Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-formi...Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-forming three-dimensional(3D)microscale functional devices and inducing fascinating and unique physical or chemical phenomena have granted this technology powerful versatility that no other technology can match.As this technology advances rapidly in various fields of application,some key challenges have emerged and remain to be urgently addressed.This review firstly introduces the fundamental principles for understanding how fs laser pulses interact with materials and the associated unique phenomena in section 2.Then micro/nano-fabrication in transparent materials by fs laser processing is presented in section 3.Thereafter,several high efficiency/throughput fabrication methods as well as pulse-shaping techniques are listed in sections 4 and 5 reviews four-dimensional(4D)and nanoscale printing realized by fs laser processing technology.Special attention is paid to the heterogeneous integration(HI)of functional materials enabled by fs laser processing in section 6.Several intriguing examples of 3D functional micro-devices created by fs laser-based manufacturing methods such as microfluidics,lab-on-chip,micro-optics,micro-mechanics,micro-electronics,micro-bots and micro-biodevices are reviewed in section 7.Finally,a summary of the review and a perspective are proposed to explore the challenges and future opportunities for further betterment of fs laser micro/nano processing technology.展开更多
A dual-phase synergistic enhancement method was adopted to strengthen the Al-Mn-Mg-Sc-Zr alloy fabricated by laser powder bed fusion(LPBF)by leveraging the unique advantages of Er and TiB_(2).Spherical powders of 0.5w...A dual-phase synergistic enhancement method was adopted to strengthen the Al-Mn-Mg-Sc-Zr alloy fabricated by laser powder bed fusion(LPBF)by leveraging the unique advantages of Er and TiB_(2).Spherical powders of 0.5wt%Er-1wt%TiB_(2)/Al-Mn-Mg-Sc-Zr nanocomposite were prepared using vacuum homogenization technique,and the density of samples prepared through the LPBF process reached 99.8%.The strengthening and toughening mechanisms of Er-TiB_(2)were investigated.The results show that Al_(3)Er diffraction peaks are detected by X-ray diffraction analysis,and texture strength decreases according to electron backscatter diffraction results.The added Er and TiB_(2)nano-reinforcing phases act as heterogeneous nucleation sites during the LPBF forming process,hindering grain growth and effectively refining the grains.After incorporating the Er-TiB_(2)dual-phase nano-reinforcing phases,the tensile strength and elongation at break of the LPBF-deposited samples reach 550 MPa and 18.7%,which are 13.4%and 26.4%higher than those of the matrix material,respectively.展开更多
To explore the formation mechanism of anisotropy in Ti-6Al-4V alloy fabricated by selective laser melting(SLM),the compressive mechanical properties,microhardness,microstructure,and crystallographic orientation of the...To explore the formation mechanism of anisotropy in Ti-6Al-4V alloy fabricated by selective laser melting(SLM),the compressive mechanical properties,microhardness,microstructure,and crystallographic orientation of the alloy across different planes were investigated.The anisotropy of SLM-fabricated Ti-6Al-4V alloys was analyzed,and the electron backscatter diffraction technique was used to investigate the influence of different grain types and orientations on the stress-strain distribution at various scales.Results reveal that in room-temperature compression tests at a strain rate of 10^(-3) s^(-1),both the compressive yield strength and microhardness vary along the deposition direction,indicating a certain degree of mechanical property anisotropy.The alloy exhibits a columnar microstructure;along the deposition direction,the grains appear equiaxed,and they have internal hexagonal close-packed(hcp)α/α'martensitic structure.α'phase has a preferential orientation approximately along the<0001>direction.Anisotropy arises from the high aspect ratio of columnar grains,along with the weak texture of the microstructure and low symmetry of the hcp crystal structure.展开更多
Combined pulsed laser(CPL),introduced in 1975 for target damage,integrates different lasers to achieve high peak power and pulse energy.However,despite decades of research,CPL remains unused for long-range target dama...Combined pulsed laser(CPL),introduced in 1975 for target damage,integrates different lasers to achieve high peak power and pulse energy.However,despite decades of research,CPL remains unused for long-range target damage due to the challenge of maintaining high peak power density over long distances.We note that a potential solution lies in leveraging the air filament generated by femtosecond laser,which can transmit peak power densities higher than 1014 W/cm^(2)under the power clamping effect.To address this,a concept of a femtosecond laser induced air filament-CW CPL for surface damage of ceramics was introduced.We found no surface changes in ceramic targets when irradiated with a CW laser alone.By way of contrast,the target can be penetrated in a very short time(20 ms)with the assistance of the femtosecond laser induced air filament.In this context,we employ high-speed shadow imaging,cross-timescale simulation models and macro-microscopic characterization,to elucidate the CPL damage mechanism.The optimal CPL,combining a 1 mJ femtosecond laser and a 500 W CW laser,yields a damage rate of 1.51×10^(7)μm^(3)/J,representing an improvement of approximately 175%compared to single femtosecond laser ablation and around 59%enhancement compared to coating-assisted CW laser ablation.Furthermore,the efficacy of the proposed femtosecond-CW CPL method is demonstrated in causing penetration damage of ceramic/metal composite material or direct damage of sapphire,showcasing its versatility in damaging applications.Consequently,the femtosecond-CW CPL ablation method presented in this paper holds great promise as a new type of damage method for transparent hard and brittle materials.展开更多
Experimental validation of laser intensity is particularly important for the study of fundamental physics at extremely high intensities.However,reliable diagnosis of the focal spot and peak intensity faces huge challe...Experimental validation of laser intensity is particularly important for the study of fundamental physics at extremely high intensities.However,reliable diagnosis of the focal spot and peak intensity faces huge challenges.In this work,we demonstrate for the firs time that the coherent radiation farfiel patterns from laser–foil interactions can serve as an in situ,real-time,and easy-to-implement diagnostic for an ultraintense laser focus.The laser-driven electron sheets,curved by the spatially varying laser fiel and leaving the targets at nearly the speed of light,produce doughnut-shaped patterns depending on the shapes of the focal spot and the absolute laser intensities.Assisted by particle-in-cell simulations,we can achieve measurements of the intensity and the focal spot,and provide immediate feedback to optimize the focal spots for extremely high intensity.展开更多
Laser processing technologies enable the precise fabrication of arbitrary structures and devices with broad applications in micro-optics,micro-mechanics,and biomedicine.However,its adoption is limited by the large siz...Laser processing technologies enable the precise fabrication of arbitrary structures and devices with broad applications in micro-optics,micro-mechanics,and biomedicine.However,its adoption is limited by the large size,complexity,high cost,and low flexibility of optical systems.Metasurfaces enable precise multidimensional control of light fields,aligning well with the development trend toward compact,high-performance optical systems.Here,we review several recent studies on the application of metasurfaces in laser processing technologies,including 3D nanolithography,direct laser writing,and laser cutting.Metasurfaces provide an integrated operational platform with exceptional performance,poised to disrupt conventional laser processing workflows.This combination presents significant cost efficiency and substantial development potential,with promising applications in areas such as imaging,optical storage,advanced sensing,and space on-orbit manufacturing.展开更多
Stimulated emission and lasing of GaN-based laser diodes(LDs)were reported at 1995[1]and 1996[2],right after the breakthrough of p-type doping[3−5],material quality[6]and the invention of high-brightness GaN-based LED...Stimulated emission and lasing of GaN-based laser diodes(LDs)were reported at 1995[1]and 1996[2],right after the breakthrough of p-type doping[3−5],material quality[6]and the invention of high-brightness GaN-based LEDs[7,8].However,it took much longer time for GaN-based LDs to achieve high power,high wall plug efficiency,and long lifetime.Until 2019,Nichia reported blue LDs with these performances[9],which open wide applications with GaN-based blue LDs.展开更多
A super-radiant terahertz free-electron laser(THz-FEL)light source was developed for the first time in Thailand and Southeast Asia at the PBP-CMU Electron Linac Laboratory(PCELL)of Chiang Mai University.This radiation...A super-radiant terahertz free-electron laser(THz-FEL)light source was developed for the first time in Thailand and Southeast Asia at the PBP-CMU Electron Linac Laboratory(PCELL)of Chiang Mai University.This radiation source requires relatively ultrashort electron bunches to produce intense coherent THz pulses.Three electron bunch compression processes are utilized in the PCELL accelerator system comprising pre-bunch compression in an alpha magnet,velocity bunching in a radio-frequency(RF)linear accelerator(linac),and magnetic bunch compression in a 180°acromat system.Electron bunch compression in the magnetic compressor system poses considerable challenges,which are addressed through the use of three quadrupole doublets.The strengths of the quadrupole fields significantly influence the rotation of the beam line longitudinal phase space distribution along the bunch compressor.Start-to-end beam dynamics simulations using the ASTRA code were performed to optimize the electron beam properties for generating super-radiant THz-FEL radiation.The operational parameters considered in the simulations comprise the alpha magnet gradient,linac RF phase,and quadrupole field strengths.The optimization results show that 10-16MeV femtosecond electron bunches with a low energy spread(~0.2%),small normalized emittance(~15πmm·mrad),and high peak current(165-247A)can be produced by the PCELL accelerator system at the optimal parameters.A THz-FEL with sub-microjoule pulse energies can thus be obtained at the optimized electron beam parameters.The physical and conceptual design of the THz-FEL beamline were completed based on the beam dynamics simulation results.The construction and installation of this beamline are currently underway and expected to be completed by mid-2024.The commissioning of the beamline will then commence.展开更多
Photonic crystal surface emitting lasers(PCSELs)utilize the Bragg diffraction of two-dimensional photonic crystals to achieve a single-mode output with a high power and a small divergence angle,and has recently attrac...Photonic crystal surface emitting lasers(PCSELs)utilize the Bragg diffraction of two-dimensional photonic crystals to achieve a single-mode output with a high power and a small divergence angle,and has recently attracted much attention^([1−3]).In 2023,Kyoto University reported GaAs-based 945 nm PCSELs with a continuous-wave(CW)single-mode output power of exceeding 50 W,and a narrow beam divergence angle of 0.05°,demonstrating a brightness of 1 GW·cm^(−2)·sr^(−1),which rivals those of the existing bulky lasers^([4]).展开更多
High-energy continuous wave(CW)lasers are mostly used in laser damage applications,but efficient laser ablation of transparent materials is challenging due to low optical absorption.Considering the potential of femtos...High-energy continuous wave(CW)lasers are mostly used in laser damage applications,but efficient laser ablation of transparent materials is challenging due to low optical absorption.Considering the potential of femtosecond(fs)laser-induced air filament for high-peak laser transmission over long distances,femtosecond(fs)laser-induced air filaments are combined with a millisecond(ms)laser to form an fs-ms CPL,enhancing the efficiency of sapphire ablation through synchronized spatial-temporal focusing.Experimental results show that ablation efficiency increases with the ms peak power and duty ratio.Excessive thermal stress leads to fragmentation of the sapphire when the ms duty ratio is over 30%at the peak power of 800 W,or when the peak power is over 500 W at a duty ratio of 100%.Also,the mechanism of high-efficiency damage is revealed through in-situ high-speed imaging.According to it,the ablation process went through 4 stages within 1.5 ms:defect-creating,melting and ablation,spattering,and fragmentation.Finally,the equivalent ablation efficiency of the fs-ms CPL is as high as 1.73×10^(7)μm^(3)/J,about 28 times higher compared to the fs laser only.The CPL damage method explored in this paper can provide theoretical guidance for efficient laser damage of transparent materials.展开更多
This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strate...This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strategies and highlight the current limitations and challenges in surface and bulk processing.Specifically,we emphasize the delicate balance between high-fidelity beam shaping and energy efficiency,both critical for surface and bulk processing applications.Given the inherent physical limitations of spatial light modulators such as spatial resolution,fill factor,and phase modulation range.We explore techniques developed to bridge the gap between desired intensity distributions and actual experimental beam profiles.We present various laser light modulation technologies and the main algorithmic strategies for obtaining modulation patterns.The paper includes application examples across a wide range of fields,from surgery to surface structuring,cutting,bulk photo-inscription of optical functions,and additive manufacturing,highlighting the significant enhancements in processing speed and precision due to spatial beam shaping.The diverse applications and the technological limitations underscore the need for adapted modulation pattern calculation methods.We discuss several advancements addressing these challenges,involving both experimental and algorithmic developments,including the recent incorporation of artificial intelligence.Additionally,we cover recent progress in phase and pulse front control based on spatial modulators,which introduces an extra control parameter for light excitation with high potential for achieving more controlled processing outcomes.展开更多
This study presents an achievement of laser cooling of alkaline-earth atoms in the Chinese Space Station’s strontium(Sr)atomic space optical clock.The system’s core components,physical unit,optical unit,and electric...This study presents an achievement of laser cooling of alkaline-earth atoms in the Chinese Space Station’s strontium(Sr)atomic space optical clock.The system’s core components,physical unit,optical unit,and electrical unit,have a total volume of 306 L and a total mass of 163.8 kg.These compact and robust units can overcome mechanical vibrations and temperature fluctuations during space launch.The laser sources of the optical unit are composed of diode lasers,and the injection locking of slave lasers is automatically performed by a program.In the experiment,a blue magneto-optical trap of cold atoms was achieved,with the atom numbers estimated to be approximately(1.50±0.13)×10^(6) for 87Sr and(8.00±0.56)×10^(6) for 88Sr.This work establishes a foundation for atomic confinement and high-precision interrogation in space-based optical clocks and expands the frontiers of cold atom physics in microgravity.展开更多
A key component of future lunar missions is the concept of in-situ resource utilization(ISRU),which involves the use of local resources to support human missions and reduce dependence on Earth-based supplies.This pape...A key component of future lunar missions is the concept of in-situ resource utilization(ISRU),which involves the use of local resources to support human missions and reduce dependence on Earth-based supplies.This paper investigates the thermal processing capability of lunar regolith without the addition of binders,with a focus on large-scale applications for the construction of lunar habitats and infrastructure.The study used a simulant of lunar regolith found on the Schr?dinger Basin in the South Pole region.This regolith simulant consists of20 wt%basalt and 80 wt%anorthosite.Experiments were conducted using a high power CO_(2)laser to sinter and melt the regolith in a 80 mm diameter laser spot to evaluate the effectiveness of direct large area thermal processing.Results indicated that sintering begins at approximately 1180℃and reaches full melt at temperatures above 1360℃.Sintering experiments with this material revealed the formation of dense samples up to 11 mm thick,while melting experiments successfully produced larger samples by overlapping molten layers and additive manufacturing up to 50 mm thick.The energy efficiency of the sintering and melting processes was compared.The melting process was about 10 times more energy efficient than sintering in terms of material consolidation,demonstrating the promising potential of laser melting technologies of anorthosite-rich regolith for the production of structural elements.展开更多
Development of on-chip coherent light sources with desired single-mode operation and straightforward spectral tunability has attracted intense interest due to ever-increasing demand for photonic devices and optoelectr...Development of on-chip coherent light sources with desired single-mode operation and straightforward spectral tunability has attracted intense interest due to ever-increasing demand for photonic devices and optoelectronic integration,but still faces serious challenges.Herein,we propose a facile method to synthesize cesium lead halide(CsPbX3)microstructures with well-defined morphologies,sizes,and constituent element gradient.The scheme is conducted using a chemical vapor deposition(CVD),which is subsequently associated with annealing-assisted solid-solid anion exchange.For the plate-shaped structures,the controllability on the cross-sectional dimension enables to precisely modulate the lasing modes,thus achieving single-mode operation;while tuning the stoichiometric of the halogen anion components in the plate-shaped CsPbI_(x)Br_(3−x) alloy samples,the lasing wavelengths are straightforwardly varied to span the entire visible spectrum.By comparison,the experimental scheme on synthesizing alloyed CsPbI_(x)Br_(3−x) perovskites is conducted using an in-situ approach,thereby achieving precise modulation of bandgap-controlled microlasers by controlling the reaction time.Such laser properties like controllable microcavity modes and broad stoichiometry-dependent tunability of light-emitting/lasing colors,associated with the facile synthesizing method of monocrystalline CsPbI_(x)Br_(3−x) structures,make lead halide perovskites ideal materials for the development of wavelength-controlled microlasers toward practical photonic integration.展开更多
This paper describes what is thought to be the first generation of a continuous wave deep ultraviolet laser at 275 nm by efficient frequency doubling of a blue-diode-pumped Pr:YLF laser at 550 nm.By employing a novel ...This paper describes what is thought to be the first generation of a continuous wave deep ultraviolet laser at 275 nm by efficient frequency doubling of a blue-diode-pumped Pr:YLF laser at 550 nm.By employing a novel fast-axis collimated blue semiconductor laser as the pump source,combined with a folded cavity and innovation coating technology,and utilizing a Brewster-cut BBO crystal for intracavity frequency doubling,TEM00 mode deep UV laser radiation at 275 nm with an output power of 351 mW is obtained.This marks the first report of achieving 275 nm laser generation based on Pr:LiYF4 to date.展开更多
Hemorrhoidal disease is a prevalent anorectal condition causing significant morbidity,affecting approximately 4%of the general population with incidence increasing with age and sedentary lifestyle.While conventional e...Hemorrhoidal disease is a prevalent anorectal condition causing significant morbidity,affecting approximately 4%of the general population with incidence increasing with age and sedentary lifestyle.While conventional excisional hemorrhoidectomy techniques such as Milligan-Morgan and Ferguson remain standard for long-term efficacy,they are often associated with substantial postoperative pain and prolonged recovery.This narrative review evaluates the comparative clinical outcomes of laser hemorrhoidoplasty(LHP)versus conventional surgical interventions in the treatment of grade II and III symptomatic hemorrhoids.A comprehensive analysis of comparative studies,randomized controlled trials,and meta-analyses published between 2020 and 2025 was conducted,with primary outcomes including postoperative pain,recovery time,operative duration,complication rates,and recurrence.Key findings from studies by Maloku et al and Hassan et al.were analyzed to contextualize real-world LHP use.Across multiple high-quality studies,LHP was consistently associated with significantly lower postoperative pain scores,reduced analgesic requirements,and faster return to daily activities.Maloku et al demonstrated a shorter mean operative time(15.9 minutes)and reduced pain compared to open techniques(26.8 minutes;P<0.01).Hassan et al confirmed these benefits in a cohort of 40 patients treated under local anesthesia.Operative time was generally comparable or shorter,and vessel ligation was suggested as an adjunct to improve outcomes in select cases.Complication rates were low and similar between groups,with LHP demonstrating minimal risk for major complications such as anal stenosis or incontinence.However,recurrence rates were higher with LHP in some studies,particularly in grade III disease.LHP offers a minimally invasive,low-morbidity alternative to excisional hemorrhoidectomy for appropriately selected patients.Despite superior short-term recovery profiles,potential for higher recurrence underscores the importance of patient selection and long-term follow-up.The role of local anesthesia and adjunctive vessel ligation merits further prospective evaluation.展开更多
Gallium nitride(GaN),as a third-generation semiconductor,is highly attractive due to its exceptional physical and chemical properties.Laser direct writing offers an efficient method for the precise processing of hard ...Gallium nitride(GaN),as a third-generation semiconductor,is highly attractive due to its exceptional physical and chemical properties.Laser direct writing offers an efficient method for the precise processing of hard and brittle materials.In this work,various types of surface microtexture were processed on GaN epilayers using a femtosecond laser with a wavelength of 1030 nm.The effects of the laser energy,singlepulse interval,number of pulses,and number of scan passes on groove machining were investigated with a view to achieving high-quality micromachining.The depth,width,surface morphology,and roughness of the grooves were analyzed using scanning electron microscopy,laser scanning confocal microscopy,and atomic force microscopy.Damage and stress were characterized at the microscale using Raman spectroscopy.High-quality precision machining of different types of periodic surface microtexture at 40 mW laser power was achieved by controlling the process parameters and laser trajectory.Finally,an initial exploration was conducted to examine vector-light-based microand nanostructure processing.The findings demonstrate the potential of femtosecond lasers for efficient micromachining of hard and brittle materials without the creation of heat-affected zones or microcracks.The high-quality textured structures achieved through this processing technique have broad and promising applications in optoelectronic devices and tribology.展开更多
Microgrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining,especially for hard-to-machine materials.Patterned laser ablation offers an avenue for ...Microgrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining,especially for hard-to-machine materials.Patterned laser ablation offers an avenue for fabricating microgrooves on any material with notably enhanced shape diversity.However,it is hard to precisely control the grooves'cross-sectional profiles due to the complex ablation process,including the diffraction-induced energy distribution variations away from the focal plane and the inconsistent polarization-related energy absorption.These factors complicate the relationship between beam spot shape and ablated groove shape,making it challenging to design appropriate spot shapes for specific groove requirements.Here,we propose an adaptive beam-shaping method for laser spot design to improve microgrooves'shape accuracy.Combining laser diffraction and polarization effects,a profile evolution model of the laser ablation is established to accurately predict groove shapes,guiding the iterative beam-shaping procedure.The beam spot shape is iteratively fine-tuned until the deviation between the simulated and the target grooves'profile meets the accuracy requirements.The grooves'profile deviations are significantly reduced,with the final profile's root mean square error decreased to less than 0.5μm when processing microgrooves with a width of 10μm.Various microgrooves with precise cross-sections,including triangles,trapezoids,and functionally contoured micro structures,are achieved by patterned laser direct writing assisted with the adaptive beam-shaping method.This method paves the way for laser ablation of microgrooves with high shape accuracy for traditional hard-to-machine materials.展开更多
Silicon carbide(SiC)is a highly valued material for power semiconductor devices due to its wide bandgap,high thermal conductivity,and high breakdown electric field.However,its high hardness,brittleness,and chemical st...Silicon carbide(SiC)is a highly valued material for power semiconductor devices due to its wide bandgap,high thermal conductivity,and high breakdown electric field.However,its high hardness,brittleness,and chemical stability present substantial challenges for efficient and high-quality processing.This study investigated the effects of picosecond laser surface scanning on 4H-SiC to enhance the material removal performance.The research focused on surface morphology,phase transitions,subsurface/interface characteristics,and material removal mechanisms under varying laser parameters.The results demonstrate that the laser thermal effect decomposes 4H-SiC into amorphous silicon(a-Si),disordered carbon,and graphite,forming a resolidified layer containing Si-O and Si-C-O oxides.Crystalline silicon(c-Si)is produced under high fluences or extensive irradiations.The variation in the resolidified layer thickness with changing laser parameters is revealed.A detailed laser-induced subsurface damage model is developed,encompassing a resolidified layer that includes the above decomposition and oxidation products,and a deformed layer formed primarily under laser-induced stress.The presence of the resolidified layer and the deformed layer leads to a decreased elastic recovery rate and an increased scratching depth,exceeding 2.5 times that of the unmodified condition.Enhanced material removal performance is mainly driven by the resolidified layer at low fluence and by the deformed layer at high fluence.When aligning the total of the ablation depth and the resolidified layer thickness with the subsurface damage depth in the original material,excellent polishing performance is achieved.These findings provide critical insights for understanding the phase evolution,subsurface damage mechanisms,and material removal behavior of 4H-SiC,offering valuable guidance for optimizing the laser surface modification parameters to achieve high-efficiency processing.展开更多
While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,du...While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.展开更多
基金supported by National Key R&D Program of China(Grant Nos.2021YFB2802000 and 2022YFB2804300)Science and Technology Commission of Shanghai Municipality(Grant No.21DZ1100500)+3 种基金Shanghai Municipal Science and Technology Major Projectthe Shanghai Frontiers Science Center Program(2021-2025 No.20)National Natural Science Foundation of China(Grant No.61975123)Shanghai Scienceand Technology Innovation Action Plan(Grant No.23JC1403100)。
文摘Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-forming three-dimensional(3D)microscale functional devices and inducing fascinating and unique physical or chemical phenomena have granted this technology powerful versatility that no other technology can match.As this technology advances rapidly in various fields of application,some key challenges have emerged and remain to be urgently addressed.This review firstly introduces the fundamental principles for understanding how fs laser pulses interact with materials and the associated unique phenomena in section 2.Then micro/nano-fabrication in transparent materials by fs laser processing is presented in section 3.Thereafter,several high efficiency/throughput fabrication methods as well as pulse-shaping techniques are listed in sections 4 and 5 reviews four-dimensional(4D)and nanoscale printing realized by fs laser processing technology.Special attention is paid to the heterogeneous integration(HI)of functional materials enabled by fs laser processing in section 6.Several intriguing examples of 3D functional micro-devices created by fs laser-based manufacturing methods such as microfluidics,lab-on-chip,micro-optics,micro-mechanics,micro-electronics,micro-bots and micro-biodevices are reviewed in section 7.Finally,a summary of the review and a perspective are proposed to explore the challenges and future opportunities for further betterment of fs laser micro/nano processing technology.
基金Shaanxi Province Qin Chuangyuan“Scientist+Engineer”Team Construction Project(2022KXJ-071)2022 Qin Chuangyuan Achievement Transformation Incubation Capacity Improvement Project(2022JH-ZHFHTS-0012)+8 种基金Shaanxi Province Key Research and Development Plan-“Two Chains”Integration Key Project-Qin Chuangyuan General Window Industrial Cluster Project(2023QCY-LL-02)Xixian New Area Science and Technology Plan(2022-YXYJ-003,2022-XXCY-010)2024 Scientific Research Project of Shaanxi National Defense Industry Vocational and Technical College(Gfy24-07)Shaanxi Vocational and Technical Education Association 2024 Vocational Education Teaching Reform Research Topic(2024SZX354)National Natural Science Foundation of China(U24A20115)2024 Shaanxi Provincial Education Department Service Local Special Scientific Research Program Project-Industrialization Cultivation Project(24JC005,24JC063)Shaanxi Province“14th Five-Year Plan”Education Science Plan,2024 Project(SGH24Y3181)National Key Research and Development Program of China(2023YFB4606400)Longmen Laboratory Frontier Exploration Topics Project(LMQYTSKT003)。
文摘A dual-phase synergistic enhancement method was adopted to strengthen the Al-Mn-Mg-Sc-Zr alloy fabricated by laser powder bed fusion(LPBF)by leveraging the unique advantages of Er and TiB_(2).Spherical powders of 0.5wt%Er-1wt%TiB_(2)/Al-Mn-Mg-Sc-Zr nanocomposite were prepared using vacuum homogenization technique,and the density of samples prepared through the LPBF process reached 99.8%.The strengthening and toughening mechanisms of Er-TiB_(2)were investigated.The results show that Al_(3)Er diffraction peaks are detected by X-ray diffraction analysis,and texture strength decreases according to electron backscatter diffraction results.The added Er and TiB_(2)nano-reinforcing phases act as heterogeneous nucleation sites during the LPBF forming process,hindering grain growth and effectively refining the grains.After incorporating the Er-TiB_(2)dual-phase nano-reinforcing phases,the tensile strength and elongation at break of the LPBF-deposited samples reach 550 MPa and 18.7%,which are 13.4%and 26.4%higher than those of the matrix material,respectively.
基金National Natural Science Foundation of China(51504138,51674118,52271177)Hunan Provincial Natural Science Foundation of China(2023JJ50181)Supported by State Key Laboratory of Materials Processing and Die&Mould Technology,Huazhong University of Science and Technology(P2024-022)。
文摘To explore the formation mechanism of anisotropy in Ti-6Al-4V alloy fabricated by selective laser melting(SLM),the compressive mechanical properties,microhardness,microstructure,and crystallographic orientation of the alloy across different planes were investigated.The anisotropy of SLM-fabricated Ti-6Al-4V alloys was analyzed,and the electron backscatter diffraction technique was used to investigate the influence of different grain types and orientations on the stress-strain distribution at various scales.Results reveal that in room-temperature compression tests at a strain rate of 10^(-3) s^(-1),both the compressive yield strength and microhardness vary along the deposition direction,indicating a certain degree of mechanical property anisotropy.The alloy exhibits a columnar microstructure;along the deposition direction,the grains appear equiaxed,and they have internal hexagonal close-packed(hcp)α/α'martensitic structure.α'phase has a preferential orientation approximately along the<0001>direction.Anisotropy arises from the high aspect ratio of columnar grains,along with the weak texture of the microstructure and low symmetry of the hcp crystal structure.
基金supports from National Natural Science Foundation of China(Grant No.52105498)The science and technology innovation Program of Hunan Province(Grant No.2021RC3074)+2 种基金Advanced Laser Technology Laboratory of Anhui Province(AHL2022KF04)National Key R&D Program of China(Grant No.2023YFB14605500)Changsha Natural Science Foundation(kq2402089).
文摘Combined pulsed laser(CPL),introduced in 1975 for target damage,integrates different lasers to achieve high peak power and pulse energy.However,despite decades of research,CPL remains unused for long-range target damage due to the challenge of maintaining high peak power density over long distances.We note that a potential solution lies in leveraging the air filament generated by femtosecond laser,which can transmit peak power densities higher than 1014 W/cm^(2)under the power clamping effect.To address this,a concept of a femtosecond laser induced air filament-CW CPL for surface damage of ceramics was introduced.We found no surface changes in ceramic targets when irradiated with a CW laser alone.By way of contrast,the target can be penetrated in a very short time(20 ms)with the assistance of the femtosecond laser induced air filament.In this context,we employ high-speed shadow imaging,cross-timescale simulation models and macro-microscopic characterization,to elucidate the CPL damage mechanism.The optimal CPL,combining a 1 mJ femtosecond laser and a 500 W CW laser,yields a damage rate of 1.51×10^(7)μm^(3)/J,representing an improvement of approximately 175%compared to single femtosecond laser ablation and around 59%enhancement compared to coating-assisted CW laser ablation.Furthermore,the efficacy of the proposed femtosecond-CW CPL method is demonstrated in causing penetration damage of ceramic/metal composite material or direct damage of sapphire,showcasing its versatility in damaging applications.Consequently,the femtosecond-CW CPL ablation method presented in this paper holds great promise as a new type of damage method for transparent hard and brittle materials.
基金supported by the Guangdong High Level Innovation Research Institute(Grant No.2021B0909050006)the National Grand Instrument Project(Grant No.2019YFF01014402)+1 种基金the National Natural Science Foundation of China(Grant No.12205008)support from the National Science Fund for Distinguished Young Scholars(Grant No.12225501)。
文摘Experimental validation of laser intensity is particularly important for the study of fundamental physics at extremely high intensities.However,reliable diagnosis of the focal spot and peak intensity faces huge challenges.In this work,we demonstrate for the firs time that the coherent radiation farfiel patterns from laser–foil interactions can serve as an in situ,real-time,and easy-to-implement diagnostic for an ultraintense laser focus.The laser-driven electron sheets,curved by the spatially varying laser fiel and leaving the targets at nearly the speed of light,produce doughnut-shaped patterns depending on the shapes of the focal spot and the absolute laser intensities.Assisted by particle-in-cell simulations,we can achieve measurements of the intensity and the focal spot,and provide immediate feedback to optimize the focal spots for extremely high intensity.
文摘Laser processing technologies enable the precise fabrication of arbitrary structures and devices with broad applications in micro-optics,micro-mechanics,and biomedicine.However,its adoption is limited by the large size,complexity,high cost,and low flexibility of optical systems.Metasurfaces enable precise multidimensional control of light fields,aligning well with the development trend toward compact,high-performance optical systems.Here,we review several recent studies on the application of metasurfaces in laser processing technologies,including 3D nanolithography,direct laser writing,and laser cutting.Metasurfaces provide an integrated operational platform with exceptional performance,poised to disrupt conventional laser processing workflows.This combination presents significant cost efficiency and substantial development potential,with promising applications in areas such as imaging,optical storage,advanced sensing,and space on-orbit manufacturing.
基金supported by the Natural Science Foundation of Jiangsu Province(Grant.BK20232042).
文摘Stimulated emission and lasing of GaN-based laser diodes(LDs)were reported at 1995[1]and 1996[2],right after the breakthrough of p-type doping[3−5],material quality[6]and the invention of high-brightness GaN-based LEDs[7,8].However,it took much longer time for GaN-based LDs to achieve high power,high wall plug efficiency,and long lifetime.Until 2019,Nichia reported blue LDs with these performances[9],which open wide applications with GaN-based blue LDs.
基金support from the NSRF via the Program Management Unit for Human Resources&Institutional Development,Research,and Innovation(No.B05F650022),as well as from Chiang Mai University.
文摘A super-radiant terahertz free-electron laser(THz-FEL)light source was developed for the first time in Thailand and Southeast Asia at the PBP-CMU Electron Linac Laboratory(PCELL)of Chiang Mai University.This radiation source requires relatively ultrashort electron bunches to produce intense coherent THz pulses.Three electron bunch compression processes are utilized in the PCELL accelerator system comprising pre-bunch compression in an alpha magnet,velocity bunching in a radio-frequency(RF)linear accelerator(linac),and magnetic bunch compression in a 180°acromat system.Electron bunch compression in the magnetic compressor system poses considerable challenges,which are addressed through the use of three quadrupole doublets.The strengths of the quadrupole fields significantly influence the rotation of the beam line longitudinal phase space distribution along the bunch compressor.Start-to-end beam dynamics simulations using the ASTRA code were performed to optimize the electron beam properties for generating super-radiant THz-FEL radiation.The operational parameters considered in the simulations comprise the alpha magnet gradient,linac RF phase,and quadrupole field strengths.The optimization results show that 10-16MeV femtosecond electron bunches with a low energy spread(~0.2%),small normalized emittance(~15πmm·mrad),and high peak current(165-247A)can be produced by the PCELL accelerator system at the optimal parameters.A THz-FEL with sub-microjoule pulse energies can thus be obtained at the optimized electron beam parameters.The physical and conceptual design of the THz-FEL beamline were completed based on the beam dynamics simulation results.The construction and installation of this beamline are currently underway and expected to be completed by mid-2024.The commissioning of the beamline will then commence.
基金funded by National Key R&D Program of China(Grant Nos.2024YFB3612200,2023YFB3609601,2022YFB3604300,2022YFB2802801,2022YFB3604802)Natural Science Foundation of China(Grant Nos.U24A20300,62174174,62274177,62275263,62325406,62374172,62304242,62304240,62404241)+4 种基金Youth Innovation Promotion Association of CAS(Grant Nos.2022323 and 2022324)Key R&D Program of Jiangsu Province(Grant No.BE2023018-2)Basic Research Program of Jiangsu(Grant No.BK20240126)Suzhou Science and Technology Program(Grant Nos.SYC2022089,ZXL2024379,and ZXL2024376)Guangdong Basic and Applied Basic Research Foundation(Grant Nos.2022A1515110482 and 2022A1515110004).
文摘Photonic crystal surface emitting lasers(PCSELs)utilize the Bragg diffraction of two-dimensional photonic crystals to achieve a single-mode output with a high power and a small divergence angle,and has recently attracted much attention^([1−3]).In 2023,Kyoto University reported GaAs-based 945 nm PCSELs with a continuous-wave(CW)single-mode output power of exceeding 50 W,and a narrow beam divergence angle of 0.05°,demonstrating a brightness of 1 GW·cm^(−2)·sr^(−1),which rivals those of the existing bulky lasers^([4]).
基金Project(52105498) supported by the National Natural Science Foundation of ChinaProject(2021RC3074) supported by the Science and Technology Innovation Program of Hunan Province,China+2 种基金Project(2023YFB4605500) supported by the National Key Research and Development Program of ChinaProject(AHL2022KF04) supported by the Advanced Laser Technology Laboratory of Anhui Province,ChinaProject(kq2402089) supported by the Changsha Natural Science Foundation,China。
文摘High-energy continuous wave(CW)lasers are mostly used in laser damage applications,but efficient laser ablation of transparent materials is challenging due to low optical absorption.Considering the potential of femtosecond(fs)laser-induced air filament for high-peak laser transmission over long distances,femtosecond(fs)laser-induced air filaments are combined with a millisecond(ms)laser to form an fs-ms CPL,enhancing the efficiency of sapphire ablation through synchronized spatial-temporal focusing.Experimental results show that ablation efficiency increases with the ms peak power and duty ratio.Excessive thermal stress leads to fragmentation of the sapphire when the ms duty ratio is over 30%at the peak power of 800 W,or when the peak power is over 500 W at a duty ratio of 100%.Also,the mechanism of high-efficiency damage is revealed through in-situ high-speed imaging.According to it,the ablation process went through 4 stages within 1.5 ms:defect-creating,melting and ablation,spattering,and fragmentation.Finally,the equivalent ablation efficiency of the fs-ms CPL is as high as 1.73×10^(7)μm^(3)/J,about 28 times higher compared to the fs laser only.The CPL damage method explored in this paper can provide theoretical guidance for efficient laser damage of transparent materials.
基金supported by the French ANRT agence nationale de la recherche technologique under the CIFRE conventions industrielles de formation par la recherche framework.
文摘This review examines the state-of-the-art in spatial manipulation of ultrafast laser processing using dynamic light modulators,with a particular focus on liquid crystal-based systems.We discuss phase modulation strategies and highlight the current limitations and challenges in surface and bulk processing.Specifically,we emphasize the delicate balance between high-fidelity beam shaping and energy efficiency,both critical for surface and bulk processing applications.Given the inherent physical limitations of spatial light modulators such as spatial resolution,fill factor,and phase modulation range.We explore techniques developed to bridge the gap between desired intensity distributions and actual experimental beam profiles.We present various laser light modulation technologies and the main algorithmic strategies for obtaining modulation patterns.The paper includes application examples across a wide range of fields,from surgery to surface structuring,cutting,bulk photo-inscription of optical functions,and additive manufacturing,highlighting the significant enhancements in processing speed and precision due to spatial beam shaping.The diverse applications and the technological limitations underscore the need for adapted modulation pattern calculation methods.We discuss several advancements addressing these challenges,involving both experimental and algorithmic developments,including the recent incorporation of artificial intelligence.Additionally,we cover recent progress in phase and pulse front control based on spatial modulators,which introduces an extra control parameter for light excitation with high potential for achieving more controlled processing outcomes.
基金supported by the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB35010202)the National Natural Science Foundation of China(Grants No.62275268)。
文摘This study presents an achievement of laser cooling of alkaline-earth atoms in the Chinese Space Station’s strontium(Sr)atomic space optical clock.The system’s core components,physical unit,optical unit,and electrical unit,have a total volume of 306 L and a total mass of 163.8 kg.These compact and robust units can overcome mechanical vibrations and temperature fluctuations during space launch.The laser sources of the optical unit are composed of diode lasers,and the injection locking of slave lasers is automatically performed by a program.In the experiment,a blue magneto-optical trap of cold atoms was achieved,with the atom numbers estimated to be approximately(1.50±0.13)×10^(6) for 87Sr and(8.00±0.56)×10^(6) for 88Sr.This work establishes a foundation for atomic confinement and high-precision interrogation in space-based optical clocks and expands the frontiers of cold atom physics in microgravity.
文摘A key component of future lunar missions is the concept of in-situ resource utilization(ISRU),which involves the use of local resources to support human missions and reduce dependence on Earth-based supplies.This paper investigates the thermal processing capability of lunar regolith without the addition of binders,with a focus on large-scale applications for the construction of lunar habitats and infrastructure.The study used a simulant of lunar regolith found on the Schr?dinger Basin in the South Pole region.This regolith simulant consists of20 wt%basalt and 80 wt%anorthosite.Experiments were conducted using a high power CO_(2)laser to sinter and melt the regolith in a 80 mm diameter laser spot to evaluate the effectiveness of direct large area thermal processing.Results indicated that sintering begins at approximately 1180℃and reaches full melt at temperatures above 1360℃.Sintering experiments with this material revealed the formation of dense samples up to 11 mm thick,while melting experiments successfully produced larger samples by overlapping molten layers and additive manufacturing up to 50 mm thick.The energy efficiency of the sintering and melting processes was compared.The melting process was about 10 times more energy efficient than sintering in terms of material consolidation,demonstrating the promising potential of laser melting technologies of anorthosite-rich regolith for the production of structural elements.
基金supported by the National Natural Science Foundation of China(No.12374257)。
文摘Development of on-chip coherent light sources with desired single-mode operation and straightforward spectral tunability has attracted intense interest due to ever-increasing demand for photonic devices and optoelectronic integration,but still faces serious challenges.Herein,we propose a facile method to synthesize cesium lead halide(CsPbX3)microstructures with well-defined morphologies,sizes,and constituent element gradient.The scheme is conducted using a chemical vapor deposition(CVD),which is subsequently associated with annealing-assisted solid-solid anion exchange.For the plate-shaped structures,the controllability on the cross-sectional dimension enables to precisely modulate the lasing modes,thus achieving single-mode operation;while tuning the stoichiometric of the halogen anion components in the plate-shaped CsPbI_(x)Br_(3−x) alloy samples,the lasing wavelengths are straightforwardly varied to span the entire visible spectrum.By comparison,the experimental scheme on synthesizing alloyed CsPbI_(x)Br_(3−x) perovskites is conducted using an in-situ approach,thereby achieving precise modulation of bandgap-controlled microlasers by controlling the reaction time.Such laser properties like controllable microcavity modes and broad stoichiometry-dependent tunability of light-emitting/lasing colors,associated with the facile synthesizing method of monocrystalline CsPbI_(x)Br_(3−x) structures,make lead halide perovskites ideal materials for the development of wavelength-controlled microlasers toward practical photonic integration.
文摘This paper describes what is thought to be the first generation of a continuous wave deep ultraviolet laser at 275 nm by efficient frequency doubling of a blue-diode-pumped Pr:YLF laser at 550 nm.By employing a novel fast-axis collimated blue semiconductor laser as the pump source,combined with a folded cavity and innovation coating technology,and utilizing a Brewster-cut BBO crystal for intracavity frequency doubling,TEM00 mode deep UV laser radiation at 275 nm with an output power of 351 mW is obtained.This marks the first report of achieving 275 nm laser generation based on Pr:LiYF4 to date.
文摘Hemorrhoidal disease is a prevalent anorectal condition causing significant morbidity,affecting approximately 4%of the general population with incidence increasing with age and sedentary lifestyle.While conventional excisional hemorrhoidectomy techniques such as Milligan-Morgan and Ferguson remain standard for long-term efficacy,they are often associated with substantial postoperative pain and prolonged recovery.This narrative review evaluates the comparative clinical outcomes of laser hemorrhoidoplasty(LHP)versus conventional surgical interventions in the treatment of grade II and III symptomatic hemorrhoids.A comprehensive analysis of comparative studies,randomized controlled trials,and meta-analyses published between 2020 and 2025 was conducted,with primary outcomes including postoperative pain,recovery time,operative duration,complication rates,and recurrence.Key findings from studies by Maloku et al and Hassan et al.were analyzed to contextualize real-world LHP use.Across multiple high-quality studies,LHP was consistently associated with significantly lower postoperative pain scores,reduced analgesic requirements,and faster return to daily activities.Maloku et al demonstrated a shorter mean operative time(15.9 minutes)and reduced pain compared to open techniques(26.8 minutes;P<0.01).Hassan et al confirmed these benefits in a cohort of 40 patients treated under local anesthesia.Operative time was generally comparable or shorter,and vessel ligation was suggested as an adjunct to improve outcomes in select cases.Complication rates were low and similar between groups,with LHP demonstrating minimal risk for major complications such as anal stenosis or incontinence.However,recurrence rates were higher with LHP in some studies,particularly in grade III disease.LHP offers a minimally invasive,low-morbidity alternative to excisional hemorrhoidectomy for appropriately selected patients.Despite superior short-term recovery profiles,potential for higher recurrence underscores the importance of patient selection and long-term follow-up.The role of local anesthesia and adjunctive vessel ligation merits further prospective evaluation.
基金supported by the Henan Key Laboratory of Intelligent Manufacturing Equipment Integration for Superhard Materials(Grant No.JDKJ2022-01)the National Natural Science Foundation of China(Grant Nos.52035009 and 51761135106)+1 种基金the 2020 Mobility Programme of the Sino-German Center for Research Promotion(Grant No.M-0396)the“111”project by the State Administration of Foreign Experts Affairs and the Ministry of Education of China(Grant No.B07014).
文摘Gallium nitride(GaN),as a third-generation semiconductor,is highly attractive due to its exceptional physical and chemical properties.Laser direct writing offers an efficient method for the precise processing of hard and brittle materials.In this work,various types of surface microtexture were processed on GaN epilayers using a femtosecond laser with a wavelength of 1030 nm.The effects of the laser energy,singlepulse interval,number of pulses,and number of scan passes on groove machining were investigated with a view to achieving high-quality micromachining.The depth,width,surface morphology,and roughness of the grooves were analyzed using scanning electron microscopy,laser scanning confocal microscopy,and atomic force microscopy.Damage and stress were characterized at the microscale using Raman spectroscopy.High-quality precision machining of different types of periodic surface microtexture at 40 mW laser power was achieved by controlling the process parameters and laser trajectory.Finally,an initial exploration was conducted to examine vector-light-based microand nanostructure processing.The findings demonstrate the potential of femtosecond lasers for efficient micromachining of hard and brittle materials without the creation of heat-affected zones or microcracks.The high-quality textured structures achieved through this processing technique have broad and promising applications in optoelectronic devices and tribology.
基金financially supported by the National Natural Science Foundation of China(Grant No.52375438)the Guangdong Talent Project(Grant No.2023TQ07Z453)+1 种基金the Shenzhen Science and Technology Programs(Grant Nos.JCYJ20220818100408019 and JSGG20220831101401003)Jiangyin-SUSTech Innovation Fund。
文摘Microgrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining,especially for hard-to-machine materials.Patterned laser ablation offers an avenue for fabricating microgrooves on any material with notably enhanced shape diversity.However,it is hard to precisely control the grooves'cross-sectional profiles due to the complex ablation process,including the diffraction-induced energy distribution variations away from the focal plane and the inconsistent polarization-related energy absorption.These factors complicate the relationship between beam spot shape and ablated groove shape,making it challenging to design appropriate spot shapes for specific groove requirements.Here,we propose an adaptive beam-shaping method for laser spot design to improve microgrooves'shape accuracy.Combining laser diffraction and polarization effects,a profile evolution model of the laser ablation is established to accurately predict groove shapes,guiding the iterative beam-shaping procedure.The beam spot shape is iteratively fine-tuned until the deviation between the simulated and the target grooves'profile meets the accuracy requirements.The grooves'profile deviations are significantly reduced,with the final profile's root mean square error decreased to less than 0.5μm when processing microgrooves with a width of 10μm.Various microgrooves with precise cross-sections,including triangles,trapezoids,and functionally contoured micro structures,are achieved by patterned laser direct writing assisted with the adaptive beam-shaping method.This method paves the way for laser ablation of microgrooves with high shape accuracy for traditional hard-to-machine materials.
基金supported by the research studentship of The Hong Kong Polytechnic University(Project code:RMAN)the Research and Innovation Office of The Hong Kong Polytechnic University(Project codes:1-W308 and 1-BECE)+2 种基金the Research Grants Council of the Government of the Hong Kong Special Administrative Region(HKSAR),China(No.15205423)funding support from the Innovation and Technology Commission(ITC)of HKSAR,China(MHP/151/22)funding support from the State Key Laboratory of Ultra-precision Machining Technology(Project code:BBX5).
文摘Silicon carbide(SiC)is a highly valued material for power semiconductor devices due to its wide bandgap,high thermal conductivity,and high breakdown electric field.However,its high hardness,brittleness,and chemical stability present substantial challenges for efficient and high-quality processing.This study investigated the effects of picosecond laser surface scanning on 4H-SiC to enhance the material removal performance.The research focused on surface morphology,phase transitions,subsurface/interface characteristics,and material removal mechanisms under varying laser parameters.The results demonstrate that the laser thermal effect decomposes 4H-SiC into amorphous silicon(a-Si),disordered carbon,and graphite,forming a resolidified layer containing Si-O and Si-C-O oxides.Crystalline silicon(c-Si)is produced under high fluences or extensive irradiations.The variation in the resolidified layer thickness with changing laser parameters is revealed.A detailed laser-induced subsurface damage model is developed,encompassing a resolidified layer that includes the above decomposition and oxidation products,and a deformed layer formed primarily under laser-induced stress.The presence of the resolidified layer and the deformed layer leads to a decreased elastic recovery rate and an increased scratching depth,exceeding 2.5 times that of the unmodified condition.Enhanced material removal performance is mainly driven by the resolidified layer at low fluence and by the deformed layer at high fluence.When aligning the total of the ablation depth and the resolidified layer thickness with the subsurface damage depth in the original material,excellent polishing performance is achieved.These findings provide critical insights for understanding the phase evolution,subsurface damage mechanisms,and material removal behavior of 4H-SiC,offering valuable guidance for optimizing the laser surface modification parameters to achieve high-efficiency processing.
基金the support by the Harbin Manufacturing Science and Technology Innovation Talent Project(No.2023CXRCGD035)the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment and Technology in Huazhong University of Science and Technology,China(No.IMETKF2023012).
文摘While laser surface texturing(LST)is a promising manufacturing technique for surface functionalization,simultaneously realizing high precision and high efficiency in the LST of complex curved surface is challenging,due to continuously varied geometries of laser-matter incidence.In the present work,we propose a novel manufacturing system of 7-axis on-the-fly LST for complex curved surface,based on the integrated synchronization of 5-axis linkage motion platform with 2-axis galvanometer.Specifically,the algorithm for decomposing spatial texture trajectory on curved surface into low-frequency and high-frequency parts is established,based on which the kinematic model of synchronized 7-axis system is developed to derive the motion of each axis in both 5-axis linkage motion platform and 2-axis galvanometer simultaneously.Subsequently,the synchronized 7-axis LST system is experimentally realized,including the setup of mechanical stages integrated with optical path,the configuration of numerical control unit,and the development of processing software.Finally,case study of 7-axis on-the-fly LST of freeform aluminum surface is performed,and the advantages in terms of processing efficiency and texturing accuracy over 5-axis linkage LST are demonstrated.The correlation of reduced following errors between mechanical stages with the promoted performance of curved surface texturing by the 7-axis on-the-fly LST is further analyzed.Current work provides a feasible solution for establishing the manufacturing system for high performance LST of complex curved surface.
