The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exh...The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method.展开更多
Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechani...Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechanical system(MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems,as well as cutting-edge bio-imaging studies.展开更多
Objective： A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefie...Objective： A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefield, evacuation, pre-hospital emergency and so on. Methods： Miniature linear motor and liquid blood cartridge compose the pump body. It＇s based on the biological impedance method to measure and control, which resolve the disadvantage of traditional infuser device： large power dissipation, big size, AC power supply only and can＇t be use in field. The whole device weights 250 gram and sizes as two mobile phone together Results： Model device experiment shows： six number 7 standard AAA size alkaline batteries will run the pump for approximately 8-10 h at 6 liters per hour; IV bag can be placed at any position of patient, even under the stretcher. Conclusion： It provides accurate and reliable intravenous infusion for fwst-aid treatment in field.展开更多
This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes ...This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.展开更多
This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed ele...This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme.展开更多
We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexib...We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexible polyimide(PI)substrate and a planar spiral inductance coil(thickness 300 nm),made using micro-electro-mechanical system(MEMS)technology.It can be bent or folded at will,and can be attached firmly to the surface of objects with a bending structure.The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna.Compared with other accelerometers with a lead wire,the accelerometer can prevent the lead from falling off in the course of vibration,thereby prolonging its service life.Through establishment of an experimental platform,when the distance between the antenna and accelerometer was 5 mm,the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/s2.The results indicate that the acceleration and peak-to-peak output voltage were nearly linear,with accelerometer sensitivity reaching 0.27 mV/(m·s-2).Moreover,the maximum error of the accelerometer was less than 0.037%.展开更多
Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coup...Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coupled micromechanical resonators,highlighting the latest advancements in four key areas:internal resonance,synchronization,frequency combs,and mode localization.The origin,development,and potential applications of each of these dynamic phenomena within mode-coupled micromechanical systems are investigated,with the goal of inspiring new ideas and directions for researchers in this field.展开更多
Three-dimensional(3D)nanoprinting via two-photon polymerization offers unparalleled design flexibility and precision,thereby enabling rapid prototyping of advanced micro-optical elements and systems that have found im...Three-dimensional(3D)nanoprinting via two-photon polymerization offers unparalleled design flexibility and precision,thereby enabling rapid prototyping of advanced micro-optical elements and systems that have found important applications in endomicroscopy and biomedical imaging.The potential of this versatile tool for monolithic manufacturing of dynamic micro-opto-electro-mechanical systems(MOEMSs),however,has not yet been sufficiently explored.This work introduces a 3D-nanoprinted lens actuator with a large optical aperture,optimized for remote focusing in miniaturized imaging systems.The device integrates orthoplanar linear motion springs,a self-aligned sintered micro-magnet,and a monolithic lens,actuated by dual microcoils for uniaxial motion.The use of 3D nanoprinting allows complete design freedom for the integrated optical lens,whereas the monolithic fabrication ensures inherent alignment of the lens with the mechanical elements.With a lens diameter of 1.4 mm and a compact footprint of 5.74 mm,it achieves high mechanical robustness at resonant frequencies exceeding 300 Hz while still providing a large displacement range of 200μm(±100μm).A comprehensive analysis of optical and mechanical performance,including the effects of coil temperature and polymer viscoelasticity,demonstrates its advantages over conventional micro-electro-mechanical system actuators,showcasing its potential for next-generation imaging applications.展开更多
Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant ...Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant phononic crystal(LRPnC)plate based on a folded helical beam structure.Through finite element simulation and theoretical analysis,the bandgap characteristics and vibration suppression mechanisms of this structure were thoroughly investigated.The results show that the structure exhibits a complete bandgap in the frequency range of 9.867-14.605 kHz,and the bandgap can be effectively tuned by adjusting the structural parameters.Based on this,the influence of the number of unit cell layers on the vibration reduction performance was further studied,and a finite periodic LRPnC plate was constructed.Numerical studies have shown that the LRPnC plate can achieve more than-30 dB of vibration attenuation within the bandgap and effectively suppress y-direction coupling vibrations caused by x-direction propagating waves.In addition,its chip-scale size and planar structure design provide new ideas and methods for the engineering application of phononic crystal technology in the field of MEMS vibration isolation.展开更多
With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.T...With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.The pedestrian naviga-tion based on radio is subject to environmental occlusion lead-ing to the degradation of positioning accuracy.The pedestrian navigation based on micro-electro-mechanical system inertial measurement unit(MIMU)is less susceptible to environmental interference,but its errors dissipate over time.In this paper,a chest card pedestrian navigation improvement method based on complementary correction is proposed in order to suppress the error divergence of inertial navigation methods.To suppress atti-tude errors,optimal feedback coefficients are established by pedestrian motion characteristics.To extend navigation time and improve positioning accuracy,the step length in subsequent movements is compensated by the first step length.The experi-mental results show that the positioning accuracy of the pro-posed method is improved by more than 47%and 44%com-pared with the pure inertia-based method combined with step compensation and the traditional complementary filtering com-bined method with step compensation.The proposed method can effectively suppress the error dispersion and improve the positioning accuracy.展开更多
A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact ...A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.展开更多
As a key component of electro-optical systems, a Two-axis Scan mirror AssemblY(TSAY) is usually used for Line-of-Sight(LOS) precision pointing, tracking, scanning, and stabilizing. Therefore, it is necessary for a TSA...As a key component of electro-optical systems, a Two-axis Scan mirror AssemblY(TSAY) is usually used for Line-of-Sight(LOS) precision pointing, tracking, scanning, and stabilizing. Therefore, it is necessary for a TSAY to have a large angular range, high dynamic characteristics, and small mirror surface distortion. Furthermore, vibration from carriers of electro-optical systems, such as spacecraft and airplanes, is inevitable, so it is critical to guarantee the control accuracy of a TSAY under vibration. In this paper, a TSAY prototype is designed and developed. To increase the control bandwidth, structural topology optimization is applied to the TSAY’s elliptical mirror to reduce the moment of inertia, meanwhile keeping surface flatness. A flexible hinge is adopted to achieve a large angular range. To suppress the angular perturbation caused by the base linear vibration, an adaptive feedforward loop with base-integrated Micro-Electro-Mechanical System(MEMS) accelerators is constructed to enhance the TSAY’s feedback loop. Simulation and experimental results show that the TSAY prototype’s two-axis mechanical angular ranges are more than ±3.2°, the mirror surface flatness Root Mean Square(RMS) value is better than 0.04 k, and the closed-loop bandwidth is beyond 330 Hz. These are suitable for most applications. Besides, the angular perturbation caused by the base vibration can be suppressed more than 37.7% with the addition of the adaptive feedforward loop.展开更多
3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink...3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink for DIW technology was prepared by a two-component adhesive system with waterborne polyurethane(WPU) and ethyl cellulose(EC).Not only the preparation of the explosive ink but also the principle of DIW process have been investigated systematically.The explosive ink displayed stro ng shea rthinning behavior that permitted layer-by-laye r deposition from a fine nozzle onto a substrate to produce complex shapes.The EC content was varied to alter the pore structure distribution and rheological behavior of ink samples after curing.The deposited explosive composite materials are of a honeycombed structure with high porosity,and the pore size distribution increases with the increase of EC content.No phase change was observed during the preparation process.Both WPU and EC show good compatibility with CL-20 particles.Apparently high activation energy was realized in the CL-20-based composite ink compared with that of the refined CL-20 due to the presence of non-energetic but stable WPU.The detonation performance of the composite materials can be precisely controlled by an adjustment in the content of binders.The 3D honeyco mbed CL-20 structures,which are fabricated by DIW technology,have a very small critical detonation size of less than 69 μm,as demonstrated by wedge shaped charge test.The ink can be used to create 3D structures with complex geometries not possible with traditional manufacturing techniques,which presents a bright future for the development of intelligent weapon systems.展开更多
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combin...This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.展开更多
A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic fiel...A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk microma^hined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10~ for the magnetic field direction measurement can be obtained using the detecting principle.展开更多
The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not...The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes （peak） between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme （MEMS） structures to simulate the dynamic performance.展开更多
文摘The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method.
基金the National Natural Science Foundation of China(No.61405112)the National High Technology Research and Development Program(863)of China(No.2015AA020944)
文摘Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechanical system(MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems,as well as cutting-edge bio-imaging studies.
基金Supported by the Second Batch of Projects of Army Medical Eleventh Five-Year Plan Research(08G084)Chongqing Key Scientific and Technological Projects(CSTC,2008AC5120)
文摘Objective： A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefield, evacuation, pre-hospital emergency and so on. Methods： Miniature linear motor and liquid blood cartridge compose the pump body. It＇s based on the biological impedance method to measure and control, which resolve the disadvantage of traditional infuser device： large power dissipation, big size, AC power supply only and can＇t be use in field. The whole device weights 250 gram and sizes as two mobile phone together Results： Model device experiment shows： six number 7 standard AAA size alkaline batteries will run the pump for approximately 8-10 h at 6 liters per hour; IV bag can be placed at any position of patient, even under the stretcher. Conclusion： It provides accurate and reliable intravenous infusion for fwst-aid treatment in field.
基金the Special New Century Excellent Talents Support Program of Ministry of Education(No.NCET-10-0583)the National Key Laboratory of Science and Technology on Nano/Micro Fabrication(No.9140C790405110C7904)+2 种基金Preresearch Fund(No.9140A09010312JW03104)Fund(No.2013ZC57003)the Graduate Innovation Program of Shanghai Jiao Tong University(No.Z-340-014)
文摘This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.
基金supported by the National Natural Science Foundation of China under Grant Nos.51505170,51475097 and 51505045Basic and Frontier Research Program of Chongqing Municipality under Grant Nos.cstc2016jcyjA0584 and cstc2016jcyjA0441)+1 种基金Project of Introduction of Talents of Guizhou University(No.[2017]27)Key Scientific Research Program of Guizhou Province under Grant No.[2017]3001)
文摘This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme.
基金Project supported by the China Aviation Development Group IndustryUniversity-Research Cooperation Project(No.HFZL2020CXY019)the Fundamental Research Program of Shanxi Province,China(No.20210302123024)the National Natural Science Foundation of China(No.51821003)。
文摘We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexible polyimide(PI)substrate and a planar spiral inductance coil(thickness 300 nm),made using micro-electro-mechanical system(MEMS)technology.It can be bent or folded at will,and can be attached firmly to the surface of objects with a bending structure.The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna.Compared with other accelerometers with a lead wire,the accelerometer can prevent the lead from falling off in the course of vibration,thereby prolonging its service life.Through establishment of an experimental platform,when the distance between the antenna and accelerometer was 5 mm,the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/s2.The results indicate that the acceleration and peak-to-peak output voltage were nearly linear,with accelerometer sensitivity reaching 0.27 mV/(m·s-2).Moreover,the maximum error of the accelerometer was less than 0.037%.
基金supported by the National Key Research and Development Program of China(No.2022YFB3203600)the National Natural Science Foundation of China(Nos.12202355,12132013,and 12172323)the Zhejiang Provincial Natural Science Foundation of China(No.LZ22A020003)。
文摘Due to scale effects,micromechanical resonators offer an excellent platform for investigating the intrinsic mechanisms of nonlinear dynamical phenomena and their potential applications.This review focuses on mode-coupled micromechanical resonators,highlighting the latest advancements in four key areas:internal resonance,synchronization,frequency combs,and mode localization.The origin,development,and potential applications of each of these dynamic phenomena within mode-coupled micromechanical systems are investigated,with the goal of inspiring new ideas and directions for researchers in this field.
文摘Three-dimensional(3D)nanoprinting via two-photon polymerization offers unparalleled design flexibility and precision,thereby enabling rapid prototyping of advanced micro-optical elements and systems that have found important applications in endomicroscopy and biomedical imaging.The potential of this versatile tool for monolithic manufacturing of dynamic micro-opto-electro-mechanical systems(MOEMSs),however,has not yet been sufficiently explored.This work introduces a 3D-nanoprinted lens actuator with a large optical aperture,optimized for remote focusing in miniaturized imaging systems.The device integrates orthoplanar linear motion springs,a self-aligned sintered micro-magnet,and a monolithic lens,actuated by dual microcoils for uniaxial motion.The use of 3D nanoprinting allows complete design freedom for the integrated optical lens,whereas the monolithic fabrication ensures inherent alignment of the lens with the mechanical elements.With a lens diameter of 1.4 mm and a compact footprint of 5.74 mm,it achieves high mechanical robustness at resonant frequencies exceeding 300 Hz while still providing a large displacement range of 200μm(±100μm).A comprehensive analysis of optical and mechanical performance,including the effects of coil temperature and polymer viscoelasticity,demonstrates its advantages over conventional micro-electro-mechanical system actuators,showcasing its potential for next-generation imaging applications.
基金supported by National Natural Science Foundation of China(No.62271262).
文摘Enhancing the vibration resistance of micro-electro-mechanical systems(MEMS)resonators in complex environments is a critical issue that urgently needs to be addressed.This paper presents a chip-scale locally resonant phononic crystal(LRPnC)plate based on a folded helical beam structure.Through finite element simulation and theoretical analysis,the bandgap characteristics and vibration suppression mechanisms of this structure were thoroughly investigated.The results show that the structure exhibits a complete bandgap in the frequency range of 9.867-14.605 kHz,and the bandgap can be effectively tuned by adjusting the structural parameters.Based on this,the influence of the number of unit cell layers on the vibration reduction performance was further studied,and a finite periodic LRPnC plate was constructed.Numerical studies have shown that the LRPnC plate can achieve more than-30 dB of vibration attenuation within the bandgap and effectively suppress y-direction coupling vibrations caused by x-direction propagating waves.In addition,its chip-scale size and planar structure design provide new ideas and methods for the engineering application of phononic crystal technology in the field of MEMS vibration isolation.
文摘With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.The pedestrian naviga-tion based on radio is subject to environmental occlusion lead-ing to the degradation of positioning accuracy.The pedestrian navigation based on micro-electro-mechanical system inertial measurement unit(MIMU)is less susceptible to environmental interference,but its errors dissipate over time.In this paper,a chest card pedestrian navigation improvement method based on complementary correction is proposed in order to suppress the error divergence of inertial navigation methods.To suppress atti-tude errors,optimal feedback coefficients are established by pedestrian motion characteristics.To extend navigation time and improve positioning accuracy,the step length in subsequent movements is compensated by the first step length.The experi-mental results show that the positioning accuracy of the pro-posed method is improved by more than 47%and 44%com-pared with the pure inertia-based method combined with step compensation and the traditional complementary filtering com-bined method with step compensation.The proposed method can effectively suppress the error dispersion and improve the positioning accuracy.
文摘A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.
基金the support by the National Natural Science Foundation of China (No. 11672016)
文摘As a key component of electro-optical systems, a Two-axis Scan mirror AssemblY(TSAY) is usually used for Line-of-Sight(LOS) precision pointing, tracking, scanning, and stabilizing. Therefore, it is necessary for a TSAY to have a large angular range, high dynamic characteristics, and small mirror surface distortion. Furthermore, vibration from carriers of electro-optical systems, such as spacecraft and airplanes, is inevitable, so it is critical to guarantee the control accuracy of a TSAY under vibration. In this paper, a TSAY prototype is designed and developed. To increase the control bandwidth, structural topology optimization is applied to the TSAY’s elliptical mirror to reduce the moment of inertia, meanwhile keeping surface flatness. A flexible hinge is adopted to achieve a large angular range. To suppress the angular perturbation caused by the base linear vibration, an adaptive feedforward loop with base-integrated Micro-Electro-Mechanical System(MEMS) accelerators is constructed to enhance the TSAY’s feedback loop. Simulation and experimental results show that the TSAY prototype’s two-axis mechanical angular ranges are more than ±3.2°, the mirror surface flatness Root Mean Square(RMS) value is better than 0.04 k, and the closed-loop bandwidth is beyond 330 Hz. These are suitable for most applications. Besides, the angular perturbation caused by the base vibration can be suppressed more than 37.7% with the addition of the adaptive feedforward loop.
基金This research work was financially supported by the Advantage Disciplines Climbing Plan of Shanxi Province and Graduate Education Innovation Project in Shanxi Province(2016BY119).
文摘3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink for DIW technology was prepared by a two-component adhesive system with waterborne polyurethane(WPU) and ethyl cellulose(EC).Not only the preparation of the explosive ink but also the principle of DIW process have been investigated systematically.The explosive ink displayed stro ng shea rthinning behavior that permitted layer-by-laye r deposition from a fine nozzle onto a substrate to produce complex shapes.The EC content was varied to alter the pore structure distribution and rheological behavior of ink samples after curing.The deposited explosive composite materials are of a honeycombed structure with high porosity,and the pore size distribution increases with the increase of EC content.No phase change was observed during the preparation process.Both WPU and EC show good compatibility with CL-20 particles.Apparently high activation energy was realized in the CL-20-based composite ink compared with that of the refined CL-20 due to the presence of non-energetic but stable WPU.The detonation performance of the composite materials can be precisely controlled by an adjustment in the content of binders.The 3D honeyco mbed CL-20 structures,which are fabricated by DIW technology,have a very small critical detonation size of less than 69 μm,as demonstrated by wedge shaped charge test.The ink can be used to create 3D structures with complex geometries not possible with traditional manufacturing techniques,which presents a bright future for the development of intelligent weapon systems.
基金Supported by the National High Technology Research and Development Program of China(863 Program,2011AA-040405)the National Natural Science Foundation of China(Nos.61101049,61201078,61302032,61327810)
文摘This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
基金Project supported by the National Natural Science Foundation of China (Grant No.61076071)
文摘A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk microma^hined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10~ for the magnetic field direction measurement can be obtained using the detecting principle.
基金This project is supported by Shanghai Municipal Science and Technique Committee Foundation, China (No. 03QF14019, No. 0452nm023, No. AM0420).
文摘The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes （peak） between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme （MEMS） structures to simulate the dynamic performance.
