Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respective...Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respectively by the conventional process and the ion-beam assisted deposition. The effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 was investigated in details, and the stress control methodologies using on-line adjustment and film doping were put forward. The results show that the film stress value of TiO2 prepared by ion-beam assisted deposition is 40 MPa lower than that prepared by conventional process, and the stress of TiO2 film changes gradually from tensile stress into compressive stress with increasing ion energy; while the film stress of SiO2 is a tensile stress under ion-beam assisted deposition because of the ion-beam sputtering effect, and the film refractive index decreases with increasing ion energy. A dynamic film stress control can be achieved through in-situ adjustment of the processing parameters based on the online film stress measuring technique, and the intrinsic stress of film can be effectively changed through film doping.展开更多
Diamond-like carbon （DLC） thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prep...Diamond-like carbon （DLC） thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy （AFM）, Raman spectroscopy, nanoindentation, and Fourier transform infrared （FTIR） spec- troscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases.展开更多
Vacuum treatment and ion-beam bombardment are two major processes in the low energy ion-beam implantation. To accurately study the contributions of these two major factors to the bioeffects separately, the M1 generati...Vacuum treatment and ion-beam bombardment are two major processes in the low energy ion-beam implantation. To accurately study the contributions of these two major factors to the bioeffects separately, the M1 generation variation of Arabidopsis thaliana with ion-beam implantation and vacuum treatment were compared through a series of key plant development parameters including morphological observation, biochemical assay and RAPD （random amplified polymorphic DNA） analysis. The results showed that ion-beam implantation had obvious effect on almost all of these parameters, and the vacuum treatment had some impacts on several morphological parameters such as the bolting time and the length of the primary stem. Taking the results together, the indication is that vacuum treatment has some slight contributions to the bioeffects of ion-beam implantation while ion-beam bombardment itself is the major creator of the bioeffects.展开更多
In this paper, surface modification of the strut dowel used in ITER PF support is reported. Different ions （nitrogen/titanium） with different doses are implanted into the surface of strut dowel. The result of Auger ...In this paper, surface modification of the strut dowel used in ITER PF support is reported. Different ions （nitrogen/titanium） with different doses are implanted into the surface of strut dowel. The result of Auger Electron Spectroscopy （AES） indicates that nitrogen can be implanted more deeply than titanium under the implantation condition of 60 kV accelerating voltage and a dose of 8×10^17/cm2 nitrogen. Surface Micro Hardness （SMH） and wear resistance are improved remarkably. Further SEM observation shows that there are no obvious scratches and damages after wear test.展开更多
he present paper focuses on the modifying effects of ion beam mixing, ion im-planting and ion sputtering on hydrogen evolution electrodes. It was discovered thatthe four types of electrodes possessed excellent catalyt...he present paper focuses on the modifying effects of ion beam mixing, ion im-planting and ion sputtering on hydrogen evolution electrodes. It was discovered thatthe four types of electrodes possessed excellent catalytic activity in acid or alkalinemedia and potential stability in long term electrolysis of water under high currentdensity. Their stability and applying life-span greatly surpass those of other elec-trodes activated by electrodepositing and other method. The effects of temperatureand roughness on function of electrodes were also examined. XPS and AES wereapplied to analyse the surface composition and bond states of the electrodes, andthe distribution of concentration varying with depth, and to explain the law of theexperiments .展开更多
The poloidal magnetic field( B_(p)) plays a critical role in plasma equilibrium, confinement and transport of magnetic confinement devices. Multiple diagnostic methods are needed to complement each other to obtain a m...The poloidal magnetic field( B_(p)) plays a critical role in plasma equilibrium, confinement and transport of magnetic confinement devices. Multiple diagnostic methods are needed to complement each other to obtain a more accurate B_(p) profile. Recently, the laser-driven ion-beam trace probe(LITP) has been proposed as a promising tool for diagnosing B_(p) and radial electric field( E_(r)) profiles in tokamaks [Yang X Y et al 2014 Rev. Sci. Instrum. 85 11E429]. The spherical tokamak(ST) is a promising compact device with high plasma beta and naturally large elongation. However, when applying LITP to diagnosing B_(p) in STs, the larger B_(p) invalidates the linear reconstruction relationship for conventional tokamaks, necessitating the development of a nonlinear reconstruction principle tailored to STs. This novel approach employs an iterative reconstruction method based on Newton's method to solve the nonlinear equation. Subsequently,a simulation model to reconstruct the B_(p) profile of STs is developed and the experimental setup of LITP is designed for EXL-50, a middle-sized ST. Simulation results of the reconstruction show that the relative errors of B_(p) reconstruction are mostly below 5%. Moreover, even with 5 mm measurement error on beam traces or 1 cm flux surface shape error, the average relative error of reconstruction remains below 15%, initially demonstrating the robustness of LITP in diagnosing B_(p) profiles in STs.展开更多
Pseudowaves, known as burst-ion signals, which are different from plasma normal modes, exist frequently in ion- wave excitation experiments when launching the waves by applying a pulsed voltage to a negatively biased ...Pseudowaves, known as burst-ion signals, which are different from plasma normal modes, exist frequently in ion- wave excitation experiments when launching the waves by applying a pulsed voltage to a negatively biased grid. In previous experiments, only one kind of the pseudowave was observed. In this paper, we report the observation and identification of double pseudowaves in an ion-beam-plasma system. These pseudowaves originate from two ion groups： the burst of the beam ions and the burst of the background ions. It was observed that the burst of the background ions was in the case of high ion beam energy, while the burst of the beam ions was in the case of low ion beam energy. By observing the dependence of the signal velocities on the characteristics of the excitation voltage, these pseudowaves can be identified. It was also observed that the burst ion signal originating from the background ions can interact with slow beam mode and that originating from the beam ions can interact with fast beam mode.展开更多
Bacillus megaterium BM302 bred by ion-beam implantation produces L-sorbose dehydrogenase accelerative protein （SAP） to accelerate the activity of L-sorbose dehydrogenase （SDH） of Gluconobacter oxydans in the 2-ket...Bacillus megaterium BM302 bred by ion-beam implantation produces L-sorbose dehydrogenase accelerative protein （SAP） to accelerate the activity of L-sorbose dehydrogenase （SDH） of Gluconobacter oxydans in the 2-keto-L-gulonic acid （2KLG） fermentation from L-sorbose by the mixed culture of B. megaterium BM302 and G. oxydans. The SAP purified by three chromatographic steps gave 35-fold purification with a yield of 13% and a specific activity of 5.21 units/mg protein. The molecular weight of the purified SAP was about 58 kDa. The SDH accelerative activity of SAP at pH 7 and 50℃ was the highest. Additionally, it retained 60% activity at a pH range of 6.5 ～ 10 and was stable at 20℃ ～ 60℃. After 0.32-unit SAP was added to the single cultured G. oxydans strains, the SDH activity was apparently accelerated and the 2KLG yield of GO29, GO112, GO and GI13 was enhanced 2.1, 3.3, 3.5 and 2.9 folds respectively over that of the strains without the addition of SAP.展开更多
Plasmas containing ion beams have various applications both in plasma technology and in fundamental research. The ion beam energy and flux are the two factors characterizing the beam properties. Previous studies have ...Plasmas containing ion beams have various applications both in plasma technology and in fundamental research. The ion beam energy and flux are the two factors characterizing the beam properties. Previous studies have not achieved the independent adjustment of these two parameters. In this paper, an ion-beam-background-plasma system was produced with hotcathode discharge in a double plasma device separated by two adjacent grids, with which the beam energy and flux ratio （the ratio between the beam flux and total ion flux） can be controlled independently. It is shown that the discharge voltage （i.e., voltage across the hot-cathode and anode） and the voltage drop between the two separation grids can be used to effectively control the beam energy while the flux ratio is not affected by these voltages. The flux ratio depends sensitively on hot-filaments heating current whose influence on the beam energy is relatively weak, and thus enabling approximate control of the flux ratio展开更多
The Ni80Nb20 films were prepared by ion beam assisted deposition (IBAD) with various Ar+ ion energies. A phase evolution of fcc→amorphous→Ni+Nb→Ni+hcp was observed with the increasing of ion beam energy from 2 keV ...The Ni80Nb20 films were prepared by ion beam assisted deposition (IBAD) with various Ar+ ion energies. A phase evolution of fcc→amorphous→Ni+Nb→Ni+hcp was observed with the increasing of ion beam energy from 2 keV to 8 keV. When bombarded by Ar+ ions of 8 keV during deposition, a new crystalline phase with hcp structure was obtained, of which the lattice parameters are a=0.286 nm and c=0.483 nm, different from those of the similar A3B-type hcp phase previously reported. The experimental results were discussed in terms of thermodynamics and restricted kinetic conditions in the far-from-equilibrium process of IBAD. The formation of hep phase may also be related to the valence electron effect.展开更多
The whole DNA of soybean was implanted into four varieties of wheat of Zhongyu 5, Huaiyin 9628, Wenyou 1, Jimai 5 respectively via ion-beam mediation. There were 5 plants obtained whose protein content was higher than...The whole DNA of soybean was implanted into four varieties of wheat of Zhongyu 5, Huaiyin 9628, Wenyou 1, Jimai 5 respectively via ion-beam mediation. There were 5 plants obtained whose protein content was higher than 18.5 %, the highest one was 21.44 %. There were 3 plants obtained whose protein content was lower than 11.5%, the lowest one was 10.96%. We can see that the whole DNA of soybean transformed into wheat via ion beam implantation can induce the increase in wheat protein content dramatically. The result also shows that the transformation efficiency of different gene types of wheat receptor varies greatly that the implanting time has a certain effect on the efficiency of transformation.展开更多
The CuZnSn（CZT） precursor thin films are grown by ion-beam sputtering Cu, Zn, Sn targets with different orders and then sputtering Se target to fabricate Cu_2ZnSnSe_4（CZTSe） absorber thin films on molybdenum subst...The CuZnSn（CZT） precursor thin films are grown by ion-beam sputtering Cu, Zn, Sn targets with different orders and then sputtering Se target to fabricate Cu_2ZnSnSe_4（CZTSe） absorber thin films on molybdenum substrates. They are annealed in the same vacuum chamber at 400 ℃. The characterization methods of CZTSe thin films include X-ray diffraction（XRD）, energy dispersive spectroscopy（EDS）, scanning electron microscopy（SEM）, and X-ray photoelectron spectra（XPS） in order to study the crystallographic properties, composition, surface morphology, electrical properties and so on. The results display that the CZTSe thin films got the strongest diffraction peak intensity and were with good crystalline quality and its morphology appeared smooth and compact with a sequence of Cu/Zn/Sn/Se, which reveals that the expected states for CZTSe are Cu^（1＋）, Zn^（2＋）, Sn^（4＋）, Se^（2）.With the good crystalline quality and close to ideal stoichiometric ratio the resistivity of the CZTSe film with the sequence of Cu/Zn/Sn/Se is lower, whose optical band gap is about 1.50 eV.展开更多
We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayercoat...We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayercoating parameters well meet the design targets. At an incident angle of 10°, the peak diffraction efficiency of the ＋1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.展开更多
An in-situ end-point detection technique for ion-beam etching is presented. A laser beam of the same wavelength and polarization as those in the intended application of the grating is fed into the vacuum chamber, and ...An in-situ end-point detection technique for ion-beam etching is presented. A laser beam of the same wavelength and polarization as those in the intended application of the grating is fed into the vacuum chamber, and the beam retro-diffracted by the grating under etching is extracted and detected outside the chamber. This arrangement greatly simplifies the end-point detection. Modeling the grating diffraction with a rigorous diffraction grating computer program, we can satisfactorily simulate the evolution of the diffraction intensity during the etching process and consequently, we can accurately predict the end-point. Employing the proposed technique, we have reproducibly fabricated multilayer dielectric gratings with diffraction efficiencies of more than 92%.展开更多
The single-sided and dual-sided high reflective mirrors were deposited with ion-beam sputtering （IBS）. When the incident light entered with 45°, the reflectance of p-polarized light at 1064 nm exceeded 99.5%. S...The single-sided and dual-sided high reflective mirrors were deposited with ion-beam sputtering （IBS）. When the incident light entered with 45°, the reflectance of p-polarized light at 1064 nm exceeded 99.5%. Spectrum was gained by spectrometer and weak absorption of coatings was measured by surface thermal lensing （STL） technique. Laser-induced damage threshold （LIDT） was determined and the damage morphology was observed with Lecia-DMRXE microscope simultaneously. The profile of coatings was measured with Mark III-GPI digital interferometer. It was found that the reflectivity of mirror exceeded 99.9% and its absorption was as low as 14 ppm. The reflective bandwidth of the dual-sided sample was about 43 nm wider than that of single-sided sample, and its LIDT was as high as 28 J/cm^2, which was 5 J/cm^2 higher than that of single-sided sample. Moreover, the profile of dual-sided sample was better than that of substrate without coatings.展开更多
文摘Based on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respectively by the conventional process and the ion-beam assisted deposition. The effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 was investigated in details, and the stress control methodologies using on-line adjustment and film doping were put forward. The results show that the film stress value of TiO2 prepared by ion-beam assisted deposition is 40 MPa lower than that prepared by conventional process, and the stress of TiO2 film changes gradually from tensile stress into compressive stress with increasing ion energy; while the film stress of SiO2 is a tensile stress under ion-beam assisted deposition because of the ion-beam sputtering effect, and the film refractive index decreases with increasing ion energy. A dynamic film stress control can be achieved through in-situ adjustment of the processing parameters based on the online film stress measuring technique, and the intrinsic stress of film can be effectively changed through film doping.
基金Project supported by the National Natural Science Foundation of China(Grant No.61235011)the Science Foundation of the Science and Technology Commission of Tianjin Municipality,China(Grant Nos.13JCYBJC17300 and 12JCQNIC01200)
文摘Diamond-like carbon （DLC） thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy （AFM）, Raman spectroscopy, nanoindentation, and Fourier transform infrared （FTIR） spec- troscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases.
基金supported by National Science Fund for Distinguished Young Scholars (No. 10225526)
文摘Vacuum treatment and ion-beam bombardment are two major processes in the low energy ion-beam implantation. To accurately study the contributions of these two major factors to the bioeffects separately, the M1 generation variation of Arabidopsis thaliana with ion-beam implantation and vacuum treatment were compared through a series of key plant development parameters including morphological observation, biochemical assay and RAPD （random amplified polymorphic DNA） analysis. The results showed that ion-beam implantation had obvious effect on almost all of these parameters, and the vacuum treatment had some impacts on several morphological parameters such as the bolting time and the length of the primary stem. Taking the results together, the indication is that vacuum treatment has some slight contributions to the bioeffects of ion-beam implantation while ion-beam bombardment itself is the major creator of the bioeffects.
基金supported by National Natural Science Foundation of China (No.10905044)Fundamental Research Funds for the Central Universities of China
文摘In this paper, surface modification of the strut dowel used in ITER PF support is reported. Different ions （nitrogen/titanium） with different doses are implanted into the surface of strut dowel. The result of Auger Electron Spectroscopy （AES） indicates that nitrogen can be implanted more deeply than titanium under the implantation condition of 60 kV accelerating voltage and a dose of 8×10^17/cm2 nitrogen. Surface Micro Hardness （SMH） and wear resistance are improved remarkably. Further SEM observation shows that there are no obvious scratches and damages after wear test.
文摘he present paper focuses on the modifying effects of ion beam mixing, ion im-planting and ion sputtering on hydrogen evolution electrodes. It was discovered thatthe four types of electrodes possessed excellent catalytic activity in acid or alkalinemedia and potential stability in long term electrolysis of water under high currentdensity. Their stability and applying life-span greatly surpass those of other elec-trodes activated by electrodepositing and other method. The effects of temperatureand roughness on function of electrodes were also examined. XPS and AES wereapplied to analyse the surface composition and bond states of the electrodes, andthe distribution of concentration varying with depth, and to explain the law of theexperiments .
基金the support of National Key Research and Development Program of China (No. 2022YFA1604600)State Key Laboratory of Advanced Electromagnetic Technology。
文摘The poloidal magnetic field( B_(p)) plays a critical role in plasma equilibrium, confinement and transport of magnetic confinement devices. Multiple diagnostic methods are needed to complement each other to obtain a more accurate B_(p) profile. Recently, the laser-driven ion-beam trace probe(LITP) has been proposed as a promising tool for diagnosing B_(p) and radial electric field( E_(r)) profiles in tokamaks [Yang X Y et al 2014 Rev. Sci. Instrum. 85 11E429]. The spherical tokamak(ST) is a promising compact device with high plasma beta and naturally large elongation. However, when applying LITP to diagnosing B_(p) in STs, the larger B_(p) invalidates the linear reconstruction relationship for conventional tokamaks, necessitating the development of a nonlinear reconstruction principle tailored to STs. This novel approach employs an iterative reconstruction method based on Newton's method to solve the nonlinear equation. Subsequently,a simulation model to reconstruct the B_(p) profile of STs is developed and the experimental setup of LITP is designed for EXL-50, a middle-sized ST. Simulation results of the reconstruction show that the relative errors of B_(p) reconstruction are mostly below 5%. Moreover, even with 5 mm measurement error on beam traces or 1 cm flux surface shape error, the average relative error of reconstruction remains below 15%, initially demonstrating the robustness of LITP in diagnosing B_(p) profiles in STs.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.11575183 and 11705201)
文摘Pseudowaves, known as burst-ion signals, which are different from plasma normal modes, exist frequently in ion- wave excitation experiments when launching the waves by applying a pulsed voltage to a negatively biased grid. In previous experiments, only one kind of the pseudowave was observed. In this paper, we report the observation and identification of double pseudowaves in an ion-beam-plasma system. These pseudowaves originate from two ion groups： the burst of the beam ions and the burst of the background ions. It was observed that the burst of the background ions was in the case of high ion beam energy, while the burst of the beam ions was in the case of low ion beam energy. By observing the dependence of the signal velocities on the characteristics of the excitation voltage, these pseudowaves can be identified. It was also observed that the burst ion signal originating from the background ions can interact with slow beam mode and that originating from the beam ions can interact with fast beam mode.
基金the General Program of National Science Foundation of China(No.10375066)
文摘Bacillus megaterium BM302 bred by ion-beam implantation produces L-sorbose dehydrogenase accelerative protein （SAP） to accelerate the activity of L-sorbose dehydrogenase （SDH） of Gluconobacter oxydans in the 2-keto-L-gulonic acid （2KLG） fermentation from L-sorbose by the mixed culture of B. megaterium BM302 and G. oxydans. The SAP purified by three chromatographic steps gave 35-fold purification with a yield of 13% and a specific activity of 5.21 units/mg protein. The molecular weight of the purified SAP was about 58 kDa. The SDH accelerative activity of SAP at pH 7 and 50℃ was the highest. Additionally, it retained 60% activity at a pH range of 6.5 ～ 10 and was stable at 20℃ ～ 60℃. After 0.32-unit SAP was added to the single cultured G. oxydans strains, the SDH activity was apparently accelerated and the 2KLG yield of GO29, GO112, GO and GI13 was enhanced 2.1, 3.3, 3.5 and 2.9 folds respectively over that of the strains without the addition of SAP.
基金supported by National Natural Science Foundation of China(Nos.11575183,11175177)
文摘Plasmas containing ion beams have various applications both in plasma technology and in fundamental research. The ion beam energy and flux are the two factors characterizing the beam properties. Previous studies have not achieved the independent adjustment of these two parameters. In this paper, an ion-beam-background-plasma system was produced with hotcathode discharge in a double plasma device separated by two adjacent grids, with which the beam energy and flux ratio （the ratio between the beam flux and total ion flux） can be controlled independently. It is shown that the discharge voltage （i.e., voltage across the hot-cathode and anode） and the voltage drop between the two separation grids can be used to effectively control the beam energy while the flux ratio is not affected by these voltages. The flux ratio depends sensitively on hot-filaments heating current whose influence on the beam energy is relatively weak, and thus enabling approximate control of the flux ratio
基金The work was supported in part by the National Natural Sci ence Foundation of China(No.19875027)The Ministry of Science and Technology of China(No.G200067207-1),by the Adninistration of Tsinghua University.
文摘The Ni80Nb20 films were prepared by ion beam assisted deposition (IBAD) with various Ar+ ion energies. A phase evolution of fcc→amorphous→Ni+Nb→Ni+hcp was observed with the increasing of ion beam energy from 2 keV to 8 keV. When bombarded by Ar+ ions of 8 keV during deposition, a new crystalline phase with hcp structure was obtained, of which the lattice parameters are a=0.286 nm and c=0.483 nm, different from those of the similar A3B-type hcp phase previously reported. The experimental results were discussed in terms of thermodynamics and restricted kinetic conditions in the far-from-equilibrium process of IBAD. The formation of hep phase may also be related to the valence electron effect.
文摘The whole DNA of soybean was implanted into four varieties of wheat of Zhongyu 5, Huaiyin 9628, Wenyou 1, Jimai 5 respectively via ion-beam mediation. There were 5 plants obtained whose protein content was higher than 18.5 %, the highest one was 21.44 %. There were 3 plants obtained whose protein content was lower than 11.5%, the lowest one was 10.96%. We can see that the whole DNA of soybean transformed into wheat via ion beam implantation can induce the increase in wheat protein content dramatically. The result also shows that the transformation efficiency of different gene types of wheat receptor varies greatly that the implanting time has a certain effect on the efficiency of transformation.
基金Project supported by the National Natural Science Foundation of China(No.61404086)the Basical Research Program of Shenzhen(Nos.JCYJ20150324140036866,JCYJ20150324141711581)the Natural Science Foundation of SZU(No.2014017)
文摘The CuZnSn（CZT） precursor thin films are grown by ion-beam sputtering Cu, Zn, Sn targets with different orders and then sputtering Se target to fabricate Cu_2ZnSnSe_4（CZTSe） absorber thin films on molybdenum substrates. They are annealed in the same vacuum chamber at 400 ℃. The characterization methods of CZTSe thin films include X-ray diffraction（XRD）, energy dispersive spectroscopy（EDS）, scanning electron microscopy（SEM）, and X-ray photoelectron spectra（XPS） in order to study the crystallographic properties, composition, surface morphology, electrical properties and so on. The results display that the CZTSe thin films got the strongest diffraction peak intensity and were with good crystalline quality and its morphology appeared smooth and compact with a sequence of Cu/Zn/Sn/Se, which reveals that the expected states for CZTSe are Cu^（1＋）, Zn^（2＋）, Sn^（4＋）, Se^（2）.With the good crystalline quality and close to ideal stoichiometric ratio the resistivity of the CZTSe film with the sequence of Cu/Zn/Sn/Se is lower, whose optical band gap is about 1.50 eV.
基金supported by the National Natural Science Foundation of China (No. 60678034) an internal fund of the State Key Laboratory of Applied Optics of China
文摘We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayercoating parameters well meet the design targets. At an incident angle of 10°, the peak diffraction efficiency of the ＋1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.
基金This research is supported by the National 863 Program of China
文摘An in-situ end-point detection technique for ion-beam etching is presented. A laser beam of the same wavelength and polarization as those in the intended application of the grating is fed into the vacuum chamber, and the beam retro-diffracted by the grating under etching is extracted and detected outside the chamber. This arrangement greatly simplifies the end-point detection. Modeling the grating diffraction with a rigorous diffraction grating computer program, we can satisfactorily simulate the evolution of the diffraction intensity during the etching process and consequently, we can accurately predict the end-point. Employing the proposed technique, we have reproducibly fabricated multilayer dielectric gratings with diffraction efficiencies of more than 92%.
文摘The single-sided and dual-sided high reflective mirrors were deposited with ion-beam sputtering （IBS）. When the incident light entered with 45°, the reflectance of p-polarized light at 1064 nm exceeded 99.5%. Spectrum was gained by spectrometer and weak absorption of coatings was measured by surface thermal lensing （STL） technique. Laser-induced damage threshold （LIDT） was determined and the damage morphology was observed with Lecia-DMRXE microscope simultaneously. The profile of coatings was measured with Mark III-GPI digital interferometer. It was found that the reflectivity of mirror exceeded 99.9% and its absorption was as low as 14 ppm. The reflective bandwidth of the dual-sided sample was about 43 nm wider than that of single-sided sample, and its LIDT was as high as 28 J/cm^2, which was 5 J/cm^2 higher than that of single-sided sample. Moreover, the profile of dual-sided sample was better than that of substrate without coatings.
