In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at dif...In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.展开更多
Machine learning (ML) is a rapidly growing tool even in the lithium-ion battery (LIB) research field. To utilize this tool, more and more datasets have been published. However, applicability of a ML model to different...Machine learning (ML) is a rapidly growing tool even in the lithium-ion battery (LIB) research field. To utilize this tool, more and more datasets have been published. However, applicability of a ML model to different information sources or various LIB cell types has not been well studied. In this paper, an unsupervised learning model called variational autoencoder (VAE) is evaluated with three datasets of charge-discharge cycles with different conditions. The model was first trained with a publicly available dataset of commercial cylindrical cells, and then evaluated with our private datasets of commercial pouch and hand-made coin cells. These cells used different chemistry and were tested with different cycle testers under different purposes, which induces various characteristics to each dataset. We report that researchers can recognise these characteristics with VAE to plan a proper data preprocessing. We also discuss about interpretability of a ML model.展开更多
基金financially supported by National Natural Science Foundation of China(Nos.11935005 and 11875101)the Fundamental Research Funds for the Central Universities(No.DUT21LAB110)。
文摘In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.
基金supported by the project“ZeDaBase-Batteriezelldatenbank”of the Initiative and Networking Fund of the Helmholtz Association(KW-BASF-6).
文摘Machine learning (ML) is a rapidly growing tool even in the lithium-ion battery (LIB) research field. To utilize this tool, more and more datasets have been published. However, applicability of a ML model to different information sources or various LIB cell types has not been well studied. In this paper, an unsupervised learning model called variational autoencoder (VAE) is evaluated with three datasets of charge-discharge cycles with different conditions. The model was first trained with a publicly available dataset of commercial cylindrical cells, and then evaluated with our private datasets of commercial pouch and hand-made coin cells. These cells used different chemistry and were tested with different cycle testers under different purposes, which induces various characteristics to each dataset. We report that researchers can recognise these characteristics with VAE to plan a proper data preprocessing. We also discuss about interpretability of a ML model.
