Laser-induced chemical vapor deposition (LCVD) is an important process for freeform microfabrication of high aspect ratio prototypes. The system consists of a laser beam focused onto a movable substrate in a vacuum ch...Laser-induced chemical vapor deposition (LCVD) is an important process for freeform microfabrication of high aspect ratio prototypes. The system consists of a laser beam focused onto a movable substrate in a vacuum chamber. Heat from the laser at or near the focal spot of the beam causes gas in the chamber to react. As a result, solid-phase reaction products are deposited on the substrate to form the microstructure. In this paper, we develop a numerical model for simulating growth of an axisymmetric cylindrical rod by pre-specifying the surface temperatures required for growing the rod and then by solving for the laser power that satisfies the pre-specified temperatures. The solution using least squares is obtained by minimizing the sum of square deviations between the pre-specified surface temperatures and the calculated temperatures from the heat equation with a given laser power as a heat source. Model predictions of the laser power over growth time helped in optimizing the growth process. Rods grown based on the predicted laser power from the numerical model were very close to being cylindrical in shape. Ways to further improve the model are being investigated.展开更多
Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133....Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa,the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar.In the experiments,the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated,the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed.Based on experiment data,the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.展开更多
文摘Laser-induced chemical vapor deposition (LCVD) is an important process for freeform microfabrication of high aspect ratio prototypes. The system consists of a laser beam focused onto a movable substrate in a vacuum chamber. Heat from the laser at or near the focal spot of the beam causes gas in the chamber to react. As a result, solid-phase reaction products are deposited on the substrate to form the microstructure. In this paper, we develop a numerical model for simulating growth of an axisymmetric cylindrical rod by pre-specifying the surface temperatures required for growing the rod and then by solving for the laser power that satisfies the pre-specified temperatures. The solution using least squares is obtained by minimizing the sum of square deviations between the pre-specified surface temperatures and the calculated temperatures from the heat equation with a given laser power as a heat source. Model predictions of the laser power over growth time helped in optimizing the growth process. Rods grown based on the predicted laser power from the numerical model were very close to being cylindrical in shape. Ways to further improve the model are being investigated.
基金Project supported by Scientific Research Fund of Centre South University of Forestry and TechnologyProject supported by Teaching Innovation Fund of Centre South University of Forestry and Technology
文摘Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa,the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar.In the experiments,the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated,the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed.Based on experiment data,the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.
