MTM(Metal To Metal)反熔丝薄膜工艺是反熔丝工艺的关键技术。介绍了MTM反熔丝薄膜单项工艺开发采用的DOE(Design of Experiment)试验方法。基于CVD(Chemical Vapor Deposition)工艺,通过对射频RF、气体1流量以及基座间距进行DOE试验设...MTM(Metal To Metal)反熔丝薄膜工艺是反熔丝工艺的关键技术。介绍了MTM反熔丝薄膜单项工艺开发采用的DOE(Design of Experiment)试验方法。基于CVD(Chemical Vapor Deposition)工艺,通过对射频RF、气体1流量以及基座间距进行DOE试验设计,以厚度均匀性、折射率以及应力等工艺参数响应并通过容宽验证,完成反熔丝薄膜主要参数的工艺菜单开发。主要提供一种采用DOE试验设计进行单项工艺开发的方法,为科研生产中各种关键单项工艺开发提供参考和借鉴。展开更多
认知无线电系统中,认知用户必须具备动态可靠感知与检测频谱空穴的能力。采用多载波调制可以作为认知用户频谱感知的有效实现方式。不同于传统正交频分复用OFDM(orthogonal frequency divisionmultiplex)多载波调制,提出了认知节点基于...认知无线电系统中,认知用户必须具备动态可靠感知与检测频谱空穴的能力。采用多载波调制可以作为认知用户频谱感知的有效实现方式。不同于传统正交频分复用OFDM(orthogonal frequency divisionmultiplex)多载波调制,提出了认知节点基于多抽头频谱估计方法的频谱感知新技术,它基于滤波器组进行实现。采用扁长型滤波器多带调制设计的多抽头频谱估计器,具有较高的频谱动态范围,可以比周期图频谱估计器更有效地估计干扰温度功率谱。通过干扰温度功率谱仿真分析,多抽头频谱估计器作为认知用户前端频谱分析器,可以准确估计干扰温度功率谱,进而实现对主用户接收机的干扰抑制。展开更多
In order to apply classical micromechanics in predicting the effective prop- erties of nanocomposites incorporating interface energy, a concept of equivalent inclusion （EI） is usually adopted. The properties of EI a...In order to apply classical micromechanics in predicting the effective prop- erties of nanocomposites incorporating interface energy, a concept of equivalent inclusion （EI） is usually adopted. The properties of EI are obtained by embedding a single inclusion with the interface into an infinite matrix. However, whether such an EI is universal for different micromechanics-based methods is rarely discussed in the literature. In this pa- per, the interface energy theory is used to study the applicability of the above mentioned EI. It is found that some elastic properties of the EI are related only to the properties of the inclusion and the interface, whereas others are also related to the properties of the matrix. The former properties of the EI can be applied to both the classical Mori-Tanaka method （MTM） and the generalized self-consistent method （GSCM）. However, the latter can be applied only to the MTM. Two kinds of new EIs are proposed for the GSCM and used to estimate the effective mechanical properties of nanocomposites.展开更多
文摘MTM(Metal To Metal)反熔丝薄膜工艺是反熔丝工艺的关键技术。介绍了MTM反熔丝薄膜单项工艺开发采用的DOE(Design of Experiment)试验方法。基于CVD(Chemical Vapor Deposition)工艺,通过对射频RF、气体1流量以及基座间距进行DOE试验设计,以厚度均匀性、折射率以及应力等工艺参数响应并通过容宽验证,完成反熔丝薄膜主要参数的工艺菜单开发。主要提供一种采用DOE试验设计进行单项工艺开发的方法,为科研生产中各种关键单项工艺开发提供参考和借鉴。
基金Project(202303AA080010)supported by the Key R&D Program of Yunnan,ChinaProject(51779250)supported by the National Natural Science Foundation of ChinaProjects([2020]No.74,[2020]No.98)supported by the Science and Technology Innovation and Demonstration of Yunnan Provincial Department of Transportation,China。
文摘认知无线电系统中,认知用户必须具备动态可靠感知与检测频谱空穴的能力。采用多载波调制可以作为认知用户频谱感知的有效实现方式。不同于传统正交频分复用OFDM(orthogonal frequency divisionmultiplex)多载波调制,提出了认知节点基于多抽头频谱估计方法的频谱感知新技术,它基于滤波器组进行实现。采用扁长型滤波器多带调制设计的多抽头频谱估计器,具有较高的频谱动态范围,可以比周期图频谱估计器更有效地估计干扰温度功率谱。通过干扰温度功率谱仿真分析,多抽头频谱估计器作为认知用户前端频谱分析器,可以准确估计干扰温度功率谱,进而实现对主用户接收机的干扰抑制。
基金supported by the National Natural Science Foundation of China(Nos.11272007 and 11332001)
文摘In order to apply classical micromechanics in predicting the effective prop- erties of nanocomposites incorporating interface energy, a concept of equivalent inclusion （EI） is usually adopted. The properties of EI are obtained by embedding a single inclusion with the interface into an infinite matrix. However, whether such an EI is universal for different micromechanics-based methods is rarely discussed in the literature. In this pa- per, the interface energy theory is used to study the applicability of the above mentioned EI. It is found that some elastic properties of the EI are related only to the properties of the inclusion and the interface, whereas others are also related to the properties of the matrix. The former properties of the EI can be applied to both the classical Mori-Tanaka method （MTM） and the generalized self-consistent method （GSCM）. However, the latter can be applied only to the MTM. Two kinds of new EIs are proposed for the GSCM and used to estimate the effective mechanical properties of nanocomposites.
