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MOCVD制备In_xGa_(1-x)N/GaN MQWs的温度依赖性 被引量:2
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作者 李培咸 郝跃 《光子学报》 EI CAS CSCD 北大核心 2007年第1期34-38,共5页
利用方势阱模型对Inx Ga1-xN/GaN MQWs结构的光特性进行了量子力学定性理论分析.并在MO源流量恒定条件下,在570℃~640℃范围内进行了不同生长温度的多量子阱制备实验,对Inx Ga1-xNs制备过程中的In组份掺入效率的温度依赖关系进行... 利用方势阱模型对Inx Ga1-xN/GaN MQWs结构的光特性进行了量子力学定性理论分析.并在MO源流量恒定条件下,在570℃~640℃范围内进行了不同生长温度的多量子阱制备实验,对Inx Ga1-xNs制备过程中的In组份掺入效率的温度依赖关系进行研究.通过对制备样品的PL谱测量分析,得到了587℃~600℃的In组份最佳掺入温度区间. 展开更多
关键词 MOCVD INX Ga1-xN GAN mqws 生长温度
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AlGaN双势垒结构对高In组分InGaN/GaN MQWs太阳能电池材料晶体质量和发光性能的影响
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作者 单恒升 李明慧 +4 位作者 李诚科 刘胜威 梅云俭 宋一凡 李小亚 《人工晶体学报》 CAS 北大核心 2023年第1期83-88,124,共7页
本文利用金属有机化合物化学气相沉积(MOCVD)技术在(001)面图形化蓝宝石衬底(PSS)上生长了一种含有AlGaN-InGaN/GaN MQWs(multiple quantum wells)-AlGaN双势垒结构的高In组分太阳能电池外延材料。高分辨率X射线衍射(HRXRD)和光致发光(... 本文利用金属有机化合物化学气相沉积(MOCVD)技术在(001)面图形化蓝宝石衬底(PSS)上生长了一种含有AlGaN-InGaN/GaN MQWs(multiple quantum wells)-AlGaN双势垒结构的高In组分太阳能电池外延材料。高分辨率X射线衍射(HRXRD)和光致发光(PL)谱分析表明,与含有AlGaN电子阻挡层的低In组分的量子阱结构太阳能电池外延材料相比,该结构材料具有较小的半峰全宽(FWHM),计算表明:此结构材料的位错密度降低了一个数量级,达到10^(7)cm^(-2);同时,有源区中的应变弛豫降低了51%;此外,此结构材料的发光强度增强了35%。研究结果表明含有AlGaN双势垒结构的外延材料可以减小有源区的位错密度,降低非辐射复合中心的数目,增大有源区有效光生载流子的数目,为制备高质量太阳能电池提供实验依据。 展开更多
关键词 金属有机化合物化学气相沉积 太阳能电池外延材料 AlGaN双势垒结构 InGaN/GaN mqws 位错密度 光生载流子
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Structural Analysis of In xGa1−xN/GaN MQWs by Different Experimental Methods
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作者 DING Bin-Beng PAN Feng +3 位作者 FENG Zhe-Chuan FA Tao CHENG Feng-Feng YAO Shu-De 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第7期305-308,共4页
Structural properties of InxGa_(1−x)N/GaN multi-quantum wells(MQWs)grown on sapphire by metal organic chemical vapor deposition are investigated by synchrotron radiation x-ray diffraction(SRXRD),Rutherford backscatter... Structural properties of InxGa_(1−x)N/GaN multi-quantum wells(MQWs)grown on sapphire by metal organic chemical vapor deposition are investigated by synchrotron radiation x-ray diffraction(SRXRD),Rutherford backscattering/channelling(RBS/C)and high-resolution transmission electron microscopy.The sample consists of eight periods of InxGa_(1−x)N/GaN wells of 2.1 nm thickness and 8.5 nm thickness of GaN barrier,and the results are very close,which verifies the accuracy of the three methods.The indium content in InxGa_(1−x)N/GaN MQWs by SRXRD and RBS/C is estimated,and results are in general the same.By RBS/C random spectra,the indium atomic lattice substitution rate is 94.0%,indicating that almost all indium atoms in InxGa_(1−x)N/GaN MQWs are at substitution,that the indium distribution of each layer in InxGa_(1−x)N/GaN MQWs is very homogeneous and that the InxGa_(1−x)N/GaN MQWs have a very good crystalline quality.It is not accurate to estimate indium content in InxGa_(1−x)N/GaN MQWs by photoluminescence(PL)spectra,because the result from the PL experimental method is very different from the results by the SRXRD and RBS/C experimental methods. 展开更多
关键词 N/Ga mqws SAPPHIRE
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Performance Characterization of Visible Light Communication Based on GaN High-Voltage LED/PD
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作者 LU Meixin JIANG Zitong +2 位作者 FANG Li YAN Yiqun YAN Jiabin 《ZTE Communications》 2024年第4期46-52,共7页
While considerable research has been conducted on the structural principles,fabrication techniques,and photoelectric properties of high-voltage light-emitting diodes(LEDs),their performance in light communication rema... While considerable research has been conducted on the structural principles,fabrication techniques,and photoelectric properties of high-voltage light-emitting diodes(LEDs),their performance in light communication remains underexplored.A high-voltage seriesconnected LED or photodetector(HVS-LED/PD)based on the gallium nitride(GaN)integrated photoelectronic chip is presented in this paper.Multi-quantum wells(MQW)diodes with identical structures are integrated onto a single chip through wafer-scale micro-fabrication techniques and connected in series to construct the HVS-LED/PD.The advantages of the HVS-LED/PD in communication are explored by testing its performance as both a light transmitter and a PD.The series connection enhances the device's 3 dB bandwidth,allowing it to increase from 1.56 MHz to a minimum of 2.16 MHz when functioning as an LED,and from 47.42 kHz to at least 85.83 kHz when operating as a PD.The results demonstrate that the light communication performance of HVS-LED/PD is better than that of a single GaN MQW diode with bandwidth and transmission quantity,which enriches the research of GaN-based high-voltage devices. 展开更多
关键词 high-voltage LEDs high-voltage PDs GaN MQW diode array communication characterization visible light communication
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GaN基激光器多量子阱垒材料的研究 被引量:1
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作者 陈伟华 廖辉 +6 位作者 胡晓东 李睿 贾全杰 金元浩 杜为民 杨志坚 张国义 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2009年第6期1441-1444,共4页
在(0001)蓝宝石衬底上分别用金属有机化学气相沉积技术外延生长了InGaN/GaN,InGaN/In-GaN,InGaN/AlInGaN多量子阱激光器结构,并分别制作了脊形波导GaN基激光器。同步辐射X射线衍射,电注入受激发射光谱测试及光功率-电流(L-I)测试证明,... 在(0001)蓝宝石衬底上分别用金属有机化学气相沉积技术外延生长了InGaN/GaN,InGaN/In-GaN,InGaN/AlInGaN多量子阱激光器结构,并分别制作了脊形波导GaN基激光器。同步辐射X射线衍射,电注入受激发射光谱测试及光功率-电流(L-I)测试证明,相对于GaN垒材料,InGaN垒材料,AlInGaN四元合金垒材料更能改善多量子阱的晶体质量,提高量子阱的量子效率及降低激光器阈值电流。相关的机制为:组分调节合适的四元合金垒层中Al的掺入使得量子阱势垒高度增加,阱区收集载流子的能力增强;In的掺入能更多地补偿应力,减少了由于缺陷和位错所产生的非辐射复合中心密度;In的掺入还减小了量子阱中应力引致的压电场,电子空穴波函数空间交叠得以加强,使得辐射复合增加。 展开更多
关键词 GAN基激光器 多量子阱(mqws) ALINGAN 垒材料
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MQW EA调制器用于短脉冲光子源驱动条件的优化设计 被引量:3
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作者 丁永奎 谭莉 +2 位作者 田贺斌 贾东方 李世忱 《量子电子学报》 CAS CSCD 北大核心 2002年第6期536-540,共5页
本文分析了多量子阱电吸收调制器(MQW EAM)的非线性损耗特性,从时域和频域两个方面讨论了MQW EAM驱动条件与输出光脉冲特性的关系.数值计算结果证明EAM产生的脉冲形状比较接近Gauss脉冲,具有较小的啁啾,接近于变换限的光脉冲,十分适... 本文分析了多量子阱电吸收调制器(MQW EAM)的非线性损耗特性,从时域和频域两个方面讨论了MQW EAM驱动条件与输出光脉冲特性的关系.数值计算结果证明EAM产生的脉冲形状比较接近Gauss脉冲,具有较小的啁啾,接近于变换限的光脉冲,十分适用于高速时分复用系统. 展开更多
关键词 MQW EA 短脉冲 光子源 驱动条件 优化设计 多量子阱电吸收调制器 量子限制 STARK效应 啁啾 线宽增强因子 时间带宽积 光通信
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Si衬底MOCVD生长GaN/InGaN多量子阱缺陷TEM研究 被引量:1
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作者 朱华 李翠云 +2 位作者 莫春兰 江风益 张萌 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第3期539-543,共5页
用透射电子显微镜对Si衬底生长GaN/InGaN多量子阱材料进行横断面测试,在衬底和缓冲层区域进行高分辨电子显微成像(HRTEM)、电子衍射衬度成像、选区电子衍射成像,在量子阱附近区域进行了双束近似电子衍衬像对其位错特性进行研究;用场发... 用透射电子显微镜对Si衬底生长GaN/InGaN多量子阱材料进行横断面测试,在衬底和缓冲层区域进行高分辨电子显微成像(HRTEM)、电子衍射衬度成像、选区电子衍射成像,在量子阱附近区域进行了双束近似电子衍衬像对其位错特性进行研究;用场发射扫描电子显微镜对饱和KOH溶液腐蚀前后材料成像.结果发现,AlN缓冲层具有多孔结构,高温GaN层位错平均密度达108cm-2,同扫描电子显微镜得到的六角腐蚀坑密度一致,量子阱以下发现大量位错发生90°弯曲,而使穿过量子阱位错密度大大降低.在线位错中,以刃位错居多,其次是混合位错,所观察区域几乎未见螺位错. 展开更多
关键词 MQW SI衬底 位错 TEM SEM
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非线性包层多量子阱波导的TE波:方均根近似法 被引量:4
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作者 佘守宪 张思炯 《量子电子学报》 CAS CSCD 1999年第3期269-275,共7页
本文给出了用以分析非线性包层多量子阱波导的TE模光学非线性与双稳性的方均根近似法,导出了理论公式及其计算方法.与精确分析法相比较,方均根近似法的计算大为简化.数值计算表明:当芯区的多量子层达到一定数目时,方均根近似法... 本文给出了用以分析非线性包层多量子阱波导的TE模光学非线性与双稳性的方均根近似法,导出了理论公式及其计算方法.与精确分析法相比较,方均根近似法的计算大为简化.数值计算表明:当芯区的多量子层达到一定数目时,方均根近似法与精确分析法的分析结果相当符合.利用本文的方法分析了模折射率与波导总功率的依赖关系,芯区功率与总功率之间的双稳性以及模场分布与模折射率的关系,讨论了波导参数对光学非线性、双稳性及模场分布的影响. 展开更多
关键词 非线性光波导 多量子阱波导 光学非线性 MQW
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AlGaInP/GaInP多量子阱的拉曼光谱 被引量:1
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作者 陈练辉 范广涵 +1 位作者 孟耀勇 刘桂强 《量子电子学报》 CAS CSCD 北大核心 2004年第6期859-862,共4页
利用LP-MOCVD生长了不同周期的AlGaInP/GaInP MQW样品,并测量了它们的拉曼光谱。由于样品包括了掺杂的电流扩展层和欧姆接触层以及上、下限制层,拉曼光谱中观察到了与掺杂有关的耦合电子(空穴)气-纵光学声子模。根据喇曼光谱的选择定则... 利用LP-MOCVD生长了不同周期的AlGaInP/GaInP MQW样品,并测量了它们的拉曼光谱。由于样品包括了掺杂的电流扩展层和欧姆接触层以及上、下限制层,拉曼光谱中观察到了与掺杂有关的耦合电子(空穴)气-纵光学声子模。根据喇曼光谱的选择定则,结合光致发光谱,发现AlP-LO/TO的相对强度比可以评定晶体AlGaInP MQW的生长质量。 展开更多
关键词 光电子学 AlGaInP/GaInP MQW 拉曼光谱 耦合电子(空穴)气-纵光学声子模
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Application of nano-patterned InGaN fabricated by selfassembled Ni nano-masks in green InGaN/GaN multiple quantum wells 被引量:2
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作者 Ruoshi Peng Shengrui Xu +5 位作者 Xiaomeng Fan Hongchang Tao Huake Su Yuan Gao Jincheng Zhang Yue Hao 《Journal of Semiconductors》 EI CAS CSCD 2023年第4期86-91,共6页
The nano-patterned InGaN film was used in green InGaN/GaN multiple quantum wells(MQWs)structure,to relieve the unpleasantly existing mismatch between high indium content InGaN and GaN,as well as to enhance the light o... The nano-patterned InGaN film was used in green InGaN/GaN multiple quantum wells(MQWs)structure,to relieve the unpleasantly existing mismatch between high indium content InGaN and GaN,as well as to enhance the light output.The different self-assembled nano-masks were formed on InGaN by annealing thin Ni layers of different thicknesses.Whereafter,the InGaN films were etched into nano-patterned films.Compared with the green MQWs structure grown on untreated InGaN film,which on nano-patterned InGaN had better luminous performance.Among them the MQWs performed best when 3 nm thick Ni film was used as mask,because that optimally balanced the effects of nano-patterned InGaN on the crystal quality and the light output. 展开更多
关键词 GAN INGAN nano-mask nano-patterned mqws
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Monolithic semi-polar(1■01) InGaN/GaN near white light-emitting diodes on micro-striped Si(100) substrate 被引量:1
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作者 Qi Wang Guo-Dong Yuan +5 位作者 Wen-Qiang Liu Shuai Zhao Lu Zhang Zhi-Qiang Liu Jun-Xi Wang Jin-Min Li 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第8期349-354,共6页
The epitaxial growth of novel GaN-based light-emitting diode(LED) on Si(100) substrate has proved challenging.Here in this work, we investigate a monolithic phosphor-free semi-polar InGaN/GaN near white light-emitting... The epitaxial growth of novel GaN-based light-emitting diode(LED) on Si(100) substrate has proved challenging.Here in this work, we investigate a monolithic phosphor-free semi-polar InGaN/GaN near white light-emitting diode, which is formed on a micro-striped Si(100) substrate by metal organic chemical vapor deposition. By controlling the size of micro-stripe, InGaN/GaN multiple quantum wells(MQWs) with different well widths are grown on semi-polar(1■01)planes. Besides, indium-rich quantum dots are observed in InGaN wells by transmission electron microscopy, which is caused by indium phase separation. Due to the different widths of MQWs and indium phase separation, the indium content changes from the center to the side of the micro-stripe. Various indium content provides the wideband emission. This unique property allows the semipolar InGaN/GaN MQWs to emit wideband light, leading to the near white light emission. 展开更多
关键词 INGAN/GAN mqws NEAR white LIGHT-EMITTING diodes Si(100)substrate
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Analysis Expression of Rate Equation for Vertical Cavity Lasers 被引量:1
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作者 PANWei CHENJian-guo 《Semiconductor Photonics and Technology》 CAS 2000年第1期40-47,共8页
An analysis solution of rate equation is derived for vertical cavity surface-emitting lasers. Based on the enhanced spontaneous emission caused by VCSELs and influence of nonradiative recombination, the relation betwe... An analysis solution of rate equation is derived for vertical cavity surface-emitting lasers. Based on the enhanced spontaneous emission caused by VCSELs and influence of nonradiative recombination, the relation between output properties and structural parameters of multi-quantum wells (MQWs) is obtained. It was found that the characteristic curve of a“thresholdless”laser is strongly nonradiative depopulation-dependent. When the nonradiative depopulation is no zero, the light-current characteristic is not linearly even for an ideal closed microcavity. The light output is increased by the enhanced well number and by the reduced width. In particular, a lower threshold current density for MQW structure in the short cavity is realized by us, meanwhile the sharpness of the variation depends on spontaneous emission factor. 展开更多
关键词 Rate equation Spontaneous emission factor Structural parameters of mqws VCSELS
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The Influence of Rapid Thermal Annealing on SiGe/Si Multiple-Quantum Wells p_-i_-n Photodiodes
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作者 李成 杨沁清 +3 位作者 王红杰 王玉田 余金中 王启明 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第6期695-699,共5页
The influence of thermal treatment on Si 1-x Ge x/Si multiple-quantum wells (MQW) p-i-n photodiodes has been investigated by photocurrent spectroscopy combined with X-ray double crystal dif... The influence of thermal treatment on Si 1-x Ge x/Si multiple-quantum wells (MQW) p-i-n photodiodes has been investigated by photocurrent spectroscopy combined with X-ray double crystal diffraction.The cutoff wavelength is significantly reduced due to the Si-Ge interdiffusion and partial relaxation of the strained SiGe alloy.The values of the blue shift increase slowly with the annealing temperatures in the range of 750℃ to 850℃.However,the nonlinear changes in photocurrent intensities of the samples annealed at different temperatures have been observed,which is mainly dominated by the generation of misfit dislocations and the reduction of the point defects in the heating process. 展开更多
关键词 SiGe/Si MQW photodiodes blue shift thermal annealing INTERDIFFUSION
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Design of Tensile Strained InGaAsP/InGaAsP MQW for 1.55μm Polarization Independent Semiconductor Optical Amplifier
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作者 邱伟彬 何国敏 +1 位作者 董杰 王圩 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第1期11-17,共7页
The theoretical optimization of tensile strained InGaAsP/InGaAsP MQW for 1.55μm windows polarization-independent semiconductor optical amplifier is reported.The valence-band structure of the MQW is calculated by usin... The theoretical optimization of tensile strained InGaAsP/InGaAsP MQW for 1.55μm windows polarization-independent semiconductor optical amplifier is reported.The valence-band structure of the MQW is calculated by using k·p method,in which 6×6 Luttinger effective-mass Hamiltonian is taken into account.The polarization dependent optical gain is calculated with various well width,strain,and carrier density. 展开更多
关键词 semiconductor optical amplifier polarization independence MQW
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Optimized Layers Design for AlGaN/GaN/InGaN Symmetrical Separate Confinement Heterojunction Multi-Quantum Well Laser Diode
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作者 陆敏 方慧智 张国义 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第5期492-496,共5页
Waveguide characteristics of symmetrical separate confinement heterojunction multi quantum well (SCH MQW) AlGaN/GaN/InGaN laser diode (LD) are studied by using one dimensional (1 D) transfer matrix waveguide appro... Waveguide characteristics of symmetrical separate confinement heterojunction multi quantum well (SCH MQW) AlGaN/GaN/InGaN laser diode (LD) are studied by using one dimensional (1 D) transfer matrix waveguide approach.Aiming at photon confinement factor,threshold current,and power efficiency,layers design for SCH MQW LD is optimized.The optimal layers parameters are 3 periods In 0.02 Ga 0.98 N/In 0.15 Ga 0.85 N QW for active layer,In 0.1 Ga 0 9 N for waveguide layer with 90nm thick,and 120×(2 5nm/2 5nm) Al 0.25 Ga 0 75 N/GaN supper lattices for cladding layer with the laser wavelength of 396 6nm. 展开更多
关键词 AlGaN/GaN/InGaN MQW SCH
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AlGaInP/GaInP多量子阱MOCVD外延片光学特性测试
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作者 王雅芳 罗键 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2010年第1期26-29,共4页
利用金属有机物化学气相沉积(MOCVD)生长了不同周期的四元合金半导体材料AlGaInP/(GaInP多量子阱(MQW)外延片,通过实验找到了在周期数和阱/垒宽度比等结构参数上生产AlGaInP/GaInP MQW的比较理想的结果.对常温下AlGaInP/GaInP MQW外延... 利用金属有机物化学气相沉积(MOCVD)生长了不同周期的四元合金半导体材料AlGaInP/(GaInP多量子阱(MQW)外延片,通过实验找到了在周期数和阱/垒宽度比等结构参数上生产AlGaInP/GaInP MQW的比较理想的结果.对常温下AlGaInP/GaInP MQW外延片的光学性质进行深入的分析和实验研究,发现当阱/垒宽度比a=0.56时,出光强度趋于饱和,当周期数目N=20时,FWHM减小到11.9 nm,可在一定程度上达到改善MQW结构设计和提高材料生长质量的目的. 展开更多
关键词 AlGaInP/GaInP MQW 拉曼光谱 金属有机物化学气相沉积
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High-efficiency InGaN/AlInGaN multiple quantum wells with lattice-matched AlInGaN superlattices barrier
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作者 Feng Xu Peng Chen +7 位作者 Fu-Long Jiang Ya-Yun Liu Zi-Li Xie Xiang-Qian Xiu Xue-Mei Hua Yi Shi Rong Zhang You-Liao Zheng 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第1期488-492,共5页
A new approach to fabricating high-quality AlInGaN film as a lattice-matched barrier layer in multiple quantum wells(MQWs) is presented. The high-quality AlInGaN film is realized by growing the AlGaN/InGaN short per... A new approach to fabricating high-quality AlInGaN film as a lattice-matched barrier layer in multiple quantum wells(MQWs) is presented. The high-quality AlInGaN film is realized by growing the AlGaN/InGaN short period superlattices through metalorganic chemical vapor deposition, and then being used as a barrier in the MQWs. The crystalline quality of the MQWs with the lattice-matched AlInGaN barrier and that of the conventional InGaN/GaN MQWs are characterized by x-ray diffraction and scanning electron microscopy. The photoluminescence(PL) properties of the InGaN/AlInGa N MQWs are investigated by varying the excitation power density and temperature through comparing with those of the InGaN/GaN MQWs. The integral PL intensity of InGaN/AlInGaN MQWs is over 3 times higher than that of InGaN/GaN MQWs at room temperature under the highest excitation power. Temperature-dependent PL further demonstrates that the internal quantum efficiency of InGaN/AlInGaN MQWs(76.1%) is much higher than that of InGaN/GaN MQWs(21%).The improved luminescence performance of InGaN/AlInGaN MQWs can be attributed to the distinct reduction of the barrier-well lattice mismatch and the strain-induced non-radiative recombination centers. 展开更多
关键词 AlInGaN superlattices mqws photoluminescence x-ray diffraction spectrum
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缓冲层对多量子阱材料GaAs/Ga_(1-x)Al_xAs共振态的影响
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作者 杨晓峰 《微纳电子技术》 CAS 2003年第7期8-10,共3页
从理论上研究缓冲层的厚度和特性对多量子阱材料 (GaAs/Ga1-xAlxAs)中的共振态的影响 ,利用界面响应理论的格林函数方法 ,计算了局域和总电子态密度以及电子对结的穿透率 ,展示了缓冲层特性对态密度特征峰、穿透率的影响。结果表明 。
关键词 缓冲层 多量子阱材料 GaAs/Ga1-xAlxAs共振态 密度 格林函数方法 MQW器件 复合材料
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阶梯状量子阱结构对蓝光GaN基LED性能的改善 被引量:7
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作者 刘轩 王美玉 +1 位作者 李毅 朱友华 《半导体技术》 CAS 北大核心 2019年第10期767-772,共6页
由于Ⅲ族氮化物材料自身的物理特性,InGaN/GaN量子阱结构存在极化效应导致能带倾斜,极大地影响了LED的辐射复合效率。采用阶梯状量子阱的结构来改善LED的发光特性,通过金属有机物化学气相沉积(MOCVD)系统在4英寸(1英寸=2.54 cm)蓝宝石... 由于Ⅲ族氮化物材料自身的物理特性,InGaN/GaN量子阱结构存在极化效应导致能带倾斜,极大地影响了LED的辐射复合效率。采用阶梯状量子阱的结构来改善LED的发光特性,通过金属有机物化学气相沉积(MOCVD)系统在4英寸(1英寸=2.54 cm)蓝宝石衬底上外延生长了3种不同量子阱结构的样品,并对其进行材料结构与器件性能的表征。实验结果表明, In组分减小的阶梯状量子阱样品相对于传统量子阱结构,其在电致发光(EL)谱中蓝移现象几乎消失;同时在注入电流为140 mA时,其发光功率以及外量子效率分别提高3.8%和5.1%。此外,Silvaco Atlas软件的仿真结果显示了该样品的量子阱中具有更高的空穴浓度与辐射复合效率。 展开更多
关键词 GaN 发光二极管(LED) 多量子阱(MQW) 光学特性 Silvaco仿真
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LP-MOVPE生长的低阈值1.3μm InGaAsP/InP压、张应变交替MQW激光器特性 被引量:1
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作者 王志杰 陈博 +6 位作者 王圩 张济志 朱洪亮 周帆 王玉田 金才政 马朝华 《光子学报》 EI CAS CSCD 1997年第5期418-421,共4页
本文国内首次报道了LP-MOVPE法生长高质量的压、张应变交替InGaAsP多量子阱结构的研制过程及其材料的高精度X-ray双晶摇摆衍射曲线和荧光光谱特性表征.在此材料基础之上制作的宽接触激光器阈值电流密度小于300A/cm2(腔长800μm)... 本文国内首次报道了LP-MOVPE法生长高质量的压、张应变交替InGaAsP多量子阱结构的研制过程及其材料的高精度X-ray双晶摇摆衍射曲线和荧光光谱特性表征.在此材料基础之上制作的宽接触激光器阈值电流密度小于300A/cm2(腔长800μm),平面掩埋条形结构激光器平面掩埋异质结(PBH)条形结构多量子阱激光器阈值电流13~15mA.经过双腔面镀增透射膜后,其TE模与TM模自发发射谱光强差为3dBm,呈现偏振补偿特性. 展开更多
关键词 低阈值 激光器 MOCVD 铟镓砷 MQW
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