Ni_(83)Fe_(17) films with a thickness of about 100 nm were deposited onthermal oxidized silicon substrates at ambient temperature, 240, 350, and 410℃ by DC magnetronsputtering. The deposition rate was about 0.11 nm/s...Ni_(83)Fe_(17) films with a thickness of about 100 nm were deposited onthermal oxidized silicon substrates at ambient temperature, 240, 350, and 410℃ by DC magnetronsputtering. The deposition rate was about 0.11 nm/s. The as-deposited films were annealed at 450,550, and 650℃, respectively, in a vacuum lower than 3 x 10~3 Pa for 1 h. The Ni_(83)Fe_(17) filmsmainly grow with a crystalline orientation of [111] in the direction of the film growth. With theannealing temperature increasing, the [111] orientation enhances. For films deposited at all fourdifferent temperatures, the significant improvement on anisotropic magnetoresistance occurs at theannealing temperature higher than 550℃. But for films deposited at ambient temperatures and 240 ℃,the anisotropic magnetoresistance can only rise to about 1% after 650 ℃ annealing. For filmsdeposited at 350℃ and 410℃, the anisotropic magnetoresistance rises to about 3.8% after 650℃annealing. The atomic force microscopy (AFM) observation shows a significant increase in grain sizeof the film deposited at 350℃ after 650℃ annealing. The decrease in resistivity and the increasein anisotropic magnetoresistance are caused by the decrease in point defects, the increase in grainsize, and the improvement in lattice structure integrity of the films.展开更多
The combined microarc oxidation （MAO） and magnetron sputtering deposition process was used to deposit duplex a-C：H/MAO and Ti-a-C：H/MAO coatings on AM80 magnesium alloy. The microstructure, mechanical properties a...The combined microarc oxidation （MAO） and magnetron sputtering deposition process was used to deposit duplex a-C：H/MAO and Ti-a-C：H/MAO coatings on AM80 magnesium alloy. The microstructure, mechanical properties and tribological behavior of the two duplex coatings were investigated. The experimental results showed that the a-C：H and Ti-a-C：H top films on Si substrates were dense and had a low G peak position and ID/IG ratio, compared with the hydrogen-free amorphous carbon films. Numerous micropores were found on the duplex a-C：H/MAO and Ti-a-C：H/MAO coatings together with low values of hardness （H） and elastic modulus （E）, which also showed good binding strength with the Mg alloy substrates. Compared to MAO treated substrate used for the protection of the Mg alloy, the duplex a-C：H/MAO and Ti-a- C：H/MAO coatings still had stable and low value of friction coefficient, even though the surface of the duplex coatings was rough and porous. Furthermore, the mechanism of friction reduction of the two duplex coatings on the Mg alloy substrates was discussed.展开更多
By the r. f. magnetron sputtering method, the CeO_2 buffer layers were prepared on (100) LaAlO_3 sub-strates. The results of X-ray diffraction and Ф-scan indicated that the CeO_2 films were unique ( 100)-orientedand ...By the r. f. magnetron sputtering method, the CeO_2 buffer layers were prepared on (100) LaAlO_3 sub-strates. The results of X-ray diffraction and Ф-scan indicated that the CeO_2 films were unique ( 100)-orientedand epitaxial. The YBa_2Cu_3O_(7-6)(YBCO) films, which were deposited on the CeO_2/LaAlO_3 by d. c. magnetronsputtering, exhibited transition temperatures of 89～91 K,and had critical current densities exceeding 10￣6 A/cm￣2 at 77 K in zero magnetic field.展开更多
Y_(1-x)Ho_xBa_2Cu_3O_(7-δ)(0<x<1) sinsle crystal thin films oriented with the caxis perpendicular to the sur-face were grown by DC magnetron sputtering technique. Target was pieced together with half of YBa_2Cu...Y_(1-x)Ho_xBa_2Cu_3O_(7-δ)(0<x<1) sinsle crystal thin films oriented with the caxis perpendicular to the sur-face were grown by DC magnetron sputtering technique. Target was pieced together with half of YBa_2Cu_3O_(7-δ)(YBCO) and half of HoBa_2Cu_3O_(7-δ)(HBCO) superconducting materials. As the distance between HBCO targetmaterial and substrate is varied , the Ho content in material is changed respectively. When the content of Ho is0. 7 (atom ratio) , the T_c>83K.展开更多
文摘Ni_(83)Fe_(17) films with a thickness of about 100 nm were deposited onthermal oxidized silicon substrates at ambient temperature, 240, 350, and 410℃ by DC magnetronsputtering. The deposition rate was about 0.11 nm/s. The as-deposited films were annealed at 450,550, and 650℃, respectively, in a vacuum lower than 3 x 10~3 Pa for 1 h. The Ni_(83)Fe_(17) filmsmainly grow with a crystalline orientation of [111] in the direction of the film growth. With theannealing temperature increasing, the [111] orientation enhances. For films deposited at all fourdifferent temperatures, the significant improvement on anisotropic magnetoresistance occurs at theannealing temperature higher than 550℃. But for films deposited at ambient temperatures and 240 ℃,the anisotropic magnetoresistance can only rise to about 1% after 650 ℃ annealing. For filmsdeposited at 350℃ and 410℃, the anisotropic magnetoresistance rises to about 3.8% after 650℃annealing. The atomic force microscopy (AFM) observation shows a significant increase in grain sizeof the film deposited at 350℃ after 650℃ annealing. The decrease in resistivity and the increasein anisotropic magnetoresistance are caused by the decrease in point defects, the increase in grainsize, and the improvement in lattice structure integrity of the films.
基金Funded by the National Natural Science Foundation of China(No.51201176)the Zhejiang Provincial Natural Science Foundation of China(No.Y2110401)the Natural Science Foundation of Shaanxi Province(No.2015JM5176)
文摘The combined microarc oxidation （MAO） and magnetron sputtering deposition process was used to deposit duplex a-C：H/MAO and Ti-a-C：H/MAO coatings on AM80 magnesium alloy. The microstructure, mechanical properties and tribological behavior of the two duplex coatings were investigated. The experimental results showed that the a-C：H and Ti-a-C：H top films on Si substrates were dense and had a low G peak position and ID/IG ratio, compared with the hydrogen-free amorphous carbon films. Numerous micropores were found on the duplex a-C：H/MAO and Ti-a-C：H/MAO coatings together with low values of hardness （H） and elastic modulus （E）, which also showed good binding strength with the Mg alloy substrates. Compared to MAO treated substrate used for the protection of the Mg alloy, the duplex a-C：H/MAO and Ti-a- C：H/MAO coatings still had stable and low value of friction coefficient, even though the surface of the duplex coatings was rough and porous. Furthermore, the mechanism of friction reduction of the two duplex coatings on the Mg alloy substrates was discussed.
文摘By the r. f. magnetron sputtering method, the CeO_2 buffer layers were prepared on (100) LaAlO_3 sub-strates. The results of X-ray diffraction and Ф-scan indicated that the CeO_2 films were unique ( 100)-orientedand epitaxial. The YBa_2Cu_3O_(7-6)(YBCO) films, which were deposited on the CeO_2/LaAlO_3 by d. c. magnetronsputtering, exhibited transition temperatures of 89～91 K,and had critical current densities exceeding 10￣6 A/cm￣2 at 77 K in zero magnetic field.
文摘Y_(1-x)Ho_xBa_2Cu_3O_(7-δ)(0<x<1) sinsle crystal thin films oriented with the caxis perpendicular to the sur-face were grown by DC magnetron sputtering technique. Target was pieced together with half of YBa_2Cu_3O_(7-δ)(YBCO) and half of HoBa_2Cu_3O_(7-δ)(HBCO) superconducting materials. As the distance between HBCO targetmaterial and substrate is varied , the Ho content in material is changed respectively. When the content of Ho is0. 7 (atom ratio) , the T_c>83K.
