As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has...As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.展开更多
基金Supported by National Natural Science Foundation of China(Grant No.51275307)
文摘As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
