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Mirror Mapping of Laser Interferometer Measurement System on Ultra-precise Movement Stage 被引量:1
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作者 周云飞 于宝成 《Journal of Southwest Jiaotong University(English Edition)》 2006年第4期355-362,共8页
The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new ... The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage (UPMS) with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm. 展开更多
关键词 laser interferometer measurement system (LIMS) Ultra-precise movement stage (UPMS) Mirror mapping Splineinterpolation Mirror map data tables
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Fiber-based distributed sensing laser interferometer enabled by mirror-image correlation method
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作者 Zhongwang Pang Guan Wang +3 位作者 Fangmin Wang Hongfei Dai Wenlin Li Bo Wang 《Advanced Photonics Nexus》 2024年第6期55-66,共12页
Distributed fiber-optic sensing(DFOS)can turn the worldwide fiber network into a sensing array,which may immensely extend the sensing range and approaches for hazard assessment,earth observation,and human activity mea... Distributed fiber-optic sensing(DFOS)can turn the worldwide fiber network into a sensing array,which may immensely extend the sensing range and approaches for hazard assessment,earth observation,and human activity measurement.However,most existing DFOS schemes cannot simultaneously give dual attention to the detection ability(for example,sensing distance)and multipoint localizing function.A mirror-image correlation method is proposed and can precisely extract the time delay between two original signals from their composite detected signal.This method enables the distributed vibration sensing function of the laser interferometer and maintains its high detection ability.We demonstrate its feasibility by simultaneously localizing multiple knocking vibrations on a 250-km round-trip fiber and distinguishing traffic vibrations at two urban positions in a field test.The localizing precision is analyzed and satisfies the requirements for fiber network sensing. 展开更多
关键词 distributed fiber-optic sensing mirror-image correlation laser interferometer vibration localization
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Application of focused laser differential interferometer to hypersonic boundary-layer instability study 被引量:4
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作者 Tao YU Youde XIONG +1 位作者 Jiaquan ZHAO Jie WU 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2021年第5期17-26,共10页
Accurate prediction of hypersonic boundary-layer transition plays an important role in thermal protection system design of hypersonic vehicles.Restricted by the capability of spatial diagnostics for hypersonic boundar... Accurate prediction of hypersonic boundary-layer transition plays an important role in thermal protection system design of hypersonic vehicles.Restricted by the capability of spatial diagnostics for hypersonic boundary-layer study,quite a lot of problems of hypersonic boundary-layer transition,such as nonlinearity and receptivity,remain outstanding.This work reports the application of focused laser differential interferometer to instability wave development across hypersonic boundary-layer on a flared cone model.To begin with,the focused laser differential interferometer is designed and set up in a Mach number 6 hypersonic quiet wind tunnel with the focal point in the laminar boundary-layer of a 5 degree half-angle flared cone model.Afterwards,instability experiments are carried out by traversing the focal point throughout the hypersonic boundary-layer and the density fluctuation along the boundary-layer profile is measured and analyzed.The results show that three types of instability waves ranging from 10 k Hz to over 1 MHz are co-existing in the hypersonic boundary-layer,indicating the powerful capability of focused laser differential interferometer in dynamic response resolution for instability wave study in hypersonic flow regime;furthermore,quantitative analyses including spectra and bicoherence analysis of instability waves throughout the hypersonic boundary-layer for both cold and heated cone models are performed. 展开更多
关键词 Bicoherence analysis Focused laser differential interferometer Hypersonic boundary-layer instability Non-intrusive measurement Wind tunnel experiment
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Recent Progress of the HL-2A Laser Interferometer 被引量:2
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作者 周艳 邓中朝 +7 位作者 易江 李永高 李连才 郑玲 赵开君 杨青巍 丁玄同 段旭如 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第4期413-416,共4页
A new multi-channel far infrared (FIR) laser interferometer was built up and ap- plied to HL-2A. The unique feature of real-time heterodyne interferometer is the combination of high power radiation source (300 mW)... A new multi-channel far infrared (FIR) laser interferometer was built up and ap- plied to HL-2A. The unique feature of real-time heterodyne interferometer is the combination of high power radiation source (300 mW), lower noise room temperature detector (noise tempera- ture below 6000 K) with good spatial resolution of 7 cm. Various parameters are optimized for maximum laser output power. Zero crossings of the signals are counted with field programmable gate array (FPGA) digital circuitry yielding the resolution of 1/1000 fringe. The newly measured results including density fluctuation are also presented. 展开更多
关键词 FIR laser interferometer MEASUREMENT density fluctuation
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HCN Laser Interferometer on the EAST Superconducting Tokamak 被引量:1
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作者 徐强 高翔 +4 位作者 揭银先 刘海庆 史楠 程永飞 童兴德 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第4期519-521,共3页
A single-channel far-infrared (FIR) laser interferometer was developed to measure the line averaged electron density on the EAST tokamak. The structure of the single-channel FIR laser interferometer is described in ... A single-channel far-infrared (FIR) laser interferometer was developed to measure the line averaged electron density on the EAST tokamak. The structure of the single-channel FIR laser interferometer is described in detail. The evolution of density sawtooth oscillation was measured by means the FIR laser interferometer, and was identified by electron cyclotron emission (ECE) signals and soft X-ray intensity. The discharges with and without sawtooth were compared with each other in the Hugill diagram. 展开更多
关键词 far-infrared laser interferometer electron density sawtooth oscillation
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Laser self-mixing interferometer with scalable fringe precision based on phase multiplication algorithm 被引量:1
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作者 WANG Xiulin XIONG Yanbin +3 位作者 XU Huizhen QIU Lirong LI Zhen HUANG Wencai 《Optoelectronics Letters》 EI 2021年第11期665-668,共4页
In this paper,we present a phase multiplication algorithm(PMA)to obtain scalable fringe precision in laser self-mixing interferometer under a weak feedback regime.Merely by applying the double angle formula on the sel... In this paper,we present a phase multiplication algorithm(PMA)to obtain scalable fringe precision in laser self-mixing interferometer under a weak feedback regime.Merely by applying the double angle formula on the self-mixing signal multiple times,the continuously improved fringe precision will be obtained.Theoretical analysis shows that the precision of the fringe could be improved toλ/2^(n+1).The validity of the proposed method is demonstrated by means of simulated SMI signals and confirmed by experiments under different amplitudes.A fringe precision ofλ/128 at a sampling rate of 500 k S/s has been achieved after doing 6 th the PMA.Finally,an amplitude of 50 nm has been proved to be measurable and the absolute error is 3.07 nm,which is within the theoretical error range.The proposed method for vibration measurement has the advantage of high accuracy and reliable without adding any additional optical elements in the optical path,thus it will play an important role in nanoscale measurement field. 展开更多
关键词 laser self-mixing interferometer with scalable fringe precision based on phase multiplication algorithm
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Recent Progress of the HL-2A Multi-Channel HCOOH Laser Interferometer/Polarimeter
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作者 李永高 周艳 +3 位作者 邓中朝 李远 易江 王浩西 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第5期430-434,共5页
A multichannel methanoic acid (HCOOH, λ=432.5 μm) laser interferometer/polarimeter is being developed from the previous eight-channel hydrogen cyanide (HCN, λ=337 μm) laser interferometer in the HL-2A tokamak.... A multichannel methanoic acid (HCOOH, λ=432.5 μm) laser interferometer/polarimeter is being developed from the previous eight-channel hydrogen cyanide (HCN, λ=337 μm) laser interferometer in the HL-2A tokamak. A conventional Michelson-type interometer is used for the electron density measurement, and a Dodel-Kunz-type polarimeter is used for the Faraday rotation effect measurement, respectively. Each HCOOH laser can produce a linearly polarized radiation at a power lever of -30 mW, and a power stability 〈10% in 50 rain. A beam waist (diameter d0 ≈12.0 mm, about 200 mm away from the outlet) is finally determined through a chopping modulation technique. The latest optical layout of the interferometer/polarimeter has been finished, and the hardware data processing system based on the fast Fourier transform phase- comparator technique is being explored. In order to demonstrate the feasibility of the diagnostic scheme, two associated bench simulation experiments were carried out in the laboratory, in which the plasma was simulated by a piece of polytetrafluoroethene plate, and the Faraday rotation effect was simulated by a rotating half-wave plate. Simulation results agreed well with the initial experimental conditions. At present, the HCOOH laser interferometer/polarimeter system is being assembled on HL-2A, and is planned to be applied in the 2014-2015 experimental campaign. 展开更多
关键词 HCOOH laser interferometer/polarimeter PLASMA Faraday rotation effect simulation experiment HL-2A
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A laser feedback interferometer with an oscillating feedback mirror
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作者 汪之国 王飞 肖光宗 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第11期227-232,共6页
A method is proposed to solve the problem of direction discrimination for laser feedback interferometers. By vibrating the feedback mirror with a small-amplitude and high-frequency sine wave, laser intensity is modula... A method is proposed to solve the problem of direction discrimination for laser feedback interferometers. By vibrating the feedback mirror with a small-amplitude and high-frequency sine wave, laser intensity is modulated accordingly. The modulation amplitude can be extracted using a phase sensitive detector (PSD). When the feedback mirror moves, the PSD output shows a quasi-sine waveform similar to a laser intensity interference fringe but with a phase difference of approximately ±π/2. If the movement direction of the feedback mirror changes, the phase difference sign reverses. Therefore, the laser feedback interferometer offers a potential application in displacement measurement with a resolution of 1/8 wavelength and in-time direction discrimination. Without using optical components such as polarization beam splitters and wave plates, the interferometer is very simple, easy to align, and less costly. 展开更多
关键词 He Ne laser laser feedback interferometer dithering
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Laser Interferometer for Detection of Gravitational Wave-TAMA-300
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作者 Kozai, Yoshihide and TAMA 300 Team (National Astronomical Observatory, Japan) 《天文研究与技术》 CSCD 1999年第S1期35-35,共1页
In National Astronomical Observatory, Japan, Mitaka, a group of scientists has been constructing a laser interferometer with two Fabry Perot cavities 300m long, one in North South and one in East West directions. The ... In National Astronomical Observatory, Japan, Mitaka, a group of scientists has been constructing a laser interferometer with two Fabry Perot cavities 300m long, one in North South and one in East West directions. The interferomer is to detect any gravitational wave near 400Hz frequency and stronger than 10 -20 by autumn, 1998 all the instruments have been installed in the underground facilities and it will be operated for more than 30 days in April, 1999. Then a recycling device will be installed to increase the sensitivity by factor of 10. In this paper this system as well as other systems such as LIGOs in UAS and VIRGO in Europe will be reviewed. 展开更多
关键词 WAVE laser interferometer for Detection of
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Measuring Method of Radius of Curvature Based on Dual-Frequency Laser Interferometer
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作者 Wenlong Zhang Liang Miao Yu Liu 《Optics and Photonics Journal》 2016年第8期209-214,共6页
In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferome... In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferometer based on cat’s eye and confocal method. Through analyzing the error source models of radius of curvature testing, optical configuration of the testing device has been optimized. Precise environment control and real-time monitoring system is also established to reduce the errors caused by environment. Through the above processes, the radius of curvature measurement relative accuracy is better than 2 ppm. One optical sphere, R88.5 mm, test aperture 59 mm, has been tested. Testing result is 88499.465 ± 0.176 μm, meeting the design requirement. The method has high accuracy and practical advantages. 展开更多
关键词 Radius of Curvature Cat’s Eye and Confocal Method Dual-Frequency laser interferometer
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Gravitational Wave Background from Extreme-Mass-Ratio Inspirals
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作者 Haoyu Zhao Yuanhao Zhang +1 位作者 Xilong Fan Wenbiao Han 《Chinese Physics Letters》 2025年第5期239-247,共9页
The gravitational wave background(GWB) produced by extreme-mass-ratio inspirals(EMRIs) serves as a powerful tool for probing the astrophysical and dynamical processes in galactic centers. EMRI systems are a primary ta... The gravitational wave background(GWB) produced by extreme-mass-ratio inspirals(EMRIs) serves as a powerful tool for probing the astrophysical and dynamical processes in galactic centers. EMRI systems are a primary target for the space-based detector laser interferometer space antenna due to their long-lived signals and high signal-to-noise ratios. This study explores the statistical properties of the GWB from EMRI, focusing on the calculation methods for the GWB, the astrophysical distribution of EMRI sources, and the influence of key parameters, including the spin of supermassive black holes(SMBHs) and the masses of compact objects(COs). By analyzing these factors, we determine the distribution range of the characteristic strain of the GWB from EMRIs. We find that the final eccentricity distributions appear to have negligible effect on the intensity of the GWB due to rapid circularization before they become detectable and the spin of the SMBH enhances the gravitational wave characteristic strain by approximately 1% compared to cases without spin effects. The masses of COs can also significantly affect the characteristic strain of the GWB from EMRIs, with black hole as CO producing a gravitational wave signal intensity that is approximately one order of magnitude higher compared to cases where neutron star or white dwarf are the COs. 展开更多
关键词 probing astrophysical dynamical processes galactic centers astrophysical distribution extreme mass ratio inspirals laser interferometer space antenna gravitational wave background calculation methods characteristic strain laser interferometer Space Antenna
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Ultraprecision intersatellite laser interferometry 被引量:7
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作者 Min Ming Yingxin Luo +8 位作者 Yu-Rong Liang Jing-Yi Zhang Hui-Zong Duan Hao Yan Yuan-Ze Jiang Ling-Feng Lu Qin Xiao Zebing Zhou Hsien-Chi Yeh 《International Journal of Extreme Manufacturing》 2020年第2期54-66,共13页
Precision measurement tools are compulsory to reduce measurement errors or machining errors in the processes of calibration and manufacturing.The laser interferometer is one of the most important measurement tools inv... Precision measurement tools are compulsory to reduce measurement errors or machining errors in the processes of calibration and manufacturing.The laser interferometer is one of the most important measurement tools invented in the 20th century.Today,it is commonly used in ultraprecision machining and manufacturing,ultraprecision positioning control,and many noncontact optical sensing technologies.So far,the state-of-the-art laser interferometers are the ground-based gravitational-wave detectors,e.g.the Laser Interferometer Gravitational-wave Observatory(LIGO).The LIGO has reached the measurement quantum limit,and some quantum technologies with squeezed light are currently being tested in order to further decompress the noise level.In this paper,we focus on the laser interferometry developed for space-based gravitational-wave detection.The basic working principle and the current status of the key technologies of intersatellite laser interferometry are introduced and discussed in detail.The launch and operation of these large-scale,gravitational-wave detectors based on space-based laser interferometry is proposed for the 2030s. 展开更多
关键词 laser interferometry gravitational-wave detection inter-satellite laser ranging transponder laser interferometer
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Design of thermal expansion measurement system based on virtual instrument 被引量:1
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作者 金锋 李田 《Journal of Beijing Institute of Technology》 EI CAS 2013年第4期509-513,共5页
System architecture is presented for an automatic measurement of thermal expansion. The dynamic measurement of the temperature and thermal expansion displacement of the material is carried out through the application ... System architecture is presented for an automatic measurement of thermal expansion. The dynamic measurement of the temperature and thermal expansion displacement of the material is carried out through the application of Labview. The expansion and temperature of material is stored and displayed in real-time. Then the thermal expansion coefficient can be obtained. The measure- ment system composes of SIOS-SP120D laser interferometer, high vacuum furnace, rbh8223h data acquisition card, rbhS104 conditioning board, constant computer power supply. The USB interface is adopted to collect the temperature and displacement data. Experimental results show that the system has high measurement accuracy and good man-machine interface properties. 展开更多
关键词 LABVIEW thermal expansion laser interferometer USB interface
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Far-Infrared Laser Diagnostics in EAST
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作者 史楠 高翔 +5 位作者 揭银先 张寿彪 曾龙 王二辉 杨耀 刘子奚 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第3期347-351,共5页
Structure, improvements and experiment results of a vertical three-channel far- in- frared (FIR) hydrogen cyanide (HCN) laser interferometer, operated routinely in EAST to measure the electron density profile, are... Structure, improvements and experiment results of a vertical three-channel far- in- frared (FIR) hydrogen cyanide (HCN) laser interferometer, operated routinely in EAST to measure the electron density profile, are presented. Moreover, a five-channel deuterium cyanide (DCN) laser interferometer was developed successfully. Some key issues confronted in development, including the economization of working gas and the solution to atmospheric absorption, are resolved and described in detail. 展开更多
关键词 plasma electron density FIR laser interferometer laser power stabilization atmospheric absorption
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Polarization switching in a quasi-isotropic microchip Nd:YAG laser induced by optical feedback
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作者 任成 谈宜东 张书练 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第2期274-279,共6页
This paper demonstrates the influence of external optical feedback on the polarization state of longitudinal modes in quasi-isotropic microchip Nd:YAG lasers. Under optical feedback, the polarization state of longitu... This paper demonstrates the influence of external optical feedback on the polarization state of longitudinal modes in quasi-isotropic microchip Nd:YAG lasers. Under optical feedback, the polarization state of longitudinal modes in quasi-isotropic lasers relies strongly on the intracavity anisotropy loss and mode competition. When the intracavity anisotropy loss is small, external optical feedback can cause polarization switching and strong mode competition between two orthogonal linearly polarized eigenstates of one laser longitudinal mode, which leads to the distortion of laser intensity modulation waveform. The polarization switching is independent of the initial external cavity length. By increasing the intracavity anisotropy loss, one polarization eigenstate can be suppressed and the laser works in single-polarization state. A theoretical analysis based on the compound cavity model is presented, which is in good agreement with the experimental results. The results offer guidance to the development of laser feedback interferometers. 展开更多
关键词 microchip Nd:YAG laser optical feedback polarization switching laser feedback interferometer
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Principle demonstration of fine pointing control system for inter-satellite laser communication 被引量:7
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作者 DONG YuHui LIU HeShan +2 位作者 LUO ZiRen LI YuQiong JIN Gang 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2015年第3期449-453,共5页
Due to high data rates and reliability,inter-satellite laser communication has developed rapidly in these days.However,the stability of the laser beam pointing is still a key technique which needs to be solved;otherwi... Due to high data rates and reliability,inter-satellite laser communication has developed rapidly in these days.However,the stability of the laser beam pointing is still a key technique which needs to be solved;otherwise,the beam pointing jitter noise would reduce the communication quality or,even worse,would make the inter-satellite laser communication impossible.For this purpose,a bench-top of the fine beam pointing control system has been built and tested for inter-satellite laser communication.The pointing offset of more than 100rad is produced by the steering mirror.With beam pointing control system turned on,the offset could be rapidly suppressed to lower than 100 nrad in less than 0.5 s.Moreover,the pointing stability can be kept at 40 nrad for yaw motion and 62 nrad for pitch motion,when the received beam jitter is set at 20rad. 展开更多
关键词 laser beam pointing control inter-satellite laser communication heterodyne laser interferometer differential wave-front sensing(DWS) technique
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Analysis and suppression of thermal effect of an ultra-stable laser interferometer for space-based gravitational waves detection 被引量:4
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作者 Guanfang Wang Zhu Li +7 位作者 Jialing Huang Huizong Duan Xiangqing Huang Hongfan Liu Qi Liu Shanqing Yang Liangcheng Tu Hsien-Chi Yeh 《Chinese Optics Letters》 SCIE EI CAS CSCD 2022年第1期43-48,共6页
In this paper,we present a suppression method for the thermal drift of an ultra-stable laser interferometer.The detailed analysis on the Michelson interferometer indicates that the change in optical path length induce... In this paper,we present a suppression method for the thermal drift of an ultra-stable laser interferometer.The detailed analysis on the Michelson interferometer indicates that the change in optical path length induced by temperature variation can be effectively reduced by choosing proper thickness and/or incident angle of a compensator.Taking the optical bench of the Laser Interferometer Space Antenna Pathfinder as an example,we analyze the optical bench model with a compensator and show that the temperature coefficient of this laser interferometer can be reduced down to 1 pm/K with an incident angle of 0.267828 rad.The method presented in this paper can be used in the design of ultra-stable laser interferometers,especially for space-based gravitational waves detection. 展开更多
关键词 gravitational waves detection laser interferometer temperature compensation optical path calculation
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Simultaneous measurement of vibration amplitude and rotation angle based on a single-channel laser self-mixing interferometer 被引量:2
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作者 孙悟 刘建国 +3 位作者 桂华侨 鲁岸立 王焕钦 陆亦怀 《Chinese Optics Letters》 SCIE EI CAS CSCD 2016年第2期23-26,共4页
Based on a single-channel laser self-mixing interferometcr, we present a new silnultaneous measurement of the vibration amplitude and tile rotation angle of objects that both affect the power spectrum containing two p... Based on a single-channel laser self-mixing interferometcr, we present a new silnultaneous measurement of the vibration amplitude and tile rotation angle of objects that both affect the power spectrum containing two peaks of the interferometer signals. The fitted results indicate that the curve of the peak frequency versus the vibration amplitude follows a linear distribution, and the curve of the difference of the two-peak power values versus the angle follows a Gaussian distribution. A vibration amplitude with an error less than 3.0% and a rotation angle with an error less than 11.7% are calculated from the fitted results. 展开更多
关键词 Simultaneous measurement of vibration amplitude and rotation angle based on a single-channel laser self-mixing interferometer LSM
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Laser self-mixing interferometer for MEMS dynamic measurement 被引量:1
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作者 Zhaoyun ZHANG Yang GAO Wei SU 《Frontiers of Optoelectronics》 EI CSCD 2013年第2期210-215,共6页
Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physi... Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physical measurements, such as displacement, distance, velocity, vibration, and so on. In this paper, this interferometer was tried to be used for micro-electro- mechanical system (MEMS) dynamic measurement. Firstly, its measurement principle based on a three-mirror cavity model was presented, and then the laser self-mixing interferometer for MEMS dynamic measurement was designed, experiments were finally performed as target moves with different forms. Experimental results suggest that self-mixing interferometer is available for MEMS dynamic measurement, and may have wider applications in the future. 展开更多
关键词 laser self-mixing interferometer dynamic measurement micro-electro-mechanical system (MEMS)
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Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides 被引量:2
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作者 XIA CHEN MILAN M.MILOSEVIC +6 位作者 DAVID J.THOMSON ALI Z.KHOKHAR YOHANN FRANZ ANTOINE F.J.RUNGE SAKELLARIS MAILIS ANNA C.PEACOCK GRAHAM T.REED 《Photonics Research》 SCIE EI 2017年第6期97-101,共5页
We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach–Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The... We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach–Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control. 展开更多
关键词 Post-fabrication phase trimming of Mach Zehnder interferometers by laser annealing of germanium implanted waveguides MZI
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