Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial m...Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing.This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP.The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density.Furthermore,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model sizes.Additionally,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped distribution.Moreover,the plasma uniformity becomes worse.Finally,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma uniformity.These findings contribute to optimizing the etching process by improving plasma radial uniformity.展开更多
To address the current issues with the conventional slide gate system utilized in the steel teeming process,a unique electromagnetic induction controlled automated steel teeming(EICAST)technology has been developed.Co...To address the current issues with the conventional slide gate system utilized in the steel teeming process,a unique electromagnetic induction controlled automated steel teeming(EICAST)technology has been developed.Cooling means of spiral coil in this technology is directly related to its service life.Firstly,heat transfer processes of air cooling and spray cooling were compared and analyzed.Secondly,the impacts of water temperature,water flow rate and air flow rate were examined in order to maximize the spray cooling effect.To maintain coil temperature at a low value consistently throughout the entire thermal cycle process of the ladle,a combined cooling mode was finally employed.Numerical simulation was applied to examine the coil temperature variation with different cooling systems and characteristics.Before coil operation,spray cooling is said to be more effective.By controlling the water flow rate and air flow rate,the spray cooling effect is enhanced.However,water temperature has little or no impact when using spray cooling.Air cooling during the secondary refining process and spray cooling prior to coil operation are combined to further lower coil temperature.When the direction of the spray cooling is from bottom to top,the coil temperature is lowered below 165℃.A practical induction coil cooling plan was provided for the EICAST technology’s production process.展开更多
Transient electromagnetic method (TEM),as a non-seismic geophysical exploration mainstream electromagnetic method,is widely used in oil,gas,mineral and other underground resources exploration areas. The coil sensor is...Transient electromagnetic method (TEM),as a non-seismic geophysical exploration mainstream electromagnetic method,is widely used in oil,gas,mineral and other underground resources exploration areas. The coil sensor is generally used to collect data. In view of the problems of incomplete information of the abnormal body and the data loss in the existing TEM single-component coil sensor,a three-component TEM coil sensor is designed. By analyzing the relationship between sensor sensitivity and coil structure parameters,the coil structure and turns are designed. By analyzing the frequency response characteristics of the TEM magnetic field sensor,the signal distortion is reduced by using the under-damped matching mode. By analyzing the distribution of various noise sources of the magnetic sensor,the appropriate amplifier is selected to reduce the background noise. Finally,a three-component TEM induction magnetic field sensor is designed. The weight of the sensor is controlled at 3.2 kg and the working frequency is 10 mHz-10 kHz. The background noises of X and Y components probably keep in 1.5×10^-8 V/ Hz and sensitivities are 8.4 and 9.8 nT/s,respectively,the background noise of vertical component is 2.1× 10^-7 V/ Hz and sensitivity is 18.5 nT/s. Compared with the existing single-component TEM receiving magnetic field sensor,the designed sensor realizes the signal acquisition of three components. Without too much increase in volume and total weight,it improves the sensitivity of the sensor and reduces the background noise,thus the signal-to-noise ratio (SNR) of the signal is improved.展开更多
A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet dur...A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications.展开更多
Magnetometric resistivity(MMR)method is a new way to detect dam leakage.The coil sensor is generally used to collect data in geophysical exploration methods.Given the characteristics of accurate vector data requiremen...Magnetometric resistivity(MMR)method is a new way to detect dam leakage.The coil sensor is generally used to collect data in geophysical exploration methods.Given the characteristics of accurate vector data requirements and high sensitivity requirement,a three-component MMR air-core coil sensor is designed.Through the analysis of sensor sensitivity and coil structure parameters,the coil structure and turn number are designed.By analyzing the noise source of the sensor,a suitable amplifier is selected to reduce the background noise of the system.Through the analysis of the three-component non-orthogonal angles,the parameters of the non-orthogonal angles of the coils are corrected.Finally,a three-component MMR induction magnetic field sensor is designed.The volume of the sensor is controlled at 0.027 m 3.The background noise of X、Y and Z are 5.030435 nV/Hz@380 Hz and magnetic field sensitivities are 0.18995 pT/Hz@380 Hz.The three channels have good consistency,and the three-component nonorthogonal angles correction error of three components is controlled within 0.2%.展开更多
基金supported by the Scientific Research Foundation of Xijing University,China(No.XJ19T03)the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory(No.ZHD201701)the Natural Science Basic Research Plan in Shaanxi Province of China(No.2024JC-YBMS-342).
文摘Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing.This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP.The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density.Furthermore,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model sizes.Additionally,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped distribution.Moreover,the plasma uniformity becomes worse.Finally,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma uniformity.These findings contribute to optimizing the etching process by improving plasma radial uniformity.
基金supported by the Startup Foundation of Shenyang Agriculture University(No.X2023050)the Fundamental Research Funds for the Central Universities(No.N2209006)the National Natural Science Foundation of China(No.U22A20173).
文摘To address the current issues with the conventional slide gate system utilized in the steel teeming process,a unique electromagnetic induction controlled automated steel teeming(EICAST)technology has been developed.Cooling means of spiral coil in this technology is directly related to its service life.Firstly,heat transfer processes of air cooling and spray cooling were compared and analyzed.Secondly,the impacts of water temperature,water flow rate and air flow rate were examined in order to maximize the spray cooling effect.To maintain coil temperature at a low value consistently throughout the entire thermal cycle process of the ladle,a combined cooling mode was finally employed.Numerical simulation was applied to examine the coil temperature variation with different cooling systems and characteristics.Before coil operation,spray cooling is said to be more effective.By controlling the water flow rate and air flow rate,the spray cooling effect is enhanced.However,water temperature has little or no impact when using spray cooling.Air cooling during the secondary refining process and spray cooling prior to coil operation are combined to further lower coil temperature.When the direction of the spray cooling is from bottom to top,the coil temperature is lowered below 165℃.A practical induction coil cooling plan was provided for the EICAST technology’s production process.
文摘Transient electromagnetic method (TEM),as a non-seismic geophysical exploration mainstream electromagnetic method,is widely used in oil,gas,mineral and other underground resources exploration areas. The coil sensor is generally used to collect data. In view of the problems of incomplete information of the abnormal body and the data loss in the existing TEM single-component coil sensor,a three-component TEM coil sensor is designed. By analyzing the relationship between sensor sensitivity and coil structure parameters,the coil structure and turns are designed. By analyzing the frequency response characteristics of the TEM magnetic field sensor,the signal distortion is reduced by using the under-damped matching mode. By analyzing the distribution of various noise sources of the magnetic sensor,the appropriate amplifier is selected to reduce the background noise. Finally,a three-component TEM induction magnetic field sensor is designed. The weight of the sensor is controlled at 3.2 kg and the working frequency is 10 mHz-10 kHz. The background noises of X and Y components probably keep in 1.5×10^-8 V/ Hz and sensitivities are 8.4 and 9.8 nT/s,respectively,the background noise of vertical component is 2.1× 10^-7 V/ Hz and sensitivity is 18.5 nT/s. Compared with the existing single-component TEM receiving magnetic field sensor,the designed sensor realizes the signal acquisition of three components. Without too much increase in volume and total weight,it improves the sensitivity of the sensor and reduces the background noise,thus the signal-to-noise ratio (SNR) of the signal is improved.
基金the National Natural Science Foundation of China(Nos.11932008 and 11672120)the Fundamental Research Funds for the Central Universities of China(No.lzujbky-2022-kb01)。
文摘A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications.
文摘Magnetometric resistivity(MMR)method is a new way to detect dam leakage.The coil sensor is generally used to collect data in geophysical exploration methods.Given the characteristics of accurate vector data requirements and high sensitivity requirement,a three-component MMR air-core coil sensor is designed.Through the analysis of sensor sensitivity and coil structure parameters,the coil structure and turn number are designed.By analyzing the noise source of the sensor,a suitable amplifier is selected to reduce the background noise of the system.Through the analysis of the three-component non-orthogonal angles,the parameters of the non-orthogonal angles of the coils are corrected.Finally,a three-component MMR induction magnetic field sensor is designed.The volume of the sensor is controlled at 0.027 m 3.The background noise of X、Y and Z are 5.030435 nV/Hz@380 Hz and magnetic field sensitivities are 0.18995 pT/Hz@380 Hz.The three channels have good consistency,and the three-component nonorthogonal angles correction error of three components is controlled within 0.2%.
