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使用晶圆级键合技术制备金属微结构
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作者 廖承举 张剑 +3 位作者 卢茜 彭挺 林玉敏 赵明 《电子工艺技术》 2024年第5期4-7,20,共5页
使用金属材料的晶圆级键合技术可以制备半封闭结构的金属矩形微同轴线。基于柔性金属衬底的晶圆级键合技术,制备了金属矩形微同轴结构。通过选择合适的对准标记和键合工艺,实现了≤10 μm的对准误差。通过多个金属矩形微同轴线的微组装... 使用金属材料的晶圆级键合技术可以制备半封闭结构的金属矩形微同轴线。基于柔性金属衬底的晶圆级键合技术,制备了金属矩形微同轴结构。通过选择合适的对准标记和键合工艺,实现了≤10 μm的对准误差。通过多个金属矩形微同轴线的微组装,初步展示了使用单层金属矩形微同轴线构建射频开关矩阵单元的能力。 展开更多
关键词 晶圆级键合技术 金属微结构 矩形微同轴线 3D merfs
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Effects of a two-equation turbulence model on the simulation of the internal lee waves
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作者 Xuhui Hu Xuefeng Zhang +2 位作者 Lei Lin Lianxin Zhang Shifan Wang 《Atmospheric and Oceanic Science Letters》 CSCD 2021年第5期30-36,共7页
In order to understand the wave-turbulence interaction under non-hydrostatic conditions to prepare future ad-vanced very-high-resolution ocean reanalysis data,an𝜎-coordinate ocean model-namely,the Marine Envir... In order to understand the wave-turbulence interaction under non-hydrostatic conditions to prepare future ad-vanced very-high-resolution ocean reanalysis data,an𝜎-coordinate ocean model-namely,the Marine Environ-ment Research and Forecasting(MERF)model-with an idealized supercritical slope topography is applied to conduct a series of high-resolution numerical experiments with and without the non-hydrostatic approximation.The popular Mellor-Yamada two-equation turbulence model(MY2.5)is enclosed in MERF to validate its effect on small-scale internal lee waves.Instantaneous results show that the internal lee-wave processes are relaxed through employment of the MY2.5 scheme,whether or not in the non-hydrostatic model.Time averaged results suggest the influences of the vertical mixing parameterization scheme on the numerical results are more dominant than the non-hydrostatic/hydrostatic selection for the large-scale dynamic process.Besides,diagnostic analyses of the energy budget show that the spread of internal lee waves at the slope is dramatically suppressed by the vertical turbulent mixing,indicating more tidal energy is able to be converted into the irreversible mixing when the two-equation turbulence model is employed. 展开更多
关键词 NON-HYDROSTATIC MERF Internal wave Turbulent mixing
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