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NEW ROD-SHAPED ULTRASONIC MICROMOTOR AND ITS DRIVING PRINCIPLE 被引量:3
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作者 朱华 董迎晖 +1 位作者 马相林 赵淳生 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2006年第1期15-19,共5页
A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshape... A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency (72 kHz) of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique. 展开更多
关键词 ultrasonic motor micro electro mechanical system micromotor ACTUATOR
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Dye-Enhanced Self-Electrophoretic Propulsion of Light-Driven TiO_2–Au Janus Micromotors 被引量:6
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作者 Yefei Wu Renfeng Dong +1 位作者 Qilu Zhang Biye Ren 《Nano-Micro Letters》 SCIE EI CAS 2017年第3期60-71,共12页
Light-driven synthetic micro-/nanomotors have attracted considerable attention in recent years due to their unique performances and potential applications. We herein demonstrate the dye-enhanced self-electrophoretic p... Light-driven synthetic micro-/nanomotors have attracted considerable attention in recent years due to their unique performances and potential applications. We herein demonstrate the dye-enhanced self-electrophoretic propulsion of light-driven Ti O_2–Au Janus micromotors in aqueous dye solutions. Compared to the velocities of these micromotors in pure water, 1.7, 1.5, and 1.4 times accelerated motions were observed for them in aqueous solutions of methyl blue(10-5g L^(-1)), cresol red(10^(-4)g L^(-1)),and methyl orange(10^(-4)g L^(-1)), respectively. We determined that the micromotor speed changes depending on thetype of dyes, due to variations in their photodegradation rates. In addition, following the deposition of a paramagnetic Ni layer between the Au and Ti O_2 layers, the micromotor can be precisely navigated under an external magnetic field. Such magnetic micromotors not only facilitate the recycling of micromotors, but also allow reusability in the context of dye detection and degradation.In general, such photocatalytic micro-/nanomotors provide considerable potential for the rapid detection and ‘‘on-thefly'' degradation of dye pollutants in aqueous environments. 展开更多
关键词 TiO2–Au Janus micromotor Selfelectrophoresis Light-driven Motion control Dye pollution Environmental remediation
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Dual-Fuel-Driven Bactericidal Micromotor 被引量:3
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作者 Ya Ge Mei Liu +3 位作者 Limei Liu Yunyu Sun Hui Zhang Bin Dong 《Nano-Micro Letters》 SCIE EI CAS 2016年第2期157-164,共8页
In this paper, we report fabrication of the bimetallic Janus microsphere, a magnesium microsphere with a silver surface coating, through thermal evaporation technique. Because of the Janus structure, this micromotor c... In this paper, we report fabrication of the bimetallic Janus microsphere, a magnesium microsphere with a silver surface coating, through thermal evaporation technique. Because of the Janus structure, this micromotor can be propelled in two different directions by the surface silver or magnesium ‘engine' and hydrogen peroxide or water fuel. In addition, due to the bactericidal property of silver, this autonomous micromotor is capable of killing bacteria in solution. As compared to the static one, the micromotor is able to kill the bacteria at a much faster rate(about nine times of that of the static one),demonstrating the superiority of the motion one. We thus believe that the micromotor shown in the current study is potentially attractive for the environmental hygiene applications. 展开更多
关键词 micromotor Self-propelling Bacterial KILLING JANUS E.COLI
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Recent progress on the design and fabrication of micromotors and their biomedical applications 被引量:2
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作者 Wensen Jiangl Liang Ma Xiaobin Xul 《Bio-Design and Manufacturing》 SCIE 2018年第4期225-236,共12页
The advancement in the micro-/nanofabrication techniques has greatly facilitated the development of micromotors.A variety of micromotors have been invented with powerful functions,which have attracted a broad range of... The advancement in the micro-/nanofabrication techniques has greatly facilitated the development of micromotors.A variety of micromotors have been invented with powerful functions,which have attracted a broad range of interests from chemistry, physics,mechanics,biology and medicine.In this paper,we reviewed recent progress in micromotors and highlighted representative works.The mechanisms of micromotors by internal and external energy sources were described.We described general fabrication strategies of the popular micromotors (wire,tubular,helical and Janus)including bottom-up and top-down approaches.In the application section,we primarily focused on the biological applications,such as biological cargo delivery, biosensing and surgery.At last,we discussed the current challenges and provided future prospects. 展开更多
关键词 micromotor NANOMOTOR Electric TWEEZERS DRUG delivery Nanorobot MICROMACHINE
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Micromotor-derived composites for biomedicine delivery and other related purposes 被引量:1
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作者 Xiang Xu Zhiyi Huo +3 位作者 Jiaming Guo Hao Liu Xiaole Qi Zhenghong Wu 《Bio-Design and Manufacturing》 SCIE CSCD 2020年第2期133-147,共15页
Biocompatible designed micromotor has attracted more and more concerns in the field of biomedicine due to their self-propulsion and delivery abilities.Such micromotors,mostly consisting of alkali earth metals,hydrogel... Biocompatible designed micromotor has attracted more and more concerns in the field of biomedicine due to their self-propulsion and delivery abilities.Such micromotors,mostly consisting of alkali earth metals,hydrogels,or other motile biomaterials,can effectively transform chemical energy into mechanical or kinetic energy to achieve the expected delivery of cargos to the sites of action.Except for conveying power,the modifiable surface and inner cavity of micromotors guarantee that their potential as versatile delivery systems for therapeutic agents.Here,this review generalizes the propelling mechanisms,composites,and shapes of micromotors.Besides,the application of micromotor-derived composites for biomedicine delivery and other versatile purposes are also discussed. 展开更多
关键词 micromotor PROPULSION TARGETED delivery RETENTION PENETRATION
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Optimization of the Drag Forces of Shell Janus Micromotor:A Study Based on Hydrodynamical Analysis and Numerical Simulation 被引量:1
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作者 Qiang Wang Zhen Wang 《Computer Modeling in Engineering & Sciences》 SCIE EI 2022年第1期443-462,共20页
Micromotors are widely used in cell operation,drug delivery and environmental decontamination due to their small size,low energy consumption and large propelling power.Compared to traditional Janus micromotor,the shel... Micromotors are widely used in cell operation,drug delivery and environmental decontamination due to their small size,low energy consumption and large propelling power.Compared to traditional Janus micromotor,the shell Janusmicromotor has better motion performance.However,the structural optimization of itsmotion performance is still unclear.The main factor restricting the motion performance of shell Janus micromotors is the drag forces.In the current work,theoretical analysis and numerical simulation were applied to analyze the drag forces of shell Janus micromotors.This study aims to design the optimum structure of shell Janus micromotors with minimum drag forces and obtain the magnitude of drag forces considering both the internal and external fluids of the shell Janus micromotors.Moreover,the influence of the motor geometry and Reynolds number on the drag coefficient was analyzed using numerical simulations.The results provide guidance for the optimum flow velocity,opening diameter and shell thickness to achieve minimum drag force. 展开更多
关键词 Shell janus micromotor drag force dimensionless numbers
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KEY TECHNOLOGY FOR PRACTICAL 1-mm-DIAMETER ELECTROMAGNETIC MICROMOTOR
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作者 杨红红 张琛 《Journal of Shanghai Jiaotong university(Science)》 EI 2000年第2期94-98,共5页
A 1 mm diameter electromagnetic micromotor was developed as a crux component for MEMS application. The motor has a novel layer structure with a 1 mm diameter rotor in the middle of two stators with the same size. The ... A 1 mm diameter electromagnetic micromotor was developed as a crux component for MEMS application. The motor has a novel layer structure with a 1 mm diameter rotor in the middle of two stators with the same size. The stator uses multiple layers, slotless and concentrated planar winding. The rotor adopts multipolar permanent magnet with high performance. Ruby bearing is used to prolong operating lifetime of the micromotor. The stator winding, consisting of 6 layer coils, 42 turns, and 9 pairs, is fabricated with microprocessing techniques. The micromotor has long operation lifetime, its running speed is stable and controllable, and rotational direction can be easily reversed. Maximum achieved rotational speed of 18000 r/min with maximum output torque of 1.5 μ N·m has been obtained. This paper presented the key technology for developing this kind of micromotor including the design of structure, magnetic circuit, heat problem, friction improvement, microprocessing techniques, and so on. 展开更多
关键词 MM DIAMETER ELECTROMAGNETIC micromotor layer structure magnetic CIRCUIT heat resistance microprocessing technique Document code:A
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Modeling and Analysis of a Micromotor with an Electrostatically Levitated Rotor
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作者 HAN Fengtian WU Qiuping ZHANG Rong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2009年第1期1-8,共8页
The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor a... The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor and further optimize the device geometry.The analytical torque model is obtained based on the principle of a planar variable-capacitance electrostatic motor while the viscous damping caused by air film between the stator and rotor is derived using laminar Couette flow model.Simulation results of the closed-loop drive motor,based on the developed dynamic model after eliminating mechanical friction torque via electrostatic suspension,are presented.The effects of the high-voltage drive,required for rotation of the rotor,on overload capacity and suspension stiffness of the electrostatic bearing system are also analytically evaluated in an effort to determine allowable drive voltage and attainable rotor speed in operation.The analytical results show that maximum speed of the micromotor is limited mainly by viscous drag torque and stiffness of the bearing system.Therefore,it is expected to operate the device in vacuum so as to increase the rotor speed significantly,especially for those electrostatically levitated micromotors to be used as an angular rate micro-gyroscope. 展开更多
关键词 electrostatic levitation electrostatic micromotor variable-capacitance motor micro-gyroscope
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A MEMS traveling-wave micromotor-based miniature gyrocompass
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作者 Jinxuan Xie Tong Zhou +10 位作者 Yu Chen Yi Zhou Bo Jiang Jing Zhang Zhenjun Wang Wentao Li Han Sun Xuyang Zhu Xiaoshi Li Tianyu Yang Yan Su 《Microsystems & Nanoengineering》 2025年第1期335-346,共12页
Traditional gyrocompasses,while capable of providing autonomous directional guidance and path correction,face limitations in widespread applications due to their large size,making them unsuitable for compact devices.M... Traditional gyrocompasses,while capable of providing autonomous directional guidance and path correction,face limitations in widespread applications due to their large size,making them unsuitable for compact devices.Microelectromechanical system(MEMS)gyrocompasses offer a promising alternative for miniaturization.However,current MEMS gyrocompasses require the integration of motor rotation modulation technology to achieve high-precision north-finding,whereas conventional motors in previous research introduce large volume and residual magnetism,thus undermining their size advantage.Here,we innovatively propose a miniature MEMS gyrocompass based on a MEMS traveling-wave micromotor,featuring the first integration of a chip-scale rotational actuator and combined with a precise multi-position braking control system,enabling high accuracy and fast north-finding.The proposed gyrocompass made significant advancements,reducing its size to 50×42.5×24.5 mm^(3)and achieving an azimuth accuracy of 0.199°within 2 min,which is half the volume of the smallest existing similar devices while offering twice the performance.These improvements indicate that the proposed gyrocompass is suitable for applications in indoor industrial robotics,autonomous driving,and other related fields requiring precise directional guidance. 展开更多
关键词 traveling wave micromotor GYROCOMPASS motor rotation modulation technology MINIATURIZATION north finding conventional motors path correctionface autonomous directional guidance
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Silicon-based Tubular Micromotor with SERS Traceability and Magnetic–Thermal Dual Responsiveness
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作者 Sijie Zhang Gaoqiang Yin +6 位作者 Zuyao Wang Lei Wu Kuo Yang Ruohu Zhang Shenfei Zong Zhuyuan Wang Yiping Cui 《Nano Biomedicine & Engineering》 2025年第2期263-276,共14页
The synergistic strategy based on magnetic hyperthermia and free radical therapy demonstrates tremendous potential in inducing effective tumor cell death. Therefore, the development of a novel multifunctional micromot... The synergistic strategy based on magnetic hyperthermia and free radical therapy demonstrates tremendous potential in inducing effective tumor cell death. Therefore, the development of a novel multifunctional micromotor with magnetic-thermal dual responsiveness is of paramount importance.Here, a novel silicon-based tubular micromotor(SiMMs) is presented, which is fabricated via template-assisted atomic layer deposition(ALD). The SiMMs is specially designed to load 2,2'-azobis(2-midinopropane) dihydrochloride(AAPH), which is an anticancer drug. Firstly, the micromotors were prepared using a polycarbonate(PC) film as a template to grow silicon microtubes via ALD. Then, a multi-step functionalization process was carried out, the silicon microtubes were modified with Fe_(3)O_(4) magnetic nanoparticles and gold core–silver shell nanoparticles to enable magnetic controllability and surface-enhanced Raman scattering(SERS) traceability. Subsequently,aptamers and AAPH were further modified onto the microtubes through a coupling method. Finally,characterizations of SiMMs were conducted, including motion behaviors, fluorescence and SERS signals. Magnetic–hyperthermia synergistic therapy of cancer cells using SiMMs were also investigated. Results indicated that SiMMs exhibit excellent magnetic controllability, targeted drug delivery efficiency, real-time monitoring capabilities, and outstanding cytotoxicity towards cancer cells under an alternating magnetic field(AMF). The novel SiMMs-based drug carrier and synergistic treatment strategy provide a new platform for cancer therapy. 展开更多
关键词 micromotor magnetic field control surface-enhanced Raman scattering(SERS)tracking carbon-centered radical synergistic therapy
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Motion-based pH sensing using spindle-like micromotors 被引量:5
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作者 Limei Liu Yonggang Dong +4 位作者 Yunyu Sun Mei Liu Yajun Su Hui Zhang Bin Dong 《Nano Research》 SCIE EI CAS CSCD 2016年第5期1310-1318,共9页
In this study, we report a spindle-like micromotor. This device, which is fabricated using a one-step electrospinning method, consists of biodegradable polycaprolactone and an anionic surfactant. Intriguingly, not onl... In this study, we report a spindle-like micromotor. This device, which is fabricated using a one-step electrospinning method, consists of biodegradable polycaprolactone and an anionic surfactant. Intriguingly, not only can the resulting micromotor move autonomously on the surface of water for a long period of time (-40 min) due to the Marangoni effect, but it also exhibits a pH sensing behavior due to variations in the surface tension caused by the release of surfactant under different pH conditions. More interestingly, we reveal that the motion-based pH sensing property is size-dependent, with smaller structures exhibiting a higher sensitivity. In addition, since polycaprolactone is a biode- gradable material, the micromotor described in this study can be easily degraded in solution. Hence, features such as one-step fabrication, motion readout, and biodegradability render this micromotor an attractive candidate for sensing algplications. 展开更多
关键词 micromotor autonomous movement self-propelling motion-based sensing
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Chinese herb pollen derived micromotors as active oral drug delivery system for gastric ulcer treatment 被引量:1
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作者 Lijun Cai Cheng Zhao +5 位作者 Xinyue Cao Minhui Lu Ning Li Yuan Luo Yongan Wang Yuanjin Zhao 《Bioactive Materials》 SCIE CSCD 2024年第2期28-36,共9页
Considerable efforts have been devoted to treating gastric ulcers.Attempts in this field tend to develop drug delivery systems with prolonged gastric retention time.Herein,we develop novel Chinese herb pollen-derived ... Considerable efforts have been devoted to treating gastric ulcers.Attempts in this field tend to develop drug delivery systems with prolonged gastric retention time.Herein,we develop novel Chinese herb pollen-derived micromotors as active oral drug delivery system for treating gastric ulcer.Such Chinese herb pollen-derived micromotors are simply produced by asymmetrically sputtering Mg layer onto one side of pollen grains.When exposed to gastric juice,the Mg layer can react with the hydrogen ions,resulting in intensive generation of hydrogen bubbles to propel the micromotors.Benefiting from the autonomous motion and unique spiny structure,our micromotors can move actively in the stomach and adhere to the surrounding tissues.Besides,their special architecture endows the micromotors with salient capacity of drug loading and releasing.Based on these features,we have demonstrated that our Chinese herb pollen-derived micromotors could effective deliver berberine hydrochloride and show desirable curative effect on the gastric ulcer model of mice.Therefore,these Chinese herb pollen-derived micromotors are anticipated to serve as promising oral drug delivery carriers for clinical applications. 展开更多
关键词 micromotor Chinese herb POLLEN Drug delivery Gastric ulcer Wound healing
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基于离散矢量模型的微电机转子二次去重动平衡研究
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作者 姜东 薛子旻 +3 位作者 鲁镇荣 李梦瑄 陈伟宇 杭晓晨 《振动工程学报》 北大核心 2025年第7期1486-1495,共10页
针对微电机转子初始不平衡量较大时动平衡效果不佳的问题,提出了一种基于离散矢量模型的切削去重不平衡校正方法。根据铣刀和转子的参数建立离散矢量去重模型,基于边缘曲线离散点的积分计算得到了二次去重情况下切削等效质量与切削深度... 针对微电机转子初始不平衡量较大时动平衡效果不佳的问题,提出了一种基于离散矢量模型的切削去重不平衡校正方法。根据铣刀和转子的参数建立离散矢量去重模型,基于边缘曲线离散点的积分计算得到了二次去重情况下切削等效质量与切削深度的对应关系,通过与三维模型仿真数据比较验证了模型的精度。采用5个微电机转子进行试验验证,在转子初始不平衡量高于100 mg的情况下,能实现90%以上的总去重率,并将剩余不平衡等效质量控制在10 mg以下,被测转子均符合G1.0精度等级。表明该方法能够在初始不平衡量较大时提高微电机转子动平衡精度。 展开更多
关键词 转子动平衡 微电机 切削去重不平衡校正方法 离散矢量模型 初始不平衡量
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Advanced manufacturing techniques and applications of micro-/nanoscale helices
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作者 Yanchen Ye Hao Wu +4 位作者 Rongye Wu Can Xu Yue Dong Li Zhang Bing Li 《International Journal of Extreme Manufacturing》 2025年第5期128-167,共40页
Inspired by the ubiquitous helical structures in nature,research on artificial helices has attracted increasing attention.As a unique and complex three-dimensional(3D)geometry in the microscopic world,the micro-/nano ... Inspired by the ubiquitous helical structures in nature,research on artificial helices has attracted increasing attention.As a unique and complex three-dimensional(3D)geometry in the microscopic world,the micro-/nano helix has significant advantages in wide applications due to its distinctive properties at the micro-scale.Micro-/nanotechnology is advancing rapidly.The geometric complexity of helical structure poses technical challenges for the manufacturing at the micro-/nanoscale,requiring some emerging manufacturing techniques.In this review,we systematically classify and summarize existing manufacturing methods for micro/nano helical structures and their underlying mechanisms.Based on the unique physical properties of helical structures at the microscale,their latest applications are analyzed across different fields.Finally,we conclude the challenges and future research directions of micro-/nano helices in manufacturing methods and applications. 展开更多
关键词 micro-nano helices manufacturing method helical micromotor micro-nano coils helical fiber
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铂-过渡金属氧化物基双面神微马达的制备及运动性能
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作者 张铭辉 魏敬武 +1 位作者 许蕾蕾 官建国 《济南大学学报(自然科学版)》 北大核心 2025年第1期135-142,共8页
为了改善化学驱动微马达的运动性能,以铂基双面神微马达为基础,通过引入过渡金属氧化物(氧化铜、氧化钨)与铂形成异质结,构建铂-过渡金属氧化物-聚苯乙烯双面神微马达,表征微马达的结构和元素价态,并对其在过氧化氢含量不同时的运动性... 为了改善化学驱动微马达的运动性能,以铂基双面神微马达为基础,通过引入过渡金属氧化物(氧化铜、氧化钨)与铂形成异质结,构建铂-过渡金属氧化物-聚苯乙烯双面神微马达,表征微马达的结构和元素价态,并对其在过氧化氢含量不同时的运动性能进行研究。结果表明,当过氧化氢的质量分数为15%时,铂-氧化钨-聚苯乙烯双面神微马达的平均速度达到43μm/s,运动性能显著改善;铂基双面神微马达的运动速度与形成异质结的铂与过渡金属氧化物之间的功函数差导致的电子迁移有关,并与功函数差值成正比。 展开更多
关键词 微马达 化学驱动 异质结 过渡氧化物
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一种提高微电机稳定度的算法研究
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作者 杨恒敏 《无线互联科技》 2025年第5期53-57,共5页
微电机作为精密设备的核心执行器件,被广泛应用于各种精准控制设备,其控制精度和稳定度直接影响系统的整体性能。然而,现有驱动方法在复杂工况下的控制精度仍存在控制精度不足、响应速度较慢以及抗干扰能力弱等问题。为此,文章通过在ST... 微电机作为精密设备的核心执行器件,被广泛应用于各种精准控制设备,其控制精度和稳定度直接影响系统的整体性能。然而,现有驱动方法在复杂工况下的控制精度仍存在控制精度不足、响应速度较慢以及抗干扰能力弱等问题。为此,文章通过在STM32微控制器中搭建实时操作系统(Real Time Operate System, RTOS)并利用磁场定向控制(Field-Oriented Control, FOC)算法对电机进行驱动。实验结果表明,该算法能够实现对微电机的精准控制,具有很好的反馈效果,为实现微电机高精度控制提供了新的思路。 展开更多
关键词 微电机 FOC RTOS STM32
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Magnetic-Driven Tubular Micromotors with Bases for Precise Positioning and Cargo Carrying
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作者 Peiqi Chen Ying Jia +3 位作者 Shutong Wang Shaobo Ding Dekai Zhou Yiwen Feng 《Nanomanufacturing and Metrology》 2025年第2期68-74,共7页
Micro/nanomotors present considerable potential in various fields,such as medical treatment,environmental remediation,and cell engineering.However,their restricted lifetime and issues in navigation control hinder thei... Micro/nanomotors present considerable potential in various fields,such as medical treatment,environmental remediation,and cell engineering.However,their restricted lifetime and issues in navigation control hinder their applications in cases requiring precise positioning without chemical fuels.Thus,we propose a tubular micromotor driven by external magnetic fields,enabling it to swim in water with accurate transport capabilities.The presented tubular micromotor incorporates a single-sided base,which increases the contact area to enable cargo delivery in liquid environments.The micromotor exhibits varied movement behaviors by applying different magnetic fields,and frequency modulation allows for control over movement velocity.Template-assisted electrochemical deposition is employed to achieve large-scale fabrication,which enables the construction of Ni–Au tubular micromotors with a single-sided base.In addition,the micromotor can trace a predefined path,which demonstrates its precise positioning ability.The cargo transport capability of the micromotor is further validated using polystyrene globules as cargo.This fuel-free tubular micromotor,which is driven by magnetic fields,provides a promising approach for precise cargo delivery.Its broad feasibility makes it suitable for various biomedical applications. 展开更多
关键词 Tubular micromotor Precise location Magnetically driven Cargo carrying
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电磁型平面微电机及其制作工艺 被引量:23
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作者 郭占社 吴一辉 +1 位作者 宣明 王淑荣 《光学精密工程》 EI CAS CSCD 2003年第2期120-124,共5页
为得到一种尺寸小、输出力矩大、转速高的直流可调速微电机,提出了一种利用微机械加工工艺制作微电机的方法。定子和转子都做成平面结构,定子线圈采用了平面型、无槽式集中绕组;线圈之间采用了三相星形连接方式,采用了微机械LIGA工艺和... 为得到一种尺寸小、输出力矩大、转速高的直流可调速微电机,提出了一种利用微机械加工工艺制作微电机的方法。定子和转子都做成平面结构,定子线圈采用了平面型、无槽式集中绕组;线圈之间采用了三相星形连接方式,采用了微机械LIGA工艺和硅微机械加工工艺;转子采用钕铁硼永磁材料,进行轴向充磁,成辐射状间隔分布。装配时转子分布于定子两侧,不但减小了电机尺寸,还有利于定子的散热。把装配完毕的微电机接通三相半控控制电路对其转速和力矩进行了测试,测试结果表明,电机运转平稳,输出力矩大。 展开更多
关键词 电磁型平面微电机 制作工艺 LIGA工艺 微机械加工工艺
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一种微型柱体超声电机的研究 被引量:35
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作者 朱华 陈超 赵淳生 《中国电机工程学报》 EI CSCD 北大核心 2006年第12期128-133,共6页
对压电陶瓷片的布局方式与力系数之间的关系进行了分析,证明了压电陶瓷片粘贴在金属弹性体一阶弯振的波谷位置时其激振效率是最高的。研制了一种新型定子结构的微型柱体超声电机。该电机直径5mm,长30mm,重量4.2g。当驱动电压峰峰值为20... 对压电陶瓷片的布局方式与力系数之间的关系进行了分析,证明了压电陶瓷片粘贴在金属弹性体一阶弯振的波谷位置时其激振效率是最高的。研制了一种新型定子结构的微型柱体超声电机。该电机直径5mm,长30mm,重量4.2g。当驱动电压峰峰值为200V,驱动频率为53kHz时,电机最大转速为350r/min,堵转力矩为2.5×10?3N?m。因为这种电机结构比较简单紧凑,便于实现进一步的微型化。所以又利用压电陶瓷管为激励元件,研制出直径2mm,长度7mm,重量为0.258g的微型柱体超声电机。在驱动电压峰峰值为60V,驱动频率75kHz时电机的转速为813r/min。文中详细介绍了这2个微型电机的工作原理、结构特点和设计方法。 展开更多
关键词 微型电机 超声电机 微机电系统 优化设计 模态分析
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轴向磁化永磁微电机磁场分析及设计方法研究 被引量:14
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作者 杨杰伟 吴一辉 +2 位作者 贾宏光 张平 王淑荣 《光学精密工程》 EI CAS CSCD 北大核心 2006年第1期83-88,共6页
在轴向磁化永磁电机设计中,为研究尺寸效应对其性能的影响,采用有限元方法对这种双转子电机的磁场进行了仿真计算,得出了轴向磁化永磁电机转子的气隙磁密波形分布。分析了转子外形尺寸、充磁极数、磁体厚度和气隙长度对气隙磁密的影响,... 在轴向磁化永磁电机设计中,为研究尺寸效应对其性能的影响,采用有限元方法对这种双转子电机的磁场进行了仿真计算,得出了轴向磁化永磁电机转子的气隙磁密波形分布。分析了转子外形尺寸、充磁极数、磁体厚度和气隙长度对气隙磁密的影响,即随着气隙长度的增加,充磁极数多的其气隙磁密幅值的减小幅度大于充磁极数少的;随着磁体厚度的增加,气隙磁密为一上升曲线,当磁体厚度达到某一点时,气隙磁密幅值基本为一常数;减小转子直径时,随着磁体厚度的降低,平均半径处气隙磁密幅值的减小幅度越来越不明显,但为不使气隙磁密波形变形严重,永磁转子径向长度需至少大于1.5 mm。磁场分析结果可对该类电机微小型化过程中的设计起指导作用。对计算结果做了理论分析,并将计算结果和实验结果进行了比较,计算值和实测值基本一致。 展开更多
关键词 永磁微电机 轴向磁化 气隙磁密 磁场分析 ND-FE-B
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