Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transf...Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transformers. In the process of fabrication, UV-LIGA, dry. etching technique, fine polishing and eleetroplating techniques have been adopted to achieve high performance mieminduetor. Experimental results show that both types of the induetors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.展开更多
NiCuZn Ferrites are widely employed for many electronic applications, but can be replaced by MgCuZn ferrites owing to their superior properties like high initial permeability, high resistivity, low magnetostriction, e...NiCuZn Ferrites are widely employed for many electronic applications, but can be replaced by MgCuZn ferrites owing to their superior properties like high initial permeability, high resistivity, low magnetostriction, environmental stability and low cost. Three series of NiMgCuZn ferrites were prepared by conventional sintering process. The formation of single phase in these ferrites was confirmed by x-ray diffraction. Initial permeability measurements on these samples were carried out in the temperature range of 30-400℃. The effect of the external applied stress on the open magnetic circuit type coil with these ferrites was studied by applying uniaxial compressive stress parallel to magnetizing direction and the change in the inductance was measured. The variation of ratio of inductance (ΔL/L)% increases upto certain applied compressive stress and there after it decreases, showing different stress sensitivities for different compositions of ferrites studied in the present work. With a view to develop stress insensitive NiMgCuZn ferrite, a low stress sensitivity composition among all the ferrites studied was chosen and different amounts of SiO2 were added to it and a series of ferrite compositions were prepared. The variation of ratio of inductance (ΔL/L)% with external applied compressive stress was examined. These results show that, in a particular composition of 0.05 wt% SiO2added Ni0.3Mg0.3Cu0.1Zn0.3Fe2O4 ferrite exhibited stress insensitivity. It was noticed that addition of SiO2 was found to be effective in reducing the stress sensitivity. This was confirmed from the elastic behaviour studies at room temperature on these ferrite samples. These studies were carried out to develop a ferrite composition for its use as core material for microinductor applications.展开更多
基金Supported by High Technology. Research and Development Program （No. 2004AA302042）, the Nanotechnology Program of Shanghai Science ＆ Technology Committee （No. 0352nm014）, the National Natural Science Foundation of China （No. 50275096）, Samsung Advanced Institute of Technology. （SALT）, Sansung Electronics Co., Ltd., and Shanghai-Applied Materials Research and Development Fund （No.0515）.
文摘Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transformers. In the process of fabrication, UV-LIGA, dry. etching technique, fine polishing and eleetroplating techniques have been adopted to achieve high performance mieminduetor. Experimental results show that both types of the induetors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.
文摘NiCuZn Ferrites are widely employed for many electronic applications, but can be replaced by MgCuZn ferrites owing to their superior properties like high initial permeability, high resistivity, low magnetostriction, environmental stability and low cost. Three series of NiMgCuZn ferrites were prepared by conventional sintering process. The formation of single phase in these ferrites was confirmed by x-ray diffraction. Initial permeability measurements on these samples were carried out in the temperature range of 30-400℃. The effect of the external applied stress on the open magnetic circuit type coil with these ferrites was studied by applying uniaxial compressive stress parallel to magnetizing direction and the change in the inductance was measured. The variation of ratio of inductance (ΔL/L)% increases upto certain applied compressive stress and there after it decreases, showing different stress sensitivities for different compositions of ferrites studied in the present work. With a view to develop stress insensitive NiMgCuZn ferrite, a low stress sensitivity composition among all the ferrites studied was chosen and different amounts of SiO2 were added to it and a series of ferrite compositions were prepared. The variation of ratio of inductance (ΔL/L)% with external applied compressive stress was examined. These results show that, in a particular composition of 0.05 wt% SiO2added Ni0.3Mg0.3Cu0.1Zn0.3Fe2O4 ferrite exhibited stress insensitivity. It was noticed that addition of SiO2 was found to be effective in reducing the stress sensitivity. This was confirmed from the elastic behaviour studies at room temperature on these ferrite samples. These studies were carried out to develop a ferrite composition for its use as core material for microinductor applications.
