Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to...Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, an EMM system for meeting the requirements of the EMM process is established. Second, sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters, feed rate, electrode geometry features and electrolyte composition on machining quality, especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality. Finally, after the preliminary experiments, a complex microstructure with good shape precision and surface quality is successfully obtained.展开更多
The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-d...The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.展开更多
A high friction coefficient and a low wear rate of contacted surfaces are essential elements to friction pairs between the stator and the rotor in ultrasonic motors. It has been shown that surface textures have a sign...A high friction coefficient and a low wear rate of contacted surfaces are essential elements to friction pairs between the stator and the rotor in ultrasonic motors. It has been shown that surface textures have a significant effect on improving the tribological performance of friction pairs.In this paper, microgroove arrays are introduced to the stator surface for improving the tribological performance of friction pairs between the stator and the rotor in ultrasonic motors. Microgrooves were fabricated on a phosphor bronze surface by through-mask electrochemical micromachining（TMEMM）. Parameters, namely, the electrolyte inlet pressure, applied voltage, pulse duty cycle,and frequency, were varied to investigate their influences on the dimensions and morphology of the microgrooves. Results showed that the width and depth of the microgrooves were strongly affected by the applied voltage and frequency, while the morphology of the microgrooves was dependent on the electrolyte inlet pressure and the pulse duty cycle. Compared with a smooth surface, the friction coefficient increased from 0.245 to 0.334 and less abrasion was obtained when a surface was textured with microgrooves of which the width and depth were 185.6 and 57.6 lm,respectively. Microgroove arrays might play an important role in enhancing the performance of ultrasonic motors.展开更多
The radial ultrasonic rolling electrochemical micromachining(RUR-EMM)combined rolling electrochemical micromachining(R-EMM)and ultrasonic vibration was studied in this paper.The fundamental understanding of the machin...The radial ultrasonic rolling electrochemical micromachining(RUR-EMM)combined rolling electrochemical micromachining(R-EMM)and ultrasonic vibration was studied in this paper.The fundamental understanding of the machining process especially the interaction between multiphysics in the interelectrode gap(IEG)was investigated and discussed by the finite element method.The multiphysics coupling model including flow field model,Joule heating model,material dissolution model and vibration model was built.3D multiphysics simulation based on micro dimples process in RUR-EMM and R-EMM was proposed.Simulation results showed that the electrolyte flowed into and out IEG periodically,gas bubbles were easy to squeeze out and the gas void fraction deceased about 16%to 54%,the maximum current density increased by 1.36 times in RUR-EMM than in R-EMM in one vibration period of time.And application of the ultrasonic vibration increased the electrolyte temperature about 1.3–4.4%in IEG.Verification experiments of the micro dimple process denoted better corrosion consistency of array dimples in RUR-EMM,there was no island at the micro dimple bottom which always formed in R-EMM,and an aggregated deviation of less than 8.7%for the micro dimple depth and 4%for the material removal amount between theory and experiment was obtained.展开更多
Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6c...Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.展开更多
A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale sim...A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale simulation method, the parameters for the cohesive zone model were obtained from the stress-displacement curves of the molecular dynamics simulation. The model considers the random properties of the siliconcarbide-particle distribution and the interface of bonding between the silicon carbide particles and the matrix.The machining mechanics was analyzed according to the chip morphology, stress distribution, cutting temperature, and cutting force. The simulation results revealed that the random distribution of nanosized SiCp causes non-uniform interaction between the tool and the reinforcement particles. This deformation mechanics leads to inhomogeneous stress distribution and irregular cutting force variation.展开更多
This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influe...This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.展开更多
Microscale grooves and holes were fabricated in carbon fiber reinforced plastics(CFRPs)using femtosecond pulsed laser irradiation,and the characteristics and mechanisms of laser processing were investigated.The relati...Microscale grooves and holes were fabricated in carbon fiber reinforced plastics(CFRPs)using femtosecond pulsed laser irradiation,and the characteristics and mechanisms of laser processing were investigated.The relationship between laser fluence and ablation depth was established by measuring the cross-sectional profiles of the microgrooves produced at different laser fluences.Furthermore,the effect of the angle between the edge of the micro holes and the carbon fibers was examined by analyzing the edges and wall surfaces of circular and rectangular holes.Experimental results revealed that the laser processing mechanism was strongly dependent on fiber orientation due to significant heat conduction along carbon fibers.The findings of this study contribute to a deeper understanding of the ultrashort pulsed laser processing characteristics and mechanisms for creating small holes in CFRPs and emphasize the possibility of drilling high-precision holes that can be used in the direct bonding of sensors/IC chips to CFRPs.展开更多
The mode-division multiplexing technique combined with a few-mode erbium-doped fiber amplifier(FM-EDFA)demonstrates significant potential for solving the capacity limitation of standard single-mode fiber(SSMF)transmis...The mode-division multiplexing technique combined with a few-mode erbium-doped fiber amplifier(FM-EDFA)demonstrates significant potential for solving the capacity limitation of standard single-mode fiber(SSMF)transmission systems.However,the differential mode gain(DMG)arising in the FM-EDFA fundamentally limits its transmission capacity and length.Herein,an innovative DMG equalization strategy using femtosecond laser micromachining to adjust the refractive index(RI)is presented.Variable mode-dependent attenuations can be achieved according to the DMG profile of the FM-EDFA,enabling DMG equalization.To validate the proposed strategy,DMG equalization of the commonly used FM-EDFA configuration was investigated.Simulation results revealed that by optimizing both the length and RI modulation depth of the femtosecond laser-tailoring area,the maximum DMG(DMGmax)among the 3 linear-polarized(LP)mode-group was mitigated from 10 dB to 1.52 dB,whereas the average DMG(DMGave)over the C-band was reduced from 8.95 dB to 0.78 dB.Finally,a 2-LP mode-group DMG equalizer was experimentally demonstrated,resulting in a reduction of the DMGmax from 2.09 dB to 0.46 dB,and a reduction of DMGave over the C band from 1.64 dB to 0.26 dB,with only a 1.8 dB insertion loss.Moreover,a maximum range of variable DMG equalization was achieved with 5.4 dB,satisfying the requirements of the most commonly used 2-LP mode-group amplification scenarios.展开更多
Perovskite materials have become a popular research topic because of their unique optical and electrical properties,that enable extensive applications in information storage,lasers,anti-counterfeiting,and planar lense...Perovskite materials have become a popular research topic because of their unique optical and electrical properties,that enable extensive applications in information storage,lasers,anti-counterfeiting,and planar lenses.However,the success of the application depends on accomplishing high-precision and high-quality perovskite patterning technology.Numerous methods have been proposed for perovskite production,including,a femtosecond laser with an ultrashort pulse width and ultrahigh peak power with unique advantages such as high precision and efficiency,nonlinearity,and excellent material adaptability in perovskite material processing.Furthermore,femtosecond lasers can induce precipitation of perovskite inside glass/crystals,which markedly enhances the stability of perovskite materials and promotes their application and development in various fields.This review introduces perovskite precipitation and processing via femtosecond lasers.The methods involved and advantages of femtosecond-laser-induced perovskite precipitation and patterning are systematically summarized.The review also provides an outlook for further optimization and improvement of femtosecond laser preparation and processing methods for perovskites,which may offer significant support for future research and applications of perovskite materials.展开更多
Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This pa...Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This paper develops a long-period fiber grating sensor based on periodic microchannels.First,a series of linear structures were etched in the cladding of a single-mode fiber by femtosecond laser microma-chining.Then,the laser-modified region was selectively eroded by selective chemical etching to obtain the periodic microchannel structure.Finally,the channels were filled with polydimethylsiloxane(PDMS)to im-prove the spectral quality.The experimental results show that the sensor has good sensitivity in the measure-ment of various parameters such as temperature,stress,refractive index(RI),and bending.It has a temperat-ure sensitivity of−55.19 pm/℃,a strain sensitivity of−3.19 pm/με,a maximum refractive index sensitivity of 540.28 nm/RIU,and a bending sensitivity of 2.65 dB/m^(-1).All of the measurement parameters show good lin-ear responses.The sensor has strong application prospects in the field of precision measurement and sensing.展开更多
While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,du...While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.展开更多
To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’...To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’along the spiral trajectory,was proposed.From the kinematics analysis,it is found that the machining quality of micro-dimpled structures is highly dependent on the machining trajectory using spiral trajectory tool reciprocating motion.To reveal this causation,simulation modelling and experimental studies were carried out.A simulation model was developed to quantitatively and qualitatively investigate the influence of the trajectory discretization strategies(constant-angle and constant-arc length)and parameters(discrete angle,discrete arc length,and pitch)on surface texture and residual height of micro-dimpled structures.Subsequently,micro-dimpled structures were milled under different trajectory discretization strategies and parameters with spiral trajectory tool reciprocating motion.A comprehensive comparison between the milled results and simulation analysis was made based on geometry accuracy,surface morphology and surface roughness of milled dimples.Meanwhile,the errors and factors affecting the above three aspects were analyzed.The results demonstrate both the feasibility of the established simulation model and the machining capability of this machining way in milling high-quality micro-dimpled structures.Spiral trajectory tool reciprocating motion provides a new machining way for milling micro-dimpled structures and micro-dimpled functional surfaces.And an appropriate machining trajectory can be generated based on the optimized trajectory parameters,thus contributing to the improvement of machining quality and efficiency.展开更多
A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that in...A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that increases the selectivity between silicon dioxide and aluminum. The etching rates of SiO2 and Al as a function of solution temperature are determined. Moreover,the effects of adding glycerol and agitating the etchant are examined and compared with this method. Finally, this method is tested on an actual device, and its efficiency is scrutinized.展开更多
We report on second harmonic generation(SHG) in on-chip high-Q(>105) lithium niobate(Li Nb O3, LN) microresonators fabricated by femtosecond laser micromachining. We examine the efficiency of SHG with either a cont...We report on second harmonic generation(SHG) in on-chip high-Q(>105) lithium niobate(Li Nb O3, LN) microresonators fabricated by femtosecond laser micromachining. We examine the efficiency of SHG with either a continuous-wave(CW) or an ultrashort pulsed pump laser. The normalized conversion efficiencies of SHG obtained with the CW and pulsed pump lasers are measured to be 1.35×10?5 m W?1 and 2.30×10?6 m W?1, respectively.展开更多
The importance of integrated quantum photonics in the telecom band is based on the possibility of interfacing with the optical network infrastructure that was developed for classical communications.In this framework,f...The importance of integrated quantum photonics in the telecom band is based on the possibility of interfacing with the optical network infrastructure that was developed for classical communications.In this framework,femtosecond laser-written integrated photonic circuits,which have already been assessed for use in quantum information experiments in the 800-nm wavelength range,have great potential.In fact,these circuits,being written in glass,can be perfectly mode-matched at telecom wavelength to the in/out coupling fibers,which is a key requirement for a low-loss processing node in future quantum optical networks.In addition,for several applications,quantum photonic devices must be dynamically reconfigurable.Here,we experimentally demonstrate the high performance of femtosecond laser-written photonic circuits for use in quantum experiments in the telecom band,and we demonstrate the use of thermal shifters,which were also fabricated using the same femtosecond laser,to accurately tune such circuits.State-of-the-art manipulation of single-and two-photon states is demonstrated,with fringe visibilities greater than 95%.The results of this work open the way to the realization of reconfigurable quantum photonic circuits based on this technological platform.展开更多
Besides the physical and chemical machining methods, a biological machining method has been presented. The experimental results show that machining of pure iron, pure copper and constantan by a special bacterium, Thio...Besides the physical and chemical machining methods, a biological machining method has been presented. The experimental results show that machining of pure iron, pure copper and constantan by a special bacterium, Thiobacillus ferrooxidans , was possible. A micro gear and grooves on pure copper piece were bio machined. The depth of the groove so bio machined was directly dependent on the machining time. The biomachining mechanism has been analyzed from the electron transport chain (ETC) in the T. ferrooxidans membrane, and its developing direction has been also discussed.展开更多
Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which m...Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 gm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.展开更多
Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this ...Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.展开更多
By introducing the mechanical motion into the confined etchant layer technique(CELT), we have developed a promising ultraprecision machining method, termed as electrochemical mechanical micromachining(ECMM), for produ...By introducing the mechanical motion into the confined etchant layer technique(CELT), we have developed a promising ultraprecision machining method, termed as electrochemical mechanical micromachining(ECMM), for producing both regular and irregular three dimensional(3 D) microstructures. It was found that there was a dramatic coupling effect between the confined etching process and the slow-rate mechanical motion because of the concentration distribution of electrogenerated etchant caused by the latter. In this article, the coupling effect was investigated systemically by comparing the etchant diffusion, etching depths and profiles in the non-confined and confined machining modes. A two-dimensional(2 D) numerical simulation model was proposed to analyze the diffusion variations during the ECMM process, which is well verified by the machining experiments. The results showed that, in the confined machining mode, both the machining resolution and the perpendicularity tolerance of side faces were improved effectively. Furthermore, the theoretical modeling and numerical simulations were proved valuable to optimize the technical parameters of the ECMM process.展开更多
基金National Natural Science Foundation of China (50635040)National High-tech Research and Development Program (2009AA04Z302)Jiangsu Provincial Natural Science Foundation (BK2008043)
文摘Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, an EMM system for meeting the requirements of the EMM process is established. Second, sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters, feed rate, electrode geometry features and electrolyte composition on machining quality, especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality. Finally, after the preliminary experiments, a complex microstructure with good shape precision and surface quality is successfully obtained.
基金supported by the Joint Funds of the National Natural Science Foundation of China and Guangdong Province(No.U1134003)
文摘The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.
基金supported by the National Basic Research Program of China (973 Program,No.2015CB057502)the Fundamental Research Funds for the Central Universities (No.NZ2016106)
文摘A high friction coefficient and a low wear rate of contacted surfaces are essential elements to friction pairs between the stator and the rotor in ultrasonic motors. It has been shown that surface textures have a significant effect on improving the tribological performance of friction pairs.In this paper, microgroove arrays are introduced to the stator surface for improving the tribological performance of friction pairs between the stator and the rotor in ultrasonic motors. Microgrooves were fabricated on a phosphor bronze surface by through-mask electrochemical micromachining（TMEMM）. Parameters, namely, the electrolyte inlet pressure, applied voltage, pulse duty cycle,and frequency, were varied to investigate their influences on the dimensions and morphology of the microgrooves. Results showed that the width and depth of the microgrooves were strongly affected by the applied voltage and frequency, while the morphology of the microgrooves was dependent on the electrolyte inlet pressure and the pulse duty cycle. Compared with a smooth surface, the friction coefficient increased from 0.245 to 0.334 and less abrasion was obtained when a surface was textured with microgrooves of which the width and depth were 185.6 and 57.6 lm,respectively. Microgroove arrays might play an important role in enhancing the performance of ultrasonic motors.
基金financial support of the projects from the National Natural Science Foundation of China(Nos.51975532 and 51475428)the Zhejiang Provincial Natural Science Foundation(No.LY19E050007)。
文摘The radial ultrasonic rolling electrochemical micromachining(RUR-EMM)combined rolling electrochemical micromachining(R-EMM)and ultrasonic vibration was studied in this paper.The fundamental understanding of the machining process especially the interaction between multiphysics in the interelectrode gap(IEG)was investigated and discussed by the finite element method.The multiphysics coupling model including flow field model,Joule heating model,material dissolution model and vibration model was built.3D multiphysics simulation based on micro dimples process in RUR-EMM and R-EMM was proposed.Simulation results showed that the electrolyte flowed into and out IEG periodically,gas bubbles were easy to squeeze out and the gas void fraction deceased about 16%to 54%,the maximum current density increased by 1.36 times in RUR-EMM than in R-EMM in one vibration period of time.And application of the ultrasonic vibration increased the electrolyte temperature about 1.3–4.4%in IEG.Verification experiments of the micro dimple process denoted better corrosion consistency of array dimples in RUR-EMM,there was no island at the micro dimple bottom which always formed in R-EMM,and an aggregated deviation of less than 8.7%for the micro dimple depth and 4%for the material removal amount between theory and experiment was obtained.
基金supported by the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIP)(No.2015R1A2A1A15054116)
文摘Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.
基金supported by the National Science Foundation of China for Young Scientists (Grant No.51505331)
文摘A finite element method based on the cohesive zone model was used to study the micromachining process of nanosized silicon-carbide-particle(SiCp) reinforced aluminum matrix composites. As a hierarchical multiscale simulation method, the parameters for the cohesive zone model were obtained from the stress-displacement curves of the molecular dynamics simulation. The model considers the random properties of the siliconcarbide-particle distribution and the interface of bonding between the silicon carbide particles and the matrix.The machining mechanics was analyzed according to the chip morphology, stress distribution, cutting temperature, and cutting force. The simulation results revealed that the random distribution of nanosized SiCp causes non-uniform interaction between the tool and the reinforcement particles. This deformation mechanics leads to inhomogeneous stress distribution and irregular cutting force variation.
基金National Natural Science Foundation of China(Grant Nos.52035004,51911530206,51905047)Heilongjiang Provincial Natural Science Foundation of China(Grant No.YQ2020E015)+1 种基金Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(Grant No.SKLRS202001C)Young Elite Scientist Sponsorship Program by CAST(Grant No.YESS20200155).
文摘This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures.Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures.The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations.For the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation.In addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μm.Finally,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe molecule.The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.
文摘Microscale grooves and holes were fabricated in carbon fiber reinforced plastics(CFRPs)using femtosecond pulsed laser irradiation,and the characteristics and mechanisms of laser processing were investigated.The relationship between laser fluence and ablation depth was established by measuring the cross-sectional profiles of the microgrooves produced at different laser fluences.Furthermore,the effect of the angle between the edge of the micro holes and the carbon fibers was examined by analyzing the edges and wall surfaces of circular and rectangular holes.Experimental results revealed that the laser processing mechanism was strongly dependent on fiber orientation due to significant heat conduction along carbon fibers.The findings of this study contribute to a deeper understanding of the ultrashort pulsed laser processing characteristics and mechanisms for creating small holes in CFRPs and emphasize the possibility of drilling high-precision holes that can be used in the direct bonding of sensors/IC chips to CFRPs.
基金supported by the National Natural Science Foundation of China(62305071)China Postdoctoral Science Foundation(2023M740747)Guangdong Introducing Innovative and Entrepreneurial Teams of“The Pearl River Talent Recruitment Program”(2021ZT09X044).
文摘The mode-division multiplexing technique combined with a few-mode erbium-doped fiber amplifier(FM-EDFA)demonstrates significant potential for solving the capacity limitation of standard single-mode fiber(SSMF)transmission systems.However,the differential mode gain(DMG)arising in the FM-EDFA fundamentally limits its transmission capacity and length.Herein,an innovative DMG equalization strategy using femtosecond laser micromachining to adjust the refractive index(RI)is presented.Variable mode-dependent attenuations can be achieved according to the DMG profile of the FM-EDFA,enabling DMG equalization.To validate the proposed strategy,DMG equalization of the commonly used FM-EDFA configuration was investigated.Simulation results revealed that by optimizing both the length and RI modulation depth of the femtosecond laser-tailoring area,the maximum DMG(DMGmax)among the 3 linear-polarized(LP)mode-group was mitigated from 10 dB to 1.52 dB,whereas the average DMG(DMGave)over the C-band was reduced from 8.95 dB to 0.78 dB.Finally,a 2-LP mode-group DMG equalizer was experimentally demonstrated,resulting in a reduction of the DMGmax from 2.09 dB to 0.46 dB,and a reduction of DMGave over the C band from 1.64 dB to 0.26 dB,with only a 1.8 dB insertion loss.Moreover,a maximum range of variable DMG equalization was achieved with 5.4 dB,satisfying the requirements of the most commonly used 2-LP mode-group amplification scenarios.
基金supported by the Guangdong Basic and Applied Basic Research Foundation(2022A1515011951,2023A1515012977,2024A1515010109)the National Natural Science Foundation of China(62375056)the Science and Technology Program of Guangzhou(202201010182).
文摘Perovskite materials have become a popular research topic because of their unique optical and electrical properties,that enable extensive applications in information storage,lasers,anti-counterfeiting,and planar lenses.However,the success of the application depends on accomplishing high-precision and high-quality perovskite patterning technology.Numerous methods have been proposed for perovskite production,including,a femtosecond laser with an ultrashort pulse width and ultrahigh peak power with unique advantages such as high precision and efficiency,nonlinearity,and excellent material adaptability in perovskite material processing.Furthermore,femtosecond lasers can induce precipitation of perovskite inside glass/crystals,which markedly enhances the stability of perovskite materials and promotes their application and development in various fields.This review introduces perovskite precipitation and processing via femtosecond lasers.The methods involved and advantages of femtosecond-laser-induced perovskite precipitation and patterning are systematically summarized.The review also provides an outlook for further optimization and improvement of femtosecond laser preparation and processing methods for perovskites,which may offer significant support for future research and applications of perovskite materials.
文摘Long-period fiber gratings have the advantages of small size,corrosion resistance,anti-electro-magnetic interference,and high sensitivity,making them widely used in biomedicine,the power industry,and aerospace.This paper develops a long-period fiber grating sensor based on periodic microchannels.First,a series of linear structures were etched in the cladding of a single-mode fiber by femtosecond laser microma-chining.Then,the laser-modified region was selectively eroded by selective chemical etching to obtain the periodic microchannel structure.Finally,the channels were filled with polydimethylsiloxane(PDMS)to im-prove the spectral quality.The experimental results show that the sensor has good sensitivity in the measure-ment of various parameters such as temperature,stress,refractive index(RI),and bending.It has a temperat-ure sensitivity of−55.19 pm/℃,a strain sensitivity of−3.19 pm/με,a maximum refractive index sensitivity of 540.28 nm/RIU,and a bending sensitivity of 2.65 dB/m^(-1).All of the measurement parameters show good lin-ear responses.The sensor has strong application prospects in the field of precision measurement and sensing.
基金the support by the Harbin Manufacturing Science and Technology Innovation Talent Project(No.2023CXRCGD035)the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment and Technology in Huazhong University of Science and Technology,China(No.IMETKF2023012).
文摘While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.
基金co-supported the National Natural Science Foundation of China(No.52235010)the Heilongjiang Postdoctoral Fund(No.LBH-Z22136)the New Era Longjiang Excellent Master and Doctoral Dissertation Fund(No.LJYXL2022-057).
文摘To mill fine and well-defined micro-dimpled structures,a machining manner of spiral trajectory tool reciprocating motion,where the tool repeats the process of‘feed milling–retract–cutting feed–feed milling again’along the spiral trajectory,was proposed.From the kinematics analysis,it is found that the machining quality of micro-dimpled structures is highly dependent on the machining trajectory using spiral trajectory tool reciprocating motion.To reveal this causation,simulation modelling and experimental studies were carried out.A simulation model was developed to quantitatively and qualitatively investigate the influence of the trajectory discretization strategies(constant-angle and constant-arc length)and parameters(discrete angle,discrete arc length,and pitch)on surface texture and residual height of micro-dimpled structures.Subsequently,micro-dimpled structures were milled under different trajectory discretization strategies and parameters with spiral trajectory tool reciprocating motion.A comprehensive comparison between the milled results and simulation analysis was made based on geometry accuracy,surface morphology and surface roughness of milled dimples.Meanwhile,the errors and factors affecting the above three aspects were analyzed.The results demonstrate both the feasibility of the established simulation model and the machining capability of this machining way in milling high-quality micro-dimpled structures.Spiral trajectory tool reciprocating motion provides a new machining way for milling micro-dimpled structures and micro-dimpled functional surfaces.And an appropriate machining trajectory can be generated based on the optimized trajectory parameters,thus contributing to the improvement of machining quality and efficiency.
基金the National Natural Science Foundation of China(No.50575001)~~
文摘A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that increases the selectivity between silicon dioxide and aluminum. The etching rates of SiO2 and Al as a function of solution temperature are determined. Moreover,the effects of adding glycerol and agitating the etchant are examined and compared with this method. Finally, this method is tested on an actual device, and its efficiency is scrutinized.
基金supported by the National Key Basic Research Program of China(Grant No.2014CB921300)the National Natural Science Foundation of China(Grant Nos.61275205,11174305 and 61205209)the Fundamental Research Funds for the Central Universities
文摘We report on second harmonic generation(SHG) in on-chip high-Q(>105) lithium niobate(Li Nb O3, LN) microresonators fabricated by femtosecond laser micromachining. We examine the efficiency of SHG with either a continuous-wave(CW) or an ultrashort pulsed pump laser. The normalized conversion efficiencies of SHG obtained with the CW and pulsed pump lasers are measured to be 1.35×10?5 m W?1 and 2.30×10?6 m W?1, respectively.
基金This work was supported by the ERC-Starting Grant 3D-QUEST(3DQuantum Integrated Optical Simulationgrant agreement no.307783,http://www.3dquest.eu)by the Marie Curie Initial Training Network PICQUE(Photonic Integrated Compound Quantum Encoding,grant agreement no.608062,funding Program:FP7-PEOPLE-2013-ITN,http://www.picque.eu).
文摘The importance of integrated quantum photonics in the telecom band is based on the possibility of interfacing with the optical network infrastructure that was developed for classical communications.In this framework,femtosecond laser-written integrated photonic circuits,which have already been assessed for use in quantum information experiments in the 800-nm wavelength range,have great potential.In fact,these circuits,being written in glass,can be perfectly mode-matched at telecom wavelength to the in/out coupling fibers,which is a key requirement for a low-loss processing node in future quantum optical networks.In addition,for several applications,quantum photonic devices must be dynamically reconfigurable.Here,we experimentally demonstrate the high performance of femtosecond laser-written photonic circuits for use in quantum experiments in the telecom band,and we demonstrate the use of thermal shifters,which were also fabricated using the same femtosecond laser,to accurately tune such circuits.State-of-the-art manipulation of single-and two-photon states is demonstrated,with fringe visibilities greater than 95%.The results of this work open the way to the realization of reconfigurable quantum photonic circuits based on this technological platform.
文摘Besides the physical and chemical machining methods, a biological machining method has been presented. The experimental results show that machining of pure iron, pure copper and constantan by a special bacterium, Thiobacillus ferrooxidans , was possible. A micro gear and grooves on pure copper piece were bio machined. The depth of the groove so bio machined was directly dependent on the machining time. The biomachining mechanism has been analyzed from the electron transport chain (ETC) in the T. ferrooxidans membrane, and its developing direction has been also discussed.
基金supported by the National Natural Science Foundation of China(Grant Nos.51375381,51775431,51675422&51575427)
文摘Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 gm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.
基金supported by the National Natural Science Foundation of China (Grant Nos. 60678011 and 10674107)
文摘Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.
基金supported by the National Natural Science Foundation of China (21573054, 21327002, 91323303, 21621091)the Joint Funds Key Project of the National Natural Science Foundation of China (U1537214)+2 种基金the State Key Program of National Natural Science of China (51535003)Self-Planned Task (SKLRS201606B) of State Key Laboratory of Robotics and System (HIT)the Open Project of the State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University)
文摘By introducing the mechanical motion into the confined etchant layer technique(CELT), we have developed a promising ultraprecision machining method, termed as electrochemical mechanical micromachining(ECMM), for producing both regular and irregular three dimensional(3 D) microstructures. It was found that there was a dramatic coupling effect between the confined etching process and the slow-rate mechanical motion because of the concentration distribution of electrogenerated etchant caused by the latter. In this article, the coupling effect was investigated systemically by comparing the etchant diffusion, etching depths and profiles in the non-confined and confined machining modes. A two-dimensional(2 D) numerical simulation model was proposed to analyze the diffusion variations during the ECMM process, which is well verified by the machining experiments. The results showed that, in the confined machining mode, both the machining resolution and the perpendicularity tolerance of side faces were improved effectively. Furthermore, the theoretical modeling and numerical simulations were proved valuable to optimize the technical parameters of the ECMM process.
