Robot＇s dynamic motion error and on-line compensation based on multi-axis force sensor are dealt with.It is revealed that the reasons of the error are formed and the relations of the error are delivered.A motion equa...Robot＇s dynamic motion error and on-line compensation based on multi-axis force sensor are dealt with.It is revealed that the reasons of the error are formed and the relations of the error are delivered.A motion equation of robot＇s termination with the error is established,and then,an error matrix and an error compensation matrix of the motion equation are also defined.An on-line error＇s compensation method is put forward to decrease the displacement error,which is a degree of millimeter,shown by the result of simulation of PUMA562 robot.展开更多
This paper presents a literature review exploring the potential of piezoelectric field-effect transistors(piezo-FETs)as bionic microelectromechanical systems(MEMS).First,piezo-FETs are introduced as bionic counterpart...This paper presents a literature review exploring the potential of piezoelectric field-effect transistors(piezo-FETs)as bionic microelectromechanical systems(MEMS).First,piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors,highlighting their classic configuration and working principles.Then,this paper summarizes the existing research on piezo-FETs as sensors for pressure,inertial,and acoustic sensors.Material selections,design characteristics,and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors.After identifying the limitations in these existing studies,this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors.Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed,pointing out a novel,feasible,and impactful research direction on these bionic piezoelectric MEMS sensors.展开更多
Robot-assisted minimally invasive surgery(RMIS)has attracted notable attention because of its numerous advantages over traditional surgery.Nevertheless,the lack of real-time force feedback in RMIS can result in surgic...Robot-assisted minimally invasive surgery(RMIS)has attracted notable attention because of its numerous advantages over traditional surgery.Nevertheless,the lack of real-time force feedback in RMIS can result in surgical errors and damage to delicate tissues.The stringent requirements for the sensitivity and volume of force sensors in RMIS make the design and fabrication of such sensors a considerable challenge.Herein,we present a high-sensitivity three-dimensional(3D)force sensing module consisting of a micro-electro-mechanical piezoresistive sensor chip and a polydimethylsiloxane cap with pyramidal microstructures for force transmission.The sensor chip incorporates four cantilevers with a circular microhole at their fixed ends to concentrate stress in piezoresistive areas;the shape of the microhole was optimized to ensure an appropriate trade-off between high sensitivity and reliability.The proposed 3D force sensor showed more than twice higher sensitivity in the X-,Y-,and Z-axis directions than the sensor based on traditional cantilevers.Furthermore,the proposed sensor exhibited little hysteresis(<1.91%),good stability,and fast response(~30 ms).An artificial neural network was adopted for 3D force decoupling;this network accurately converted resistance changes into 3D forces,showing a prediction error of<2%.Furthermore,the proposed sensor was integrated into a robot to perform various clamping tasks,exhibiting good application potential for RMIS.展开更多
基金This project is supported by National Hi-tech Research and Development Program of China(863 Program,No.2001AAA423300)Provincial Natural Science Foundation of Anhui,China(No.00043310)
文摘Robot＇s dynamic motion error and on-line compensation based on multi-axis force sensor are dealt with.It is revealed that the reasons of the error are formed and the relations of the error are delivered.A motion equation of robot＇s termination with the error is established,and then,an error matrix and an error compensation matrix of the motion equation are also defined.An on-line error＇s compensation method is put forward to decrease the displacement error,which is a degree of millimeter,shown by the result of simulation of PUMA562 robot.
文摘This paper presents a literature review exploring the potential of piezoelectric field-effect transistors(piezo-FETs)as bionic microelectromechanical systems(MEMS).First,piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors,highlighting their classic configuration and working principles.Then,this paper summarizes the existing research on piezo-FETs as sensors for pressure,inertial,and acoustic sensors.Material selections,design characteristics,and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors.After identifying the limitations in these existing studies,this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors.Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed,pointing out a novel,feasible,and impactful research direction on these bionic piezoelectric MEMS sensors.
基金supported by the National Natural Science Foundation of China(Grant No.62401385)the Natural Science Foundation of Jiangsu Province(Grant No.BK20240803)+1 种基金the Natural Science Foundation of the Jiangsu Higher Education Institutions of China(Grant No.24KJB460025)the Open Fund of State Key Laboratory of Precision Measurement Technology and Instruments(Grant No.Pilab2413)。
文摘Robot-assisted minimally invasive surgery(RMIS)has attracted notable attention because of its numerous advantages over traditional surgery.Nevertheless,the lack of real-time force feedback in RMIS can result in surgical errors and damage to delicate tissues.The stringent requirements for the sensitivity and volume of force sensors in RMIS make the design and fabrication of such sensors a considerable challenge.Herein,we present a high-sensitivity three-dimensional(3D)force sensing module consisting of a micro-electro-mechanical piezoresistive sensor chip and a polydimethylsiloxane cap with pyramidal microstructures for force transmission.The sensor chip incorporates four cantilevers with a circular microhole at their fixed ends to concentrate stress in piezoresistive areas;the shape of the microhole was optimized to ensure an appropriate trade-off between high sensitivity and reliability.The proposed 3D force sensor showed more than twice higher sensitivity in the X-,Y-,and Z-axis directions than the sensor based on traditional cantilevers.Furthermore,the proposed sensor exhibited little hysteresis(<1.91%),good stability,and fast response(~30 ms).An artificial neural network was adopted for 3D force decoupling;this network accurately converted resistance changes into 3D forces,showing a prediction error of<2%.Furthermore,the proposed sensor was integrated into a robot to perform various clamping tasks,exhibiting good application potential for RMIS.
文摘提出了一种扭摆式结构的MEMS电容式强磁场传感器,采用洛伦兹力驱动,通过测量硅板扭摆导致的电容变化来检测外部磁场强度,测量磁场的量程设计在0.2 T～2 T之间。首先介绍了传感器的工作原理,然后对其进行仿真,分析其物理特性,建立了模型并且求解出各阶模态下的振动形式,得到传感器主振模态频率为28.26 k Hz。并模拟了受力过程中的形变量。最后介绍了其制造工艺流程,验证了传感器加工的可行性。
