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Development and application of knowledge-based subject group integration platforms:A case study of Shanghai Institute of Ceramics,CAS 被引量:1
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作者 Yu LIU Jian FU +2 位作者 Huijun ZHENG Hao CHEN Zhiping YANG 《Chinese Journal of Library and Information Science》 2014年第2期1-14,共14页
Purpose:According to the different requirements of research group users,we established the knowledge-based subject group integration platforms of Shanghai Institute of Ceramics,the Chinese Academy of Sciences(abbrevia... Purpose:According to the different requirements of research group users,we established the knowledge-based subject group integration platforms of Shanghai Institute of Ceramics,the Chinese Academy of Sciences(abbreviated as SIC CAS hereinafter),which were designed and constructed to better meet the needs of CAS research groups for their development,collaboration and communication.Design/methodology/approach:We first identified the requirements of users via preliminary investigation,and then chose CASI1 P,iLibrary and XKE technology,respectively as the building tools compatible with the major demands of users.These steps helped us complete the layout design of SIC CAS integration platforms,as well as its knowledge organization and integration.Findings:According to the need of users,we applied three types of platform construction technologies to five SIC integration platforms,and formulated standard norms for the further construction process,which could provide useful reference for a sustainable development for the extensive construction in CAS institutes.Research limitations:In order to make the SIC integration platforms more intelligent and have more functions,we need to enlarge the scale of the Platforms and upgrade the building tools for the platform construction.Practical implications:The nature of SIC sub-project integration platforms is to construct a content-sensitive environment which can embed knowledge services and knowledge applications seamlessly into scientific activities,so the Platform is expected to be a useful tool to help researchers better understand the recent development of the research field and form collaborations with their peers.Originality/value:SIC integration platforms are the only pilot construction that used 3different platform technologies in the first batch of knowledge-based subject group integration platforms of the Chinese Academy of Sciences.The construction is user-centered throughout the whole process,namely,from the technology selection,content construction to the sustainable development of the platforms,which are all based on user requirements.During this process,we have not only established sustainable mechanisms for both the personalized feedback and security management of the institutional knowledge of SIC CAS,but also formed a service team for the sustainable development of SIC integration platforms. 展开更多
关键词 integration platforms USER-ORIENTED Team construction Knowledge organization Sustainable development
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Prospect of Key Technologies of Intelligent HSR 2.0 Empowered by Model-data Integration Platform
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作者 WANG Tongjun WANG Wanqi +2 位作者 LI Ping LU Wenlong ZHENG Mingda(Translated) 《Chinese Railways》 2024年第2期3-10,共8页
By relying on the major projects of Beijing-Zhangjiakou HSR,China's railway industry has integrated and applied several digital intelligence technologies to form a complete set of intelligent HSR 1.0 technology,wh... By relying on the major projects of Beijing-Zhangjiakou HSR,China's railway industry has integrated and applied several digital intelligence technologies to form a complete set of intelligent HSR 1.0 technology,which has been popularized and applied to several new lines.With the continuous deepening of intelligent applications in construction,equipment,operation and other fields,there is an increasingly urgent need for integrated sharing and analysis of models and data.The paper analyzes the connotation and key points of model-data integration and puts forward the overall architecture of model-data integration platform composed of model-data convergence tier,model-data storage tier,model-data management tier,model-data calculation tier,model data aggregation tier,etc.Moreover,it looks forward to the prospect of leading key technologies and multiple innovative key technologies such as intelligent engineering survey and generative design,all-discipline intelligent construction,digital twin of railway engineering,CR450 intelligent EMU,new generation of dedicated mobile communication for railway (5G-R), operation safety protection based on multi-source information perception, transmission and fusion analysis, displacement-based full-travel intelligent service (MaaS+), intelligent comprehensive dispatching of regional railway network, wheel-rail integrated intelligent maintenance of EMU, etc. It can provide guidance and reference for digital railway construction and intelligent HSR 2.0 scientific & technological breakthroughs. 展开更多
关键词 intelligent HSR 2.0 model-data integration platform digital intelligence digital railway
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Air Flotation Towing Characteristics of an Integrated Wellhead Platform
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作者 LE Conghuan ZHANG Yuyang +2 位作者 BAI Yu ZHANG Puyang DING Hongyan 《Journal of Ocean University of China》 2025年第3期605-617,共13页
This study investigates the wet towing characteristics of an integrated wellhead platform supported by a bucket foundation.These characteristics are crucial for optimizing offshore construction efficiency and enabling... This study investigates the wet towing characteristics of an integrated wellhead platform supported by a bucket foundation.These characteristics are crucial for optimizing offshore construction efficiency and enabling the development of small marginal oil fields.The wet towing behavior of the integrated wellhead platform was explored through a combination of physical experiments and numerical simulations.Physical experiments were conducted to validate the accuracy of the numerical simulations.Subsequently,numerical simulations were employed to determine the impacts of towing speed and wave direction on the towing process of the integrated wellhead platform.Finally,the impact of compartment failure due to bulkhead damage on towage stability was analyzed.Findings indicate that the wave and towing directions influence the motion of the platform at various degrees of freedom.The platform demonstrates optimal stability when towing against waves,particularly when the towing direction aligns at a specific angle relative to the wave direction.In addition,a controlled increase in towing speed within a specific range effectively mitigates roll and pitch motions,which enhances the overall tow stability of the platform.Notably,compartment failure has an adverse effect on the towing stability,particularly in aft compartments.Therefore,it requires careful consideration and attention in practical engineering scenarios. 展开更多
关键词 integrated wellhead platform TOWING air flotation numerical simulation compartments failure
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ENTERPRISE INTEGRATION PLATFORM BASED ON SERVICEORIENTED ARCHITECTURE 被引量:2
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作者 MENG Xiaojun ZHANG Xu +1 位作者 NING Ruxin SONG Yu 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第3期36-40,共5页
To achieve information integration, process integration and application integration of enterprise, an enterprise integration platform (EIP) based on service-oriented architecture (SOA) is built. The enterprise int... To achieve information integration, process integration and application integration of enterprise, an enterprise integration platform (EIP) based on service-oriented architecture (SOA) is built. The enterprise integration model depending on encapsulating the business processes as well as the enterprise applications by the neutral and standard web services is presented. The problem how to discover the existed enterprise resources and share them was resolved depending on the mechanism of publishing and discovering the services. The EIP is integrated closely with product lifecycle management (PLM) system so that the process integration as well as orchestration of the business process services is implemented by encapsulating the workflow engine of PLM system. Not only process integration and application integration, but also information integration based on the bill of material (BOM) conversion driven by process are achieved. Finally, an interpretive, qualitative case study on EIP is conducted for this research. 展开更多
关键词 Enterprise integration platform (EIP) Service-oriented architecture (SOA) Information integration Process integration Application integration
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A CORBA-Based Integration Platform of Product Development Process Management for Concurrent Engineering
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作者 Zhao Jin min, Liu Ji hong, Guan Qiang, Jin Guo dong CAD Center, Huazhong University of Science & Technology, Wuhan 430074, China 《Wuhan University Journal of Natural Sciences》 EI CAS 2001年第3期699-703,共5页
Product development process management plays an important role in concurrent engineering (CE). The integration platform is a useful tool for effectively supporting the software development and integration. Based on th... Product development process management plays an important role in concurrent engineering (CE). The integration platform is a useful tool for effectively supporting the software development and integration. Based on the analysis of practical requirements for product development process management for CE, a CORBA-based integration platform of product development process management (IP-PDPM) is designed and developed. The design principles for IP-PDPM are described. The system architecture and functions of the platform are given, the key technologies for the implementation of IP-PDPM are presented, the application integration mechanism and its implementation techniques are also detailed. 展开更多
关键词 Key words CORBA concurrent engineering integration platform product development process
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Event-Driven SOA Based Integration Platform for Mold Making Industry
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作者 HU Sha LI Bei YANG Shuang-rong LI Jian-jun 《Computer Aided Drafting,Design and Manufacturing》 2009年第1期43-55,共13页
The platform consists of three administers the infrastructure of the whole platform; layers: the management service layer the integration service layer provides the core integration functions and the user service lay... The platform consists of three administers the infrastructure of the whole platform; layers: the management service layer the integration service layer provides the core integration functions and the user service layer satisfies the enterprise integration demands. For the purpose of accommodating the characteristics of mold making companies, an event-driven enterprise service bus working as the heart of the platform is realized. A prototype system combining Web services, Business Process Execution Language (BPEL) and Web Ontology Language (OWL) is implemented. The clients and suppliers and the applications of mold making company are integrated in a loosely-coupled way through the services provided by the platform. Meanwhile the sharing of data and knowledge, and the coordination of business process are realized. By adopting the platform, a new approach is provided to solve the problem of design and manufacture integration for intra and inter mold making companies. 展开更多
关键词 integration platform service-oriented architecture mold making company enterprise service bus
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Innovation and Practice of Teaching Methods in Digital and Adaptive Learning:Taking Communication Engineering Major as an Example
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作者 Xixi Fu Kun Zhang +2 位作者 Xiaomin Jiang Xueya Xia Qian Gao 《Journal of Contemporary Educational Research》 2024年第9期32-39,共8页
This paper proposes teaching reforms in communication engineering majors,emphasizing the implementation of digital and adaptive teaching methodologies,integrating emerging technologies,breaking free from the constrain... This paper proposes teaching reforms in communication engineering majors,emphasizing the implementation of digital and adaptive teaching methodologies,integrating emerging technologies,breaking free from the constraints of traditional education,and fostering high-caliber talents.The reform measures encompass fundamental data collection,recognition of individual characteristics,recommendation of adaptive learning resources,process-oriented teaching management,adaptive student guidance and early warning systems,personalized evaluation,and the construction of an integrated service platform.These measures,when combined,form a comprehensive system that is expected to enhance teaching quality and efficiency,and facilitate student development. 展开更多
关键词 Digital learning Adaptive learning Communication Engineering Teaching reform Talent cultivation Integrated service platform
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Current State and Development Trends for Integration Platforms
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作者 范玉顺 吴澄 《Tsinghua Science and Technology》 SCIE EI CAS 1999年第1期10-13,18,共5页
The integration platform (IP) is an advanced support tool for application software development and integration. This paper analyzes the shortcomings of traditional software programming methods, introduces the backgrou... The integration platform (IP) is an advanced support tool for application software development and integration. This paper analyzes the shortcomings of traditional software programming methods, introduces the background and development of integration platforms and presents the basic functions and system architecture of computer integrated manufacture computing environment (CCE) IP as well as the integration framework. Computer integrated manufacturing system (CIMS) application IP is defined in relation to the IP requirements for CIMS implementation within a company. The CIMS application IP is not only a support tool for application software development, but also a support tool for software integration and system operation. Therefore, the behavior and functions of a CIMS application IP must also include software integration and system operation. The development trend for CIMS application Ips is discussed in view of software technology development trends. 展开更多
关键词 integration platform computer integrated manufacturing system (CIMS) object oriented distributed environment
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Production System of Integrated Agriculture
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作者 朱光伟 程金钗 《Agricultural Science & Technology》 CAS 2013年第5期806-808,812,共4页
In the research, the definition of production system of integrated agriculture was proposed, and the theoretical basis (system theory, information theory, cybernetics and operational research) and the key technologi... In the research, the definition of production system of integrated agriculture was proposed, and the theoretical basis (system theory, information theory, cybernetics and operational research) and the key technologies were analyzed. Furthermore, IDEFO of production system of integrated agriculture was established and the constituents of different subsystems were analyzed. In addition, the components of the integrated platform, involving operational system, network, distributed database, communication services, information services, development tools, management and application services and platform entrance, were discussed. In agricultural integrated system, relationship among subsystems should be well considered under guidance of system theory in order to better improve controllability and productivity of agricultural activity. 展开更多
关键词 Integrated system of modern agriculture IDEFO Structure chart Integrated platform
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More Discussion on High Efficiency & Low Cost Clean Steel Production Platform
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作者 YIN Rui-yu (Central Iron and Steel Research Institute, Beijing, 100081) 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2011年第S2期1-8,共8页
The construction of high efficiency, low cost clean steel platform is one of the common key technologies concerning efficiency, quality and cost. It is basic and universal and not only applicable in the R&D and pr... The construction of high efficiency, low cost clean steel platform is one of the common key technologies concerning efficiency, quality and cost. It is basic and universal and not only applicable in the R&D and production of "high-end" products, but also in the production of bulk ordinary steel products. The platform of high efficiency, low cost clean steel is the important direction of modern steel technology progress and has great significance on the competitiveness of each steel plant. The research of high efficiency, low cost platform not only involves the production and management of the steel plant, but also the academic research field (process engineering and dynamic operation) and theories and methods innovation of engineering design (theory and method of dynamic-precision design). The integrated theory and method of high efficiency and low cost clean steel platform is the binding point of metallurgical process engineering and material engineering. Different types of high efficiency, low cost clean steel platform should combine with the corresponding rolling process and iron making process so that high efficiency, low cost clean steel manufacturing system would come into being. 展开更多
关键词 more discussion high efficiency & low cost clean steel platform integration technology
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Design and application of integrated automation system platform of mine based on PON
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作者 CHENG Xue-zhen YUAN Xing-jie PANG Ming-xiang WEI A-ying 《Journal of Measurement Science and Instrumentation》 CAS 2014年第2期83-87,共5页
This article analyzes the design and integrates application of a mine integrated automation system platform based on PON. At the beginning, the paper analyzes the basic principle and structure of PON. The set of integ... This article analyzes the design and integrates application of a mine integrated automation system platform based on PON. At the beginning, the paper analyzes the basic principle and structure of PON. The set of integrated automation network platform according to the information transmission characteristics of mine based on access network and Ethernet of PON is designed. The paper descripes the platform in detail from aspacts of designs of system hardware, software and others. The results show that the system platform can improve the efficiency and reduce the cost. 展开更多
关键词 passive optical network (PON) MINE integrated automation system platform access network ETHERNET
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Research on the Construction of Intelligence Community Integrated Information Service platform
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作者 Tengfei Zhang Junhui Fan Jun Hu 《International English Education Research》 2015年第5期107-108,共2页
With the constructions of "intelligence city", intelligent life quietly came to the people. As the "cell" of the city, the construction of intelligence community arises. Resident service system and e-government ap... With the constructions of "intelligence city", intelligent life quietly came to the people. As the "cell" of the city, the construction of intelligence community arises. Resident service system and e-government application system have been used in the traditional information community, but these systems are independent of each other, lack of interconnectedness, which results in the phenomenon of information isolated island. Intelligence community integrated information service platform can integrate information service resources and provide residents with efficient and convenient life. From the meaning, operation mode, we can design the cooperative, open and extensible system architecture. 展开更多
关键词 smart community integrated information service platform system architecture ctc.
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Research on Teaching Reform of Computer Specialty in Colleges and Universities Based on Big Data
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作者 NONGJiaming YANGJie 《外文科技期刊数据库(文摘版)教育科学》 2022年第8期102-105,共4页
In the era of network information development, the big data technology is constantly developing which is very important to the development of our society. With the development of technology, the demand for computer te... In the era of network information development, the big data technology is constantly developing which is very important to the development of our society. With the development of technology, the demand for computer technology talents in China is increasing. Therefore, in the era of big data, it is the key to improve the teaching level of computer major in colleges and universities and provide more professional and technical talents for social development. In the traditional teaching of computer major, it is influenced by many factors, such as teachers outdated teaching ideas, imperfect computer teaching infrastructure, etc., which leads to the improvement of the teaching level of computer major in colleges and universities in China. Based on the era of big data technology development, it is the key to improve the teaching quality and efficiency by integrating computer major teaching with big data. Based on this, this paper takes college computer major teaching as the research object, relies on big data technology, analyzes the value of big data technology applied to college computer major teaching, and analyzes the practical application of big data technology in college computer major teaching based on big data integration cloud platform teaching mode. 展开更多
关键词 big data technology computer major in universities integrated cloud platform fusion value practi
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Integrated Mini-Pillar Platform for Wireless Real-Time Cell Monitoring
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作者 Yong Luo Yongchao Song +2 位作者 Jing Wang Tailin Xu Xueji Zhang 《Research》 2025年第1期815-822,共8页
Cell culture as the cornerstone of biotechnology remains a labor-intensive process requiring continuous manual oversight and substantial time investment.In this work,we propose an integrated mini-pillar platform for i... Cell culture as the cornerstone of biotechnology remains a labor-intensive process requiring continuous manual oversight and substantial time investment.In this work,we propose an integrated mini-pillar platform for in situ monitoring of multiple cellular metabolism processes,which achieves media anchoring and cell culture through an arrayed mini-pillar chip.The assembly of polyaniline(PANI)/dendritic gold-modified microelectrode biosensors exhibits high sensitivity(63.55 mV/pH)and excellent interference resistance,enabling real-time acquisition of biosensing signals.We successfully employed such integrated devices to real-time measuring pH variations in multiple cells and real-time monitoring of cell metabolism under drug interventions and to facilitate in situ assisted cultivation of 3-dimensional(3D)cell spheroids.This mini-pillar array-based cell culture platform exhibits excellent biosensing sensitivity and real-time monitoring capability,offering considerable potential for the advancement of biotechnology and medical drug development. 展开更多
关键词 situ monitoring wireless real time cell monitoring cell culture media anchoring cellular metabolism processes integrated mini pillar platform
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Integrated Single-Step Terahertz Metasensing for Simultaneous Detection Based on Exosomal Membrane Proteins Enables Pathological Typing of Gastric Cancer
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作者 Qingzhe Jia Zhaofu Ma +9 位作者 Yuja Wang Mingjin Zhang Guijun Zou Bin Lan Songyan Li Zeqiu Lao Wenbin Shen Jing Lou Yanan Jiao Xiaohui Du 《Research》 2025年第3期118-126,共9页
Exosomes(Exos)are emerging as noninvasive biomarkers for diagnosis and progression monitoring of gastric cancer(GC).However,the heterogeneity discrimination and ultrasensitive quantification of Exos presents a conside... Exosomes(Exos)are emerging as noninvasive biomarkers for diagnosis and progression monitoring of gastric cancer(GC).However,the heterogeneity discrimination and ultrasensitive quantification of Exos presents a considerable analytical challenge,thereby impeding severely their clinical application.Herein,we propose an integrated terahertz metasensing platform for the discrimination of Exos in distinct subtypes of GC in a single step—through the simultaneous evaluation of the category and richness level of Exos membrane proteins.Characterized by dual-sided independent sensing capabilities with enhanced sensitivity(169 and 325 GHz per refractive index unit,respectively),the metasensor functionalized with antibodies simultaneously reflects the content of 2 membrane proteins in the terahertz spectral response.Our approach concurrently completes accurate differentiation and precise quantification of GC-subtype Exos by integrating dual-sided sensing information in merely a single assay.The dual-sided sensing design enhances the reliability of detection results.Moreover,combined with the signal amplification of gold nanoparticles,the platform experimentally demonstrates a superior dynamic response to Exos concentrations spanning from 1×10^(4)to 1×10^(8)particles/ml,with the limit of detection being 1×10^(4)particles/ml.This work provides new insights into multisensing metasurface design and paves the way for precise and personalized cancer treatment through the specific sensing of Exos. 展开更多
关键词 terahertz metasensing gastric cancer gc howeverthe gastric cancer integrated terahertz metasensing platform noninvasive biomarkers evaluation category richness level ultrasensitive quantification exosomal membrane proteins
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Enterprise service bus and standard based hospital integration platform and its application research 被引量:1
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作者 Wu Tao Li Ping +2 位作者 Xu Jian Zhou Bin Xu Wei-guo 《Chinese Medical Journal》 SCIE CAS CSCD 2013年第20期3978-3981,共4页
For healthcare organizations, there is increasing needs to share data among applications to deliver qualitypatient care. It is a key for successful diagnosis and treatment to view accurate and up-to-date patient data ... For healthcare organizations, there is increasing needs to share data among applications to deliver qualitypatient care. It is a key for successful diagnosis and treatment to view accurate and up-to-date patient data in a single information dashboard in real time. But the fact is that many hospitals and healthcare providers today are struggling with legacy system or internally developed systems that cannot easily scale to support new interfaces; the plethora of inflexible point-to-point interfaces make changing in one system deleteriously impact other systems; some systems could not support information sharing; and the standards followed by different systems are not compatible to each other. This is making it increasingly difficult to meet the rapidly changing and demanding of healthcare service. 展开更多
关键词 hospital integration platform enterprise service bus service-oriented architecture health level seven clinical data repository
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Development of a Support Tool for Rapid Application Integration of CIMS
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作者 范玉顺 吴澄 《Tsinghua Science and Technology》 SCIE EI CAS 1998年第2期45-50,共6页
Computer intergrated manufacturing system (CIMS) applications in manufacturing enterprises need new advanced support tools for application integration. This paper presents the system architecture and functions for CIM... Computer intergrated manufacturing system (CIMS) applications in manufacturing enterprises need new advanced support tools for application integration. This paper presents the system architecture and functions for CIMS application integration platform for manufacturing enterprises (MACIP). MACIP integrates a set of application software products and development tools as a complete system for CIMS implementation. MACIP includes a communication system, a global information system, three domain application sub integration platforms, an internet interface and an operation management and control system. The Client/Server structure, the object oriented method and the agent technique were used in developing MACIP. Good system openness, scalability, and maintenance are ensured by conforming to international standards and by using advanced system design software and management tools. MACIP can significantly reduce the implementation complexity, time, and cost of CIMS. 展开更多
关键词 integration platform CIMS system architecture object oriented application programming interface
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CORBA Based CIMS Application Integration
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作者 石伟 吴澄 范玉顺 《Tsinghua Science and Technology》 SCIE EI CAS 1999年第1期14-18,共5页
Common object request broker architecture (CORBA) provides the framework and the mechanism for distributed object operation. It can also be applied to computer integrated manufacturing system (CIMS) application integr... Common object request broker architecture (CORBA) provides the framework and the mechanism for distributed object operation. It can also be applied to computer integrated manufacturing system (CIMS) application integration. This paper studies the CIMS information service requirement, presents a CORBA based integration approach including the CORBA based CIM information system architecture and the application integration mechanism, and discusses the relationship between CORBA and the CIM application integration platform. 展开更多
关键词 computer integrated manufacturing system (CIMS) CORBA application integration integration platform〖H
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Integrated Cam Contour Optimization Method Considering Kinematic and Dynamic Characteristics: A Paradigm of Offset Press Open-Close Gripper Mechanism
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作者 LI Wenwei CAO Shuai +2 位作者 QIAN Qian ZHANG Yaling CHEN Nan 《Journal of Shanghai Jiaotong university(Science)》 2025年第6期1195-1207,共13页
To efficiently search out the optimal cam contour,a software integrated optimization method considering cam mechanism’s kinematic and dynamic characteristics was presented,and its effectiveness was demonstrated by a ... To efficiently search out the optimal cam contour,a software integrated optimization method considering cam mechanism’s kinematic and dynamic characteristics was presented,and its effectiveness was demonstrated by a case study of the cam contour optimization for an offset press open-close gripper mechanism.The acceleration curve and the residual vibration model of the follower were separately studied.A symmetric harmonic trapezoidal curve was designed to control the follower’s acceleration,and single-DOF lumped parameter torsional vibration model was proposed to describe the follower’s residual vibration.Accordingly,corresponding motion curve design software and Simulink vibration model of the follower were developed respectively,and they were integrated into an automatic optimization platform with iSIGHT.The multi-objective optimization with objectives of minimizing both the acceleration and the residual vibration of the follower was completed within the platform by using NSGA-II algorithm.An appropriate point with lower acceleration and residual vibration was chosen from Pareto front as an optimal solution of the follower’s motion curve.Based on the follower’s new motion curve,the actual cam contour was generated by inverse kinematic simulation in COSMOSMotion.The offset press that installed our new designed cam exhibited a lower vibration than the previous machine,and the maximum measured acceleration of the offset press at a printing speed of 15000 r/h is reduced by 7.7%. 展开更多
关键词 offset press cam contour optimization acceleration curve residual vibration kinematics dynamics integrated platform
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A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration
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作者 Jiashuai Xu Zijun Ren +2 位作者 Fangsheng Qian Junyan Zheng Yansong Yang 《Microsystems & Nanoengineering》 2025年第3期399-408,共10页
This study presents a wafer-level sealed silicon cavity(SSC)microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator(C-SOI)wafers for the 5G/6G wireless communication system.The... This study presents a wafer-level sealed silicon cavity(SSC)microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator(C-SOI)wafers for the 5G/6G wireless communication system.The proposed SSC platform features an extremely smooth suspended membrane with adjustable thickness,flexible cavity shapes with high density,self-formed acoustic wave confinement steps,stable temperature coefficient of frequency(TCF),and highly integrated compatibility with complementary metal-oxide semiconductor(CMOS).A surface smoothing method based on wet oxidation for SSC wafers is presented,which achieves a root mean square(RMS)roughness on the cavity surface of 1.5 nm for the first time.Based on the presented SSC platform,an Al_(0.75)Sc_(0.25)N sealed cavity bulk acoustic wave resonator(S-BAR)is designed,fabricated,and characterized.The experimental results show that the asymmetric second-order(A2)Lamb mode of S-BAR is enhanced for higher frequency with a maximum piezoelectric coupling coefficient(k_(t)^(2))of 9.53%,a maximum quality factor(Q)of 439,and a TCF of−11.44 ppm/K.Different designs’piezoelectric coupling coefficient distribution is consistent with the theoretical prediction.The proposed smoothing process increases the S-BARs’quality factor by~400%.The frequency shift caused by the temperature(absolute value of TCF)is reduced by 62%compared with the traditional Al_(0.75)Sc_(0.25)N thin film bulk acoustic wave resonator(without temperature compensation).The enhanced performances demonstrated the potential of SSC in the next-generation highly integrated RF communication systems. 展开更多
关键词 silicon cavity radio frequency integration acoustic wave confinement surface smoothing wet oxidation integration platform ssc platform microacoustic platform
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