Optimal parameters for depositing Titanium nitride （TIN） thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si （100） substrates by DC reactive magnetron sputtering, at...Optimal parameters for depositing Titanium nitride （TIN） thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si （100） substrates by DC reactive magnetron sputtering, at different temperatures, different electrical current values, and different N2/Ar ratios. Structural characteristics of TiN thin films were measured by X-ray diffraction （XRD）; surface morphology of the thin films was characterized using an atomic force microscope （AFM）. The electric resistivity of the TiN films was measured by a four-point probe. In the result, temperature is 500℃, electrical current value is 1.6 A, pure N2 is the reacting gas, TiN thin film has the preferred （200） orientation, resistance is small enough for its use as bottom electrodes.展开更多
A composite ceramic coating containing Y2O3-ZrO2-MgO（YSZ-MgO） was prepared on AZ91D magnesium alloy,which was immersed in Y（NO3）3 aqueous solution as pretreatment,by micro-arc oxidation（MAO） process.The morpholo...A composite ceramic coating containing Y2O3-ZrO2-MgO（YSZ-MgO） was prepared on AZ91D magnesium alloy,which was immersed in Y（NO3）3 aqueous solution as pretreatment,by micro-arc oxidation（MAO） process.The morphology,elemental and phase compositions,corrosion behavior and thermal stability of the coatings were studied by SEM,EDX,XRD,electrochemical corrosion test,high temperature oxidation and thermal shock test.The results show that the coating mainly consists of ZrO2,Y2O3,MgO,Mg2SiO4,and MgF2.Among these compounds,Y2O3 accounts for 26.7% of（Y2O3 ＋ ZrO2）.The thickness of YSZ-MgO coating is smaller than that of ZrO2-MgO coating,but its compactness and surface roughness are better than those of ZrO2-MgO coating.YSZ-MgO coating has a good corrosion resistance,and its corrosion rate in 5% NaCl aqueous solution is lower than that of ZrO2-MgO and only about 8.5% of that of AZ91D magnesium alloy.After oxidation at 410 °C,the mass gain of AZ91D magnesium alloy presents a linear increase with the oxidation time.The YSZ-MgO coating and ZrO2-MgO coating can remarkably decrease the oxidation mass gain.The oxidation mass gain of YSZ-MgO coating is lower than that of ZrO2-MgO coating,especially during a long oxidation period.The thermal shock resistance of YSZ-MgO coating is superior to ZrO2-MgO coating.展开更多
The formation processes of a composite ceramic coating on AM50 magnesium alloy prepared by plasma electrolytic oxidation （PEO） in a K 2 ZrF 6 electrolyte solution were studied by scanning electron microscope （SEM）...The formation processes of a composite ceramic coating on AM50 magnesium alloy prepared by plasma electrolytic oxidation （PEO） in a K 2 ZrF 6 electrolyte solution were studied by scanning electron microscope （SEM） and energy dispersive X-ray spectroscope （EDX）. Electrochemical impedance spectroscopy （EIS） tests were used to study the variation of the corrosion resistance of the coating during the PEO treatment. The results show that the coating formed on Mg alloy is mainly composed of MgO and MgF 2 when the applied voltage is lower than the sparking voltage, and zirconium oxides start to be deposited on Mg substrate after the potential exceeding the sparking voltage. The corrosion resistance of the coating increases with increasing the applied voltage.展开更多
Magnetic Fe films grown on single-crystal Mg O(001) and(011) substrates were prepared by direct current magnetron sputtering. The experimental results showed that by applying an external magnetic field of about 300 Oe...Magnetic Fe films grown on single-crystal Mg O(001) and(011) substrates were prepared by direct current magnetron sputtering. The experimental results showed that by applying an external magnetic field of about 300 Oe to film during deposition, a fourfold cubic magnetic anisotropy on Mg O(001) substrate and a twofold uniaxial magnetic anisotropy on Mg O(011) substrate were generated, compared to the isotropic magnetization of Fe film grown without applying the external magnetic field.Our results suggested that external magnetic field during preparation effectively induced relatively higher surface mobility of sputtered Fe atoms and further promoted the crystallization of Fe film and the enhancement of magnetic anisotropy.展开更多
基金Project supported by the National Natural Science Foundation of China (No. 60478039) and the Natural Science Foundation of Zheji-ang Province (No. X405002), China
文摘Optimal parameters for depositing Titanium nitride （TIN） thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si （100） substrates by DC reactive magnetron sputtering, at different temperatures, different electrical current values, and different N2/Ar ratios. Structural characteristics of TiN thin films were measured by X-ray diffraction （XRD）; surface morphology of the thin films was characterized using an atomic force microscope （AFM）. The electric resistivity of the TiN films was measured by a four-point probe. In the result, temperature is 500℃, electrical current value is 1.6 A, pure N2 is the reacting gas, TiN thin film has the preferred （200） orientation, resistance is small enough for its use as bottom electrodes.
基金Project (gf200901002) support by the National Defense Key Disciplines Laboratory of Light Alloy Processing Science and Technology of Nanchang Hangkong University,China
文摘A composite ceramic coating containing Y2O3-ZrO2-MgO（YSZ-MgO） was prepared on AZ91D magnesium alloy,which was immersed in Y（NO3）3 aqueous solution as pretreatment,by micro-arc oxidation（MAO） process.The morphology,elemental and phase compositions,corrosion behavior and thermal stability of the coatings were studied by SEM,EDX,XRD,electrochemical corrosion test,high temperature oxidation and thermal shock test.The results show that the coating mainly consists of ZrO2,Y2O3,MgO,Mg2SiO4,and MgF2.Among these compounds,Y2O3 accounts for 26.7% of（Y2O3 ＋ ZrO2）.The thickness of YSZ-MgO coating is smaller than that of ZrO2-MgO coating,but its compactness and surface roughness are better than those of ZrO2-MgO coating.YSZ-MgO coating has a good corrosion resistance,and its corrosion rate in 5% NaCl aqueous solution is lower than that of ZrO2-MgO and only about 8.5% of that of AZ91D magnesium alloy.After oxidation at 410 °C,the mass gain of AZ91D magnesium alloy presents a linear increase with the oxidation time.The YSZ-MgO coating and ZrO2-MgO coating can remarkably decrease the oxidation mass gain.The oxidation mass gain of YSZ-MgO coating is lower than that of ZrO2-MgO coating,especially during a long oxidation period.The thermal shock resistance of YSZ-MgO coating is superior to ZrO2-MgO coating.
基金Project(2007CB613705)supported by the National Basic Research Program of ChinaProject(50901082)supported by the NationalNatural Science Foundation of China
文摘The formation processes of a composite ceramic coating on AM50 magnesium alloy prepared by plasma electrolytic oxidation （PEO） in a K 2 ZrF 6 electrolyte solution were studied by scanning electron microscope （SEM） and energy dispersive X-ray spectroscope （EDX）. Electrochemical impedance spectroscopy （EIS） tests were used to study the variation of the corrosion resistance of the coating during the PEO treatment. The results show that the coating formed on Mg alloy is mainly composed of MgO and MgF 2 when the applied voltage is lower than the sparking voltage, and zirconium oxides start to be deposited on Mg substrate after the potential exceeding the sparking voltage. The corrosion resistance of the coating increases with increasing the applied voltage.
基金supported by the National Natural Science Foundation of China(51332001 and 51402164)Tsinghua University Initiative Scientific Research Program(2014Z21010 and 2014Z01006)
文摘Magnetic Fe films grown on single-crystal Mg O(001) and(011) substrates were prepared by direct current magnetron sputtering. The experimental results showed that by applying an external magnetic field of about 300 Oe to film during deposition, a fourfold cubic magnetic anisotropy on Mg O(001) substrate and a twofold uniaxial magnetic anisotropy on Mg O(011) substrate were generated, compared to the isotropic magnetization of Fe film grown without applying the external magnetic field.Our results suggested that external magnetic field during preparation effectively induced relatively higher surface mobility of sputtered Fe atoms and further promoted the crystallization of Fe film and the enhancement of magnetic anisotropy.
