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Speeches at the sub-forum on metrology technology
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《China Standardization》 2025年第6期51-59,共9页
At present,AI is reshaping the global industrial landscape at an unprecedented depth.As the cornerstone suppor ting technological innovation and industrial development,metrology is radiating new vitality in the AI era... At present,AI is reshaping the global industrial landscape at an unprecedented depth.As the cornerstone suppor ting technological innovation and industrial development,metrology is radiating new vitality in the AI era.It is not only a verification scale for algorithm accuracy and a trust anchor for sensing systems,but also a strategic link for China and ASEAN to deepen industrial collaboration.Metrology runs through the entire innovation chain of AI,providing verifiable and reproducible scientific basis for technological innovation and industrial development. 展开更多
关键词 verification scale technological innovation industrial developmentmetrology trust anchor algorithm accuracy metrology deepen industrial collaborationmetrology sensing systemsbut
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Analysis of circularity metrology of small cylindrical workpiece with a segmenting scan method
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作者 Qiaolin Li Chuang Zeng +2 位作者 Jiali Zhao Dan Wu Liang Zhang 《Nanotechnology and Precision Engineering》 2025年第2期42-50,共9页
Owing to eccentricity and inclination, circularity of a cylindrical workpiece cannot be measured precisely by a circularity measuring machine when the workpiece has a small dimension(diameter ≤ 3 mm). In this paper, ... Owing to eccentricity and inclination, circularity of a cylindrical workpiece cannot be measured precisely by a circularity measuring machine when the workpiece has a small dimension(diameter ≤ 3 mm). In this paper, with the aim of solving this problem, circularity metrology of a small cylindrical workpiece using a segmenting scanning method is analyzed. The cross-sectional circle of the cylinder is segmented into several equivalent arcs for measurement by a two-dimensional coordinate measuring machine(profilometer). The circularity contour is obtained by stitching together arc contours obtained by data processing of the coordinates. Different segmenting patterns for coordinate scanning are considered. Measurement results are presented for three segmentation patterns, with 8, 10, and 12 equal segments, respectively.These results are evaluated in terms of the matching coefficient between neighboring arc contours on circumferential stitching, the Euclidean distance between neighboring arc contours on radial stitching, and the curvature of the arcs. From these evaluations, it is found that as the number of segments is increased, the matching coefficient increases from 0.14 to 0.50, the Euclidean distance decreases from 32 nm to 26 nm,and the curvature becomes close to the standard value. 展开更多
关键词 CIRCULARITY Precision metrology Small cylindrical part Coordinate modeling-segmenting Arc contour
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Sub-Diffraction Limit Quantum Metrology for Nanofabrication
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作者 Wenyi Ye Yang Li +10 位作者 Lianwei Chen Mingbo Pu Zheting Meng Yuanjian Huang Hengshuo Guo Xiaoyin Li Yinghui Guo Xiong Li Yun Long Emmanuel Stratakis Xiangang Luo 《Engineering》 2025年第6期96-103,共8页
Optical monitoring of object position and alignment with nanoscale precision is critical for ultra-precision measurement applications,such as micro/nano-fabrication,weak force sensing,and micro-scopic imaging.Traditio... Optical monitoring of object position and alignment with nanoscale precision is critical for ultra-precision measurement applications,such as micro/nano-fabrication,weak force sensing,and micro-scopic imaging.Traditional optical nanometry methods often rely on precision nanostructure fabrication,multi-beam interferometry,or complex post-processing algorithms,which can limit their practical use.In this study,we introduced a simplified and robust quantum measurement technique with an achievable resolution of 2.2 pm and an experimental demonstration of 1 nm resolution,distinguishing it from conventional interferometry,which depended on multiple reference beams.We designed a metasurface substrate with a mode-conversion function,in which an incident Gaussian beam is converted into higher-order transverse electromagnetic mode(TEM)modes.A theoretical analysis,including calculations of the Fisher information,demonstrated that the accuracy was maintained for nanoscale displacements.In conclusion,the study findings provide a new approach for precise alignment and metrology of nanofabrication and other advanced applications. 展开更多
关键词 Nanofabrication Precision measurement Diffraction limit Quantum metrology
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Creaform Metrology Suite激光投影插件
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作者 《现代制造》 2025年第4期10-10,共1页
Creaform形创,AMETEK阿美特克公司旗下品牌,是便携式和自动化三维检测解决方案全球供应商。阿美特克(纽交所代码:AME)是工业技术解决方案的全球供应商,成立于1930年,在纽约证券交易所上市已有90多年的历史,是标准普尔500指数的成分股之一。
关键词 激光投影插件 metrology Suite 三维检测 CREAFORM
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Quantum metrology with optimal control under an arbitrary non-Markovian bosonic environment
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作者 Likun Zhou Wen Yang 《Communications in Theoretical Physics》 2025年第2期110-118,共9页
Finding the optimal control is of importance to quantum metrology under a noisy environment.In this paper,we tackle the problem of finding the optimal control to enhance the performance of quantum metrology under an a... Finding the optimal control is of importance to quantum metrology under a noisy environment.In this paper,we tackle the problem of finding the optimal control to enhance the performance of quantum metrology under an arbitrary non-Markovian bosonic environment.By introducing an equivalent pseudomode model,the non-Markovian dynamic evolution is reduced to a Lindblad master equation,which helps us to calculate the gradient of quantum Fisher information and perform the gradient ascent algorithm to find the optimal control.Our approach is accurate and circumvents the need for the Born-Markovian approximation.As an example,we consider the frequency estimation of a spin with pure dephasing under two types of non-Markovian environments.By maximizing the quantum Fisher information at a fixed evolution time,we obtain the optimal multi-axis control,which results in a notable enhancement in quantum metrology.The advantage of our method lies in its applicability to the arbitrary non-Markovian bosonic environment. 展开更多
关键词 quantum metrology non-Markovian environment optimal control
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Optimal multi-parameter quantum metrology for frequencies of magnetic field
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作者 Zhenhua Long Shengshi Pang 《Chinese Physics B》 2025年第8期465-473,共9页
Multi-parameter quantum estimation has attracted considerable attention due to its broad applications.Due to the complexity of quantum dynamics,existing research places significant emphasis on estimating parameters in... Multi-parameter quantum estimation has attracted considerable attention due to its broad applications.Due to the complexity of quantum dynamics,existing research places significant emphasis on estimating parameters in time-independent Hamiltonians.Here,our work makes an effort to explore multi-parameter estimation with time-dependent Hamiltonians.In particular,we focus on the discrimination of two close frequencies of a magnetic field by using a single qubit.We optimize the quantum controls by employing both traditional optimization methods and reinforcement learning to improve the precision for estimating the frequencies of the two magnetic fields.In addition to the estimation precision,we also evaluate the robustness of the optimization schemes against the shift of the control parameters.The results demonstrate that the hybrid reinforcement learning approach achieves the highest estimation precision,and exhibits superior robustness.Moreover,a fundamental challenge in multi-parameter quantum estimation stems from the incompatibility of the optimal control strategies for different parameters.We demonstrate that the hybrid control strategies derived through numerical optimization remain effective in enhancing the precision of multi-parameter estimation in spite of the incompatibilities,thereby mitigating incompatibilities between control strategies on the estimation precision.Finally,we investigate the trade-offs in estimation precision among different parameters for different scenarios,revealing the inherent challenges in balancing the optimization of multiple parameters simultaneously and providing insights into the fundamental distinction between quantum single-parameter estimation and multi-parameter estimation. 展开更多
关键词 quantum metrology multi-parameter estimation quantum control
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Expansion of Metasurface Technology:Exploring Picophotonics in Optical Precision Metrology
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作者 Maowei Liang Chengtao Lu +7 位作者 Mengdi Zhang Dezhou Lu Yubin Gao Junhuai Jiang Yiming Zheng Yuehao Zhang Chenguang Xin Yaoguang Ma 《Journal of Beijing Institute of Technology》 2025年第2期143-164,共22页
With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodo... With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolution of metasurface systems capable of achieving nano/sub-nano precision,and identifies the critical issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology. 展开更多
关键词 metasurfaces lithography machine optical precision metrology
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Enhancing quantum metrology for multiple frequencies of oscillating magnetic fields by quantum control 被引量:1
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作者 雷昕 范静怡 庞盛世 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第6期177-187,共11页
Quantum multi-parameter estimation has recently attracted increased attention due to its wide applications, with a primary goal of designing high-precision measurement schemes for unknown parameters. While existing re... Quantum multi-parameter estimation has recently attracted increased attention due to its wide applications, with a primary goal of designing high-precision measurement schemes for unknown parameters. While existing research has predominantly concentrated on time-independent Hamiltonians, little has been known about quantum multi-parameter estimation for time-dependent Hamiltonians due to the complexity of quantum dynamics. This work bridges the gap by investigating the precision limit of multi-parameter quantum estimation for a qubit in an oscillating magnetic field model with multiple unknown frequencies. As the well-known quantum Cramer–Rao bound is generally unattainable due to the potential incompatibility between the optimal measurements for different parameters, we use the most informative bound instead which is always attainable and equivalent to the Holevo bound in the asymptotic limit. Moreover, we apply additional Hamiltonian to the system to engineer the dynamics of the qubit. By utilizing the quasi-Newton method, we explore the optimal schemes to attain the highest precision for the unknown frequencies of the magnetic field, including the simultaneous optimization of initial state preparation, the control Hamiltonian and the final measurement. The results indicate that the optimization can yield much higher precisions for the field frequencies than those without the optimizations. Finally,we study the robustness of the optimal control scheme with respect to the fluctuation of the interested frequencies, and the optimized scheme exhibits superior robustness to the scenario without any optimization. 展开更多
关键词 quantum metrology multi-parameter estimation quantum control
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Advancing quantum metrology in China’s power grids
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作者 Shisong Li 《iEnergy》 2024年第3期125-127,共3页
In November 2018,during the 26th General Conference on Weights and Measures(CGPM)in Versailles,France,a land-mark resolution was adopted to redefine four base units of the International System of Units(SI)(https://www... In November 2018,during the 26th General Conference on Weights and Measures(CGPM)in Versailles,France,a land-mark resolution was adopted to redefine four base units of the International System of Units(SI)(https://www.bipm.org/en/committees/cg/cgpm/26-2018/resolution-1).The kilogram,mole,ampere,and kelvin were redefined in terms of fundamental physical constants:the Planck constant(h),the Avogadro constant(NA),the elementary charge(e),and the Boltzmann constant(k),respectively.As illustrated in Figure 1(a),the new SI framework defines all seven base units based on fundamental constants,marking a complete transition of metrology into the quantum era.This system has been in effect globally since May 20,2019,on World Metrology Day. 展开更多
关键词 metrology FIGURE BASE
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Metrology of clinical literature on acupuncture for rheumatoid arthritis in China in recent five years 被引量:2
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作者 张阔 赵雪 +6 位作者 陈波 丁沙沙 徐媛 余楠楠 洪寿海 王慎军 郭义 《World Journal of Acupuncture-Moxibustion》 CSCD 2016年第3期62-72,共11页
Objective To conduct metrological study on clinical literature on acupuncture in treatment of rheumatoid arthritis(RA) at home in recent five years, providing reference basis and train of thought for clinical scient... Objective To conduct metrological study on clinical literature on acupuncture in treatment of rheumatoid arthritis(RA) at home in recent five years, providing reference basis and train of thought for clinical scientific research. Methods CNKI was retrieved based on the following search words: acupuncture and moxibustion, acupuncture, electroacupuncture, filiform needle, hand acupuncture, body acupuncture, and rheumatoid arthritis. The general information, diagnostic criteria, treatment principles, treatment methods, amount of stimulation, reinforcing/reducing methods, and efficacy criteria were analyzed. Results Fifty papers were obtained after strict screening, and most clinical reports were randomized controlled trials; there were differences among the diagnostic criteria, treatment principles and efficacy criteria in different reports; there were few literature on acupuncture in treatment of RA simply, most of the literature were about acupuncture combining other therapies. Conclusion The acupoint selection of acupuncture in treatment of RA should be studied further. 展开更多
关键词 ACUPUNCTURE rheumatoid arthritis metrology of literature
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Robust Filtration Techniques in Geometrical Metrology and Their Comparison 被引量:2
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作者 Shan Lou Wen-Han Zeng +1 位作者 Xiang-Qian Jiang Paul J. Scott 《International Journal of Automation and computing》 EI CSCD 2013年第1期1-8,共8页
Filtration is one of the core elements of analysis tools in geometrical metrology. Filtration techniques are progressing along with the advancement of manufacturing technology. Modern filtration techniques are require... Filtration is one of the core elements of analysis tools in geometrical metrology. Filtration techniques are progressing along with the advancement of manufacturing technology. Modern filtration techniques are required to be robust against outliers, applicable to surfaces with complex geometry and reliable in whole range of measurement data. A comparison study is conducted to evaluate commonly used robust filtration techniques in the field of geometrical metrology, including the two-stage Gaussian filter, the robust Gaussian regression filter, the robust spline filter and morphological filters. They are compared in terms of four aspects: functionality, mathematical computation, capability and characterization parameters. As a result, this study offers metrologists a guideline to choose the appropriate filter for various applications. 展开更多
关键词 Geometrical metrology robust Gaussian regression filter robust spline filter morphological filters surface roughness
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基于RANSAC算法的2D Metrology在BGA质量检测中的应用研究 被引量:1
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作者 周亚歌 宁爱林 《邵阳学院学报(自然科学版)》 2016年第3期108-112,共5页
针对BGA质量检测中芯片图像的识别定位问题,提出了一种基于RANSAC算法的2D Metrology芯片定位方法。首先进行2D Metrology建模,其次添加对象到2D Metrology模型,然后设置2D Metrology模型参数,应用2D Metrology,最后得到2D Metrology模... 针对BGA质量检测中芯片图像的识别定位问题,提出了一种基于RANSAC算法的2D Metrology芯片定位方法。首先进行2D Metrology建模,其次添加对象到2D Metrology模型,然后设置2D Metrology模型参数,应用2D Metrology,最后得到2D Metrology模型的对象定位边结果。该方法基于RANSAC算法,能精确识别模型对象中的边缘轮廓特征,简单易行、定位精度高、鲁棒性好、抗干扰能力强。文中通过实验,与常用的基于最小二乘法的芯片定位方法进行对比,验证了该方法的有效性。 展开更多
关键词 BGA检测 2D metrology 芯片定位 RANSAC算法
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Informative Signal Analysis: Metrology of the Underwater Geomagnetic Singularities in Low-Density Ionic Solution (Sea Water) 被引量:1
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作者 Osvaldo Faggioni Maurizio Soldani +1 位作者 Giacomo Cozzani Rodolfo Zunino 《Journal of Signal and Information Processing》 2018年第1期1-23,共23页
The paper tackles the problem of reading singularities of the geomagnetic field in noisy underwater (UW) environments. In particular, we propose a novel metrological approach to measuring low-amplitude geomagnetic sig... The paper tackles the problem of reading singularities of the geomagnetic field in noisy underwater (UW) environments. In particular, we propose a novel metrological approach to measuring low-amplitude geomagnetic signals in hard noisy magnetic environments. This research action was launched to develop a detection system for enforcing the peripheral security of military bases (harbors/coasts and landbases) and for asymmetric warfare. The concept underlying this theory is the spatial stability in the temporal variations of the geomagnetic field in the observation area. The paper presents the development and deployment of a self-informed measurement system, in which the signal acquired from each sensor—observation node—is compared with the signal acquired by the adjacent ones. The effectiveness of this procedure relates to the inter-node (sensor-to-sensor) distance, L;this quantity should, on one hand, correlate the noise and, on the other hand, decorrelate the target signal. The paper presents the results obtained, that demonstrate the ability of self-informed systems to read weak magnetic signals even in the presence of very high noise in low-density ionic solutions (i.e. sea water). 展开更多
关键词 Geomatic Geophysical Signals Processing GEOMAGNETIC metrology HARBOR Protection COUNTERTERRORISM Mag Security System
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Electrical Metrology Applications of LabVIEW Software 被引量:1
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作者 Hala M. Abdel Mageed Ali M. El-Rifaie 《Journal of Software Engineering and Applications》 2013年第3期113-120,共8页
Automation in measurement has wide range of electrical metrology applications and construction of powerful calibration software is one of the highly accurate metrological laboratories’ priorities. Thus, two automatic... Automation in measurement has wide range of electrical metrology applications and construction of powerful calibration software is one of the highly accurate metrological laboratories’ priorities. Thus, two automatic systems for controlling and calibrating the electrical reference standards have been established at National Institute for Standards (NIS), Egypt. The first system has been built to calibrate the zener diode reference standards while the second one has been built to calibrate the electrical sourcing and measuring instruments. These two systems act as the comprehensive and reliable structure that, from the national electrical standards, disseminates the traceability to all the electrical units under calibration. The software of the two systems has been built using the Laboratory Virtual Instrument Engineering Workbench (LabVIEW) graphical language. The standard development procedures have been followed in the building of both systems software. The software requirement specifications as well as functional specifications are taken into consideration. Design, implementation and testing of the software have been performed. Furthermore, software validation for measurements’ uncertainty as well as results’ compatibility in both automatic and manual modes has been achieved. 展开更多
关键词 ELECTRICAL metrology APPLICATIONS AUTOMATION LabVIEW SOFTWARE VALIDATION
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Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing 被引量:1
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作者 Wei Zhang Jun Xu +2 位作者 Sicong Wang Yi Zhou Jian Mi 《Journal of Microelectronic Manufacturing》 2020年第1期9-16,共8页
3D NAND technical development and manufacturing face many challenges to scale down their devices,and metrology stands out as much more difficult at each turn.Unlike planar NAND,3D NAND has a three-dimensional vertical... 3D NAND technical development and manufacturing face many challenges to scale down their devices,and metrology stands out as much more difficult at each turn.Unlike planar NAND,3D NAND has a three-dimensional vertical structure with high-aspect ratio.Obviously top-down images is not enough for process control,instead inner structure control becomes much more important than before,e.g.channel hole profiles.Besides,multi-layers,special materials and YMTC unique X-Tacking technology also bring other metrology challenges:high wafer bow,stress induced overlay,opaque film measurement.Technical development can adopt some destructive methodology(TEM,etch-back SEM),while manufacturing can only use nondestructive method.These drive some new metrology development,including X-Ray,mass measure and Mid-IR spectroscopy.As 3D NAND suppliers move to>150 layers devices,the existing metrology tools will be pushed to the limits.Still,the metrology must innovate. 展开更多
关键词 3D NAND metrology SEMICONDUCTOR HAR Process Control
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Quantum metrology with a non-Markovian qubit system
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作者 Jiang Huang Wen-Qing Shi +2 位作者 Yu-Ping Xie Guo-Bao Xu Hui-Xian Wu 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第12期172-176,共5页
The dynamics of the quantum Fisher information(QFI) of phase parameter estimation in a non-Markovian dissipative qubit system is investigated within the structure of single and double Lorentzian spectra. We use the ti... The dynamics of the quantum Fisher information(QFI) of phase parameter estimation in a non-Markovian dissipative qubit system is investigated within the structure of single and double Lorentzian spectra. We use the time-convolutionless method with fourth-order perturbation expansion to obtain the general forms of QFI for the qubit system in terms of a non-Markovian master equation. We find that the phase parameter estimation can be enhanced in our model within both single and double Lorentzian spectra. What is more, the detuning and spectral width are two significant factors affecting the enhancement of parameter-estimation precision. 展开更多
关键词 quantum metrology quantum Fisher information time-convolutionless parameter estimation
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Quantum metrology with coherent superposition of two different coded channels
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作者 Dong Xie Chunling Xu Anmin Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第9期111-116,共6页
We investigate the advantage of coherent superposition of two different coded channels in quantum metrology.In a continuous variable system,we show that the Heisenberg limit 1/N can be beaten by the coherent superposi... We investigate the advantage of coherent superposition of two different coded channels in quantum metrology.In a continuous variable system,we show that the Heisenberg limit 1/N can be beaten by the coherent superposition without the help of indefinite causal order.And in parameter estimation,we demonstrate that the strategy with the coherent superposition can perform better than the strategy with quantum switch which can generate indefinite causal order.We analytically obtain the general form of estimation precision in terms of the quantum Fisher information and further prove that the nonlinear Hamiltonian can improve the estimation precision and make the measurement uncertainty scale as 1/N^(m) for m≥2.Our results can help to construct a high-precision measurement equipment,which can be applied to the detection of coupling strength and the test of time dilation and the modification of the canonical commutation relation. 展开更多
关键词 quantum metrology quantum switch quantum Fisher information coherent superposition
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Prefect Protection of Quantum-Enhanced Metrology from Dephasing Noise
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作者 钟伟 黄奕筱 王晓光 《Communications in Theoretical Physics》 SCIE CAS CSCD 2017年第4期383-390,共8页
One of the main obstacles for quantum-enhanced metrology is that the estimation accuracy enhanced by non-classical states is likely to be obliterated by noises. Here, we consider a scenario of phase estimation sufferi... One of the main obstacles for quantum-enhanced metrology is that the estimation accuracy enhanced by non-classical states is likely to be obliterated by noises. Here, we consider a scenario of phase estimation suffering from pure dephasing noise which is taken into account after the phase parameter being imprinted, and propose a scheme to effectively protect the quantum enhancement from both correlated and uncorrelated dephasing sources by performing a rotation operation prior to the noise. By invoking the Fisher information approach, we strictly prove that a π/2 rotation is the ideal one which can completely resist the influence of the phase noise for all real symmetric pure states and the optimal measurement approaching the ultimate sensitivity set by quantum Cramér–Rao bound is presented.Additionally, we numerically study the availability of the scheme with arbitrary angle rotation for different probe states and show that our scheme will still robust for general symmetric pure states even with non-ideal rotation operation. 展开更多
关键词 quantum-enhanced metrology DEPHASING optimal measurement
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Contrasting Transport Performance of Electron-and Hole-Doped Epitaxial Graphene for Quantum Resistance Metrology
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作者 万歆祎 范晓东 +5 位作者 翟昌伟 杨镇宇 郝立龙 李林 鲁云峰 曾长淦 《Chinese Physics Letters》 SCIE EI CAS CSCD 2023年第10期89-94,共6页
Epitaxial graphene grown on silicon carbide(Si C/graphene)is a promising solution for achieving a highprecision quantum Hall resistance standard.Previous research mainly focused on the quantum resistance metrology of ... Epitaxial graphene grown on silicon carbide(Si C/graphene)is a promising solution for achieving a highprecision quantum Hall resistance standard.Previous research mainly focused on the quantum resistance metrology of n-type Si C/graphene,while a comprehensive understanding of the quantum resistance metrology behavior of graphene with different doping types is lacking.Here,we fabricated both n-and p-type Si C/graphene devices via polymer-assisted molecular adsorption and conducted systematic magneto-transport measurements in a wide parameter space of carrier density and temperature.It is demonstrated that n-type devices show greater potential for development of quantum resistance metrology compared with p-type devices,as evidenced by their higher carrier mobility,lower critical magnetic field for entering quantized Hall plateaus,and higher robustness of the quantum Hall effect against thermal degeneration.These discrepancies can be reasonably attributed to the weaker scattering from molecular dopants for n-type devices,which is further supported by the analyses on the quantum interference effect in multiple devices.These results enrich our understanding of the charged impurity on electronic transport performance of graphene and,more importantly,provide a useful reference for future development of graphene-based quantum resistance metrology. 展开更多
关键词 SCATTERING DOPANT metrology
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Ultrafast optoelectronic technology for radio metrology applications
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作者 Zhe Ma Hongmei Ma +2 位作者 Pengwei Gong Chuntao Yang Keming Feng 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2010年第3期461-468,共8页
Ultrafast optoelectronic technology has been widely used in terahertz time domain spectrum,terahertz imaging technology,terahertz communication and so on,and great progress has been achieved in the past two decade.Rec... Ultrafast optoelectronic technology has been widely used in terahertz time domain spectrum,terahertz imaging technology,terahertz communication and so on,and great progress has been achieved in the past two decade.Recently,this innovative technology has been applied in radio metrology and supplied a potential and hopeful method to solve the existent challenges of calibration devices and equipments with bandwidth up to 100 GHz.This paper generally summarizes the emerging applications of the ultrafast optoelectronic technology in radio metrology.The main applications of this technology in calibrating broadband sampling oscilloscopes,the high-speed photodiodes and calibrating the electrical pulse generators are emphasized,and the testing of monolithic microwave integrated circuits is also presented. 展开更多
关键词 ultrafast optoelectronic technology terahertz pulse radio metrology electrooptic sampling(EOS).
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