A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Thr...A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.展开更多
Non-local electron transport in laser-produced plasmas under inertial confinement fusion （ICF） conditions is studied based on Fokker-Planck （FP） and hydrodynamic simulations. A comparison between the classical Spi...Non-local electron transport in laser-produced plasmas under inertial confinement fusion （ICF） conditions is studied based on Fokker-Planck （FP） and hydrodynamic simulations. A comparison between the classical Spitzer-Harm （SH） transport model and non-local transport models has been made. The result shows that among those non-local models the Epperlein and Short （ES） model of heat flux is in reasonable agreement with the FP simulation in overdense region. However, the non-local models are invalid in the hot underdense plasmas. Hydrodynamic simulation is performed with the flux limiting model and the non-local model, separately. The simulation results show that in the underdense region of the laser-produced plasmas the temperature given by the flux limiting model is significantly higher than that given with the non-local model.展开更多
A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained a...A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.展开更多
In order to mitigate the effect of the strong electromagnetic pulse, which produces laser-plasma interactions, we designed a new streaked X-ray spectrometer （SXS） enclosed within a well-sealed, electromag- netic int...In order to mitigate the effect of the strong electromagnetic pulse, which produces laser-plasma interactions, we designed a new streaked X-ray spectrometer （SXS） enclosed within a well-sealed, electromag- netic interference-free cavity. The SXS can cover a wide selection of spectral windows using interchangeable Bragg crystals and by appropriate adjustment of the Bragg angle. The SXS has been used to observe time-re- solved X-ray spectrum in the 2.5 keV to 3.5 keV photon-energy range, resulting in a demonstrated spectral res- olution of about 13 at 2960 eV with a time resolution of 10 ps. The observed time and spectral resolutions dem- onstrate the applicability of the SXS for studies of laser-produced plasmas.展开更多
Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Req...Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.展开更多
In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced ...In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.展开更多
We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are ir...We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.展开更多
Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acqui...Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.展开更多
In order to measure spatially and temporarily resolved laser-produced plasma X-ray spectra in 0.2 - 2 nm region, a novel two-channel elliptically-bent crystal spectrograph has been developed. Dispersive elements are L...In order to measure spatially and temporarily resolved laser-produced plasma X-ray spectra in 0.2 - 2 nm region, a novel two-channel elliptically-bent crystal spectrograph has been developed. Dispersive elements are LiF, PET, Mica, and KAP crystals, which cover Bragg angles in the range of 30 - 67.5 degrees. Eccentricity and focal distance of twin ellipses are 0.9586 and 1350 mm, respectively. Spatially resolved spectrum is photographically recorded with an X-ray film or X-CCD camera in one channel, and temporarily resolved one is photographically recorded with an X-ray streak camera in another channel, thus spatially and temporarily resolved spectra can be simultaneously obtained. Spectral images were acquired with X-CCD and PET in SHENGUANG-II laser facility, and experimental results show that the spectral resolution of the spectrograph is about 0.002 nm.展开更多
The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectro...The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectroscopy technique.The spectral profiles involve an intense quasi-continuous band with superimposed intense characteristic radiation and are different with the increase of delay time.The spectral structures were also analyzed according to Hartree-Fock calculations with configuration interaction effects and contributed from 4d^4/;4d-4p,and 4d-5f unresolved transition arrays of Sb7*-Sb131.A steady-state collisionalradiative model was used to estimate the electron temperature and density range of Sb plasmas.This work would enrich the spectral data of highly-charged ions and provided a possible selection for developing EUV light sources.展开更多
The evolutions of the electron temperatures of Muminum plasmas produced with 0.351 μm laser are simulated by means of one-dimensional hydrodynamic code. The simulations show that the plasma geometry has strong influe...The evolutions of the electron temperatures of Muminum plasmas produced with 0.351 μm laser are simulated by means of one-dimensional hydrodynamic code. The simulations show that the plasma geometry has strong influence on the electron temperature＇s evolution while the effect of the flux limiter is not so significant. The simulations are in good agreement with the experiments only at some spatial points. A full comparison between the simulations and experiments indicates that the one-dimensional code is not accurate enough to characterize the laser-produced plasmas. A post-processor code based on the hydro code is developed to generate the streak image of the Thomson scattering spectra, which can be directly compared with the experimental data.展开更多
A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By co...A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By comparing the simulated spectra obtained by using the FLYCHK code with the measured titanium spectra, the temporal plasma states, i.e.,the electron temperatures and densities, are deduced. To evaluate the feasibility of using the method for the characterization of Au plasma states, the deduced plasma states from the measured titanium spectra are compared with the Multi-1D hydrodynamic simulations of laser-produced Au plasmas. By comparing the measured and simulated results, an overall agreement for the electron temperatures is found, whereas there are deviations in the electron densities. The experiment–theory discrepancy may suggest that the plasma state could not be well reproduced by the Multi-1D hydrodynamic simulation, in which the radial gradient is not taken into account. Further investigations on the spectral characterization and hydrodynamic simulations of the plasma states are needed. All the measured and FLYCHK simulated spectra are given in this paper as datasets. The datasets are openly available at http://www.doi.org/10.57760/sciencedb.j00113.00032.展开更多
Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this ef...Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.展开更多
A plasma is produced in air by using a high-intensity Q-switch Nd：YAG pulsed laser to irradiate a solid target, and the impulses delivering from the plasma to the target are measured at different laser power densitie...A plasma is produced in air by using a high-intensity Q-switch Nd：YAG pulsed laser to irradiate a solid target, and the impulses delivering from the plasma to the target are measured at different laser power densities. Analysing the formation process of laser plasma and the laser supported detonation wave （LSDW） and using fluid mechanics theory and Pirri＇s methods, an approximately theoretical solution of the impulse delivering from the plasma to the target under our experimental condition is found. Furthermore, according to the formation time of plasma and the variation of pressure in plasma in a non-equilibrium state, a physical model of the interaction between the pulse laser and the solid target is developed. The plasma evolutions with time during and after the laser pulse irradiating the target are simulated numerically by using a three-dimensional difference scheme. And the numerical solutions of the impulse delivering from the plasma to the target are obtained. A comparison among the theoretical, numerical and experimental results and their analyses are performed. The experimental results are explained reasonably. The consistency between numerical results and experimental results implies that the numerical calculation model used in this paper can well describe the mechanical action of the laser on the target.展开更多
The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the s...The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the specific emission lines from the SnO2 plasma was characterized. The intensities of Sn I and Sn Ⅱ lines first increased, and then decreased with the delay time. The results also showed a faster decay of Sn I atoms than that of Sn II ionic species. The temporal evolutions of the SnO2 plasma parameters （electron temperature and density） were deduced. The measured temperature and density of SnO2 plasma are 4.38 eV to 0.5 eV and 11.38×1017 cm 3 to 1.1×1017^ cm-3, for delay times between 0.1 μs and 2.2 #s. We also investigated the effect of the laser pulse energy on Sn02 plasma.展开更多
Several experiments are performed on the ShenGuang-Ⅱ laser facility to investigate an x-ray source and test radiography concepts. X-ray lines emitted from laser-produced plasmas are the most practical means of genera...Several experiments are performed on the ShenGuang-Ⅱ laser facility to investigate an x-ray source and test radiography concepts. X-ray lines emitted from laser-produced plasmas are the most practical means of generating these high intensity sources. By using a time-integrated space-resolved keV spectroscope and pinhole camera, potential helium-like titanium Kα x-ray backlighting （radiography） line source is studied as a function of laser wavelength, ratio of pre-pulse intensity to main pulse intensity, and laser intensity （from 7.25 to ～ 11.3 × 10^15 W/cm2）. One-dimensional radiography using a grid consisting of 5 #m Au wires on 16 μm period and the pinhole-assisted point projection is tested. The measurements show that the size of the helium-like titanium Ka source from a simple foil target is larger than 100 ~m, and relative x-ray line emission conversion efficiency ~x from the incident laser light energy to helium- like titanium K-shell spectrum increases significantly with pre-pulse intensity increasing, increases rapidly with laser wavelength decreasing, and increases moderately with main laser intensity increasing. It is also found that a gold gird foils can reach an imaging resolution better than 5-μm featured with high contrast. It is further demonstrated that the pinhole-assisted point projection at such a level will be a novel two-dimensional imaging diagnostic technique for inertial confinement fusion experiments.展开更多
A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 ...A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.展开更多
In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 ...In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.展开更多
We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on ...We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.展开更多
This article provides a short review on the importance of the detailed analysis of a Langmuir probe I-V trace in a multi-Maxwellian plasma,and discuss proper procedures analyzing Langmuir probe I-V traces in bi-Maxwel...This article provides a short review on the importance of the detailed analysis of a Langmuir probe I-V trace in a multi-Maxwellian plasma,and discuss proper procedures analyzing Langmuir probe I-V traces in bi-Maxwellian and triple-Maxwellian Electron Energy Distribution Function(EEDF)plasmas.Discus⁃sion and demonstration of procedures include the treatment of the ion saturation current,electron saturation cur⁃rent,space-charge effects on the I-V trace,and most importantly how to properly isolate and fit for each electron group present in an I-V trace reflecting a mult-Maxwellian EEDF,as well as how having a multi-Maxwellian EEDF affects the procedures of treating the ion and electron saturation currents.Shortcomings of common improp⁃er procedures are discussed and demonstrated with simulated I-V traces to show how these procedures gives false measurements.展开更多
基金National Natural Science Foundation of China(Nos.10375064,10575102,10625523)Nation High-Tech ICF Committee
文摘A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.
基金Project supported by the National Natural Science Foundation of China （Grant Nos 10375064, 10575102, 10625523）, and the National High Technology Inertial Confinement Fusion Foundation of China.
文摘Non-local electron transport in laser-produced plasmas under inertial confinement fusion （ICF） conditions is studied based on Fokker-Planck （FP） and hydrodynamic simulations. A comparison between the classical Spitzer-Harm （SH） transport model and non-local transport models has been made. The result shows that among those non-local models the Epperlein and Short （ES） model of heat flux is in reasonable agreement with the FP simulation in overdense region. However, the non-local models are invalid in the hot underdense plasmas. Hydrodynamic simulation is performed with the flux limiting model and the non-local model, separately. The simulation results show that in the underdense region of the laser-produced plasmas the temperature given by the flux limiting model is significantly higher than that given with the non-local model.
基金This work is supported by the National Key Research and Development Program of China(No.2017YFA0402300)National Natural Science Foundation of China(Nos.11874051,11564037,61741513,11904293)the Special Fund Project for Guiding Scientific and Technological Inno-vation of Gansu Province(No.2019zx-10).
文摘A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.
文摘In order to mitigate the effect of the strong electromagnetic pulse, which produces laser-plasma interactions, we designed a new streaked X-ray spectrometer （SXS） enclosed within a well-sealed, electromag- netic interference-free cavity. The SXS can cover a wide selection of spectral windows using interchangeable Bragg crystals and by appropriate adjustment of the Bragg angle. The SXS has been used to observe time-re- solved X-ray spectrum in the 2.5 keV to 3.5 keV photon-energy range, resulting in a demonstrated spectral res- olution of about 13 at 2960 eV with a time resolution of 10 ps. The observed time and spectral resolutions dem- onstrate the applicability of the SXS for studies of laser-produced plasmas.
基金support from Guangdong Major Project of Basic and Applied Basic Research(No.2019B030302003)。
文摘Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.
基金Project supported by the National Key Research and Development Program of China(Grant No.2017YFA0402300)the National Natural Science Foundation of China(Grant Nos.11874051,11904293,and 61965015)the Special Fund Project for Guiding Scientific and Technological Innovation of Gansu Province,China(Grant No.2019zx-10).
文摘In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.
基金Project supported by the National Natural Science Foundation of China(Grant No.11304235)the Director Fund of WNLO,China
文摘We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.
基金Project supported by the National Key Research and Development Program of China(Grant No.2017YFA0402300)the National Natural Science Foundation of China(Grant Nos.11874051,11274254,and 11564037)
文摘Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.
基金This work was supported by the High-Technology Research and Development Program of Chinaunder Grant No.863-804-3.
文摘In order to measure spatially and temporarily resolved laser-produced plasma X-ray spectra in 0.2 - 2 nm region, a novel two-channel elliptically-bent crystal spectrograph has been developed. Dispersive elements are LiF, PET, Mica, and KAP crystals, which cover Bragg angles in the range of 30 - 67.5 degrees. Eccentricity and focal distance of twin ellipses are 0.9586 and 1350 mm, respectively. Spatially resolved spectrum is photographically recorded with an X-ray film or X-CCD camera in one channel, and temporarily resolved one is photographically recorded with an X-ray streak camera in another channel, thus spatially and temporarily resolved spectra can be simultaneously obtained. Spectral images were acquired with X-CCD and PET in SHENGUANG-II laser facility, and experimental results show that the spectral resolution of the spectrograph is about 0.002 nm.
文摘The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectroscopy technique.The spectral profiles involve an intense quasi-continuous band with superimposed intense characteristic radiation and are different with the increase of delay time.The spectral structures were also analyzed according to Hartree-Fock calculations with configuration interaction effects and contributed from 4d^4/;4d-4p,and 4d-5f unresolved transition arrays of Sb7*-Sb131.A steady-state collisionalradiative model was used to estimate the electron temperature and density range of Sb plasmas.This work would enrich the spectral data of highly-charged ions and provided a possible selection for developing EUV light sources.
基金supported by Natural Science Foundation of China (Nos. 10375064, 10275056, 10176028)the National High Technology Programs on Inertially Confined Fusion of China
文摘The evolutions of the electron temperatures of Muminum plasmas produced with 0.351 μm laser are simulated by means of one-dimensional hydrodynamic code. The simulations show that the plasma geometry has strong influence on the electron temperature＇s evolution while the effect of the flux limiter is not so significant. The simulations are in good agreement with the experiments only at some spatial points. A full comparison between the simulations and experiments indicates that the one-dimensional code is not accurate enough to characterize the laser-produced plasmas. A post-processor code based on the hydro code is developed to generate the streak image of the Thomson scattering spectra, which can be directly compared with the experimental data.
基金Project supported by the National Key Research and Development Program of China (Grant No.2017YFA0403300)the National Natural Science Foundation of China (Grant Nos.12074352 and 11675158)Fundamental Research Funds for the Central Universities in China (Grant No.YJ202144)。
文摘A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By comparing the simulated spectra obtained by using the FLYCHK code with the measured titanium spectra, the temporal plasma states, i.e.,the electron temperatures and densities, are deduced. To evaluate the feasibility of using the method for the characterization of Au plasma states, the deduced plasma states from the measured titanium spectra are compared with the Multi-1D hydrodynamic simulations of laser-produced Au plasmas. By comparing the measured and simulated results, an overall agreement for the electron temperatures is found, whereas there are deviations in the electron densities. The experiment–theory discrepancy may suggest that the plasma state could not be well reproduced by the Multi-1D hydrodynamic simulation, in which the radial gradient is not taken into account. Further investigations on the spectral characterization and hydrodynamic simulations of the plasma states are needed. All the measured and FLYCHK simulated spectra are given in this paper as datasets. The datasets are openly available at http://www.doi.org/10.57760/sciencedb.j00113.00032.
基金supported by the National Key Research and Development Program of China(Grant No.2017YFA0402300)National Natural Science Foundation of China(NSFC)(Grant Nos.11904293,11874051)。
文摘Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.
基金Project supported by the National Natural Science Foundation of China (Grant No 60578015)the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No 20050288025)the Foundation of the Ministry of Education of China for Outstanding Young Teachers in University (2003-2008)
文摘A plasma is produced in air by using a high-intensity Q-switch Nd：YAG pulsed laser to irradiate a solid target, and the impulses delivering from the plasma to the target are measured at different laser power densities. Analysing the formation process of laser plasma and the laser supported detonation wave （LSDW） and using fluid mechanics theory and Pirri＇s methods, an approximately theoretical solution of the impulse delivering from the plasma to the target under our experimental condition is found. Furthermore, according to the formation time of plasma and the variation of pressure in plasma in a non-equilibrium state, a physical model of the interaction between the pulse laser and the solid target is developed. The plasma evolutions with time during and after the laser pulse irradiating the target are simulated numerically by using a three-dimensional difference scheme. And the numerical solutions of the impulse delivering from the plasma to the target are obtained. A comparison among the theoretical, numerical and experimental results and their analyses are performed. The experimental results are explained reasonably. The consistency between numerical results and experimental results implies that the numerical calculation model used in this paper can well describe the mechanical action of the laser on the target.
基金supported by National Natural Science Foundation of China(No.11304235)the Director Fund of WNLO
文摘The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the specific emission lines from the SnO2 plasma was characterized. The intensities of Sn I and Sn Ⅱ lines first increased, and then decreased with the delay time. The results also showed a faster decay of Sn I atoms than that of Sn II ionic species. The temporal evolutions of the SnO2 plasma parameters （electron temperature and density） were deduced. The measured temperature and density of SnO2 plasma are 4.38 eV to 0.5 eV and 11.38×1017 cm 3 to 1.1×1017^ cm-3, for delay times between 0.1 μs and 2.2 #s. We also investigated the effect of the laser pulse energy on Sn02 plasma.
基金supported by the National High Technology Development Program of China (Grant No. 2009AA8046006)
文摘Several experiments are performed on the ShenGuang-Ⅱ laser facility to investigate an x-ray source and test radiography concepts. X-ray lines emitted from laser-produced plasmas are the most practical means of generating these high intensity sources. By using a time-integrated space-resolved keV spectroscope and pinhole camera, potential helium-like titanium Kα x-ray backlighting （radiography） line source is studied as a function of laser wavelength, ratio of pre-pulse intensity to main pulse intensity, and laser intensity （from 7.25 to ～ 11.3 × 10^15 W/cm2）. One-dimensional radiography using a grid consisting of 5 #m Au wires on 16 μm period and the pinhole-assisted point projection is tested. The measurements show that the size of the helium-like titanium Ka source from a simple foil target is larger than 100 ~m, and relative x-ray line emission conversion efficiency ~x from the incident laser light energy to helium- like titanium K-shell spectrum increases significantly with pre-pulse intensity increasing, increases rapidly with laser wavelength decreasing, and increases moderately with main laser intensity increasing. It is also found that a gold gird foils can reach an imaging resolution better than 5-μm featured with high contrast. It is further demonstrated that the pinhole-assisted point projection at such a level will be a novel two-dimensional imaging diagnostic technique for inertial confinement fusion experiments.
基金supported by the Scientific Research Foundation of the Education Department of Hubei Province (No.Q20131512)National Natural Science Foundation of China (No.61078024)
文摘A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.
基金Project supported by the National Natural Science Foundation of China(Grant No.51705009)the NSAF of China(Grant No.U1530153)
文摘In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.
基金supported by National Natural Science Foundation of China(Nos.61427812,61805118,12104216 and 12241403)the Natural Science Foundation of Jiangsu Province of China(Nos.BK20192006,BK20180056 and BK20200307)。
文摘We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.
文摘This article provides a short review on the importance of the detailed analysis of a Langmuir probe I-V trace in a multi-Maxwellian plasma,and discuss proper procedures analyzing Langmuir probe I-V traces in bi-Maxwellian and triple-Maxwellian Electron Energy Distribution Function(EEDF)plasmas.Discus⁃sion and demonstration of procedures include the treatment of the ion saturation current,electron saturation cur⁃rent,space-charge effects on the I-V trace,and most importantly how to properly isolate and fit for each electron group present in an I-V trace reflecting a mult-Maxwellian EEDF,as well as how having a multi-Maxwellian EEDF affects the procedures of treating the ion and electron saturation currents.Shortcomings of common improp⁃er procedures are discussed and demonstrated with simulated I-V traces to show how these procedures gives false measurements.
