The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibra...The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibrate the corresponding instruments.We develop a new reference material with nominal CDs of 160 nm,80 nm,and 40 nm.The line features are investigated based on the metrological scanning electron microscope which is developed by the National Institute of Metrology(NIM)in China.Also,we propose a new characterization method for the precise measurement of CD values.After filtering and leveling the intensity profiles,the line features are characterized by the combination model of the Gaussian and Lorentz functions.The left and right edges of CD are automatically extracted with the profile decomposition and k-means algorithm.Then the width of the two edges at the half intensity position is regarded as the standard CD value.Finally,the measurement results are evaluated in terms of the sample,instrument,algorithm,and repeatability.The experiments indicate efficiency of the proposed method which can be easily applied in practice to accurately characterize CDs.展开更多
A quasicrystal has a structure intermediate between crystals and compound glasses. The disorder in glass makes its diffraction diffuse, so it is surprising that quasicrystals diffract more sharply than crystals. The g...A quasicrystal has a structure intermediate between crystals and compound glasses. The disorder in glass makes its diffraction diffuse, so it is surprising that quasicrystals diffract more sharply than crystals. The greater sharpness is computed to be due to the hierarchic structure with unit cell alignment in 3-dimensional space. Electron microscope phase contrast images map the comparatively heavy Mn atoms in icosahedral Al<sub>6</sub>Mn, where the transition metal locates the centers of unit cells inside clusters and superclusters. Because the solid is aperiodic, each diffracted beam is a product of multiple interplanar spacings combined, and this contrasts with the unique relationship between spacing and incident angle in Bragg diffraction from crystals. Simulated quasi-structure factors add the relative phase shifts that are in geometric series from cell to cluster to superclusters of increasing order. The scattering becomes coherent in best fit, angular configuration between the aperiodic solid and a longitudinally periodic X-ray or electron probe. The quasi-structure factors express angular divergence in each diffracted beam from its corresponding Bragg condition, and the divergence provides a special metric, essential for atomic measurement in the geometric solids. The fit is reinforced at all levels from the unit cell to cluster to high order superclusters. The optics operates under a new quasi-Bragg law in a new geometric space. In this paper, we proceed to examine the effect of specimen size on line resolution in diffraction, first analytically and secondly in simulation. The line resolution follows a power law on the supercluster order, matching its atomic population.展开更多
We propose a technique to precisely measure the line width of the photoassociation spectra of the excited cesium molecule by using a frequency shifter to generate two laser beams with a precise frequency difference. A...We propose a technique to precisely measure the line width of the photoassociation spectra of the excited cesium molecule by using a frequency shifter to generate two laser beams with a precise frequency difference. A series of photoassociation （PA） spectra are recorded with two laser beam induced molecular lines, whose peak separation serves as an accurate frequency ruler to measure the line width of the PA spectra. The full width half maximum line width was studied as a function of PA laser intensity. The extrapolated value at zero laser intensity is （34.8± 0.22） MHz. By analyzing other broadening mechanisms, a value of （32.02 ± 0.70） MHz was deduced. It is shown that this scheme is inexpensive, simple, robust, and is promising for applications in a variety of other atomic species.展开更多
The purpose of the current study is to evaluate the ageing of poly(ethylene-co-propylene) fittings produced by several manufacturers. The fittings were aged for varying times as follows: 0, 2, 13, 23, 45, 106, 225 and...The purpose of the current study is to evaluate the ageing of poly(ethylene-co-propylene) fittings produced by several manufacturers. The fittings were aged for varying times as follows: 0, 2, 13, 23, 45, 106, 225 and 391 days at 100°C. In a previous paper, the oxidation induction time (OItime) and oxidation induction temperature (OItemp) were evaluated with respect to every single step of the ageing process [1]. Here, the Vickers microhardness and wide-angle X-ray line width were used for characterization of the oxidative stability of poly(ethylene-co-propylene) pipes. Both the Vickers microhardness and wide-angle X-ray line width as evaluated from a certain reflex of the diffractogram generally increase with ageing for most samples. The higher microhardness is most likely related to higher fragility of the pipes. The increase of the X-ray line width with ageing indirectly proves that reducing the crystallite size as well as increase of the crystallite defectiveness take place.展开更多
We performed systematic laser spectroscopic investigations of La I spectral lines, using optogalvanic detection. Sixteen previously unknown even parity levels, having energies between 40,300 and 44,300 cm<sup>-1...We performed systematic laser spectroscopic investigations of La I spectral lines, using optogalvanic detection. Sixteen previously unknown even parity levels, having energies between 40,300 and 44,300 cm<sup>-1</sup>, are reported. These levels classify altogether 67 lines, not listed in spectral tables. The new levels were found due to the observation of the depopulation of the lower levels of the excited transitions. We found a remarkable variation of the observed widths of single hyperfine structure components dependent on the energy of the upper excited levels. Some levels having energies higher than 43,000 cm<sup>-1</sup> appear to have a very high ionization probability.展开更多
研究地下内衬岩洞(Lined Rock Caverns,LRC)储气库的衬砌开裂特征,为该类储气库的设计和工程应用提供参考。通过应用ABAQUS有限元软件建立地下大罐式内衬高压储气库模型,使用显示动力分析研究横向配筋率、纵向配筋率、埋深、储气压力等...研究地下内衬岩洞(Lined Rock Caverns,LRC)储气库的衬砌开裂特征,为该类储气库的设计和工程应用提供参考。通过应用ABAQUS有限元软件建立地下大罐式内衬高压储气库模型,使用显示动力分析研究横向配筋率、纵向配筋率、埋深、储气压力等参数对衬砌开裂特征的影响。结果表明:衬砌外表面最大裂缝宽度大于内表面,而衬砌内表面存在更多的细小裂缝;随着横向配筋率的提高,混凝土衬砌中内外表面裂缝宽度逐渐减小,贯穿性裂缝数量减小,裂缝平均间距减小。但当横向配筋率超过0.16%,裂缝宽度变化不再显著;埋深越大,地应力越大,衬砌产生的环向拉应力越小,衬砌裂缝宽度越小。建议适当增大横向配筋率和储气库埋深,减小储气压力来抑制衬砌裂缝的开展,而纵向钢筋按构造配筋即可。展开更多
基金supported by the National Key Research and Development Program of China(Grant No.2020YFF0218403)the Basic Scientific Research Operating Fund of NIM(Grant No.AKYZD2007-1)。
文摘The line width(often synonymously used for critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control CD values in manufacturing,a reasonable CD reference material is required to calibrate the corresponding instruments.We develop a new reference material with nominal CDs of 160 nm,80 nm,and 40 nm.The line features are investigated based on the metrological scanning electron microscope which is developed by the National Institute of Metrology(NIM)in China.Also,we propose a new characterization method for the precise measurement of CD values.After filtering and leveling the intensity profiles,the line features are characterized by the combination model of the Gaussian and Lorentz functions.The left and right edges of CD are automatically extracted with the profile decomposition and k-means algorithm.Then the width of the two edges at the half intensity position is regarded as the standard CD value.Finally,the measurement results are evaluated in terms of the sample,instrument,algorithm,and repeatability.The experiments indicate efficiency of the proposed method which can be easily applied in practice to accurately characterize CDs.
文摘A quasicrystal has a structure intermediate between crystals and compound glasses. The disorder in glass makes its diffraction diffuse, so it is surprising that quasicrystals diffract more sharply than crystals. The greater sharpness is computed to be due to the hierarchic structure with unit cell alignment in 3-dimensional space. Electron microscope phase contrast images map the comparatively heavy Mn atoms in icosahedral Al<sub>6</sub>Mn, where the transition metal locates the centers of unit cells inside clusters and superclusters. Because the solid is aperiodic, each diffracted beam is a product of multiple interplanar spacings combined, and this contrasts with the unique relationship between spacing and incident angle in Bragg diffraction from crystals. Simulated quasi-structure factors add the relative phase shifts that are in geometric series from cell to cluster to superclusters of increasing order. The scattering becomes coherent in best fit, angular configuration between the aperiodic solid and a longitudinally periodic X-ray or electron probe. The quasi-structure factors express angular divergence in each diffracted beam from its corresponding Bragg condition, and the divergence provides a special metric, essential for atomic measurement in the geometric solids. The fit is reinforced at all levels from the unit cell to cluster to high order superclusters. The optics operates under a new quasi-Bragg law in a new geometric space. In this paper, we proceed to examine the effect of specimen size on line resolution in diffraction, first analytically and secondly in simulation. The line resolution follows a power law on the supercluster order, matching its atomic population.
基金Project supported by the National Basic Research Program of China (Grant No. 2012CB921603)the National High Technology Research and Development of China (Grant No. 2009AA01Z319)+3 种基金the National Natural Science Foundation of China (Grant Nos.61008012,10934004,60978018,60978001,60808009, and 11074154)the Science Fund for Creative Research Groups of the National Natural Science Foundation of China (Grant No. 60821004)the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20101401120004)the National Natural Science Foundation of Shanxi Province,China (Grant No. 2009011059-2)
文摘We propose a technique to precisely measure the line width of the photoassociation spectra of the excited cesium molecule by using a frequency shifter to generate two laser beams with a precise frequency difference. A series of photoassociation （PA） spectra are recorded with two laser beam induced molecular lines, whose peak separation serves as an accurate frequency ruler to measure the line width of the PA spectra. The full width half maximum line width was studied as a function of PA laser intensity. The extrapolated value at zero laser intensity is （34.8± 0.22） MHz. By analyzing other broadening mechanisms, a value of （32.02 ± 0.70） MHz was deduced. It is shown that this scheme is inexpensive, simple, robust, and is promising for applications in a variety of other atomic species.
文摘The purpose of the current study is to evaluate the ageing of poly(ethylene-co-propylene) fittings produced by several manufacturers. The fittings were aged for varying times as follows: 0, 2, 13, 23, 45, 106, 225 and 391 days at 100°C. In a previous paper, the oxidation induction time (OItime) and oxidation induction temperature (OItemp) were evaluated with respect to every single step of the ageing process [1]. Here, the Vickers microhardness and wide-angle X-ray line width were used for characterization of the oxidative stability of poly(ethylene-co-propylene) pipes. Both the Vickers microhardness and wide-angle X-ray line width as evaluated from a certain reflex of the diffractogram generally increase with ageing for most samples. The higher microhardness is most likely related to higher fragility of the pipes. The increase of the X-ray line width with ageing indirectly proves that reducing the crystallite size as well as increase of the crystallite defectiveness take place.
文摘We performed systematic laser spectroscopic investigations of La I spectral lines, using optogalvanic detection. Sixteen previously unknown even parity levels, having energies between 40,300 and 44,300 cm<sup>-1</sup>, are reported. These levels classify altogether 67 lines, not listed in spectral tables. The new levels were found due to the observation of the depopulation of the lower levels of the excited transitions. We found a remarkable variation of the observed widths of single hyperfine structure components dependent on the energy of the upper excited levels. Some levels having energies higher than 43,000 cm<sup>-1</sup> appear to have a very high ionization probability.
文摘研究地下内衬岩洞(Lined Rock Caverns,LRC)储气库的衬砌开裂特征,为该类储气库的设计和工程应用提供参考。通过应用ABAQUS有限元软件建立地下大罐式内衬高压储气库模型,使用显示动力分析研究横向配筋率、纵向配筋率、埋深、储气压力等参数对衬砌开裂特征的影响。结果表明:衬砌外表面最大裂缝宽度大于内表面,而衬砌内表面存在更多的细小裂缝;随着横向配筋率的提高,混凝土衬砌中内外表面裂缝宽度逐渐减小,贯穿性裂缝数量减小,裂缝平均间距减小。但当横向配筋率超过0.16%,裂缝宽度变化不再显著;埋深越大,地应力越大,衬砌产生的环向拉应力越小,衬砌裂缝宽度越小。建议适当增大横向配筋率和储气库埋深,减小储气压力来抑制衬砌裂缝的开展,而纵向钢筋按构造配筋即可。
