Particles and fields represent two major modeling paradigms in pure and applied science at all. In this paper a methodology and some of the results for three-dimensional (3D) simulations that include both field and pa...Particles and fields represent two major modeling paradigms in pure and applied science at all. In this paper a methodology and some of the results for three-dimensional (3D) simulations that include both field and particle abstractions are presented. Electromagnetic field calculations used here are based on the discrete differential form representation of the finite elements method, while the Monte Carlo method makes foundation of the particle part of the simulations. The first example is the simulation of the feature profile evolution during SiO2 etching enhanced by Ar + /CF4 non-equilibrium plasma based on the sparse field method for solving level set equations. Second example is devoted to the design of a spiral inflector which is one of the key devices of the axial injection system of the VINCY Cyclotron.展开更多
The central region model (CRM) cyclotron is the experimental platform for the key technology study of a high intensity beam cyclotron.In this paper we introduce the spiral inflector and central region designed for the...The central region model (CRM) cyclotron is the experimental platform for the key technology study of a high intensity beam cyclotron.In this paper we introduce the spiral inflector and central region designed for the CRM cyclotron,including the physical design,the numerical control machining and the installation precision control techniques.The shape of electrodes is complex,and machining with a strict tolerance must be done by a numerical control machine tool with the number of its axles no less than 4.The electrodes of central region were finished by using 3-axle machine tools.The size of gaps between the ground and Dee tip is very important,a special device was made to guarantee the installation precision,and the error of gaps was controlled within±0.05mm.展开更多
基金supported by O171037,Ⅲ 41011 and Ⅲ45006 Projects of Ministry of Education and Science,Serbia.
文摘Particles and fields represent two major modeling paradigms in pure and applied science at all. In this paper a methodology and some of the results for three-dimensional (3D) simulations that include both field and particle abstractions are presented. Electromagnetic field calculations used here are based on the discrete differential form representation of the finite elements method, while the Monte Carlo method makes foundation of the particle part of the simulations. The first example is the simulation of the feature profile evolution during SiO2 etching enhanced by Ar + /CF4 non-equilibrium plasma based on the sparse field method for solving level set equations. Second example is devoted to the design of a spiral inflector which is one of the key devices of the axial injection system of the VINCY Cyclotron.
文摘The central region model (CRM) cyclotron is the experimental platform for the key technology study of a high intensity beam cyclotron.In this paper we introduce the spiral inflector and central region designed for the CRM cyclotron,including the physical design,the numerical control machining and the installation precision control techniques.The shape of electrodes is complex,and machining with a strict tolerance must be done by a numerical control machine tool with the number of its axles no less than 4.The electrodes of central region were finished by using 3-axle machine tools.The size of gaps between the ground and Dee tip is very important,a special device was made to guarantee the installation precision,and the error of gaps was controlled within±0.05mm.
