This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a ...This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.展开更多
Most researches on micro-arc oxidation mainly focus on the application rather than discovering the evolution of residual stresses. However, residual stresses in the surface coatings of structural components have adver...Most researches on micro-arc oxidation mainly focus on the application rather than discovering the evolution of residual stresses. However, residual stresses in the surface coatings of structural components have adverse effects on their properties, such as fatigue life, dimensional stability and corrosion resistance, etc. The micro-arc oxidation ceramic coatings are produced on the surfaces of 6061 aluminum alloy by a homemade asymmetric AC type of micro-arc oxidation equipment of 20 kW. A constant current density of 4.4___0.1 A/dm2 and a self-regulated composite electrolyte are used. The micro-arc oxidation treatment period ranges from 10 min to 40 min, and the thickness of the ceramic coatings is more than 20 Bin. Residual stresses attributed to 7-A1203 constituent in the coatings at different micro-arc oxidation periods are analyzed by an X-ray diffractometer using the sin2~u method. The analysis results show that the residual stress in the ceramic coatings is compressive in nature, and it increases first and then decreases with micro-arc oxidation time increase. The maximum stress value is 1 667_＋20 MPa for period of 20 min. Through analyzing the coating thickness, surface morphology and phase composition, it is found that the residual stress in the ceramic coatings is linked closely with the coating growth, the phase composition and the micro cracks formed. It is also found that both the heat treatment and the ultrasonic action release remarkably the residual compressive stress. The heat treatment makes the residual compressive stress value decrease 1 378 MPa. The ultrasonic action even alters the nature of the residual stress, making the residual compressive stress change into a residual tensile stress.展开更多
A series of cubic SiC single crystals were heteroepitaxially grown by the hot-wall chemical vapor deposition (CVD) using a HMDS-C3H8-H2 system on 2 inch silicon substrates with the orientations of (100), (111), (110) ...A series of cubic SiC single crystals were heteroepitaxially grown by the hot-wall chemical vapor deposition (CVD) using a HMDS-C3H8-H2 system on 2 inch silicon substrates with the orientations of (100), (111), (110) and (211), respectively. Even though an initial carbonization was carried out to reduce the large lattice mismatch, residual stress could not be completely relieved, partly also due to the difference of their thermal expansion coefficients. Raman scattering studies for the specimens were performed to estimate the internal stress in the SiC epilayer and the substrate. Raman spectra were mapped out on the sample surface as well as on the cross section using an automated x-y stage with a spatial resolution capable of 100 nm. For all the samples, two Raman peaks corresponding to the transverse optical (TO) and longitudinal optical (LO) phonon modes were observed, even though the intensity varied with the polarization configurations. In the SiC epilayers, tensile stresses decrease away from the interface, while compressive stresses exist in the substrate, with the magnitudes dependent on the growth orientation. The lattice strains were discussed in terms of the elastic deformation theory for the comparison.展开更多
Shielded Metal Arc Welding (SMAW) in Ductile Irons (DI) is often required by foundries for practical manufacturing reasons. The mechanical properties of the welded structures are strongly dependent on their HAZ’s wid...Shielded Metal Arc Welding (SMAW) in Ductile Irons (DI) is often required by foundries for practical manufacturing reasons. The mechanical properties of the welded structures are strongly dependent on their HAZ’s width. A model based on the behaviour of the ferritic matrix of high-Si DIs in order to make an approach in measuring their HAZ’s width is developed in this study. A series of thermal treatments on 3.35 and 3.75 wt% Si as-cast DIs and spot SMAWs is applied on these materials. The applied SMAWs are done on non-preheated and preheated samples (150℃ - 300℃). For welding we modify the amperage (100 - 140A). The micro-hardness Vickers changes in the ferrite of the as-cast samples and inside the HAZ of the welded ones can be attributed to the existence of residual stresses (RS) in the ferritic matrix and assist in estimating the HAZ’s width.展开更多
Si-based multilayer structures are widely used in current microelectronics. During their preparation, some inhomogeneous residual stress is induced, resulting in competition between interface mismatching and surface e...Si-based multilayer structures are widely used in current microelectronics. During their preparation, some inhomogeneous residual stress is induced, resulting in competition between interface mismatching and surface energy and even leading to structure failure. This work presents a methodological study on the measurement of residual stress in a multi-layer semiconductor heterostructure. Scanning electron microscopy（SEM）, micro-Raman spectroscopy（MRS）, and transmission electron microscopy（TEM） were applied to measure the geometric parameters of the multilayer structure. The relationship between the Raman spectrum and the stress/strain on the [100] and [110] crystal orientations was determined to enable surface and crosssection residual stress analyses, respectively. Based on the Raman mapping results, the distribution of residual stress along the depth of the multi-layer heterostructure was successfully obtained.展开更多
The size-dependent effect on the biaxial and shear nonlinear buckling analysis of an isotropic and orthotropic micro-plate based on the surface stress, the modified couple stress theory （MCST）, and the nonlocal elas...The size-dependent effect on the biaxial and shear nonlinear buckling analysis of an isotropic and orthotropic micro-plate based on the surface stress, the modified couple stress theory （MCST）, and the nonlocal elasticity theories using the differential quadrature method （DQM） is presented. Main advantages of the MCST over the classical theory （CT） are the inclusion of the asymmetric couple stress tensor and the consideration of only one material length scale parameter. Based on the nonlinear von Karman assumption, the governing equations of equilibrium for the micro-classical plate consid- ering midplane displacements are derived based on the minimum principle of potential energy. Using the DQM, the biaxial and shear critical buckling loads of the micro-plate for various boundary conditions are obtained. Accuracy of the obtained results is validated by comparing the solutions with those reported in the literature. A parametric study is conducted to show the effects of the aspect ratio, the side-to-thickness ratio, Eringen＇s nonlocal parameter, the material length scale parameter, Young＇s modulus of the surface layer, the surface residual stress, the polymer matrix coefficients, and various boundary conditions on the dimensionless uniaxial, biaxial, and shear critical buckling loads. The results indicate that the critical buckling loads are strongly sensitive to Eringen＇s nonlocal parameter, the material length scale parameter, and the surface residual stress effects, while the effect of Young＇s modulus of the surface layer on the critical buckling load is negligible. Also, considering the size dependent effect causes the increase in the stiffness of the orthotropic micro-plate. The results show that the critical biaxial buckling load increases with an increase in G12/E2 and vice versa for E1/E2. It is shown that the nonlinear biaxial buckling ratio decreases as the aspect ratio increases and vice versa for the buckling amplitude. Because of the most lightweight micro-composite materials with high strength/weight and stiffness/weight ratios, it is anticipated that the results of the present work are useful in experimental characterization of the mechanical properties of micro-composite plates in the aircraft industry and other engineering applications.展开更多
The linear and nonlinear torsional free vibration analyses of functionMly graded micro/nuno-tubes （FGMTs） are analytically investigated based on the couple stress theory. The employed non-classical continuum theory ...The linear and nonlinear torsional free vibration analyses of functionMly graded micro/nuno-tubes （FGMTs） are analytically investigated based on the couple stress theory. The employed non-classical continuum theory contains one material length scale parameter, which can capture the small scale effect. The FGMT model accounts for the through-radius power-law variation of a two-constituent material. Hamilton＇s principle is used to develop the non-classical nonlinear governing equation. To study the effect of the boundary conditions, two types of end conditions, i.e., fixed-fixed and fixed-free, are considered. The derived boundary value governing equation is of the fourthorder, and is solved by the homotopy analysis method （HAM）. This method is based on the Taylor series with an embedded parameter and is capable of providing very good approximations by means of only a few terms, if the initial guess and the auxiliary linear operator are properly selected. The analytical expressions are developed for the linear and nonlinear natural frequencies, which can be conveniently used to investigate the effects of the dimensionless length scale parameter, the material gradient index, and the vibration amplitude on the natural frequencies of FGMTs.展开更多
Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam th...Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.展开更多
Micro-hotplate （MHP） technology is one key part in the manufacturing of gas sensors. The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scie...Micro-hotplate （MHP） technology is one key part in the manufacturing of gas sensors. The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientific interest. In this study, analytical solutions for the temperature field, and both radial and tangential stresses and van Mises stress for circular MHP were obtained. Two geometries were considered： one had a circular heater at the center and the other had a circular heater at the center and an annular heater within the membrane part. Internal heat generation was incorporated in the energy equation for the MHP and different values of convection heat transfer coefficient were used at the upper and lower surfaces of the MHP. It has been shown that the MHP with two heaters can provide more uniform temperature field compared with the MHP with one heater. The main objective of this work is to provide an exact analytical solution for thermal stresses within the circular micro-hcater with a simple geometry as a benchmark, from mathematical point of view, against which the accuracy of new numerical schemes can be checked. To make sure that the analytical procedure is correct, the analytical results are checked against numerical solutions derived from finite element simulation. Since the analytical models for the temperature field and especially for the thermal stresses of MHP ace seldom investigated in the literature, the obtained results are believed to facilitate the design and performance evaluation of MHPs as well.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No 60576053)Technology Innovation of Chinese Academy of Sciences (Grant No CXJJ-176)
文摘This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.
基金supported by National Natural Science Foundation of China(Grant No.51171167)Hebei Provincial Natural Science Foundation of China(Grant No.A2011203068)
文摘Most researches on micro-arc oxidation mainly focus on the application rather than discovering the evolution of residual stresses. However, residual stresses in the surface coatings of structural components have adverse effects on their properties, such as fatigue life, dimensional stability and corrosion resistance, etc. The micro-arc oxidation ceramic coatings are produced on the surfaces of 6061 aluminum alloy by a homemade asymmetric AC type of micro-arc oxidation equipment of 20 kW. A constant current density of 4.4___0.1 A/dm2 and a self-regulated composite electrolyte are used. The micro-arc oxidation treatment period ranges from 10 min to 40 min, and the thickness of the ceramic coatings is more than 20 Bin. Residual stresses attributed to 7-A1203 constituent in the coatings at different micro-arc oxidation periods are analyzed by an X-ray diffractometer using the sin2~u method. The analysis results show that the residual stress in the ceramic coatings is compressive in nature, and it increases first and then decreases with micro-arc oxidation time increase. The maximum stress value is 1 667_＋20 MPa for period of 20 min. Through analyzing the coating thickness, surface morphology and phase composition, it is found that the residual stress in the ceramic coatings is linked closely with the coating growth, the phase composition and the micro cracks formed. It is also found that both the heat treatment and the ultrasonic action release remarkably the residual compressive stress. The heat treatment makes the residual compressive stress value decrease 1 378 MPa. The ultrasonic action even alters the nature of the residual stress, making the residual compressive stress change into a residual tensile stress.
文摘A series of cubic SiC single crystals were heteroepitaxially grown by the hot-wall chemical vapor deposition (CVD) using a HMDS-C3H8-H2 system on 2 inch silicon substrates with the orientations of (100), (111), (110) and (211), respectively. Even though an initial carbonization was carried out to reduce the large lattice mismatch, residual stress could not be completely relieved, partly also due to the difference of their thermal expansion coefficients. Raman scattering studies for the specimens were performed to estimate the internal stress in the SiC epilayer and the substrate. Raman spectra were mapped out on the sample surface as well as on the cross section using an automated x-y stage with a spatial resolution capable of 100 nm. For all the samples, two Raman peaks corresponding to the transverse optical (TO) and longitudinal optical (LO) phonon modes were observed, even though the intensity varied with the polarization configurations. In the SiC epilayers, tensile stresses decrease away from the interface, while compressive stresses exist in the substrate, with the magnitudes dependent on the growth orientation. The lattice strains were discussed in terms of the elastic deformation theory for the comparison.
文摘Shielded Metal Arc Welding (SMAW) in Ductile Irons (DI) is often required by foundries for practical manufacturing reasons. The mechanical properties of the welded structures are strongly dependent on their HAZ’s width. A model based on the behaviour of the ferritic matrix of high-Si DIs in order to make an approach in measuring their HAZ’s width is developed in this study. A series of thermal treatments on 3.35 and 3.75 wt% Si as-cast DIs and spot SMAWs is applied on these materials. The applied SMAWs are done on non-preheated and preheated samples (150℃ - 300℃). For welding we modify the amperage (100 - 140A). The micro-hardness Vickers changes in the ferrite of the as-cast samples and inside the HAZ of the welded ones can be attributed to the existence of residual stresses (RS) in the ferritic matrix and assist in estimating the HAZ’s width.
基金supported by the National Basic Research Program of China (Grant 2012CB937500)the National Natural Science Foundation of China (Grants 11422219, 11227202, 11372217, 11272232)+1 种基金the Program for New Century Excellent Talents in University (Grant NCET-13)China Scholarship Council (201308120092)
文摘Si-based multilayer structures are widely used in current microelectronics. During their preparation, some inhomogeneous residual stress is induced, resulting in competition between interface mismatching and surface energy and even leading to structure failure. This work presents a methodological study on the measurement of residual stress in a multi-layer semiconductor heterostructure. Scanning electron microscopy（SEM）, micro-Raman spectroscopy（MRS）, and transmission electron microscopy（TEM） were applied to measure the geometric parameters of the multilayer structure. The relationship between the Raman spectrum and the stress/strain on the [100] and [110] crystal orientations was determined to enable surface and crosssection residual stress analyses, respectively. Based on the Raman mapping results, the distribution of residual stress along the depth of the multi-layer heterostructure was successfully obtained.
基金supported by the Iranian Nanotechnology Development Committee and the University of Kashan(No.363452/10)
文摘The size-dependent effect on the biaxial and shear nonlinear buckling analysis of an isotropic and orthotropic micro-plate based on the surface stress, the modified couple stress theory （MCST）, and the nonlocal elasticity theories using the differential quadrature method （DQM） is presented. Main advantages of the MCST over the classical theory （CT） are the inclusion of the asymmetric couple stress tensor and the consideration of only one material length scale parameter. Based on the nonlinear von Karman assumption, the governing equations of equilibrium for the micro-classical plate consid- ering midplane displacements are derived based on the minimum principle of potential energy. Using the DQM, the biaxial and shear critical buckling loads of the micro-plate for various boundary conditions are obtained. Accuracy of the obtained results is validated by comparing the solutions with those reported in the literature. A parametric study is conducted to show the effects of the aspect ratio, the side-to-thickness ratio, Eringen＇s nonlocal parameter, the material length scale parameter, Young＇s modulus of the surface layer, the surface residual stress, the polymer matrix coefficients, and various boundary conditions on the dimensionless uniaxial, biaxial, and shear critical buckling loads. The results indicate that the critical buckling loads are strongly sensitive to Eringen＇s nonlocal parameter, the material length scale parameter, and the surface residual stress effects, while the effect of Young＇s modulus of the surface layer on the critical buckling load is negligible. Also, considering the size dependent effect causes the increase in the stiffness of the orthotropic micro-plate. The results show that the critical biaxial buckling load increases with an increase in G12/E2 and vice versa for E1/E2. It is shown that the nonlinear biaxial buckling ratio decreases as the aspect ratio increases and vice versa for the buckling amplitude. Because of the most lightweight micro-composite materials with high strength/weight and stiffness/weight ratios, it is anticipated that the results of the present work are useful in experimental characterization of the mechanical properties of micro-composite plates in the aircraft industry and other engineering applications.
文摘The linear and nonlinear torsional free vibration analyses of functionMly graded micro/nuno-tubes （FGMTs） are analytically investigated based on the couple stress theory. The employed non-classical continuum theory contains one material length scale parameter, which can capture the small scale effect. The FGMT model accounts for the through-radius power-law variation of a two-constituent material. Hamilton＇s principle is used to develop the non-classical nonlinear governing equation. To study the effect of the boundary conditions, two types of end conditions, i.e., fixed-fixed and fixed-free, are considered. The derived boundary value governing equation is of the fourthorder, and is solved by the homotopy analysis method （HAM）. This method is based on the Taylor series with an embedded parameter and is capable of providing very good approximations by means of only a few terms, if the initial guess and the auxiliary linear operator are properly selected. The analytical expressions are developed for the linear and nonlinear natural frequencies, which can be conveniently used to investigate the effects of the dimensionless length scale parameter, the material gradient index, and the vibration amplitude on the natural frequencies of FGMTs.
文摘Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.
文摘Micro-hotplate （MHP） technology is one key part in the manufacturing of gas sensors. The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientific interest. In this study, analytical solutions for the temperature field, and both radial and tangential stresses and van Mises stress for circular MHP were obtained. Two geometries were considered： one had a circular heater at the center and the other had a circular heater at the center and an annular heater within the membrane part. Internal heat generation was incorporated in the energy equation for the MHP and different values of convection heat transfer coefficient were used at the upper and lower surfaces of the MHP. It has been shown that the MHP with two heaters can provide more uniform temperature field compared with the MHP with one heater. The main objective of this work is to provide an exact analytical solution for thermal stresses within the circular micro-hcater with a simple geometry as a benchmark, from mathematical point of view, against which the accuracy of new numerical schemes can be checked. To make sure that the analytical procedure is correct, the analytical results are checked against numerical solutions derived from finite element simulation. Since the analytical models for the temperature field and especially for the thermal stresses of MHP ace seldom investigated in the literature, the obtained results are believed to facilitate the design and performance evaluation of MHPs as well.
