Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The ma...Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The manufacturing of high-quality micro diamond tools relies on scientific design methods and appropriate processing techniques.However,there is currently a lack of systematic review on the design and manufacturing methods of micro diamond tools in academia.This study systematically summarizes and analyzes modern manufacturing methods for micro diamond tools,as well as the impact of tool waviness,sharpness,and durability on machining quality.Subsequently,a design method is proposed based on the theory of cutting edge strength distribution to enhance tool waviness,sharpness,and durability.Finally,this paper presents current technical challenges faced by micro diamond tools along with potential future solutions to guide scientists in this field.The aim of this review is to contribute to the further development of the current design and manufacturing processes for micro diamond cutting tools.展开更多
The dispersion behavior of micro-diamond particles ranging from 0 to 0.5 micron was compared between in DI water and in electroless nickel solution. The effects of the concentration of electroless solution, temperatur...The dispersion behavior of micro-diamond particles ranging from 0 to 0.5 micron was compared between in DI water and in electroless nickel solution. The effects of the concentration of electroless solution, temperature, ultrasonic treatment, stirring speed, and baffles on the size distribution of micro diamond particles in electroless nickel solution were studied. Results show that the dispersion of micro diamond particles in DI water is obviously superior to that in electroless nickel solution. Micro diamond particles agglomerate evidently when the concentration of electroless solution Velect：VDI in dispersion media exceeds 5%0. Diamond particles agglomerate more and more seriously with the increase of the ion concentration. Applying ultrasonic, increasing stirring speed and adding baffles are helpful to improving the dispersion of diamond particles in the electroless nickel solution and its uniform distribution in the Ni-P coating.展开更多
Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapp...Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.展开更多
The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness ca...The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness can be machined by using ultra-precision machine tools,the micro pattern on a large light guide plate (LGP) is mainly machined using a diamond tool.The tool wear occurs due to long machining distances and time while machining a large-area LGP mold.The deformation and dimensional error of micro pattern are caused by tool wear,as a result,the light efficiency of LGP declines.The characteristics of tool wear should be analyzed in order to precisely machine large-area LGP mold from all sorts of materials.The experiments were performed in order to compare wear characteristics of a V90° diamond tool using Al3003,5052,6061 and 7075.The prism pattern of depth 10 μm was machined in order to analyze characteristics of tool wear according to machining distances (0.5,1 and 1.5 km).The effects of tool wear on pattern shape were analyzed by applying overlapped cutting depths (Rough machining is (10+8+7) μm and Finish machining is (5+3+2+1) μm) by continuously machining a prism pattern of W shape of 25 μm in depth.展开更多
The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very ＂smoothed＂ surface and investigate the machining-induced ...The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very ＂smoothed＂ surface and investigate the machining-induced damage in the grinding in order to reduce or eliminate the subsurface damage.The brittle/ductile transition behavior of optical glass materials and the wear of diamond wheel are the most important factors for ductile grinding of optical glass.In this paper,the critical brittle/ductile depth,the influence factors on brittle/ductile transition behavior,the wear of diamond grits in diamond grinding of ultra pure fused silica（UPFS） are investigated by means of micro/nano indentation technique,as well as single grit diamond grinding on an ultra-stiff machine tool,Tetraform ＂C＂.The single grit grinding processes are in-process monitored using acoustic emission（AE） and force dynamometer simultaneously.The wear of diamond grits,morphology and subsurface integrity of the machined groves are examined with atomic force microscope（AFM） and scanning electron microscope（SEM）.The critical brittle/ductile depth of more than 0.5 μm is achieved.When compared to the using roof-like grits,by using pyramidal diamonds leads to higher critical depths of scratch with identical grinding parameters.However,the influence of grit shapes on the critical depth is not significant as supposed.The grinding force increased linearly with depth of cut in the ductile removal regime,but in brittle removal regime,there are large fluctuations instead of forces increase.The SEM photographs of the cross-section profile show that the median cracks dominate the crack patterns beneath the single grooves.Furthermore,The SEM photographs show multi worn patterns of diamond grits,indicating an inhomogeneous wear mechanism of diamond grits in grinding of fused silica with diamond grinding wheels.The proposed research provides the basal technical theory for improving the ultra-precision grinding of UPFS.展开更多
The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at gene...The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at generating very ＂smoothed＂ surfaces and reducing the subsurface damage. However, when grinding spectrosil 2000 and BK7 glass assisted with ELID technology, a deeply comparative study on material removal mechanism and the wheel wear behaviors have not been given yet. In this paper, the micro/nano indentation technique is initially applied for investigating the mechanical properties of optical glasses, whose results are then refereed to evaluate the machinability. In single grit diamond scratching on glasses, the scratching traces display four kinds of scratch characteristics according to different material removal modes. In normal grinding experiments, the result shows BK7 glass has a better machinability than that of spectrosil 2000, corresponding to what the micro/nano indentation vent revealed. Under the same grinding depth parameters, the smaller amplitude of acoustic emission （AE） raw signals, grinding force and grinding force ratio correspond to a better surface quality. While for these two kinds of glasses, with the increasing of grinding depth, the variation trends of the surface roughness, the force ratio, and the AE raw signals are contrary, which should be attributed to different material removal modes. Moreover, the SEM micrographs of used wheels surface indicate that diamond grains on the wheel surface after grinding BK7 glass are worn more severely than that of spectrosil 2000. The proposed research analyzes what happened in the grinding process with different material removal patterns, which can provide a basis for producing high-quality optical glasses and comprehensively evaluate the surface and subsurface integrity of optical glasses.展开更多
In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) te...In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.展开更多
CVD diamond microdosimeter is an ideal substitute of common Si.GaAs detector for extremely strong radiation experimental environment due to its high band gap energy, fast charge collection, low dielectric constant and...CVD diamond microdosimeter is an ideal substitute of common Si.GaAs detector for extremely strong radiation experimental environment due to its high band gap energy, fast charge collection, low dielectric constant and hardness. In order to improve its character, a CVD diamond microdosimeter was irradiated by a proton dose of 46 Gy, and a lateral micro-ion beam induced charge (IBIC) technique was utilized to characterize it in low beam current (～fA). It was clearly shown that charge collection efficiency and energy resolution were greatly improved after proton irradiation of that dose. Moreover, the homogeneities of both its counting performance and collection efficiency were enhanced. Proton irradiation of 46 Gy has been proved to be an effective way to prime a CVD diamond.展开更多
The outstanding properties of CVD diamond film such as electronic, optical, thermal and mechanical and the high radiation hardness have made it an ideal candidate material for radiation detectors in severe environment...The outstanding properties of CVD diamond film such as electronic, optical, thermal and mechanical and the high radiation hardness have made it an ideal candidate material for radiation detectors in severe environments. Fabrication of ＇detector grade＇ CVD diamond films and development of CVD diamond detectors have been leading edge subjects. Micro-strip gas chamber （MSGC） fabricated on CVD diamond substrate would overcome the charge-up effect and the substrate instability, which has been a hotspot in the research of gas detectors.展开更多
A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a r...A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a rough surface for better mechanical interlocking. Subsequently, surface Co was removed by etching in acid solution. Then the hard metal substrate was boronized to form a compound interlayer which acted as an efficient diffusion barrier to prevent the outward diffusion of Co. Novel nano-microcrystalline composite diamond film coatings with a very smooth surface was deposited on the surface engineering pre-treated hard metal surface. Promising results of measurement in adhesion strength as well as field cutting tests have been obtained.展开更多
Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experi...Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.展开更多
Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidanc...Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.展开更多
基金the China Postdoctoral Science Foundation(No.2024M754169)Fundamentals of Equipment Technology(No.2212W22002)for the support of this work。
文摘Micro diamond tools are indispensable for the efficient machining of microstructured surfaces.The precision in tool manufacturing and cutting performance directly determines the processing quality of components.The manufacturing of high-quality micro diamond tools relies on scientific design methods and appropriate processing techniques.However,there is currently a lack of systematic review on the design and manufacturing methods of micro diamond tools in academia.This study systematically summarizes and analyzes modern manufacturing methods for micro diamond tools,as well as the impact of tool waviness,sharpness,and durability on machining quality.Subsequently,a design method is proposed based on the theory of cutting edge strength distribution to enhance tool waviness,sharpness,and durability.Finally,this paper presents current technical challenges faced by micro diamond tools along with potential future solutions to guide scientists in this field.The aim of this review is to contribute to the further development of the current design and manufacturing processes for micro diamond cutting tools.
基金Funded by the Jiangsu Key Laboratory for Materials Tribology(No.kjsmcx0901)
文摘The dispersion behavior of micro-diamond particles ranging from 0 to 0.5 micron was compared between in DI water and in electroless nickel solution. The effects of the concentration of electroless solution, temperature, ultrasonic treatment, stirring speed, and baffles on the size distribution of micro diamond particles in electroless nickel solution were studied. Results show that the dispersion of micro diamond particles in DI water is obviously superior to that in electroless nickel solution. Micro diamond particles agglomerate evidently when the concentration of electroless solution Velect：VDI in dispersion media exceeds 5%0. Diamond particles agglomerate more and more seriously with the increase of the ion concentration. Applying ultrasonic, increasing stirring speed and adding baffles are helpful to improving the dispersion of diamond particles in the electroless nickel solution and its uniform distribution in the Ni-P coating.
基金supported by the National Nature Science Foundation of China(No.51275230)NUAA Research Funding(No.kfjj20150507)+2 种基金Six Talent Peak of Jiangsu(No.ZBZZ-002)the Funding of Jiangsu Innovation Program for Graduate Education(No.KYLX_0227)the Fundamental Research Funds for the Central Universities
文摘Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.
文摘The ultra-precision machining process using a single crystal diamond tool has been mainly used for machining molds of optical components.Since the micro patterns of various shapes having excellent surface roughness can be machined by using ultra-precision machine tools,the micro pattern on a large light guide plate (LGP) is mainly machined using a diamond tool.The tool wear occurs due to long machining distances and time while machining a large-area LGP mold.The deformation and dimensional error of micro pattern are caused by tool wear,as a result,the light efficiency of LGP declines.The characteristics of tool wear should be analyzed in order to precisely machine large-area LGP mold from all sorts of materials.The experiments were performed in order to compare wear characteristics of a V90° diamond tool using Al3003,5052,6061 and 7075.The prism pattern of depth 10 μm was machined in order to analyze characteristics of tool wear according to machining distances (0.5,1 and 1.5 km).The effects of tool wear on pattern shape were analyzed by applying overlapped cutting depths (Rough machining is (10+8+7) μm and Finish machining is (5+3+2+1) μm) by continuously machining a prism pattern of W shape of 25 μm in depth.
基金supported by National Key Science and Technology Projects of China (Grant No. 2009ZX04001-101, Grant No. 2009ZX01001-151)New Century Excellent Talents in University,China (GrantNo. NCET-07-0246)National Natural Science Foundation of China(Grant No. 50675051)
文摘The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very ＂smoothed＂ surface and investigate the machining-induced damage in the grinding in order to reduce or eliminate the subsurface damage.The brittle/ductile transition behavior of optical glass materials and the wear of diamond wheel are the most important factors for ductile grinding of optical glass.In this paper,the critical brittle/ductile depth,the influence factors on brittle/ductile transition behavior,the wear of diamond grits in diamond grinding of ultra pure fused silica（UPFS） are investigated by means of micro/nano indentation technique,as well as single grit diamond grinding on an ultra-stiff machine tool,Tetraform ＂C＂.The single grit grinding processes are in-process monitored using acoustic emission（AE） and force dynamometer simultaneously.The wear of diamond grits,morphology and subsurface integrity of the machined groves are examined with atomic force microscope（AFM） and scanning electron microscope（SEM）.The critical brittle/ductile depth of more than 0.5 μm is achieved.When compared to the using roof-like grits,by using pyramidal diamonds leads to higher critical depths of scratch with identical grinding parameters.However,the influence of grit shapes on the critical depth is not significant as supposed.The grinding force increased linearly with depth of cut in the ductile removal regime,but in brittle removal regime,there are large fluctuations instead of forces increase.The SEM photographs of the cross-section profile show that the median cracks dominate the crack patterns beneath the single grooves.Furthermore,The SEM photographs show multi worn patterns of diamond grits,indicating an inhomogeneous wear mechanism of diamond grits in grinding of fused silica with diamond grinding wheels.The proposed research provides the basal technical theory for improving the ultra-precision grinding of UPFS.
基金supported by National Key Science and Technology Projects of China (Grant No. 2009ZX04001-101, Grant No. 2009ZX01001-151)New Century Excellent Talents in University of China (Grant No. NCET-07-0246)Pre-Research Project of General Armament Department of China (Grant No. 9140A18070209HT0138)
文摘The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at generating very ＂smoothed＂ surfaces and reducing the subsurface damage. However, when grinding spectrosil 2000 and BK7 glass assisted with ELID technology, a deeply comparative study on material removal mechanism and the wheel wear behaviors have not been given yet. In this paper, the micro/nano indentation technique is initially applied for investigating the mechanical properties of optical glasses, whose results are then refereed to evaluate the machinability. In single grit diamond scratching on glasses, the scratching traces display four kinds of scratch characteristics according to different material removal modes. In normal grinding experiments, the result shows BK7 glass has a better machinability than that of spectrosil 2000, corresponding to what the micro/nano indentation vent revealed. Under the same grinding depth parameters, the smaller amplitude of acoustic emission （AE） raw signals, grinding force and grinding force ratio correspond to a better surface quality. While for these two kinds of glasses, with the increasing of grinding depth, the variation trends of the surface roughness, the force ratio, and the AE raw signals are contrary, which should be attributed to different material removal modes. Moreover, the SEM micrographs of used wheels surface indicate that diamond grains on the wheel surface after grinding BK7 glass are worn more severely than that of spectrosil 2000. The proposed research analyzes what happened in the grinding process with different material removal patterns, which can provide a basis for producing high-quality optical glasses and comprehensively evaluate the surface and subsurface integrity of optical glasses.
文摘In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.
文摘CVD diamond microdosimeter is an ideal substitute of common Si.GaAs detector for extremely strong radiation experimental environment due to its high band gap energy, fast charge collection, low dielectric constant and hardness. In order to improve its character, a CVD diamond microdosimeter was irradiated by a proton dose of 46 Gy, and a lateral micro-ion beam induced charge (IBIC) technique was utilized to characterize it in low beam current (～fA). It was clearly shown that charge collection efficiency and energy resolution were greatly improved after proton irradiation of that dose. Moreover, the homogeneities of both its counting performance and collection efficiency were enhanced. Proton irradiation of 46 Gy has been proved to be an effective way to prime a CVD diamond.
文摘The outstanding properties of CVD diamond film such as electronic, optical, thermal and mechanical and the high radiation hardness have made it an ideal candidate material for radiation detectors in severe environments. Fabrication of ＇detector grade＇ CVD diamond films and development of CVD diamond detectors have been leading edge subjects. Micro-strip gas chamber （MSGC） fabricated on CVD diamond substrate would overcome the charge-up effect and the substrate instability, which has been a hotspot in the research of gas detectors.
文摘A surface engineering approach for a novel pre-treatment of hard metal tool substrate for optimum adhesion of diamond coatings is presented. Firsfly, an alkaline solution was used to etch the WC grains to generate a rough surface for better mechanical interlocking. Subsequently, surface Co was removed by etching in acid solution. Then the hard metal substrate was boronized to form a compound interlayer which acted as an efficient diffusion barrier to prevent the outward diffusion of Co. Novel nano-microcrystalline composite diamond film coatings with a very smooth surface was deposited on the surface engineering pre-treated hard metal surface. Promising results of measurement in adhesion strength as well as field cutting tests have been obtained.
文摘Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.
基金Supported by the National Natural Science Foundation of China(No.50935003)Science and Technology Support Project of Jiangsu Province,China(No.BE2012172)
文摘Based on the study of existing typical micro-milling tools and the actual demand for micro-milling tools, the P3 design principle and design flow for ultra-hard micro-milling tool were introduced to give basic guidance for the optimization of micro-milling tools. Then, according to the P3 design flow, the manufacturing process of polycrystalline diamond(PCD) micro-milling tool was proposed, and the PCD micro-milling tool with diameter of 0.5 mm was developed. Finally, the micro-milling test on the slot was carried out to study the milling performance of PCD micromilling tool.
