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Optical transmitter module with hybrid integration of DFB laser diode and proton-exchanged LiNbO_(3)modulator chip
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作者 Xuyang Wang He Jia +2 位作者 Junhui Li Yumei Guo Yu Liu 《Journal of Semiconductors》 EI CAS CSCD 2022年第6期34-39,共6页
In this work,a hybrid integrated optical transmitter module was designed and fabricated.A proton-exchanged Mach–Zehnder lithium niobate(LiNbO_(3))modulator chip was chosen to enhance the output extinction ratio.A fib... In this work,a hybrid integrated optical transmitter module was designed and fabricated.A proton-exchanged Mach–Zehnder lithium niobate(LiNbO_(3))modulator chip was chosen to enhance the output extinction ratio.A fiber was used to adjust the rotation of the polarization direction caused by the optical isolator.The whole optical path structure,including the laser chip,lens,fiber,and modulator chip,was simulated to achieve high optical output efficiency.After a series of process improvements,a module with an output extinction ratio of 34 dB and a bandwidth of 20.5 GHz(from 2 GHz)was obtained.The optical output efficiency of the whole module reached approximately 21%.The link performance of the module was also measured. 展开更多
关键词 optical transmitter module hybrid integration DFB laser chip LiNbO3 modulator chip
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Measurement of 3db Bandwidth of Laser Diode Chips
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作者 徐遥 王圩 王子宇 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第8期794-797,共4页
An accurate technique for measuring the frequency response of semiconductor laser diode chips is proposed and experimentally demonstrated.The effects of test jig parasites can be completely removed in the measurement ... An accurate technique for measuring the frequency response of semiconductor laser diode chips is proposed and experimentally demonstrated.The effects of test jig parasites can be completely removed in the measurement by a new calibration method.In theory,the measuring range of the measurement system is only determined by the measuring range of the instruments network analyzer and photo detector.Diodes' bandwidth of 7 5GHz and 10GHz is measured.The results reveal that the method is feasible and comparing with other method,it is more precise and easier to use. 展开更多
关键词 bandwidth measurement CALIBRATION frequency response semiconductor laser diode chips
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MODELING OF LASER MACHINING ON POLYMETHYL METHACRYLATE TO FABRICATE MICROFLUIDIC CHIP 被引量:1
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作者 FU Jianzhong XIANG Hengfu CHEN Zichen 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第4期570-573,共4页
The use of a CO2 laser system for fabrication of microfluidic chip on polymethyl methacrylate (PMMA) is presented to reduce fabrication cost and time of chip. The grooving process of the laser system and a model for... The use of a CO2 laser system for fabrication of microfluidic chip on polymethyl methacrylate (PMMA) is presented to reduce fabrication cost and time of chip. The grooving process of the laser system and a model for the depth of microchannels are investigated. The relations between the depth of laser-cut channels and the laser beam power, velocity or the number of passes of the beam along the same channel are evaluated. In the experiments, the laser beam power varies from 0 to 50 W, the laser beam scanning velocity varies from 0 to 1 000 mm/s and the passes vary in the range of 1 to 10 times. Based on the principle of conservation of energy, the influence of the laser beam velocity, the laser power and the number of groove passes are examine. Considering the grooving interval energy loss, a modified mathematical model has been obtained and experimental data show good agreement with the theoretical model. This approach provides a simple way of predicting groove depths. The system provides a cost alternative of the other methods and it is especially useful on research work of rnicrofluidic prototyping due to the short cycle time of production. 展开更多
关键词 Microfluidic chip laser machining Polymer material Modeling
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Simultaneous laser-induced fluorescence and contactless-conductivity detection for microfluidic chip 被引量:1
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作者 Feng Shen Meng Yang +1 位作者 Yong Yu Qi Kang 《Chinese Chemical Letters》 SCIE CAS CSCD 2008年第11期1333-1336,共4页
A combined detection system involving simultaneous LIF and contacfless-conductometric measurements at the same place of the microfluidic chip was described. The LIF measurement was designed according to the confocal p... A combined detection system involving simultaneous LIF and contacfless-conductometric measurements at the same place of the microfluidic chip was described. The LIF measurement was designed according to the confocal principle and a moveable contactless-conduetivity detector was used in C^4D. Both measurements were mutually independent and advantageous in analyses of mixtures. Various experimental parameters affecting the response were examined and optimized. The performances were demonstrated by simultaneous detection of Rhodamine B. And the results showed that the combined detection system could be used sensitively and reliably. 展开更多
关键词 Microfluidic chip laser-induced fluorescence (LIF) Capacitively coupled contactless-conductivity detection (C^4D)
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Fabricating lifted Haar transform image compression optical chip based on femtosecond laser
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作者 TAO Qing WEI Liangpeng +3 位作者 KUANG Wenxiang YIN Yegang CHENG Jian LIU Dun 《Optoelectronics Letters》 EI 2023年第9期519-525,共7页
In this paper,a lifted Haar transform(LHT)image compression optical chip has been researched to achieve rapid image compression.The chip comprises 32 same image compression optical circuits,and each circuit contains a... In this paper,a lifted Haar transform(LHT)image compression optical chip has been researched to achieve rapid image compression.The chip comprises 32 same image compression optical circuits,and each circuit contains a 2×2 multimode interference(MMI)coupler and aπ/2 delay line phase shifter as the key components.The chip uses highly borosilicate glass as the substrate,Su8 negative photoresist as the core layer,and air as the cladding layer.Its horizontal and longitudinal dimensions are 8011μm×10000μm.Simulation results present that the designed optical circuit has a coupling ratio(CR)of 0:100 and an insertion loss(IL)of 0.001548 d B.Then the chip is fabricated by femtosecond laser and testing results illustrate that the chip has a CR of 6:94 and an IL of 0.518 d B.So,the prepared chip possesses good image compression performance. 展开更多
关键词 Fabricating lifted Haar transform image compression optical chip based on femtosecond laser IMAGE
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Pattern recognition in multi-synaptic photonic spiking neural networks based on a DFB-SA chip 被引量:6
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作者 Yanan Han Shuiying Xiang +6 位作者 Ziwei Song Shuang Gao Xingxing Guo Yahui Zhang Yuechun Shi Xiangfei Chen Yue Hao 《Opto-Electronic Science》 2023年第9期1-10,共10页
Spiking neural networks(SNNs)utilize brain-like spatiotemporal spike encoding for simulating brain functions.Photonic SNN offers an ultrahigh speed and power efficiency platform for implementing high-performance neuro... Spiking neural networks(SNNs)utilize brain-like spatiotemporal spike encoding for simulating brain functions.Photonic SNN offers an ultrahigh speed and power efficiency platform for implementing high-performance neuromorphic computing.Here,we proposed a multi-synaptic photonic SNN,combining the modified remote supervised learning with delayweight co-training to achieve pattern classification.The impact of multi-synaptic connections and the robustness of the network were investigated through numerical simulations.In addition,the collaborative computing of algorithm and hardware was demonstrated based on a fabricated integrated distributed feedback laser with a saturable absorber(DFB-SA),where 10 different noisy digital patterns were successfully classified.A functional photonic SNN that far exceeds the scale limit of hardware integration was achieved based on time-division multiplexing,demonstrating the capability of hardware-algorithm co-computation. 展开更多
关键词 photonic spiking neural network fabricated DFB-SA laser chip multi-synaptic connection optical computing
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Compact orbital angular momentum multiplexing via laser-written glass chips
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作者 CHENHAO LI SIMON GROSS +3 位作者 LEONARDO DE S.MENEZES STEFAN A.MAIER JUDITH M.DAWES HAORAN REN 《Photonics Research》 2025年第10期I0015-I0024,共10页
Orbital angular momentum(OAM)modes have emerged as a promising solution for enhancing the capacity of optical multiplexing systems,leveraging their theoretically unbounded set of orthogonal spatial modes.However,the g... Orbital angular momentum(OAM)modes have emerged as a promising solution for enhancing the capacity of optical multiplexing systems,leveraging their theoretically unbounded set of orthogonal spatial modes.However,the generation and detection of OAM multiplexing signals are predominantly reliant on bulky optical components within complex optical setups.We introduce a compact solution for OAM information processing using laser-written glass chips,facilitating efficient multiplexing and demultiplexing of multiple OAM information channels.During the multiplexing process,OAM channels are managed via laser-scribed single-mode waveguides within a glass chip,with their modes converted using laser-written holograms on the side wall of the glass chip.The reciprocal process is employed for OAM demultiplexing.Our chips seamlessly interface with commercial optical fibers,ensuring compatibility with existing fiber-optic communication infrastructure.This work not only establishes,to our knowledge,a novel approach for OAM optical multiplexing but also underscores the potential of laser writing technology in advancing photonics and its practical applications in optical communications. 展开更多
关键词 bulky optical components laser written glass chips orbital angular momentum oam modes enhancing capacity optical multiplexing systemsleveraging orthogonal spatial modeshoweverthe multiplexing demultiplexing optical setupswe
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基于芯片式银钯合金膜电桥的换能元的设计与性能研究
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作者 樊龙龙 马骏 +5 位作者 刘剑 艾沛延 杨康 郭凯 吴琴钟 韩克华 《爆破器材》 北大核心 2025年第6期8-16,共9页
为了使火工品换能元电桥芯片化,提升火工品换能元电桥的加工精度及效能,采用银钯合金膜制备芯片式火工品换能元电桥,并开展了性能研究。结果表明:通过激光调阻工艺制备的银钯合金膜换能元电桥芯片的电阻精度得到提高,电阻为1Ω时,精度可... 为了使火工品换能元电桥芯片化,提升火工品换能元电桥的加工精度及效能,采用银钯合金膜制备芯片式火工品换能元电桥,并开展了性能研究。结果表明:通过激光调阻工艺制备的银钯合金膜换能元电桥芯片的电阻精度得到提高,电阻为1Ω时,精度可达±1%;基于银钯合金膜芯片的换能元的最小爆发工作电压为16 V(33μF),最小爆发电流为2.9 A(50 ms),最大不熔断电流为1.3 A(5 min),最高温度为215.13℃;基于银钯合金膜电桥芯片换能元的电点火器安全电流在1.3~1.6 A之间,满足钝感火工品1 A、 1 W、 5 min的要求,并且能可靠点燃40 mg斯帝芬酸铅与180 mg的B/KNO_(3)的装药序列。为高效能、高精度电火工品换能元电桥的标准化设计及应用提供技术参考。 展开更多
关键词 火工品 换能元芯片 激光调阻 银钯合金膜
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Optical Properties of Tetrahedral Amorphous Carbon Films and Their Potential for Lab-on-a-Chip 被引量:1
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作者 Katja Guenther Frank Sonntag +1 位作者 Teja Roch Andrés Fabián Lasagni 《Materials Sciences and Applications》 2015年第5期445-455,共11页
In this study, tetrahedral amorphous carbon (ta-C) films with thicknesses between several 100 nm and several micrometers have been deposited onto polished tungsten carbide and steel substrates by pulsed laser depositi... In this study, tetrahedral amorphous carbon (ta-C) films with thicknesses between several 100 nm and several micrometers have been deposited onto polished tungsten carbide and steel substrates by pulsed laser deposition (PLD) using an excimer laser (248 nm wavelength). We investigate the optical properties (e.g. the refractive index (n) and extinction coefficient (k) in the visible and near-infrared wavelength range) of these layers in dependence of the used laser ablation fluence on the target. It is shown that n of ~2000 nm thick ta-C films can be tuned, depending on the sp3-content, between n = 2.5 and 2.8 at a wavelength of 632 nm. Besides of this k reduces with the sp3-content and is as low as 0.03 at sp3-contents of more than 75%. We proof that this gives the opportunity to prepare coating with tailored optical properties. Furthermore, it is shown that the ta-C films have low background fluorescence in the wavelengths range of 380 - 750 nm, which make this thin films attractive for certain optical, medical and biotechnological applications. We present for the first time that one possible application is the use in Lab-on-a-Chip-systems (LOC). Within these systems, the ultrasensitive detection of fluorescence markers and dyes is a challenge. In order to increase the signal-to-noise-ratio, a setup was developed, that used the specific optical properties of ta-C films produced by PLD. We used the ta-C film as an integrated reflector that combined low background fluorescence, a low reflectivity at the excitation wavelength and the high reflectivity at the emission wavelength. We prove that this setup improves the detection of fluorescence photons. 展开更多
关键词 TETRAHEDRAL AMORPHOUS CARBON PULSED laser Deposition Thin Films DIAMOND-LIKE CARBON LAB-ON-A-chip
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基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法 被引量:3
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作者 胡玮 赵菊敏 李灯熬 《太原理工大学学报》 北大核心 2025年第1期137-147,共11页
【目的】高功率半导体激光器的光学灾变损伤是限制其可靠性和寿命的主要因素,因此,有效的缺陷检测对于优化激光器芯片的制造工艺和结构设计至关重要。提出了一种基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法,旨在解决深度学习应... 【目的】高功率半导体激光器的光学灾变损伤是限制其可靠性和寿命的主要因素,因此,有效的缺陷检测对于优化激光器芯片的制造工艺和结构设计至关重要。提出了一种基于改进YOLOv7-Tiny的轻量化激光器芯片缺陷检测算法,旨在解决深度学习应用于缺陷检测时面临的高计算量和参数量问题。【方法】利用轻量化卷积神经网络替换特征提取主干有效减少对计算资源消耗,有效提取电致发光图像中缺陷特征。为从上下文特征获取更丰富的信息,引入多分支重参数化卷积块重构聚合模块,通过多路径分支丰富特征表示,训练与推理的解耦保证检测效率。此外,结合坐标注意力,提升定位精度。进行了剪枝实验和模型部署,验证算法的初步应用。【结果】在电致发光缺陷数据集上的实验结果显示,本文方法能在较低的参数和计算量下准确地检测出芯片缺陷,展现出良好的性能。 展开更多
关键词 光学灾变损伤 半导体激光器芯片 缺陷检测 轻量化 模型剪枝
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脉冲激光-超声复合辅助车削SiCp/Al的切屑形成演变过程分析 被引量:1
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作者 林洁琼 解略 +2 位作者 于行 谷岩 周晓勤 《表面技术》 北大核心 2025年第8期167-179,共13页
目的 SiCp/Al复合材料与传统的金属材料相比具有高硬度、高抗弯强度以及热膨胀系数低等优异的物理性能,但其加工过程困难。旨在揭示脉冲激光-超声复合辅助车削SiCp/Al复合材料的切屑形成机理。方法 建立理论模型来确定最小未变形切屑厚... 目的 SiCp/Al复合材料与传统的金属材料相比具有高硬度、高抗弯强度以及热膨胀系数低等优异的物理性能,但其加工过程困难。旨在揭示脉冲激光-超声复合辅助车削SiCp/Al复合材料的切屑形成机理。方法 建立理论模型来确定最小未变形切屑厚度,进而揭示脉冲激光-超声复合辅助车削SiCp/Al切屑形成的临界条件。并比较常规车削、脉冲激光辅助车削和脉冲激光-超声复合辅助车削的切屑形态,探究脉冲激光功率对切屑形成机理的影响。结果 研究表明,当脉冲激光作用于材料表面时,会产生热软化效应。这种效应使材料更易去除,并减少了切屑自由表面颗粒的破损程度。此外,在超声振动的辅助下,切屑连续性得到进一步改善。通过对加工后工件表面形貌测试发现,脉冲激光-超声复合辅助加工的表面粗糙度最小,为0.388μm,与常规加工相比降低了70.8%;脉冲激光-超声复合辅助加工的亚表面变形层厚度最小,为37.28μm。结论 通过深入分析复合车削切屑的形成及其对表面质量的影响,为优化SiCp/Al复合材料的表面质量提供了有力的理论支撑和实用的加工方法。 展开更多
关键词 脉冲激光-超声复合辅助车削 SICP/AL 切屑形成机理 表面质量
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气体放电与等离子体在芯片制造领域中的应用
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作者 付洋洋 王新新 +11 位作者 邹晓兵 韩星 陈佳毅 张东荷雨 陈健东 林楚彬 杨栋 贾鸿宇 王倩 郑博聪 赵凯 肖舒 《高电压技术》 北大核心 2025年第8期4458-4477,共20页
放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典... 放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典型应用进行了概述。首先,针对光刻光源系统,介绍了气体放电泵浦准分子激光、激光产生等离子体辐射极紫外光的基本原理,其本质都是利用等离子体产生的光辐射;其次,针对刻蚀用射频等离子体,介绍了低气压射频放电的产生、特性、调控及相关工艺技术;再次,对薄膜工艺、离子注入装备原理及相关放电等离子体技术原理进行了介绍与讨论;随后,在量测与检测方面,分别介绍了光学检测与电子束检测的特点,阐述了激光维持等离子体实现宽谱强辐射光源的基本原理与特性;最后,介绍了基于辉光放电的等离子体清洗技术,以及其在去除刻蚀残留物中的应用。通过总结梳理气体放电与等离子体在半导体制造领域中的应用及相关核心技术,明晰放电等离子体科学基础研究方向,助力解决半导体装备国产化过程中的等离子体技术瓶颈。 展开更多
关键词 气体放电 等离子体 芯片制造 气体激光 等离子体辐射 射频放电 等离子体刻蚀 激光维持等离子体 辉光放电清洗
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飞秒激光直写单模短波长蓝宝石光波导(特邀)
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作者 杨鑫 范文卓 +4 位作者 肖凯恒 尹思宇 胡志勇 魏伟华 田振男 《红外与激光工程》 北大核心 2025年第9期140-147,共8页
蓝宝石因其较宽的光谱透射窗口及高稳定性,成为制备短波长、高功率光子集成器件的理想材料。文中采用515 nm飞秒激光结合狭缝光束整形技术,在蓝宝石内部激光焦斑下方区域制备出类I型单模光波导。与Ⅱ型波导不同,该波导不存在双侧壁结构... 蓝宝石因其较宽的光谱透射窗口及高稳定性,成为制备短波长、高功率光子集成器件的理想材料。文中采用515 nm飞秒激光结合狭缝光束整形技术,在蓝宝石内部激光焦斑下方区域制备出类I型单模光波导。与Ⅱ型波导不同,该波导不存在双侧壁结构,更易于构建空间耦合器件。制备的510 nm单模光波导传输损耗低至1.3 dB/cm,并基于该波导构建了分光比例任意可控的定向耦合器。该类I型蓝宝石光波导制备方法为适用于极端环境的宽光谱波导耦合光子器件提供新的设计思路和技术支持。 展开更多
关键词 飞秒激光 精密加工 蓝宝石 单模波导 光芯片
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蓝绿水下激光衰减测量系统设计
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作者 孙莹 赵忠义 +1 位作者 许锐 杨亚辉 《激光杂志》 北大核心 2025年第7期24-30,共7页
为了进一步提高蓝绿光水下激光衰减系数的测量技术,本研究基于水衰减系数的测量原理,设计并实现了一种蓝绿水下激光衰减测量系统。采用反射镜和分光镜进行蓝光和绿光的光路设计,使蓝光和绿光分别照射到硅光电池;设计衰减测量系统的机械... 为了进一步提高蓝绿光水下激光衰减系数的测量技术,本研究基于水衰减系数的测量原理,设计并实现了一种蓝绿水下激光衰减测量系统。采用反射镜和分光镜进行蓝光和绿光的光路设计,使蓝光和绿光分别照射到硅光电池;设计衰减测量系统的机械结构使各部件的协同工作和光路准确,并对其进行机械加工和表面氧化处理以防止海水腐蚀;基于CH32单片机设计激光驱动电路。最后,开展了相关水下实验研究,实验表明,蓝光在水中的衰减系数为0.521,绿光在水中的衰减系数为0.345,水中波长450 nm蓝光衰减系数大于波长510 nm的绿光。 展开更多
关键词 衰减系数 单片机 激光 传感器
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碎石封层三维视角的剥落程度量化方法
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作者 张炎棣 惠冰 +2 位作者 马子业 李元乐 汪海年 《华南理工大学学报(自然科学版)》 北大核心 2025年第2期80-91,共12页
为准确量化碎石封层集料剥落程度,克服传统脱石法和图像法因忽视碎石粒形与嵌固姿态导致对剥落程度模糊评价的问题,采用室内三维激光检测设备采集碎石封层剥落前后点云数据,引入大津法中最小类内方差概念求取高程分割阈值,进而提取空间... 为准确量化碎石封层集料剥落程度,克服传统脱石法和图像法因忽视碎石粒形与嵌固姿态导致对剥落程度模糊评价的问题,采用室内三维激光检测设备采集碎石封层剥落前后点云数据,引入大津法中最小类内方差概念求取高程分割阈值,进而提取空间剥落轮廓,实现剥落面积指标的计算并提供了激光法测算剥落面积的误差分布,复位了逐颗剥落集料,进而对比了每个剥落区域的脱石质量和剥落面积指标,最后采用集料图像测量系统AIMS-Ⅱ分析剥落集料的粒形特征。结果表明:统计了共计75个剥落面积样本的相对误差,均值为4.07%,表明激光法具有良好的检测精度;同时剥落面积计算标准差位于1.73~3.89,表明激光法具有良好的检测稳定性;对比了逐个剥落区域的剥落集料质量与剥落面积,随着剥落面积增大,剥落颗粒的质量具有随之增大的趋势,然而剥落面积与剥落颗粒质量并非同步增大,存在剥落面积增大但质量减小的现象;通过AIMS-Ⅱ对剥落颗粒的粒形分析表明片状集料更可能出现质量小但剥落面积大的情况,而针状集料更可能出现质量大但剥落面积小的情况。 展开更多
关键词 道路工程 碎石封层 三维激光 集料剥落 剥落面积
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微流控芯片加工专利技术分析研究
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作者 王晓红 王鑫 《价值工程》 2025年第21期166-168,共3页
本文介绍了微流控芯片加工技术的国内外专利的基本情况,归纳和总结相关专利的总体申请态势、重要申请人及技术分布,并且基于该领域具有代表性的重要专利分析梳理了激光加工、光刻加工和3D打印等加工方法的技术演进路线,并对未来的发展... 本文介绍了微流控芯片加工技术的国内外专利的基本情况,归纳和总结相关专利的总体申请态势、重要申请人及技术分布,并且基于该领域具有代表性的重要专利分析梳理了激光加工、光刻加工和3D打印等加工方法的技术演进路线,并对未来的发展趋势进行了预测。 展开更多
关键词 关微流控芯片 激光加工 3D打印
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空间一点对多点激光通信技术发展概述
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作者 王亚菁 李立 +6 位作者 靳一 张建华 李文屏 孟令杰 徐常志 梁慧剑 齐志强 《通信学报》 北大核心 2025年第10期24-39,共16页
激光通信是未来空间信息基础设施建设的关键支撑。传统“点对点”模式存在资源利用率低、结构复杂、可扩展性不足等问题,“一点对多点”激光通信架构逐渐成为重点研究方向。基于此,系统梳理了“一点对多点”激光通信架构的技术路径,将... 激光通信是未来空间信息基础设施建设的关键支撑。传统“点对点”模式存在资源利用率低、结构复杂、可扩展性不足等问题,“一点对多点”激光通信架构逐渐成为重点研究方向。基于此,系统梳理了“一点对多点”激光通信架构的技术路径,将其分为机械式光束偏转与光学相控阵(OPA)两大类,并重点对比了液晶光学相控阵(LC-OPA)、微机电系统光学相控阵(MEMS-OPA)及硅基光波导相控阵(Si-OWPA)的性能优劣。随后,针对某遥感卫星典型应用场景,提出了基于Si-OWPA的空间“一点对多点”激光通信系统构想,为后续技术演进与工程应用提供参考。 展开更多
关键词 激光通信 灵活组网 光学相控阵 芯片集成 捕获跟踪
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纳秒激光对硅基底上的微纳颗粒的清洗研究
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作者 张雨阳 杨伟 +2 位作者 牛富增 谢仑靖 韩敬华 《激光与红外》 北大核心 2025年第9期1406-1413,共8页
激光清洗研究可以在航空航天和电子元件领域对微米甚至纳米的器件实现精确清洗,并有更加精确的控制。然而针对颗粒在激光清洗作用下不同尺寸的清洗机理以及温度变化情况研究较少。针对上述问题,本研究内容首先单利用激光器对硅表面氧化... 激光清洗研究可以在航空航天和电子元件领域对微米甚至纳米的器件实现精确清洗,并有更加精确的控制。然而针对颗粒在激光清洗作用下不同尺寸的清洗机理以及温度变化情况研究较少。针对上述问题,本研究内容首先单利用激光器对硅表面氧化铝微纳颗粒进行了清洗实验,然后根据理论分析和有限元仿真软件来分析激光在清洗时的温度变化和作用机理。结果表明,在能量为207mJ开始清洗,激光能量提升为激光能量为287mJ时,此时清洗的效果最好,在超过312mJ损伤基底;通过理论分析得到激光能量和颗粒半径都与清洗力成正比关系;颗粒越小,颗粒吸附的能力就越大,颗粒的形变程度也就越大,越难以清洗。这些结果证明了激光清洗硅片表面氧化铝颗粒的可行性和有效性,对于工业化激光清洗硅片表面氧化铝颗粒的参数选择具有重要参考意义。 展开更多
关键词 激光清洗 有限元模拟 温度分析 硅片 氧化铝颗粒
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激光加热辅助铣削钛铝合金试验研究 被引量:1
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作者 王明海 张言可 +2 位作者 孔宪俊 宋一平 李雅楠 《工具技术》 北大核心 2025年第2期36-41,共6页
激光辅助铣削技术是加工难加工材料的一种有效方法,利用高能激光束照射待加工区域可以提高材料温度,使材料软化以改善其铣削性能。本文通过开展钛铝合金材料的激光辅助铣削加工试验,研究激光引起的温度变化以及铣削参数对加工中切削力... 激光辅助铣削技术是加工难加工材料的一种有效方法,利用高能激光束照射待加工区域可以提高材料温度,使材料软化以改善其铣削性能。本文通过开展钛铝合金材料的激光辅助铣削加工试验,研究激光引起的温度变化以及铣削参数对加工中切削力、切屑状态、加工表面质量、刀具磨损的影响。结果表明,当激光加热区域至650℃时,工件材料得到充分软化且不对材料产生烧蚀破坏,并在n=1600 r/min,v_(f)=80 mm/min,a_(p)=0.5 mm的加工条件下进行激光辅助铣削实现塑性加工:此时切削力比常规加工中的低;切屑形成过程中发生塑性流动,产生连续型切屑;此高温下对刀具影响较小,能够有效降低刀具磨损,同时也可以降低已加工表面粗糙度。 展开更多
关键词 激光加热辅助铣削 钛铝合金 切削力 切屑 表面粗糙度 刀具磨损
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On-chip tunable single-mode high-power narrow-linewidth Fabry–Perot microcavity laser on Yb^(3+)-doped thin-film lithium niobate
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作者 QINFEN HUANG ZHIWEI FANG +6 位作者 ZHE WANG YIRAN ZHU JIAN LIU YUAN ZHOU JIANPING YU MIN WANG YA CHENG 《Photonics Research》 2025年第4期935-940,共6页
Ytterbium ion(Yb^(3+))-doped lasers are widely used in precision machining and precision measurement fields because of their high efficiency and high power,which are primarily based on solid-state lasers and fiber las... Ytterbium ion(Yb^(3+))-doped lasers are widely used in precision machining and precision measurement fields because of their high efficiency and high power,which are primarily based on solid-state lasers and fiber lasers.Here,we demonstrate an on-chip Yb^(3+)-doped thin-film lithium niobate(Yb:TFLN)Fabry-Perot microcavity laser.We achieve single-frequency laser operation at 1030 and 1060 nm with a side-mode suppression ratio above 30 dB,an emission linewidth below 40 pm,and an output power up to 1.5 mW at 1060 nm and 0.3 mW at 1030 nm.In addition,using the electro-optic effect of lithium niobate,we achieve a laser tuning efficiency of 4 pm/V.This work opens the path to on-chip high-power and mode-locked ultrafast laser output. 展开更多
关键词 Fabry Perot microcavity Yb doped thin film lithium niobate fiber lasersherewe precision measurement precision machining side mode suppression narrow linewidth emission chip laser
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