With the increasing requirements of precision mechanical systems in electronic packaging,ultra-precision machining,biomedicine and other high-tech fields,it is necessary to study a precision two-stage amplification mi...With the increasing requirements of precision mechanical systems in electronic packaging,ultra-precision machining,biomedicine and other high-tech fields,it is necessary to study a precision two-stage amplification micro-drive system that can safely provide high precision and a large amplification ratio.In view of the disadvantages of the current two-stage amplification and micro-drive system,such as poor security,low motion accuracy and limited amplification ratio,an optimization design of a precise symmetrical two-stage amplification micro-drive system was completed in this study,and its related performance was studied.Based on the guiding principle of the flexure hinge,a two-stage amplification micro-drive mechanism with no parasitic motion or non-motion direction force was designed.In addition,the structure optimization design of the mechanism was completed using the particle swarm optimization algorithm,which increased the amplification ratio of the mechanism from 5 to 18 times.A precise symmetrical two-stage amplification system was designed using a piezoelectric ceramic actuator and two-stage amplification micro-drive mechanism as the micro-driver and actuator,respectively.The driving,strength,and motion performances of the system were subsequently studied.The results showed that the driving linearity of the system was high,the strength satisfied the design requirements,the motion amplification ratio was high and the motion accuracy was high(relative error was 5.31%).The research in this study can promote the optimization of micro-drive systems.展开更多
基金The research was funded by the National Natural Science Foundation of China,No.51805428Innovation Capability Support Plan of Shaanxi Province,No.2021 TD-27.
文摘With the increasing requirements of precision mechanical systems in electronic packaging,ultra-precision machining,biomedicine and other high-tech fields,it is necessary to study a precision two-stage amplification micro-drive system that can safely provide high precision and a large amplification ratio.In view of the disadvantages of the current two-stage amplification and micro-drive system,such as poor security,low motion accuracy and limited amplification ratio,an optimization design of a precise symmetrical two-stage amplification micro-drive system was completed in this study,and its related performance was studied.Based on the guiding principle of the flexure hinge,a two-stage amplification micro-drive mechanism with no parasitic motion or non-motion direction force was designed.In addition,the structure optimization design of the mechanism was completed using the particle swarm optimization algorithm,which increased the amplification ratio of the mechanism from 5 to 18 times.A precise symmetrical two-stage amplification system was designed using a piezoelectric ceramic actuator and two-stage amplification micro-drive mechanism as the micro-driver and actuator,respectively.The driving,strength,and motion performances of the system were subsequently studied.The results showed that the driving linearity of the system was high,the strength satisfied the design requirements,the motion amplification ratio was high and the motion accuracy was high(relative error was 5.31%).The research in this study can promote the optimization of micro-drive systems.
