By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrica...By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.展开更多
An air parametric array can generate a highly directional beam of audible sound in air,which has a wide range of applications in targeted audio delivery.Capacitive micromachined ultrasonic transducer(CMUTs)have great ...An air parametric array can generate a highly directional beam of audible sound in air,which has a wide range of applications in targeted audio delivery.Capacitive micromachined ultrasonic transducer(CMUTs)have great potential for air-coupled applications,mainly because of their low acoustic impedance.In this study,an air-coupled CMUT array is designed as an air parametric array.A hexagonal array is proposed to improve the directivity of the sound generated.A finite element model of the CMUT is established in COMSOL software to facilitate the choice of appropriate structural parameters of the CMUT cell.The CMUT array is then fabricated by a wafer bonding process with high consistency.The performances of the CMUT are tested to verify the accuracy of the finite element analysis.By optimizing the component parameters of the bias-T circuit used for driving the CMUT,DC and AC voltages can be effectively applied to the top and bottom electrodes of the CMUT to provide efficient ultrasound transmission.Finally,the prepared hexagonal array is successfully used to conduct preliminary experiments on its application as an air parametric array.展开更多
This paper reports the current-voltage characteristics of [001]-oriented AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes （RTDs） as a function of uniaxial external stress applied parallel to the [110] and the [1^-10]...This paper reports the current-voltage characteristics of [001]-oriented AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes （RTDs） as a function of uniaxial external stress applied parallel to the [110] and the [1^-10] orientations, and the output characteristics of the GaAs pressure sensor based on the pressure effect on the RTDs. Under [110] stress, the resonance peak voltages of the RTDs shift to more positive voltages. For [1^-10] stress, the peaks shift toward more negative voltages. The resonance peak voltage is linearly dependent on the [110] and [1^-0] stresses and the linear sensitivities are up to 0.69 mV/MPa, -0.69 mV/MPa respectively. For the pressure sensor, the linear sensitivity is up to 0.37 mV/kPa.展开更多
This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer （PMUT） actuated by a strong external electric field. The transducer membrane consists of a piezoelectric laye...This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer （PMUT） actuated by a strong external electric field. The transducer membrane consists of a piezoelectric layer, a passive layer and two electrode layers. The nonlinearities of the piezoelectric layer caused by electrostriction under a strong electric field are analyzed. Because the thickness of the transducer membrane is on the microscale, the size dependence of the deformation behavior is evaluated using the couple stress theory. The results show that the optimal ratio of the top electrode diameter and the membrane diameter is around 0.674. It is also found that this optimal value does not depend on any other parameters if the thicknesses of the two electrodes are negligible compared with those of the piezo- electric and passive layers. In addition, the nonlinearities of the piezoelectric layer will become stronger along with the increase of the electric field, which means that softening of the membrane stiffness occurs when a strong external electric field is applied. Meanwhile, the optimal thickness ratio for the passive layer and the piezoelectric layer is not equal to 1.0 which is usually adopted by previous researchers. Because there exists size dependence of membrane deforma-tion, the optimal value of this thickness ratio needs to be greater than 1.0 on the microscale.展开更多
This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing...This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.展开更多
Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their va...Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with the piezoresistors in order to measure the output response.The output voltage increases with increasing flow rate of air,obeying determined relationships.The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities.The sensor chip is manufactured with bulk-micromachining technologies,requiring a set of seven masks.展开更多
This paper proposes an improved design of micromachined tuning fork gyroscope （M-TFG） to decouple the cross talk between driving and sensing directions better and to increase resolution. By employing dual-folds spri...This paper proposes an improved design of micromachined tuning fork gyroscope （M-TFG） to decouple the cross talk between driving and sensing directions better and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The quality factor investigation demonstrates that high quality factor can be attained by using this structure, which can bring in accurate resolution. As a result, this design has the potential to accomplish low bias drift and accurate resolution for initial level applications.展开更多
In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low d...In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low damping gyroscope's output signal are given respectively, based on the motion equations of the silicon micromachined gyroscope. Theory proves that the output signal error of the silicon micromachined sensor is mainly caused by the instability of damping factor and the angular velocity of the rotating carrier itself. The experiment result indicates that the error of proportionality coefficient of output voltage which is caused by the instability of the angular velocity of the rotating carrier itself reaches to 4.1 %. Theoretical demonstration and experimental verification show that the instability of angular velocity of the rotating carrier itself has an important effect on the stability of low damping silicon micromachined gyroscope.展开更多
The FT-638 mini micromachine for kidney imaging, manufactured by the Beijing Nuclear Instrument Factory, shows the curve lines of the human kidney and records various data and indexes in clinical examination, not only...The FT-638 mini micromachine for kidney imaging, manufactured by the Beijing Nuclear Instrument Factory, shows the curve lines of the human kidney and records various data and indexes in clinical examination, not only providing accurate data for diagnosis but also monitoring kidney translating. The FT-638G mini machine for thekidneys is a new product which展开更多
The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration.Meanwhile,advancements in fabrication techniques have l...The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration.Meanwhile,advancements in fabrication techniques have led to the emergence of micromachined alternatives,namely,piezoelectric micromachined ultrasound transducer(PMUT)and capacitive micromachined ultrasound transducer(CMUT).These devices operate in flexural mode using piezoelectric thin films and electrostatic forces,respectively.In addition,the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications,including biomedical imaging,sensing,and stimulation.This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers(MUTs)and potential applications,their specifications,materials,fabrication,and electronics integration.Specifically,the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs,including resonance frequency,sensitivity,flexibility,and other relevant factors.Finally,the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.展开更多
Piezoelectric micromachined ultrasonic transducers(p-MUTs)have been extensively utilized in medical imaging,range-finding,gesture recognition,and so on.However,the piezoelectric layer is dominated by the toxic Pb(Zr,T...Piezoelectric micromachined ultrasonic transducers(p-MUTs)have been extensively utilized in medical imaging,range-finding,gesture recognition,and so on.However,the piezoelectric layer is dominated by the toxic Pb(Zr,Ti)O_(3),other materials possess inferior piezoelectric coefficients,and the traditional clamped diaphragm restricts the p-MUT response.In this work,lead-free ZnO films are doped by the vanadium nanostructures and are implemented to beam-island structure membranes,which are aimed to achieve non-toxic and high-performance p-MUTs.Firstly,the doping mechanism of ZnO is analyzed and the p-MUT structure is designed.Secondly,simulation based on the finite element method is conducted to evaluate the dynamic displacement of p-MUTs,after which prototypes are fabricated by the standard micromachined process.The effects of key fabrication parameters including O2 flow rates,sputtering targets,and annealing temperatures on V-doped ZnO films are investigated in detail.By using atomic force microscopy(AFM)and X-ray diffraction(XRD),the surface morphology and crystal structure of the films are analyzed respectively.Moreover,the piezoelectric properties are measured by piezo response force microscopy(PFM).The results indicate a piezoelectric coefficient as high as 194.5 pm/V,which is superior to most doped ZnO films.Finally,an experimental testing system is established to examine the p-MUT performance.Compared with the clamped diaphragm,the beam-island structure can acquire better electromechanical coupling and achieve range-finding successfully.This work provides a fine application prospect for enhancing the performance of lead-free p-MUTs.展开更多
A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to ...A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of aΣΔaccelerometer, mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1μg/（Hz）^（1/2） and 8μV/（Hz）^（1/2） respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results.展开更多
Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This pa...Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This paper develops a long-period fiber grating sensor based on periodic microchannels.First,a series of linear structures were etched in the cladding of a single-mode fiber by femtosecond laser microma-chining.Then,the laser-modified region was selectively eroded by selective chemical etching to obtain the periodic microchannel structure.Finally,the channels were filled with polydimethylsiloxane(PDMS)to im-prove the spectral quality.The experimental results show that the sensor has good sensitivity in the measure-ment of various parameters such as temperature,stress,refractive index(RI),and bending.It has a temperat-ure sensitivity of−55.19 pm/℃,a strain sensitivity of−3.19 pm/με,a maximum refractive index sensitivity of 540.28 nm/RIU,and a bending sensitivity of 2.65 dB/m^(-1).All of the measurement parameters show good lin-ear responses.The sensor has strong application prospects in the field of precision measurement and sensing.展开更多
A theoretical model and mathematical description for silicon micromachined elec- trostatic or capacitive ultrasonic imaging transducers have been developed. Ac- cording to the model the basic performance parameters of...A theoretical model and mathematical description for silicon micromachined elec- trostatic or capacitive ultrasonic imaging transducers have been developed. Ac- cording to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the ge- ometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, correspond- ing to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respec- tively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal de- sign.展开更多
The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever o...The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.展开更多
A wideband 8-12 GHz inline type microwave power sensor, which has both working and non-working states, is presented. The power sensor measures the microwave power coupled from a CPW line by a MEMS membrane. In order t...A wideband 8-12 GHz inline type microwave power sensor, which has both working and non-working states, is presented. The power sensor measures the microwave power coupled from a CPW line by a MEMS membrane. In order to reduce microwave losses during the non-working state, a new structure of working state transfer switches is proposed to realize the two working states. The fabrication of the power sensor with two working states is compatible with the GaAs MMIC （monolithic microwave integrated circuit） process. The experimental results show that the power sensor has an insertion loss of 0.18 dB during the non-working state and 0.24 dB during the working state at a frequency of 10 GHz. This means that no microwave power has been coupled from the CPW line during the non-working state.展开更多
This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and...This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/（deg/sec） with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.展开更多
While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,du...While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.展开更多
To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’...To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’along the spiral trajectory,was proposed.From the kinematics analysis,it is found that the machining quality of micro-dimpled structures is highly dependent on the machining trajectory using spiral trajectory tool reciprocating motion.To reveal this causation,simulation modelling and experimental studies were carried out.A simulation model was developed to quantitatively and qualitatively investigate the influence of the trajectory discretization strategies(constant-angle and constant-arc length)and parameters(discrete angle,discrete arc length,and pitch)on surface texture and residual height of micro-dimpled structures.Subsequently,micro-dimpled structures were milled under different trajectory discretization strategies and parameters with spiral trajectory tool reciprocating motion.A comprehensive comparison between the milled results and simulation analysis was made based on geometry accuracy,surface morphology and surface roughness of milled dimples.Meanwhile,the errors and factors affecting the above three aspects were analyzed.The results demonstrate both the feasibility of the established simulation model and the machining capability of this machining way in milling high-quality micro-dimpled structures.Spiral trajectory tool reciprocating motion provides a new machining way for milling micro-dimpled structures and micro-dimpled functional surfaces.And an appropriate machining trajectory can be generated based on the optimized trajectory parameters,thus contributing to the improvement of machining quality and efficiency.展开更多
There is a high demand for bespoke grafts to replace damaged or malformed bone and cartilage tissue.Three-dimensional(3D)printing offers a method of fabricating complex anatomical features of clinically relevant sizes...There is a high demand for bespoke grafts to replace damaged or malformed bone and cartilage tissue.Three-dimensional(3D)printing offers a method of fabricating complex anatomical features of clinically relevant sizes.However,the construction of a scaffold to replicate the complex hierarchical structure of natural tissues remains challenging.This paper reports a novel biofabrication method that is capable of creating intricately designed structures of anatomically relevant dimensions.The beneficial properties of the electrospun fibre meshes can finally be realised in 3D rather than the current promising breakthroughs in two-dimensional(2D).The 3D model was created from commercially available computer-aided design software packages in order to slice the model down into many layers of slices,which were arrayed.These 2D slices with each layer of a defined pattern were laser cut,and then successfully assembled with varying thicknesses of 100μm or 200μm.It is demonstrated in this study that this new biofabrication technique can be used to reproduce very complex computer-aided design models into hierarchical constructs with micro and nano resolutions,where the clinically relevant sizes ranging from a simple cube of 20 mm dimension,to a more complex,50 mm-tall human ears were created.In-vitro cell-contact studies were also carried out to investigate the biocompatibility of this hierarchal structure.The cell viability on a micromachined electrospun polylactic-co-glycolic acid fibre mesh slice,where a range of hole diameters from 200μm to 500μm were laser cut in an array where cell confluence values of at least 85%were found at three weeks.Cells were also seeded onto a simpler stacked construct,albeit made with micromachined poly fibre mesh,where cells can be found to migrate through the stack better with collagen as bioadhesives.This new method for biofabricating hierarchical constructs can be further developed for tissue repair applications such as maxillofacial bone injury or nose/ear cartilage replacement in the future.展开更多
文摘By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.
基金the National Key R&D Program of China(Nos.2017YFA0205103 and 2018YFE020505)the National Natural Science Foundation of China(Nos.81571766 and 61771337)+1 种基金the Natural Science Foundation of Tianjin,China(No.17JCYBJC24400)the“111”Project of China(No.B07014).
文摘An air parametric array can generate a highly directional beam of audible sound in air,which has a wide range of applications in targeted audio delivery.Capacitive micromachined ultrasonic transducer(CMUTs)have great potential for air-coupled applications,mainly because of their low acoustic impedance.In this study,an air-coupled CMUT array is designed as an air parametric array.A hexagonal array is proposed to improve the directivity of the sound generated.A finite element model of the CMUT is established in COMSOL software to facilitate the choice of appropriate structural parameters of the CMUT cell.The CMUT array is then fabricated by a wafer bonding process with high consistency.The performances of the CMUT are tested to verify the accuracy of the finite element analysis.By optimizing the component parameters of the bias-T circuit used for driving the CMUT,DC and AC voltages can be effectively applied to the top and bottom electrodes of the CMUT to provide efficient ultrasound transmission.Finally,the prepared hexagonal array is successfully used to conduct preliminary experiments on its application as an air parametric array.
基金Project supported by the National Natural Science Foundation of China （Grant Nos 50405025 and 50375050）.
文摘This paper reports the current-voltage characteristics of [001]-oriented AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes （RTDs） as a function of uniaxial external stress applied parallel to the [110] and the [1^-10] orientations, and the output characteristics of the GaAs pressure sensor based on the pressure effect on the RTDs. Under [110] stress, the resonance peak voltages of the RTDs shift to more positive voltages. For [1^-10] stress, the peaks shift toward more negative voltages. The resonance peak voltage is linearly dependent on the [110] and [1^-0] stresses and the linear sensitivities are up to 0.69 mV/MPa, -0.69 mV/MPa respectively. For the pressure sensor, the linear sensitivity is up to 0.37 mV/kPa.
基金supported by the National Natural Science Foundation of China (11172138, 10727201)
文摘This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer （PMUT） actuated by a strong external electric field. The transducer membrane consists of a piezoelectric layer, a passive layer and two electrode layers. The nonlinearities of the piezoelectric layer caused by electrostriction under a strong electric field are analyzed. Because the thickness of the transducer membrane is on the microscale, the size dependence of the deformation behavior is evaluated using the couple stress theory. The results show that the optimal ratio of the top electrode diameter and the membrane diameter is around 0.674. It is also found that this optimal value does not depend on any other parameters if the thicknesses of the two electrodes are negligible compared with those of the piezo- electric and passive layers. In addition, the nonlinearities of the piezoelectric layer will become stronger along with the increase of the electric field, which means that softening of the membrane stiffness occurs when a strong external electric field is applied. Meanwhile, the optimal thickness ratio for the passive layer and the piezoelectric layer is not equal to 1.0 which is usually adopted by previous researchers. Because there exists size dependence of membrane deforma-tion, the optimal value of this thickness ratio needs to be greater than 1.0 on the microscale.
基金supported by the National Natural Science Foundation of China(No.60272001)the Beijing Natural Science Foundation of China(No.4032010).
文摘This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.
基金The project supported by the National "973" Project (TG1999033108)the National Natural Science Foundation of China (19928205,50131160739 and 10072068)
文摘Micromachined piezoresistive flowmeters with four different types of sensing struc- tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensors through p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with the piezoresistors in order to measure the output response.The output voltage increases with increasing flow rate of air,obeying determined relationships.The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities.The sensor chip is manufactured with bulk-micromachining technologies,requiring a set of seven masks.
基金supported by the 11th Five-Year Plan Military Pre-study Foundation under Grand No. G17010801TX11030203
文摘This paper proposes an improved design of micromachined tuning fork gyroscope （M-TFG） to decouple the cross talk between driving and sensing directions better and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The quality factor investigation demonstrates that high quality factor can be attained by using this structure, which can bring in accurate resolution. As a result, this design has the potential to accomplish low bias drift and accurate resolution for initial level applications.
基金The author would like to thank the Nature Science Foundation of China (Grant No.60627001)the Beijing Key Laboratory for Sensor(No.KM200810772001)
文摘In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low damping gyroscope's output signal are given respectively, based on the motion equations of the silicon micromachined gyroscope. Theory proves that the output signal error of the silicon micromachined sensor is mainly caused by the instability of damping factor and the angular velocity of the rotating carrier itself. The experiment result indicates that the error of proportionality coefficient of output voltage which is caused by the instability of the angular velocity of the rotating carrier itself reaches to 4.1 %. Theoretical demonstration and experimental verification show that the instability of angular velocity of the rotating carrier itself has an important effect on the stability of low damping silicon micromachined gyroscope.
文摘The FT-638 mini micromachine for kidney imaging, manufactured by the Beijing Nuclear Instrument Factory, shows the curve lines of the human kidney and records various data and indexes in clinical examination, not only providing accurate data for diagnosis but also monitoring kidney translating. The FT-638G mini machine for thekidneys is a new product which
基金supported by EU EIC Transition under grant agreement ID 101057902,as well as KU Leuven Interdisciplinary Networks(ID-N)under grant No.ZKD-6578。
文摘The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration.Meanwhile,advancements in fabrication techniques have led to the emergence of micromachined alternatives,namely,piezoelectric micromachined ultrasound transducer(PMUT)and capacitive micromachined ultrasound transducer(CMUT).These devices operate in flexural mode using piezoelectric thin films and electrostatic forces,respectively.In addition,the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications,including biomedical imaging,sensing,and stimulation.This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers(MUTs)and potential applications,their specifications,materials,fabrication,and electronics integration.Specifically,the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs,including resonance frequency,sensitivity,flexibility,and other relevant factors.Finally,the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.
基金supported by the National Natural Science Foundation of China(Grant No.52205602&52075455).
文摘Piezoelectric micromachined ultrasonic transducers(p-MUTs)have been extensively utilized in medical imaging,range-finding,gesture recognition,and so on.However,the piezoelectric layer is dominated by the toxic Pb(Zr,Ti)O_(3),other materials possess inferior piezoelectric coefficients,and the traditional clamped diaphragm restricts the p-MUT response.In this work,lead-free ZnO films are doped by the vanadium nanostructures and are implemented to beam-island structure membranes,which are aimed to achieve non-toxic and high-performance p-MUTs.Firstly,the doping mechanism of ZnO is analyzed and the p-MUT structure is designed.Secondly,simulation based on the finite element method is conducted to evaluate the dynamic displacement of p-MUTs,after which prototypes are fabricated by the standard micromachined process.The effects of key fabrication parameters including O2 flow rates,sputtering targets,and annealing temperatures on V-doped ZnO films are investigated in detail.By using atomic force microscopy(AFM)and X-ray diffraction(XRD),the surface morphology and crystal structure of the films are analyzed respectively.Moreover,the piezoelectric properties are measured by piezo response force microscopy(PFM).The results indicate a piezoelectric coefficient as high as 194.5 pm/V,which is superior to most doped ZnO films.Finally,an experimental testing system is established to examine the p-MUT performance.Compared with the clamped diaphragm,the beam-island structure can acquire better electromechanical coupling and achieve range-finding successfully.This work provides a fine application prospect for enhancing the performance of lead-free p-MUTs.
基金supported by the National High Technology Research and Development Program of China(No.2008AA042201).
文摘A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of aΣΔaccelerometer, mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1μg/（Hz）^（1/2） and 8μV/（Hz）^（1/2） respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results.
文摘Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This paper develops a long-period fiber grating sensor based on periodic microchannels.First,a series of linear structures were etched in the cladding of a single-mode fiber by femtosecond laser microma-chining.Then,the laser-modified region was selectively eroded by selective chemical etching to obtain the periodic microchannel structure.Finally,the channels were filled with polydimethylsiloxane(PDMS)to im-prove the spectral quality.The experimental results show that the sensor has good sensitivity in the measure-ment of various parameters such as temperature,stress,refractive index(RI),and bending.It has a temperat-ure sensitivity of−55.19 pm/℃,a strain sensitivity of−3.19 pm/με,a maximum refractive index sensitivity of 540.28 nm/RIU,and a bending sensitivity of 2.65 dB/m^(-1).All of the measurement parameters show good lin-ear responses.The sensor has strong application prospects in the field of precision measurement and sensing.
基金Supported by the National Natural Science Foundation of China (Grant Nos. 60374044 and 69974001)
文摘A theoretical model and mathematical description for silicon micromachined elec- trostatic or capacitive ultrasonic imaging transducers have been developed. Ac- cording to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the ge- ometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, correspond- ing to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respec- tively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal de- sign.
文摘The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.
基金Project supported by the National Natural Science Foundation of China(No.60676043)the National High Technology Research and Development Program of China(No.2007AA04Z328).
文摘A wideband 8-12 GHz inline type microwave power sensor, which has both working and non-working states, is presented. The power sensor measures the microwave power coupled from a CPW line by a MEMS membrane. In order to reduce microwave losses during the non-working state, a new structure of working state transfer switches is proposed to realize the two working states. The fabrication of the power sensor with two working states is compatible with the GaAs MMIC （monolithic microwave integrated circuit） process. The experimental results show that the power sensor has an insertion loss of 0.18 dB during the non-working state and 0.24 dB during the working state at a frequency of 10 GHz. This means that no microwave power has been coupled from the CPW line during the non-working state.
基金supported by the National Natural Science Foundation of China (No. 50375154)the NUDT Innovation Project for Excellent Postgraduates
文摘This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/（deg/sec） with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.
基金the support by the Harbin Manufacturing Science and Technology Innovation Talent Project(No.2023CXRCGD035)the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment and Technology in Huazhong University of Science and Technology,China(No.IMETKF2023012).
文摘While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.
基金co-supported the National Natural Science Foundation of China(No.52235010)the Heilongjiang Postdoctoral Fund(No.LBH-Z22136)the New Era Longjiang Excellent Master and Doctoral Dissertation Fund(No.LJYXL2022-057).
文摘To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’along the spiral trajectory,was proposed.From the kinematics analysis,it is found that the machining quality of micro-dimpled structures is highly dependent on the machining trajectory using spiral trajectory tool reciprocating motion.To reveal this causation,simulation modelling and experimental studies were carried out.A simulation model was developed to quantitatively and qualitatively investigate the influence of the trajectory discretization strategies(constant-angle and constant-arc length)and parameters(discrete angle,discrete arc length,and pitch)on surface texture and residual height of micro-dimpled structures.Subsequently,micro-dimpled structures were milled under different trajectory discretization strategies and parameters with spiral trajectory tool reciprocating motion.A comprehensive comparison between the milled results and simulation analysis was made based on geometry accuracy,surface morphology and surface roughness of milled dimples.Meanwhile,the errors and factors affecting the above three aspects were analyzed.The results demonstrate both the feasibility of the established simulation model and the machining capability of this machining way in milling high-quality micro-dimpled structures.Spiral trajectory tool reciprocating motion provides a new machining way for milling micro-dimpled structures and micro-dimpled functional surfaces.And an appropriate machining trajectory can be generated based on the optimized trajectory parameters,thus contributing to the improvement of machining quality and efficiency.
基金The authors acknowledge the funding support from the EPSRC(Funding Reference Number EP/L015995/1&EP/W004860/1)the Royal Society(IEC\NSFC\201166)+1 种基金the National Natural Science Foundation of China(No.82111530157)the Priority Academic Program Development(PAPD)of Jiangsu Higher Education Institutions。
文摘There is a high demand for bespoke grafts to replace damaged or malformed bone and cartilage tissue.Three-dimensional(3D)printing offers a method of fabricating complex anatomical features of clinically relevant sizes.However,the construction of a scaffold to replicate the complex hierarchical structure of natural tissues remains challenging.This paper reports a novel biofabrication method that is capable of creating intricately designed structures of anatomically relevant dimensions.The beneficial properties of the electrospun fibre meshes can finally be realised in 3D rather than the current promising breakthroughs in two-dimensional(2D).The 3D model was created from commercially available computer-aided design software packages in order to slice the model down into many layers of slices,which were arrayed.These 2D slices with each layer of a defined pattern were laser cut,and then successfully assembled with varying thicknesses of 100μm or 200μm.It is demonstrated in this study that this new biofabrication technique can be used to reproduce very complex computer-aided design models into hierarchical constructs with micro and nano resolutions,where the clinically relevant sizes ranging from a simple cube of 20 mm dimension,to a more complex,50 mm-tall human ears were created.In-vitro cell-contact studies were also carried out to investigate the biocompatibility of this hierarchal structure.The cell viability on a micromachined electrospun polylactic-co-glycolic acid fibre mesh slice,where a range of hole diameters from 200μm to 500μm were laser cut in an array where cell confluence values of at least 85%were found at three weeks.Cells were also seeded onto a simpler stacked construct,albeit made with micromachined poly fibre mesh,where cells can be found to migrate through the stack better with collagen as bioadhesives.This new method for biofabricating hierarchical constructs can be further developed for tissue repair applications such as maxillofacial bone injury or nose/ear cartilage replacement in the future.
