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DEVELOPMENT AND ERROR ANALYSIS OF AN INSPECTING SYSTEM FOR MEASURING THE ROTATIONAL INERTIA OF BULLETS 被引量:15
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作者 车英 李占国 +3 位作者 陈礼华 白素平 马宏 韩文波 《兵工学报》 EI CAS CSCD 北大核心 2000年第1期-,共3页
介绍了一种用于测量弹丸转动惯量的高精度测量仪器,该仪器利用双悬丝扭摆机构、光电计时系统提取摆动周期信息,由MCS-51系列单片机组成的测量系统进行数据处理,并由LED显示器测量结果。文中阐述了仪器的工作原理, 推导了所需的计算... 介绍了一种用于测量弹丸转动惯量的高精度测量仪器,该仪器利用双悬丝扭摆机构、光电计时系统提取摆动周期信息,由MCS-51系列单片机组成的测量系统进行数据处理,并由LED显示器测量结果。文中阐述了仪器的工作原理, 推导了所需的计算公式,分析了产生测量误差的因素,进行了定量精度分析,给出了实验结果与测量精度。 展开更多
关键词 转动惯量 摆动周期 测量误差 DEVELOPMENT AND ERROR ANALYSIS OF AN inspecting
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Variation regularity of metal magnetic memory signals with inspecting time-interval and location
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作者 严春妍 李午申 +3 位作者 邸新杰 薛振奎 白世武 刘方明 《Journal of Central South University of Technology》 EI 2007年第3期319-323,共5页
Influences of inspecting time-interval and location on varying behavior of metal magnetic memory (MMM) signals of defects were studied. Different areas in two precracked weldments were inspected at different time-inte... Influences of inspecting time-interval and location on varying behavior of metal magnetic memory (MMM) signals of defects were studied. Different areas in two precracked weldments were inspected at different time-intervals by type TSC-1M-4 stress-concentration magnetic inspector to obtain MMM signals. Mechanisms of MMM signals varying behavior with inspecting time and space were analyzed and discussed respectively. It is found that MMM signals don't change with inspecting time-interval, since stress field and magnetic leakage field maintain unchanged at any time after welding. On the other hand, MMM signals differ greatly for different inspecting locations, because stress field and magnetic leakage field are unevenly distributed in defective ferromagnetic materials. 展开更多
关键词 nondestructive testing metal magnetic memory inspecting interval inspecting location
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A mask R-CNN based method for inspecting cable brackets in aircraft 被引量:6
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作者 Gang ZHAO Jingyu HU +1 位作者 Wenlei XIAO Jie ZOU 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2021年第12期214-226,共13页
In the aviation industry,cable bracket is one of the most common parts.The traditional assembly state inspection method of cable bracket is to manually compare by viewing 3 D models.The purpose of this paper is to add... In the aviation industry,cable bracket is one of the most common parts.The traditional assembly state inspection method of cable bracket is to manually compare by viewing 3 D models.The purpose of this paper is to address the problem of inefficiency of traditional inspection method.In order to solve the problem that machine learning algorithm requires large dataset and manually labeling of dataset is a laborious and time-consuming task,a simulation platform is developed to automatically generate synthetic realistic brackets images with pixel-level annotations based on 3 D digital mock-up.In order to obtain accurate shapes of brackets from 2 D image,a brackets recognizer based on Mask R-CNN is trained.In addition,a semi-automatic cable bracket inspection method is proposed.With this method,the inspector can easily obtain the inspection result only by taking a picture with a portable device,such as augmented reality(AR)glasses.The inspection task will be automatically executed via bracket recognition and matching.The experimental result shows that the proposed method for automatically labeling dataset is valid and the proposed cable bracket inspection method can effectively inspect cable bracket in the aircraft.Finally,a prototype system based on client-server framework has been developed for validation purpose. 展开更多
关键词 Aircraft assembly Augmented reality Cable bracket Mask R-CNN Synthetic dataset Template matching Visual inspection
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A MACHINE VISION SYSTEM FOR INSPECTING WOOD SURFACE DEFECTS BY USING NEURAL NETWORK
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作者 王克奇 白景峰 《Journal of Northeast Forestry University》 SCIE CAS CSCD 1996年第2期63-65,共3页
With the development of wood industry, the processing of wood products becomemore significant. This paper discusses the developmen of machine vision system used to inspect andclassny the various types of defects of wo... With the development of wood industry, the processing of wood products becomemore significant. This paper discusses the developmen of machine vision system used to inspect andclassny the various types of defects of wood suxface. The surface defeds means the variations ofcolour and textUre. The machine vision system is to dated undesirable 'defecs' that can appear onthe surface of rough wood lwnber. A neural network was used within the Blackboard framework fora labeling verification step of the high-level recognition module of vision system. The system hasbere successfully tested on a number of boards from several different species. 展开更多
关键词 Neural network Machine vision Defects inspection
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Photoelectric Inspecting of Artillery Bore
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作者 ZHANG Jie MA Hong BAI Su-ping YAN Yu-feng 《Semiconductor Photonics and Technology》 CAS 2008年第1期48-50,55,共4页
A photoelectric equipment for inspecting artillery bore is composed of digital display grating sensor and data processing with computer.It can replace the traditional mechanical measurer and realize the automatic insp... A photoelectric equipment for inspecting artillery bore is composed of digital display grating sensor and data processing with computer.It can replace the traditional mechanical measurer and realize the automatic inspection of artillery bore.Introduced are briefly the working principles and analysis of this device. 展开更多
关键词 artillery bore grating sensor automatic inspection precision analysis
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New Robotic Technologies for Inspecting Two Pole Electric Generators while the Rotor Remains in Place
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作者 Mark Savenkov Michael Turner 《Journal of Power and Energy Engineering》 2015年第4期123-127,共5页
The electric generator is a highly stressed plant component requiring periodic inspection and maintenance to reduce the risk of a costly forced outage. This paper briefly introduces two new robotic technologies for pe... The electric generator is a highly stressed plant component requiring periodic inspection and maintenance to reduce the risk of a costly forced outage. This paper briefly introduces two new robotic technologies for performing fast and reliable inspections of two pole electric generators with minimal mechanical disassembly requirements. The first robotic system is designed to inspect within the generator rotor and stator air gap, while the second robotic system is designed to inspect the generator retaining rings. An overview of the design and construction of each system is provided, along with an explanation of the capabilities and benefits they bring to the power station owner. 展开更多
关键词 Generator Condition Based Maintenance ROBOTIC Inspection Retaining RINGS
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The Use of Damage Modes in Periodic Inspecting Autoclave
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作者 LIU Xinshang 《International Journal of Plant Engineering and Management》 2019年第2期120-125,共6页
According to the operation characteristics of autoclave, the possible defects are analyzed by damage modes, the inspection methods are selected contrapuntally, and the causes of the defects affecting the safe operatio... According to the operation characteristics of autoclave, the possible defects are analyzed by damage modes, the inspection methods are selected contrapuntally, and the causes of the defects affecting the safe operation of the equipment are analyzed. This study effectively improves the quality of inspection work and plays an important role in strengthening the management of equipment use and reducing accidents. 展开更多
关键词 DAMAGE MODES AUTOCLAVE inspection DEFECT pressure VESSEL
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MEDIA WATCH EXCERPTS FROM MAJOR CHINESE MAGAZINES
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《ChinAfrica》 2026年第3期7-7,共1页
HUBEI AND THE RISE OF CENTRAL CHINA Outlook Weekly 9 February Hubei’s recent development trajectory offers a vivid case study of how China’s central provinces are being repositioned as engines of national growth.Dur... HUBEI AND THE RISE OF CENTRAL CHINA Outlook Weekly 9 February Hubei’s recent development trajectory offers a vivid case study of how China’s central provinces are being repositioned as engines of national growth.During an inspection tour in November 2024. 展开更多
关键词 national growth inspection tour HUBEI central provinces development trajectory
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Design and Control of a Bionic Inspection Robot for Suspension Bridge Main Cables
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作者 Shengkai Liu Chao Wang +1 位作者 Xiaoqiang Yuan Ning Ding 《Journal of Bionic Engineering》 2026年第1期159-174,共16页
The main cable is the primary load-bearing component of a suspension bridge,continuously exposed to harsh environmental conditions,such as wind and rain,throughout the year.These adverse conditions contribute to varyi... The main cable is the primary load-bearing component of a suspension bridge,continuously exposed to harsh environmental conditions,such as wind and rain,throughout the year.These adverse conditions contribute to varying degrees of degradation and damage to the main cable,necessitating regular inspections to prevent catastrophic failures.Traditional manual inspection methods not only suffer from low efficiency but also pose significant safety risks to personnel.To address these challenges and ensure the safe and effective inspection of suspension bridge main cables,this study introduces a novel cooperative climbing robot,designated as Main Cable Robot Version II(CCRobot-M-II),inspired by the locomotion of the inchworm.The robot employs an alternating opening and closing mechanism of four gripper sets,mimicking the inchworm's movement to achieve efficient crawling along the suspension bridge handrails.This paper provides a comprehensive analysis of the structural design,key components,and motion mechanisms of CCRobot-M-II.A detailed force analysis of the robot's crawling process is also presented,followed by the design of the control system and the development of an efficient motion control algorithm.Laboratory experiments demonstrate that the robot achieves a positional error of 00.64%during crawling,with a maximum average crawling speed of 7.6 m/min.Furthermore,the biomimetic design enables the robot to overcome obstacles up to 30 mm in height and possess the capability to handle suspension bridge cables with spans ranging from 740 to 1100 mm.Finally,CCRobot-M-II successfully conducted an inspection of the main cable on a suspension bridge,marking the world's first successful deployment of a climbing robot for main cable inspection on a suspension bridge. 展开更多
关键词 Bionic design Suspension bridge Main cable inspection Climbing robot Motion control
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Drive-by spatial offset detection for high-speed railway bridges based on fusion analysis of multi-source data from comprehensive inspection train
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作者 Chuang Wang Jiawang Zhan +4 位作者 Nan Zhang Yujie Wang Xinxiang Xu Zhihang Wang Zhen Ni 《Railway Engineering Science》 2026年第1期128-148,共21页
The spatial offset of bridge has a significant impact on the safety,comfort,and durability of high-speed railway(HSR)operations,so it is crucial to rapidly and effectively detect the spatial offset of operational HSR ... The spatial offset of bridge has a significant impact on the safety,comfort,and durability of high-speed railway(HSR)operations,so it is crucial to rapidly and effectively detect the spatial offset of operational HSR bridges.Drive-by monitoring of bridge uneven settlement demonstrates significant potential due to its practicality,cost-effectiveness,and efficiency.However,existing drive-by methods for detecting bridge offset have limitations such as reliance on a single data source,low detection accuracy,and the inability to identify lateral deformations of bridges.This paper proposes a novel drive-by inspection method for spatial offset of HSR bridge based on multi-source data fusion of comprehensive inspection train.Firstly,dung beetle optimizer-variational mode decomposition was employed to achieve adaptive decomposition of non-stationary dynamic signals,and explore the hidden temporal relationships in the data.Subsequently,a long short-term memory neural network was developed to achieve feature fusion of multi-source signal and accurate prediction of spatial settlement of HSR bridge.A dataset of track irregularities and CRH380A high-speed train responses was generated using a 3D train-track-bridge interaction model,and the accuracy and effectiveness of the proposed hybrid deep learning model were numerically validated.Finally,the reliability of the proposed drive-by inspection method was further validated by analyzing the actual measurement data obtained from comprehensive inspection train.The research findings indicate that the proposed approach enables rapid and accurate detection of spatial offset in HSR bridge,ensuring the long-term operational safety of HSR bridges. 展开更多
关键词 High-speed railway bridge Drive-by inspection Spatial offset Multi-source data fusion Deep learning
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Design and implementation of a computer endpoint security baseline verification system based on MLPS 2.0
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作者 Fan Miao YaQiong Xu +3 位作者 ZiYang Wan YingJie Zhuang Yang Li JiaPeng Ren 《Railway Sciences》 2026年第1期136-152,共17页
Purpose-Amidst an increasingly severe cybersecurity landscape,the widespread adoption of Xinchuang endpoints has become a strategic imperative.Governments and enterprises have established terminal localization as a cr... Purpose-Amidst an increasingly severe cybersecurity landscape,the widespread adoption of Xinchuang endpoints has become a strategic imperative.Governments and enterprises have established terminal localization as a critical objective,aiming for comprehensive indigenous replacement through rapid technological iteration.Consequently,Xinchuang systems and Windows platforms are expected to coexist over an extended period.This study seeks to establish an automated verification framework for multi-version operating systems and validate the efficacy of baseline hardening in mitigating security risks.Design/methodology/approach-Based on the Classified Protection 2.0 framework and relevant national standards for endpoint security,this study proposes an endpoint security baseline verification scheme applicable to multiple operating systems.The scheme addresses divergent security policies and implementation methodologies across heterogeneous environments.It automates the inspection of core baselines,including account password complexity,default shared service status and patch installation status.Furthermore,a comprehensive scoring model is established by incorporating differentiated weights for account security,patch management and log auditing,ultimately generating visualized risk reports to facilitate remediation prioritization.Findings-This study reveals that baseline configuration serves as the fundamental prerequisite in endpoint security practices.Through a scalable detection engine and quantitative scoring model,the system can promptly identify and remediate potential risks,thereby reducing the attack surface and mitigating intrusion risks.However,on certain domestic chip architectures,compatibility issues persist in detecting specific configuration items.Further improvement in hardware-software co-adaptation for domestic platforms is required to advance the development of localized security protection systems.Originality/value-Through in-depth research on security baseline configurations across multiple operating systems,this study implements an automated and visualized baseline verification methodology.This approach significantly strengthens the security posture of domestic operating systems and supports the establishment of a more robust,national-level cybersecurity defense framework. 展开更多
关键词 Windows security baseline Endpoint security Baseline inspection Xinchuang system security baseline
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An Ultrasonic Microrobot Enabling Ultrafast Bidirectional Navigation in Confinned Tubular Environments
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作者 Meng Cui Liyun Zhen +5 位作者 Xingyu Bai Lihan Yu Xuhao Chen Jingquan Liu Qingkun Liu Bin Yang 《Nano-Micro Letters》 2026年第2期183-198,共16页
Pipelines are extensively used in environments such as nuclear power plants,chemical factories,and medical devices to transport gases and liquids.These tubular environments often feature complex geometries,confined sp... Pipelines are extensively used in environments such as nuclear power plants,chemical factories,and medical devices to transport gases and liquids.These tubular environments often feature complex geometries,confined spaces,and millimeter-scale height restrictions,presenting significant challenges to conventional inspection methods.Here,we present an ultrasonic microrobot(weight,80 mg;dimensions,24 mm×7 mm;thickness,210μm)to realize agile and bidirectional navigation in narrow pipelines.The ultrathin structural design of the robot is achieved through a high-performance piezoelectric composite film microstructure based on MEMS technology.The robot exhibits various vibration modes when driven by ultrasonic frequency signals,its motion speed reaches81 cm s-1 at 54.8 k Hz,exceeding that of the fastest piezoelectric microrobots,and its forward and backward motion direction is controllable through frequency modulation,while the minimum driving voltage for initial movement can be as low as 3 VP-P.Additionally,the robot can effortlessly climb slopes up to 24.25°and carry loads more than 36 times its weight.The robot is capable of agile navigation through curved L-shaped pipes,pipes made of various materials(acrylic,stainless steel,and polyvinyl chloride),and even over water.To further demonstrate its inspection capabilities,a micro-endoscope camera is integrated into the robot,enabling real-time image capture inside glass pipes. 展开更多
关键词 Ultrasonic microrobot Piezoelectric composite film microstructure MEMS fabrication Bidirectional locomotion Confined pipeline inspection
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BearFusionNet:A Multi-Stream Attention-Based Deep Learning Framework with Explainable AI for Accurate Detection of Bearing Casting Defects
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作者 Md.Ehsanul Haque Md.Nurul Absur +3 位作者 Fahmid Al Farid Md Kamrul Siam Jia Uddin Hezerul Abdul Karim 《Computers, Materials & Continua》 2026年第3期845-871,共27页
Manual inspection of onba earing casting defects is not realistic and unreliable,particularly in the case of some micro-level anomalies which lead to major defects on a large scale.To address these challenges,we propo... Manual inspection of onba earing casting defects is not realistic and unreliable,particularly in the case of some micro-level anomalies which lead to major defects on a large scale.To address these challenges,we propose BearFusionNet,an attention-based deep learning architecture with multi-stream,which merges both DenseNet201 and MobileNetV2 for feature extraction with a classification head inspired by VGG19.This hybrid design,figuratively beaming from one layer to another,extracts the enormity of representations on different scales,backed by a prepreprocessing pipeline that brings defect saliency to the fore through contrast adjustment,denoising,and edge detection.The use of multi-head self-attention enhances feature fusion,enabling the model to capture both large and small spatial features.BearFusionNet achieves an accuracy of 99.66%and Cohen’s kappa score of 0.9929 in Kaggle’s Real-life Industrial Casting Defects dataset.Both McNemar’s and Wilcoxon signed-rank statistical tests,as well as fivefold cross-validation,are employed to assess the robustness of our proposed model.To interpret the model,we adopt Grad-Cam visualizations,which are the state of the art standard.Furthermore,we deploy BearFusionNet as a webbased system for near real-time inference(5-6 s per prediction),which enables the quickest yet accurate detection with visual explanations.Overall,BearFusionNet is an interpretable,accurate,and deployable solution that can automatically detect casting defects,leading to significant advances in the innovative industrial environment. 展开更多
关键词 Bearing casting defects defects classification fault detection quality inspection of bearing Industry 4.0
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Second Volume of Book on Xi's Visits to People's Homes Published
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《Women of China》 2026年第3期7-7,共1页
BEIJING,Feb.22(Xinhua)-The second volume of a book about the interactions between Xi Jinping,General Secretary of the Communist Party of China Central Committee,and the people during his domestic inspection tours has ... BEIJING,Feb.22(Xinhua)-The second volume of a book about the interactions between Xi Jinping,General Secretary of the Communist Party of China Central Committee,and the people during his domestic inspection tours has been published by the China Women Publishing House. 展开更多
关键词 domestic inspection tours Xi Jinping BOOK central committee China Women Publishing House general secretary second volume communist party china
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逆向工程技术在汽车零件修复中的应用与研究
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作者 黄江航 《汽车电器》 2026年第1期117-119,共3页
本文采用三维扫描系统对破损汽车零件进行扫描,获取零件的点云数据文件。借助GOM Inspect检测分析软件对扫描得到的点云数据进行系统分析与整理,依据点云的空间分布规律构建线框模型,并通过优化破损区域的点线布局对破损部位进行重构。... 本文采用三维扫描系统对破损汽车零件进行扫描,获取零件的点云数据文件。借助GOM Inspect检测分析软件对扫描得到的点云数据进行系统分析与整理,依据点云的空间分布规律构建线框模型,并通过优化破损区域的点线布局对破损部位进行重构。利用GOM Inspect内置的分析工具,对重构后的模型进行受力分析模拟,并与原始点云数据进行实时对比,计算新构建曲面与原始点云阵列的尺寸偏差,生成可操作的修复建议。该方法有效解决了单个零件损坏后的修复技术难题,为复杂零件的修复场景提供了切实可行的解决方案。 展开更多
关键词 逆向工程技术 GOM Inspect 三维扫描仪
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A novel approach to identifying the ultrasonic echoes for inspecting well cementing quality
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作者 YU Houquan HUANG Zailu and QU Wanli(Dept. of Electronics and Information Eng., Huazhong Universitg of Science and Technology Wihan 430074) 《Chinese Journal of Acoustics》 1997年第1期13-19,共7页
In this paper, it is presented that an approach based on Continuous Wavelet Thansform(CWT) and Fourier Transform(FT) for identifying ultrasonic echoes in inspecting oil well cementing quality. First, CWT is used to pr... In this paper, it is presented that an approach based on Continuous Wavelet Thansform(CWT) and Fourier Transform(FT) for identifying ultrasonic echoes in inspecting oil well cementing quality. First, CWT is used to process echo signals. Then spectra of the processing results in some specilic scale-time segments are calculated as pattern features. The research results show that theoretical calculations basically agree with experimental results. Compared with the aPproach based on the spectra or Discrete Wavlet Transform, our approach has advantages of fine analyzing scales, stable features and high recognizing rate. It is very suitable to identify echo signals whose spectra vary with time. 展开更多
关键词 WELL A novel approach to identifying the ultrasonic echoes for inspecting well cementing quality CWT
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High-efficiency inspecting method for mobile robots based on task planning for heat transfer tubes in a steam generator 被引量:1
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作者 Biying XU Xuehe ZHANG +5 位作者 Yue OU Kuan ZHANG Zhenming XING Hegao CAI Jie ZHAO Jizhuang FAN 《Frontiers of Mechanical Engineering》 SCIE CSCD 2023年第2期161-175,共15页
Many heat transfer tubes are distributed on the tube plates of a steam generator that requires periodic inspection by robots.Existing inspection robots are usually involved in issues:Robots with manipulators need comp... Many heat transfer tubes are distributed on the tube plates of a steam generator that requires periodic inspection by robots.Existing inspection robots are usually involved in issues:Robots with manipulators need complicated installation due to their fixed base;tube mobile robots suffer from low running efficiency because of their structural restricts.Since there are thousands of tubes to be checked,task planning is essential to guarantee the precise,orderly,and efficient inspection process.Most in-service robots check the task tubes using row-by-row and column-bycolumn planning.This leads to unnecessary inspections,resulting in a long shutdown and affecting the regular operation of a nuclear power plant.Therefore,this paper introduces the structure and control system of a dexterous robot and proposes a task planning method.This method proceeds into three steps:task allocation,base position search,and sequence planning.To allocate the task regions,this method calculates the tool work matrix and proposes a criterion to evaluate a sub-region.And then all tasks contained in the sub-region are considered globally to search the base positions.Lastly,we apply an improved ant colony algorithm for base sequence planning and determine the inspection orders according to the planned path.We validated the optimized algorithm by conducting task planning experiments using our robot on a tube sheet.The results show that the proposed method can accomplish full task coverage with few repetitive or redundant inspections and it increases the efficiency by 33.31% compared to the traditional planning algorithms. 展开更多
关键词 steam generator transfer tubes mobile robot dexterous structure task planning efficient inspection
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Status and Development of Rapid Detection Technology for Tunnel Structural Defects 被引量:5
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作者 LIU Xuezeng FANG Maoliu +3 位作者 WU Dexing LI Yinping LIU Xingen LI Gang 《隧道建设(中英文)》 北大核心 2025年第4期657-676,I0005-I0024,共40页
Based on inspection data,the authors analyze and summarize the main types and distribution characteristics of tunnel structural defects.These defects are classified into three types:surface defects,internal defects,an... Based on inspection data,the authors analyze and summarize the main types and distribution characteristics of tunnel structural defects.These defects are classified into three types:surface defects,internal defects,and defects behind the structure.To address the need for rapid detection of different defect types,the current state of rapid detection technologies and equipment,both domestically and internationally,is systematically reviewed.The research reveals that surface defect detection technologies and equipment have developed rapidly in recent years.Notably,the integration of machine vision and laser scanning technologies have significantly improved detection efficiency and accuracy,achieving crack detection precision of up to 0.1 mm.However,the non-contact rapid detection of internal and behind-the-structure defects remains constrained by hardware limitations,with traditional detection remaining dominant.Nevertheless,phased array radar,ultrasonic,and acoustic vibration detection technologies have become research hotspots in recent years,offering promising directions for detecting these challenging defect types.Additionally,the application of multisensor fusion technology in rapid detection equipment has further enhanced detection capabilities.Devices such as cameras,3D laser scanners,infrared thermal imagers,and radar demonstrate significant advantages in rapid detection.Future research in tunnel inspection should prioritize breakthroughs in rapid detection technologies for internal and behind-the-structure defects.Efforts should also focus on developing multifunctional integrated detection vehicles that can simultaneously inspect both surface and internal structures.Furthermore,progress in fully automated,intelligent systems with precise defect identification and real-time reporting will be essential to significantly improve the efficiency and accuracy of tunnel inspection. 展开更多
关键词 TUNNEL structural defect inspection techniques inspection equipment rapid inspection
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Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence 被引量:1
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作者 Jiamin Liu Jinlong Zhu +8 位作者 Zhe Yu Xianrui Feng Zedi Li Lei Zhong Jinsong Zhang Honggang Gu Xiuguo Chen Hao Jiang Shiyuan Liu 《International Journal of Extreme Manufacturing》 2025年第1期623-639,共17页
In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and... In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and yields of chips.With the critical dimensions of IC nanostructures continuing to shrink,directly imaging or classifying deep-subwavelength defects by bright-field microscopy is challenging due to the well-known diffraction barrier,the weak scattering effect,and the faint correlation between the scattering cross-section and the defect morphology.Herein,we propose an optical far-field inspection method based on the form-birefringence scattering imaging of the defective nanostructure,which can identify and classify various defects without requiring optical super-resolution.The technique is built upon the principle of breaking the optical form birefringence of the original periodic nanostructures by the defect perturbation under the anisotropic illumination modes,such as the orthogonally polarized plane waves,then combined with the high-order difference of far-field images.We validated the feasibility and effectiveness of the proposed method in detecting deep subwavelength defects through rigid vector imaging modeling and optical detection experiments of various defective nanostructures based on polarization microscopy.On this basis,an intelligent classification algorithm for typical patterned defects based on a dual-channel AlexNet neural network has been proposed,stabilizing the classification accuracy ofλ/16-sized defects with highly similar features at more than 90%.The strong classification capability of the two-channel network on typical patterned defects can be attributed to the high-order difference image and its transverse gradient being used as the network’s input,which highlights the polarization modulation difference between different patterned defects more significantly than conventional bright-field microscopy results.This work will provide a new but easy-to-operate method for detecting and classifying deep-subwavelength defects in patterned wafers or photomasks,which thus endows current online inspection equipment with more missions in advanced IC manufacturing. 展开更多
关键词 defect inspection form birefringence breaking high order difference anisotropic illumination modes deep-subwavelength sensitivity defect classification
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Research and Design of Intelligent Inspection System for Thermal Power Plants 被引量:1
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作者 Wei Zhang Tingfeng Zhang 《Journal of Electronic Research and Application》 2025年第2期69-75,共7页
To meet the demand for intelligent and unmanned development in thermal power plants,an intelligent inspection system has been designed.This system efficiently performs inspection tasks and monitors the operational par... To meet the demand for intelligent and unmanned development in thermal power plants,an intelligent inspection system has been designed.This system efficiently performs inspection tasks and monitors the operational parameters of key equipment in real-time.The collected data is uploaded to the monitoring center,allowing operation and maintenance personnel to access equipment information promptly.Data analysis is used to provide fault warning and diagnosis for critical equipment.The system employs the Pure Pursuit algorithm,which effectively avoids obstacles and ensures path continuity and stability.Simulation results show that the Pure Pursuit algorithm significantly improves the navigation accuracy and task efficiency of the inspection robot,ensuring the reliability of thermal power plant inspections. 展开更多
关键词 Thermal power plants Intelligent inspection Parameter acquisition Path planning
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