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Probing the peripheral self-generated magnetic field distribution in laser-plasma magnetic reconnection with Martin-Puplett interferometer polarimeter
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作者 张雅芃 姚嘉文 +2 位作者 刘正东 马作霖 仲佳勇 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第4期129-134,共6页
Magnetic reconnection of the self-generated magnetic fields in laser-plasma interaction is an important laboratory method for modeling high-energy density astronomical and astrophysical phenomena.We use the Martin-Pup... Magnetic reconnection of the self-generated magnetic fields in laser-plasma interaction is an important laboratory method for modeling high-energy density astronomical and astrophysical phenomena.We use the Martin-Puplett interferometer(MPI)polarimeter to probe the peripheral magnetic fields generated in the common magnetic reconnection configuration,two separated coplanar plane targets,in laser-target interaction.We introduce a new method that can obtain polarization information from the interference pattern instead of the sinusoidal function fitting of the intensity.A bidirectional magnetic field is observed from the side view,which is consistent with the magneto-hydro-dynamical(MHD)simulation results of self-generated magnetic field reconnection.We find that the cancellation of reverse magnetic fields after averaging and integration along the observing direction could reduce the magnetic field strength by one to two orders of magnitude.It indicates that imaging resolution can significantly affect the accuracy of measured magnetic field strength. 展开更多
关键词 laser-plasma experiment POLARIMETER self-generated magnetic field magnetic reconnection
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Spectral characteristics of laser-plasma instabilities with a broadband laser
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作者 许国潇 康宁 +10 位作者 雷安乐 刘会亚 赵耀 周申蕾 安红海 熊俊 王瑞荣 谢志勇 周熙晨 方智恒 王伟 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第8期362-368,共7页
Recent experimental progresses regarding broadband laser-plasma instabilities(LPIs)show that a 0.6%laser bandwidth can reduce backscatters of the stimulated Brillouin scattering(SBS)and the stimulated Raman scattering... Recent experimental progresses regarding broadband laser-plasma instabilities(LPIs)show that a 0.6%laser bandwidth can reduce backscatters of the stimulated Brillouin scattering(SBS)and the stimulated Raman scattering(SRS)at normal incidence[Phys.Rev.Lett.132035102(2024)].In this paper,we present a further discussion of the spectral distributions of the scatters developed by broadband LPIs,in addition to a brief validation of the effectiveness of bandwidth on LPIs mitigation at oblique incidence.SBS backscatter has a small redshift in the broadband case contrary to the blueshift with narrowband laser,which may be explained by the self-cross beam energy transfer between the various frequency components within the bandwidth.SRS backscatter spectrum presents a peak at a longer wavelength in the broadband case compared to the short one in the narrowband case,which is possibly attributed to the mitigation effect of bandwidth on filaments at underdense plasmas.The three-halves harmonic emission(3ω/2)has a one-peak spectral distribution under the broadband condition,which is different from the two-peak distribution under the narrowband condition,and may be related to the spectral mixing of different frequency components within the bandwidth if the main sources of the two are both two-plasmon decays. 展开更多
关键词 laser-plasma instability laser bandwidth light spectrum
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First experimental comparisons of laser-plasma interactions between spherical and cylindrical hohlraums at SGⅢ laser facility 被引量:2
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作者 Yaohua Chen Zhichao Li +33 位作者 Xufei Xie Chunyang Zheng Chuanlei Zhai Liang Hao Dong Yang Wenyi Huo Guoli Ren Jie Liu Xiaoshi Peng Tao Xu Yulong Li Sanwei Li Zhiwen Yang Liang Guo Lifei Hou Yonggang Liu Huiyue Wei Xiangming Liu Weiyi Cha Yukun Li Keli Deng Zheng Yuan Xiayu Zhan Haijun Zhang Baibin Jiang Wei Zhang Kai Du Xuewei Deng Yongkun Ding Xiaofeng Wei Wanguo Zheng Xiaodong Chen Xiantu He Ke Lan 《Matter and Radiation at Extremes》 SCIE EI CAS 2017年第2期77-86,共10页
We present our recent laser-plasmas instability(LPI)comparison experiment at the SGIII laser facility between the spherical and cylindrical hohlraums.Three kinds of filling are considered:vacuum,gas-filling with or wi... We present our recent laser-plasmas instability(LPI)comparison experiment at the SGIII laser facility between the spherical and cylindrical hohlraums.Three kinds of filling are considered:vacuum,gas-filling with or without a capsule inside.A spherical hohlraum of 3.6 mm in diameter,and a cylindrical hohlraum of 2.4 mm?4.3 mm are used.The capsule diameter is 0.96 mm.A flat-top laser pulse with 3 ns duration and up to 92.73 kJ energy is used.The experiment has shown that the LPI level in the spherical hohlraum is close to that of the outer beam in the cylindrical hohlraum,while much lower than that of the inner beam.The experiment is further simulated by using our 2-dimensional radiation hydrodynamic code LARED-Integration,and the laser back-scattering fraction and the stimulated Raman scatter(SRS)spectrum are post-processed by the high efficiency code of laser interaction with plasmas HLIP.According to the simulation,the plasma waves are strongly damped and the SRS is mainly developed at the plasma conditions of electron density from 0.08 n_(c) to 0.1 n_(c) and electron temperature from 1.5 keV to 2.0 keV inside the hohlraums.However,obvious differences between the simulation and experiment are found,such as that the SRS back-scattering is underestimated,and the numerical SRS spectrum peaks at a larger wavelength and at a later time than the data.These dif-ferences indicate that the development of a 3D radiation hydrodynamic code,with more accurate physics models,is mandatory for spherical hohlraum study. 展开更多
关键词 laser-plasmas interactions Spherical hohlraum Stimulated Raman scattering Stimulated Brillouin scattering
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Superthermal Electron Produced in Relativistic Laser-Plasma Interaction 被引量:1
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作者 CHEN Bao-Zhen 《Communications in Theoretical Physics》 SCIE CAS CSCD 2002年第7期89-90,共2页
The dynamics of a relativistic electron submitted to an intense, plane wave, linearly polarized laser field is reviewed. Based on the dynamics, the temperature of the electron in the laser field is delined and calcula... The dynamics of a relativistic electron submitted to an intense, plane wave, linearly polarized laser field is reviewed. Based on the dynamics, the temperature of the electron in the laser field is delined and calculated. It is found that the calculated temperature fits the first temperature observed in the experiment by Malka et al. A model to evaluate the electron temperature by taking the electron-ion scattering into account is proposed. It is found that when I ≥ 4.0 × 101s W/cm2 the electron temperature by considering the scattering, T hs, is evidently larger than the electron temperature without considering the scattering, Th. This result is in favor of explaining the two-temperature distribution of the electron energy observed in the experiment by Malka et al. 展开更多
关键词 two-temperature DISTRIBUTION of superthermal ELECTRON energy RELATIVISTIC laser-plasma INTERACTION
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High power terahertz pulses generated in intense laser-plasma interactions 被引量:1
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作者 李玉同 王伟民 +1 位作者 李春 盛政明 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第9期24-31,共8页
Terahertz (THz) radiation has attracted much attention due to its wide potential applications. Though radiation can be generated with various ways, it is still a big challenge to obtain strong tabletop sources. Plas... Terahertz (THz) radiation has attracted much attention due to its wide potential applications. Though radiation can be generated with various ways, it is still a big challenge to obtain strong tabletop sources. Plasma, with the advantage of no damage limit, is a promising medium to generate strong THz radiation. This review reports recent advances on strong THz radiation generation from low-density gases and high-density solid targets at different laser intensities. 展开更多
关键词 strong terahertz pulses intense laser-plasma interactions relativistic laser pulses
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Laser-Plasma Deposition of Silicon Carbonitride Films by the HMDS Vapor Gas Flow Activation after a Laser Beam Focus 被引量:1
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作者 V. N. Demin V. O. Borisov +3 位作者 G. N. Grachev A. L. Smirnov M. N. Khomyakov S. N. Bagayev 《Advances in Materials Physics and Chemistry》 2021年第7期121-130,共10页
A new laser-plasma deposition method has been developed for the plasma chemical deposition of hard silicon carbonitride coatings on stainless steel substrates from the hexamethyldisilazane (HMDS) Si<sub><span... A new laser-plasma deposition method has been developed for the plasma chemical deposition of hard silicon carbonitride coatings on stainless steel substrates from the hexamethyldisilazane (HMDS) Si<sub><span style="font-size:12px;font-family:Verdana;">2</span></sub><span style="font-family:Verdana;">NH(CH</span><sub><span style="font-size:12px;font-family:Verdana;">3</span></sub><span style="font-family:Verdana;">)</span><sub><span style="font-size:12px;font-family:Verdana;">6</span></sub><span style="font-family:Verdana;"> vapor in a high-speed Ar and Ar</span><span style="font-family:Verdana;"> </span><span style="font-family:Verdana;">+</span><span style="font-family:Verdana;"> </span><span style="font-family:Verdana;">10 vol.% He gas stream at the HMDS gas flow activation after the laser beam focus. The method allows depositing silicon carbonitride coatings at the rate of 0.4</span><span style="font-family:Verdana;"> - </span><span style="font-family:;" "=""><span style="font-family:Verdana;">1.2 μm·min</span><sup><span style="font-size:12px;font-family:Verdana;">-1</span></sup><span style="font-family:Verdana;">, </span><i><span style="font-family:Verdana;">i.e.</span></i><span style="font-family:Verdana;"> ~2 times higher than that at introducing HMDS in the laser beam focus zone. The properties of the prepared coatings have been studied by the methods of IR and Raman spectroscopy, atomic force microscopy, nanoindentation and X-ray diffraction (XRD) analysis. Studying the film structure with the use of XRD showed that the prepared silicon carbonitride coatings are X-ray amorphous. It has been found that the coating deposition rate and the structure of coatings depend on the process parameters: HMDS flow rate and plasma-generating gas (argon or (Ar +</span></span><span style="font-family:Verdana;"> </span><span style="font-family:Verdana;">He). The method allows depositing SiCN films at a high speed and a hardness of 20</span><span style="font-family:Verdana;"> </span><span style="font-family:Verdana;">-</span><span style="font-family:Verdana;"> </span><span style="font-family:Verdana;">22 GPa.</span> 展开更多
关键词 laser-plasma Deposition Hard Coating Silicon Carbonitride Films
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Ion Acceleration in Laser-Plasma Interaction: Shock, Sheath, and Scaling
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作者 XIE Bai-Song WU Hai-Cheng 《Communications in Theoretical Physics》 SCIE CAS CSCD 2009年第6期1125-1128,共4页
Some notes and comments on ion acceleration in laser-plasma interaction is given, in particular for the implication of shock, sheath and sealing. A simple model is proposed for ion acceleration by the combination of s... Some notes and comments on ion acceleration in laser-plasma interaction is given, in particular for the implication of shock, sheath and sealing. A simple model is proposed for ion acceleration by the combination of shock and sheath. The obtained scaling relations between the maximum ion energy and laser parameters (power, pulse duration) as well plasma parameter (plasma density)for example α PL 7/12 Eion,max α TL1/3 and Eion,max α ne2/3,are compared to the previous works. Some deficiencies and implications of model and results are discussed. 展开更多
关键词 laser-plasma acceleration shock waves plasma sheaths
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Influences of Uncaptured Electron on Energy Conversion of Photon Compton Scattering in High Power Laser-plasma
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作者 ZHENGJing-hua HAOXiao-fei HAODong-shan 《Semiconductor Photonics and Technology》 CAS 2004年第4期285-288,共4页
Using the single particle theory and the non-flexibility collision model of electron and photon, the influence of the uncaptured electrons on the energy conversion efficiency of multi-photon nonlinear Compton scatteri... Using the single particle theory and the non-flexibility collision model of electron and photon, the influence of the uncaptured electrons on the energy conversion efficiency of multi-photon nonlinear Compton scattering in the extra stationary laser-plasma is investigated. It shows that in extra stationary laser-plasma,the uncaptured electrons make the Δω of the scattering frequency of the multi-photon Compton fall down with the increases of the incident radiation electron speed,the materials of the incident collision of electron and photon, and the number of the photons which work with the electrons at the same time. Under the modulation of the uncaptured electrons to the laser field, the energy conversion efficiency between electrons and photons will fall down with the increase of the electron incident radiation speed, using the low-power electrons for incident source, the loss can be efficiently reduced. 展开更多
关键词 Photon Compton scattering Energy conversion Captured electron laser-plasma
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Laser-Plasma Interaction in Presence of an Obliquely External Magnetic Field:Application to Laser Fusion without Radioactivity
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作者 M.Mobaraki S.Jafari 《Communications in Theoretical Physics》 SCIE CAS CSCD 2016年第8期237-243,共7页
In this paper, the nonlinear interaction of ultra-high power laser beam with fusion plasma at relativistic regime in the presence of obliquely external magnetic field has been studied. Imposing an external magnetic fi... In this paper, the nonlinear interaction of ultra-high power laser beam with fusion plasma at relativistic regime in the presence of obliquely external magnetic field has been studied. Imposing an external magnetic field on plasma can modify the density profile of the plasma so that the thermal conductivity of electrons reduces which is considered to be the decrease of the threshold energy for ignition. To achieve the fusion of Hydrogen–Boron(HB) fuel,the block acceleration model of plasma is employed. Energy production by HB isotopes can be of interest, since its reaction does not generate radioactive tritium. By using the inhibit factor in the block model acceleration of plasma and Maxwell's as well as the momentum transfer equations, the electron density distribution and dielectric permittivity of the plasma medium are obtained. Numerical results indicate that with increasing the intensity of the external magnetic field, the oscillation of the laser magnetic field decreases, while the dielectric permittivity increases. Moreover, the amplitude of the electron density becomes highly peaked and the plasma electrons are strongly bunched with increasing the intensity of external magnetic field. Therefore, the magnetized plasma can act as a positive focusing lens to enhance the fusion process. Besides, we find that with increasing θ-angle(from oblique external magnetic field) between 0 and 90°, the dielectric permittivity increases, while for θ between 90° and 180°, the dielectric permittivity decreases with increasing θ. 展开更多
关键词 laser-plasma interaction external magnetic field laser fusion HB fuel
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Electron Dynamics and Characteristics of Attosecond Electromagnetic Emissions in Relativistic Laser-Plasma Interactions
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作者 Yi-Ying Wu Quan-Li Dong +5 位作者 Zhao-Hua Wang Ping Liu Cheng-Zhen Wang Yi-Hui Zhang Zheng-Ming Sheng Jie Zhang 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第9期37-40,共4页
Generation of attosecond electromagnetic (EM) pulses and the associated electron dynamics are studied using particle-in-cell simulations of relativistic laser pulses interacting with over-dense plasma foil targets. ... Generation of attosecond electromagnetic (EM) pulses and the associated electron dynamics are studied using particle-in-cell simulations of relativistic laser pulses interacting with over-dense plasma foil targets. The inter- action process is found to be so complicated even in the situation of utilizing driving laser pulses of only one cycle. Two electron bunches closely involved in the laser-driven wavebreaking process contribute to attosecond EM pulses through the coherent synchrotron emission process whose spectra are found to follow an exponential decay rule. Detailed investigations of electron dynamics indicate that the early part of the reflected EM emission is the high-harmonics produced through the relativistic oscillating mirror mechanism. High harmonics are also found to be generated through the Bremsstrahlung radiation by one electron bunch that participates in the wavebreaking process and decelerates when it experiences the local wavebreaking-generated high electrostatic field in the moving direction. 展开更多
关键词 Electron Dynamics and Characteristics of Attosecond Electromagnetic Emissions in Relativistic laser-plasma Interactions
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Intense Cherenkov-type terahertz electromagnetic radiation from ultrafast laser-plasma interaction 被引量:1
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作者 胡强林 刘世炳 李维 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第3期1050-1054,共5页
A Cherenkowtype terahertz electromagnetic radiation is revealed, which results efficiently from the collective effects in the time-domain of ultrafast pulsed electron current produced by ultrafast intense laser plasma... A Cherenkowtype terahertz electromagnetic radiation is revealed, which results efficiently from the collective effects in the time-domain of ultrafast pulsed electron current produced by ultrafast intense laser plasma interaction. The emitted pulse waveform and spectrum, and the dependence of laser pulse parameters on the structure of the radiation field are investigated numerically. The condition of THz radiation generation in this regime and Cherenkov geometry of the radiation field are studied analytically. 展开更多
关键词 terahertz radiation CHERENKOV ultrashort pulse laser PLASMA
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High-energy-density electron beam generation in ultra intense laser-plasma interaction 被引量:1
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作者 Jianxun LIU Yanyun MA +7 位作者 Jun ZHAO Tongpu YU Fuqiu SHAO Hongbin ZHUO Longfei GAN Guobo ZHANG Yuan ZHAO Jingkang YANG1] 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第1期1-6,共6页
By using a two-dimensional particle-in-cell simulation,we demonstrate a scheme for highenergy-density electron beam generation by irradiating an ultra intense laser pulse onto an aluminum(Al) target.With the laser h... By using a two-dimensional particle-in-cell simulation,we demonstrate a scheme for highenergy-density electron beam generation by irradiating an ultra intense laser pulse onto an aluminum(Al) target.With the laser having a peak intensity of 4×10^23W cm^-2,a high quality electron beam with a maximum density of 117 nc and a kinetic energy density up to8.79×10^18J m^-3 is generated.The temperature of the electron beam can be 416 Me V,and the beam divergence is only 7.25°.As the laser peak intensity increases(e.g.,1024 W cm^-2),both the beam energy density(3.56×10^19J m^-3) and the temperature(545 Me V) are increased,and the beam collimation is well controlled.The maximum density of the electron beam can even reach 180 nc.Such beams should have potential applications in the areas of antiparticle generation,laboratory astrophysics,etc. 展开更多
关键词 ultra intense laser PLASMA high-energy-density electron beam
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Electron trajectory evaluation in laser-plasma interaction for effective output beam
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作者 P. Zobdeh R. Sadighi-Bonabi H. Afarideh 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第6期344-348,共5页
Using the ellipsoidal cavity model, the quasi-monoenergetic electron output beam in laser-plasma interaction is described. By the cavity regime the quality of electron beam is improved in comparison with those generat... Using the ellipsoidal cavity model, the quasi-monoenergetic electron output beam in laser-plasma interaction is described. By the cavity regime the quality of electron beam is improved in comparison with those generated from other methods such as periodic plasma wave field, spheroidal cavity regime and plasma channel guided acceleration. Trajectory of electron motion is described as hyperbolic, parabolic or elliptic paths. We find that the self-generated electron bunch has a smaller energy width and more effective gain in energy spectrum. Initial condition for the ellipsoidal cavity is determined by laser-plasma parameters. The electron trajectory is influenced by its position, energy and cavity electrostatic potential. 展开更多
关键词 ELECTRON intense laser plasma accelerator laser wake field bubble regime wave breaking
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Characteristics of Self-Focusing Dueto the Pondermotive Forcein Laser-Plasma Interaction
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作者 Zhang Yuesheng Yao Duanzheng(Department of Physics, Wuhan University. Wuhan 430072,China) 《Wuhan University Journal of Natural Sciences》 CAS 1998年第4期429-432,共4页
The Max’s equation of self-focusing in laser-plasma interaction due to the pondermotive force has been discussed and its physical meaning of the assumption has been predicted. The characteristics of selffocusing due ... The Max’s equation of self-focusing in laser-plasma interaction due to the pondermotive force has been discussed and its physical meaning of the assumption has been predicted. The characteristics of selffocusing due to the pondermotive force with different initial situations have been analyzed through the numerical calculation. 展开更多
关键词 LASER PLASMA SELF-FOCUSING pondermotive force
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Photon Acceleration Based On Laser-Plasma
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作者 LAIGuo-jun JIPei-yong 《Journal of Shanghai University(English Edition)》 CAS 2001年第1期44-47,共4页
One dimensional electron density perturbation is derived by using the cold fluid equation, Possion's equation and the continuity equation. The perturbation is generated by a driving laser pulse propagating through... One dimensional electron density perturbation is derived by using the cold fluid equation, Possion's equation and the continuity equation. The perturbation is generated by a driving laser pulse propagating through a plasma. The upshifting of the frequency of a trailing pulse induced by density perturbation is studied by using optical metric. The results show that it is possible that the photon will gain energy from the wakefield when assuming photon's number to be conserved, i.e. , the photon will be accelerated. 展开更多
关键词 electron density perturbation laser plasma optical metric photon acceleration
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Metrology for sub-Rayleigh-length target positioning in~10^(22)W/cm^(2)laser-plasma experiments
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作者 E.A.Vishnyakov A.Sagisaka +38 位作者 K.Ogura T.Zh.Esirkepov B.Gonzalez-Izquierdo C.D.Armstrong T.A.Pikuz S.A.Pikuz W.Yan T.M.Jeong S.Singh P.Hadjisolomou O.Finke G.M.Grittani M.Nevrkla C.M.Lazzarini A.Velyhan T.Hayakawa Y.Fukuda J.K.Koga M.Ishino K.Kondo Y.Miyasaka A.Kon M.Nishikino Y.V.Nosach D.Khikhlukha I.P.Tsygvintsev D.Kumar J.Nejdl D.Margarone P.V.Sasorov S.Weber M.Kando H.Kiriyama Y.Kato G.Korn K.Kondo S.V.Bulanov T.Kawachi A.S.Pirozhkov 《High Power Laser Science and Engineering》 SCIE CAS CSCD 2024年第3期90-105,共16页
Tight focusing with very small f-numbers is necessary to achieve the highest at-focus irradiances.However,tight focusing imposes strong demands on precise target positioning in-focus to achieve the highest on-target i... Tight focusing with very small f-numbers is necessary to achieve the highest at-focus irradiances.However,tight focusing imposes strong demands on precise target positioning in-focus to achieve the highest on-target irradiance We describe several near-infrared,visible,ultraviolet and soft and hard X-ray diagnostics employed in a~10^(22)W/cm^(2)laser±plasma experiment.We used nearly 10 J total energy femtosecond laser pulses focused into an approximately1.3-μm focal spot on 5±20μm thick stainless-steel targets.We discuss the applicability of these diagnostics to determine the best in-focus target position with approximately 5μm accuracy(i.e.,around half of the short Rayleigh length)and show that several diagnostics(in particular,3ωreflection and on-axis hard X-rays)can ensure this accuracy.We demonstrated target positioning within several micrometers from the focus,ensuring over 80%of the ideal peak laser intensity on-target.Our approach is relatively fast(it requires 10±20 laser shots)and does not rely on the coincidence of low-power and high-power focal planes. 展开更多
关键词 laser-plasma interaction precise target positioning spectroscopy ultra-high intensity X-rays
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Synchronized off-harmonic probe laser with highly variable pulse duration for laser-plasma interaction experiments
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作者 J.Hornung Y.Zobus +3 位作者 H.Lorenté C.Brabetz B.Zielbauer V.Bagnoud 《High Power Laser Science and Engineering》 SCIE CAS CSCD 2024年第1期99-107,共9页
This paper presents the development and experimental utilization of a synchronized off-harmonic laser system designed as a probe for ultra-intense laser±plasma interaction experiments. The system exhibits a novel... This paper presents the development and experimental utilization of a synchronized off-harmonic laser system designed as a probe for ultra-intense laser±plasma interaction experiments. The system exhibits a novel seed-generation design,allowing for a variable pulse duration spanning over more than three orders of magnitude, from 3.45 picoseconds to 10 nanoseconds. This makes it suitable for various plasma diagnostics and visualization techniques. In a side-view configuration, the laser was employed for interferometry and streaked shadowgraphy of a laser-induced plasma while successfully suppressing the self-emission background of the laser±plasma interaction, resulting in a signal-to-self-emission ratio of 110 for this setup. These properties enable the probe to yield valuable insights into the plasma dynamics and interactions at the PHELIX facility and to be deployed at various laser facilities due to its easy-to-implement design. 展开更多
关键词 INTERFEROMETRY laser-plasma interaction off-harmonic probe laser streaked shadowgraphy
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气体放电与等离子体在芯片制造领域中的应用
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作者 付洋洋 王新新 +11 位作者 邹晓兵 韩星 陈佳毅 张东荷雨 陈健东 林楚彬 杨栋 贾鸿宇 王倩 郑博聪 赵凯 肖舒 《高电压技术》 北大核心 2025年第8期4458-4477,共20页
放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典... 放电等离子体广泛应用于半导体芯片制造,包括光刻、刻蚀、薄膜沉积、离子注入、等离子体清洗等,其技术总成占据集成电路产业份额1/3以上,已发展成为芯片制造工艺与装备领域的关键核心技术。该文对气体放电与等离子体在芯片制造领域的典型应用进行了概述。首先,针对光刻光源系统,介绍了气体放电泵浦准分子激光、激光产生等离子体辐射极紫外光的基本原理,其本质都是利用等离子体产生的光辐射;其次,针对刻蚀用射频等离子体,介绍了低气压射频放电的产生、特性、调控及相关工艺技术;再次,对薄膜工艺、离子注入装备原理及相关放电等离子体技术原理进行了介绍与讨论;随后,在量测与检测方面,分别介绍了光学检测与电子束检测的特点,阐述了激光维持等离子体实现宽谱强辐射光源的基本原理与特性;最后,介绍了基于辉光放电的等离子体清洗技术,以及其在去除刻蚀残留物中的应用。通过总结梳理气体放电与等离子体在半导体制造领域中的应用及相关核心技术,明晰放电等离子体科学基础研究方向,助力解决半导体装备国产化过程中的等离子体技术瓶颈。 展开更多
关键词 气体放电 等离子体 芯片制造 气体激光 等离子体辐射 射频放电 等离子体刻蚀 激光维持等离子体 辉光放电清洗
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激光-等离子弧复合沉积316L不锈钢的组织及性能
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作者 赵宇辉 贺晨 +1 位作者 赵吉宾 张宏伟 《热加工工艺》 北大核心 2025年第1期109-113,共5页
为了验证激光-等离子弧/复合沉积成形工艺的可行性,首先采用等离子弧增材制造后,在其基础上采用激光沉积工艺复合成形了316L块体试样。采用光学显微镜、扫描电镜、显微硬度仪、拉伸试验机等设备,研究了不同沉积层位置的宏观形貌、微观... 为了验证激光-等离子弧/复合沉积成形工艺的可行性,首先采用等离子弧增材制造后,在其基础上采用激光沉积工艺复合成形了316L块体试样。采用光学显微镜、扫描电镜、显微硬度仪、拉伸试验机等设备,研究了不同沉积层位置的宏观形貌、微观组织特征、力学性能、断口形貌等。结果表明:等离子弧沉积成形试验的沉积层厚度是激光沉积层的3倍以上。等离子弧沉积层内组织显著粗化,二次枝晶发达,而激光沉积层的硬度高于等离子弧沉积层;两种工艺沉积层形成了良好的冶金结合,界面热影响区厚度小于100μm。虽然,激光-等离子弧复合工艺可以实现316L复合沉积成形,与等离子弧沉积工艺相比,沉积效率有一定优势,但是,复合工艺成形试样的强度和伸长率等性能参数低于等离子弧沉积成形试样。 展开更多
关键词 激光-等离子弧复合成形 316L不锈钢 微观组织 力学性能
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普通铅对LA-ICP-MS磷灰石U-Pb定年结果的影响及校正方法 被引量:1
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作者 罗涛 王瀚林 +2 位作者 朱松柏 卿丽媛 胡兆初 《岩矿测试》 CAS 北大核心 2025年第1期51-62,共12页
磷灰石是火成岩、变质岩和沉积岩中广泛分布的含铀矿物,开展磷灰石U-Pb年代学研究对揭示岩浆演化过程、示踪溯源等方面具有重要意义。激光剥蚀电感耦合等离子体质谱法(LA-ICP-MS)是开展磷灰石U-Pb年龄微区分析的重要手段之一。当前,基... 磷灰石是火成岩、变质岩和沉积岩中广泛分布的含铀矿物,开展磷灰石U-Pb年代学研究对揭示岩浆演化过程、示踪溯源等方面具有重要意义。激光剥蚀电感耦合等离子体质谱法(LA-ICP-MS)是开展磷灰石U-Pb年龄微区分析的重要手段之一。当前,基体匹配磷灰石U-Pb定年矿物标样缺乏和标样中不可避免的普通铅是制约LA-ICP-MS高精度磷灰石U-Pb年龄分析的主要瓶颈。本文对比研究了标样中普通铅对LA-ICP-MS磷灰石U-Pb定年结果的影响,采用含普通铅的磷灰石MAD作外标直接开展U-Pb年龄校正,获得的被测样品年龄会产生显著的系统偏差(最大约6%);采用207Pb法或Tera-Wasserburg图解法先校正标样中普通铅,再利用校正后的数据进行元素分馏和仪器漂移校正则可获得准确的磷灰石U-Pb年龄,与推荐值偏差在2%以内。另一方面,为消除标样中普通铅对分析结果的影响,本文还采用水蒸气辅助激光剥蚀方法,实现以NIST612玻璃作为外标准确分析磷灰石U-Pb年龄,解决了磷灰石U-Pb定年微区分析高质量标样缺乏的难题。本研究通过对标样中普通铅进行预校正或采用非基体匹配分析,建立了高精度LA-ICP-MS磷灰石U-Pb定年新方法,将促进磷灰石U-Pb年代学在地球科学研究中的应用。 展开更多
关键词 激光剥蚀电感耦合等离子体质谱法 磷灰石 U-PB定年 普通铅校正 非基体匹配分析
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