Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techni...Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techniques involved in the fabrication ofμLED-based devices is transfer printing.Although numerous methods have been proposed for transfer printing,improving the yield ofμLED arrays is still a formidable task.In this paper,we propose a novel method for improving the yield ofμLED arrays transferred by the stamping method,using an innovative design of piezoelectrically driven asymmetric micro-gripper.Traditional grippers are too large to manipulateμLEDs,and therefore two micro-sized cantilevers are added at the gripper tips.AμLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system.Experimental results using this system show that it can be used successfully to manipulateμLED arrays.展开更多
The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition a...The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.展开更多
为降低微夹钳前端执行机构的复杂度,探索四自由度压电微夹钳的实现问题。通过在被设计成夹钳形状的两个压电单晶片的非黏结面上制作相互绝缘的驱动电极,且使两个非黏结面上驱动电极相互对齐的方法,设计出了可同时产生夹持方向与垂直于...为降低微夹钳前端执行机构的复杂度,探索四自由度压电微夹钳的实现问题。通过在被设计成夹钳形状的两个压电单晶片的非黏结面上制作相互绝缘的驱动电极,且使两个非黏结面上驱动电极相互对齐的方法,设计出了可同时产生夹持方向与垂直于夹持方向位移的四自由度压电微夹钳;采用压电悬臂梁变形理论,推导出了钳指位移同钳指几何参数、驱动电压的关系,进而在对钳指进行尺寸优化的基础上,采用有限元方法分析了其静动态特性;最后,对微夹钳的静动态特性进行了测试,结果表明:当驱动电压为60 V时,左钳指、右钳指在夹持方向上的位移分别为25.7μm、26.1μm,左、右钳指在垂直于夹持方向上的位移分别为33.5μm、32.8μm,钳指位移具有很好的重复性;微夹钳在夹持方向和垂直于夹持方向的固有频率分别为2.35 k Hz、0.62 k Hz;在15 V的阶跃电压作用下,微夹钳在夹持方向和垂直于夹持方向的响应时间均为0.23 s。展开更多
基金support from the Scientific Research Program of the Tianjin Education Commission(No.2019ZD08).
文摘Micro-LEDs(μLEDs)have advantages in terms of brightness,power consumption,and response speed.In addition,they can also be used as micro-sensors implanted in the body via flexible electronic skin.One of the key techniques involved in the fabrication ofμLED-based devices is transfer printing.Although numerous methods have been proposed for transfer printing,improving the yield ofμLED arrays is still a formidable task.In this paper,we propose a novel method for improving the yield ofμLED arrays transferred by the stamping method,using an innovative design of piezoelectrically driven asymmetric micro-gripper.Traditional grippers are too large to manipulateμLEDs,and therefore two micro-sized cantilevers are added at the gripper tips.AμLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system.Experimental results using this system show that it can be used successfully to manipulateμLED arrays.
文摘The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.
文摘为降低微夹钳前端执行机构的复杂度,探索四自由度压电微夹钳的实现问题。通过在被设计成夹钳形状的两个压电单晶片的非黏结面上制作相互绝缘的驱动电极,且使两个非黏结面上驱动电极相互对齐的方法,设计出了可同时产生夹持方向与垂直于夹持方向位移的四自由度压电微夹钳;采用压电悬臂梁变形理论,推导出了钳指位移同钳指几何参数、驱动电压的关系,进而在对钳指进行尺寸优化的基础上,采用有限元方法分析了其静动态特性;最后,对微夹钳的静动态特性进行了测试,结果表明:当驱动电压为60 V时,左钳指、右钳指在夹持方向上的位移分别为25.7μm、26.1μm,左、右钳指在垂直于夹持方向上的位移分别为33.5μm、32.8μm,钳指位移具有很好的重复性;微夹钳在夹持方向和垂直于夹持方向的固有频率分别为2.35 k Hz、0.62 k Hz;在15 V的阶跃电压作用下,微夹钳在夹持方向和垂直于夹持方向的响应时间均为0.23 s。
