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Support electron inductive effect of Pd-Mn/Ni foam catalyst for robust electrocatalytic hydrodechlorination 被引量:1
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作者 Junxi Li Chao Feng +2 位作者 Chong Chen Yuan Pan Yunqi Liu 《Journal of Environmental Sciences》 2025年第3期288-300,共13页
Structural regulation of Pd-based electrocatalytic hydrodechlorination(EHDC)catalyst for constructing high-efficient cathode materials with low noble metal content and high atom utilization is crucial but still challe... Structural regulation of Pd-based electrocatalytic hydrodechlorination(EHDC)catalyst for constructing high-efficient cathode materials with low noble metal content and high atom utilization is crucial but still challenging.Herein,a support electron inductive effect of Pd-Mn/Ni foam catalyst was proposed via in-situ Mn doping to optimize the electronic structure of the Ni foam(NF),which can inductive regulation of Pd for improving the EHDC performance.The mass activity and current efficiency of Pd-Mn/NF catalyst are 2.91 and 1.34 times superior to that of Pd/NF with 2,4-dichlorophenol as model compound,respectively.The Mn-doped interlayer optimized the electronic structure of Pd by bringing the d-state closer to the Fermi level than Pd on the NF surface,which optimizied the binding of EHDC intermediates.Additionally,the Mn-doped interlayer acted as a promoter for generating H∗and accelerating the EHDC reaction.This work presents a simple and effective regulation strategy for constructing high-efficient cathode catalyst for the EHDC of chlorinated organic compounds. 展开更多
关键词 PALLADIUM Structural Regulation Electrocatalytic hydrodechlorination Support electron inductive effect
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In-situ reaction monitoring and kinetics study of photochemical reactions by optical focusing inductive electrospray mass spectrometry
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作者 Yongyi Li Jin Han +1 位作者 Xiangyu Wang Zhenwei Wei 《Chinese Chemical Letters》 2025年第9期564-568,共5页
The investigation of reaction kinetics is the key to understanding the nature of reaction processes.However,monitoring fast photochemical reactions by mass spectrometry remains challenging.Herein,we developed an optic... The investigation of reaction kinetics is the key to understanding the nature of reaction processes.However,monitoring fast photochemical reactions by mass spectrometry remains challenging.Herein,we developed an optical focusing inductive electrospray(OF-iESI)mass spectrometry platform for real-time and in-situ photoreaction monitoring.Coaxial irradiation from back of nanoelectrospray emitter with a taper section was utilized,so the emitter could act as optical lens to help achieving much larger optical power density at emitter tip compared to other sections,which allowed for in-situ reaction monitoring of photoreactions.Through theoretical calculations,the highest optical power density region volume was ca.45 nL.We also integrated a controller for the laser source(450 nm),enabling the modulation of pulse duration(>1 ms).This facilitates the study of photochemical reaction kinetics.The in-situ capability of this device was proved by capturing the short-lived photogenerated intermediates during the dehydrogenation of tetrahydroquinoline.This device was further used to investigate the kinetics of triplet energy transfer based Paternò-Büchi reaction.The reaction order has hitherto remained undetermined while the result of OF-iESI suggested it followed pseudo-second-order reaction kinetics.The short-lived donor-acceptor collision complex intermediate was also successfully identified by tandem mass spectrometry. 展开更多
关键词 Mass spectrometry inductive electrospray Reaction monitoring Reaction intermediates Photochemical reaction
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Arsenic speciation in freshwater fish using high performance liquid chromatography and inductively coupled plasma mass spectrometry
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作者 Chester Lau Xiufen Lu +4 位作者 Karen S.Hoy Tetiana Davydiuk Jennifer A.Graydon Megan Reichert X.Chris Le 《Journal of Environmental Sciences》 2025年第7期302-315,共14页
Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research... Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research interest due to their higher arsenic content,research on freshwater fish is limited due to the challenges in quantifying and identifying arsenic species present at trace levels.We describe here a sensitivemethod and its application to the quantification of arsenic species in freshwater fish.Arsenic species from fish tissues were extracted using a methanol/water mixture(1:1 vol.ratio)and ultrasound sonication.Anion-exchange high-performance liquid chromatography(HPLC)enabled separation of arsenobetaine(AsB),inorganic arsenite(iAs^(Ⅲ)),dimethylarsinic acid(DMA),monomethylarsonic acid(MMA),inorganic arsenate(iAs^(Ⅴ)),and three new arsenic species.Inductively coupled plasma mass spectrometry(ICPMS)provided highly sensitive and specific detection of arsenic.A limit of detection of 0.25μg/kg(wet weight fish tissue)was achieved for the five target arsenic species:AsB,iAs^(Ⅲ),DMA,MMA,and iAs^(Ⅴ).A series of experimentswere conducted to ensure the accuracy and validity of the analytical method.The method was successfully applied to the determination of arsenic species in lakewhitefish,northern pike,and walleye,with AsB,DMA,and iAs^(Ⅴ) being frequently detected.Three new arsenic species were detected,but their chromatographic retention times did not match with those of any available arsenic standards.Future research is necessary to elucidate the identity of these new arsenic species detected in freshwater fish. 展开更多
关键词 Arsenic species Freshwater fish HPLC ICPMS Chromatography separation inductively coupled plasma mass SPECTROMETRY Non-targeted new species Speciation method validation
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Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges
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作者 Ying WANG Nie CHEN +4 位作者 Jingfeng YAO Evgeniy BOGDANOV Anatoly KUDRYAVTSEV Chengxun YUAN Zhongxiang ZHOU 《Plasma Science and Technology》 2025年第5期122-128,共7页
This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distr... This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy.The inverse EEDF plays a central role in the problem of negative conductivity.Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma,a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional(2D)kinetic modeling on a large array of different glow discharges.It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density.The theoretical conclusions are validated by numerical modeling of lowpressure two-chamber inductively-coupled plasma(ICP)discharges in the COMSOL Multiphysics environment.As a result,areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies. 展开更多
关键词 electron kinetics nonlocal electron distribution function gas discharge Boltzmann kinetic equation inverse electron distribution function inductively coupled plasma
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Highly dispersed Pt/Co_(3)O_(4)catalyst constructed by vacancy defect inductive effect for enhanced catalytic propane total oxidation
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作者 Chao Feng Gaoyan Xiong +8 位作者 Chong Chen Yan Lin Zhong Wang Yukun Lu Fang Liu Xuebing Li Yunqi Liu Runduo Zhang Yuan Pan 《Chinese Journal of Catalysis》 2025年第8期21-33,共13页
Directional design of efficient catalysts for volatile organic compounds degradation remains a complex,yet effective and challenging process.Herein,oxygen-rich vacancy Co_(3)O_(4)-anchored Pt catalysts were prepared t... Directional design of efficient catalysts for volatile organic compounds degradation remains a complex,yet effective and challenging process.Herein,oxygen-rich vacancy Co_(3)O_(4)-anchored Pt catalysts were prepared through atom-trapping strategy and relevant vacancy defect inductive effect was proposed.The 0.6Pt/VO-Co_(3)O_(4)catalyst presented a reaction rate value of 32.2×10^(-5)mol·g_(cat)^(-1)·s^(-1)at 160℃for catalytic propane total oxidation,which was nearly 5 times the reaction rate of Co_(3)O_(4)(6.7×10^(-5)mol·g_(cat)^(-1)·s^(-1)).Also,it exhibited excellent water-resistance and catalytic stability.The Pt atoms were stabilized on the Co_(3)O_(4)surface by vacancy defects to improve dispersion.Meanwhile,the vacancy defect inductive effect induced stronger electron interaction between Pt and Co_(3)O_(4)on the surface,thus promote the redox ability at low-temperature.The mobility and oxygen-activating ability of surface lattice oxygen were also strengthened by the vacancy defect inductive effect.This facilitated the generation of more surface-active oxygen species for the cleavage of C-H bond and the deep oxidation of intermediate species.Overall,this study proposed a novel concept the fabrication of highly efficient catalysts for the purpose of catalytic oxidation. 展开更多
关键词 Propane total oxidation Pt/Co_(3)O_(4) Oxygen vacancy Defect inductive effect Synergetic catalysis
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Determination on Heavy Metals Content of Achyranthes bidentata Blume. through Inductively Coupled Plasma Mass Spectrometry (ICP-MS) 被引量:4
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作者 李宇伟 王新民 +3 位作者 连瑞丽 魏志华 介晓磊 陈士林 《Agricultural Science & Technology》 CAS 2008年第5期145-149,共5页
[Objective] The inductively coupled plasma mass spectrometry(ICP-MS)was constructed to determine the contents of lead,cadmium,mercury and arsenic in Archyranthes bidentata Blume.[Method]Under the optimum operation con... [Objective] The inductively coupled plasma mass spectrometry(ICP-MS)was constructed to determine the contents of lead,cadmium,mercury and arsenic in Archyranthes bidentata Blume.[Method]Under the optimum operation condition of ICP-MS,the samples were digested by microwave.The element 114In was taken as an internal standard element to compensate body effect and ICP-MS method was used to determine the contents of lead,cadmium,mercury and arsenic.[Result]For the determined elements,the correlation coefficient(r)of standard curve was over 0.9995 and recovery rate was from 96.7% to 106.4% while RSD was less than 11.2%.The result of determination showed that the heavy metal content in Archyranthes bidentata Blume.beyond standard was serious.[Conclusion]The constructed ICP-MS method with simple operation,rapid response,accuracy and high sensitivity in this experiment could be used for quality control of Chinese medicinal materials by detecting heavy metal contents in different Chinese medicinal materials from original places. 展开更多
关键词 Microwave DIGESTION inductively coupled plasma MASS spectrometry(ICP-MS) Achyranthes bidentata Blume. HEAVY metal
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Functional Orientation and Practice of Inductive and Deductive Approaches to Grammar Teaching in EFL
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作者 邵阳 《英语广场(学术研究)》 2011年第Z6期57-58,共2页
To solve the ambiguous understanding of Grammar Teaching position,based on explicit grammatical knowledge,this paper discusses the grammar position in EFL,compares both its pros and cons between deductive and inductiv... To solve the ambiguous understanding of Grammar Teaching position,based on explicit grammatical knowledge,this paper discusses the grammar position in EFL,compares both its pros and cons between deductive and inductive approaches,and indicates that grammar teaching by either approach alone has disadvantages,should adopt a combination technique. 展开更多
关键词 GRAMMAR teaching deductive APPROACH inductive APPROACH explicit GRAMMATICAL knowledge
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Using An Inductive Approach to Teach Grammar to Chinese Adult Learners of English
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作者 王中锋 李爱萍 《疯狂英语(教师版)》 2007年第1期27-33,47,共8页
关键词 inductive APPROACH deductive APPROACH GRAMMAR teaching CHINESE adult LEARNERS of ENGLISH
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Inductive Topologies of L-fuzzy Topological Vector Spaces
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作者 严从华 《Chinese Quarterly Journal of Mathematics》 CSCD 2001年第2期22-29,共8页
In this paper, using the theory of L _fuzzy topological vector spaces [1]-[6] , we study some properties of L _fuzzy inductive topologies determined by a family of L _fuzzy linerar order_homomorphisms... In this paper, using the theory of L _fuzzy topological vector spaces [1]-[6] , we study some properties of L _fuzzy inductive topologies determined by a family of L _fuzzy linerar order_homomorphisms [2] of L _ftvs, and give a characterization of inductive topologies determined by a single FLOH. As an application of this results, we prove that the quotient space of L _ftvs is also L _ftvs. 展开更多
关键词 L _fuzzy linear order_homomorphism L _ftvs L _flctvs inductive L _fuzzy topology
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SOME PROPERTIES OF BOUNDED SETS IN INDUCTIVE LIMITS
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作者 丘京辉 《苏州大学学报(自然科学版)》 CAS 1991年第2期109-114,共6页
Let (E,ξ)=indlim (En,ξn) be an inductive limit of a sequence of locally convex spaces,For brevity,denote by (DS) each set Bbounded in (E,ξ) is contained in some En; and (DST) each set B bounded in (E,ξ) is co... Let (E,ξ)=indlim (En,ξn) be an inductive limit of a sequence of locally convex spaces,For brevity,denote by (DS) each set Bbounded in (E,ξ) is contained in some En; and (DST) each set B bounded in (E,ξ) is contained and bounded in some (En,ξn). Theovem 1.(DS) holds provided that (i) for each n∈N,there is a neighborhood Un of o in (En,ξn) and m(n)∈ such that -↑Un^E包含于Em(n),and (ii) for any neighborhood V n of o in (En,ξn),∞↑Un=1 Vn absorbs every bounded set in (E,ξ). theorem 2 Let all (En,ξn) be metrizable and (DS) hold,then for each bounded set B IN (E,ξ)and each n ∈N thcrc is a neighborhood U k of o in (Ek,ξk), 1≤k≤n ,and m(n)∈N such that ——↑(B+U1+U2+…+Un)^E包含于 Em(n). theorem 3. Let all (En,ξn) be Frechet spaces.Then (DST) holds if and only if (i) for each n ∈N,there is u neighborhood U n of in (En,ξn) and m(n)∈N such that 0↑Un^E包含于Em(n),and (ii) for each each closed ,absosed,absolutely conuex,bounded set B in (E,ξ),∞↑Un=1((εnB)∩Un)absorbs B,where U n is any neighborhood of o in (En,ξn) and εn is any positive number for every n ∈N。 展开更多
关键词 有界集 归纳极限 凸空间 线性拓扑空间
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Energy-storage Welding Connection Characteristics of Rapid Solidification AZ91D Mg Alloy Ribbons 被引量:14
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作者 JinfengXU QiuyaZHAI SenYUAN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第4期431-434,共4页
Energy-storage welding connection characteristics of rapidly solidified AZ91D Mg alloy ribbons with 40-70 μm thickness are investigated using a microtype energy-storage welding machine. The microstructure and perform... Energy-storage welding connection characteristics of rapidly solidified AZ91D Mg alloy ribbons with 40-70 μm thickness are investigated using a microtype energy-storage welding machine. The microstructure and performance of the connection joints are analyzed and studied. The research results indicate that energy-storage welding is able to realize the spot welding connection of AZ9ID Mg alloy ribbons. The welding nugget consists of developed α-Mg equiaxed grains with the sizes of 1.2-2.7 μm and intergranular distributed β-Mg17Al12 compounds. The thickness of bond zone is about 4 μm and the solidification microstructure is characterized by the fine equiaxed grains with the sizes of 0.8-1.2μm and grain boundary has become coarsening. The columnar crystal in HAZ also becomes slightly coarsening and the grain boundary has broadened, however, there is no obvious change in its primitive morphology and crystallographic direction. When welding energy is about 2.0 J, the welding joints with higher shear strength and smaller electrical resistivity are obtained. 展开更多
关键词 AZ91D Rapid solidification energy-storage welding Microstructures Properties
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Fountain Rockburst and Inductive Rockburst 被引量:3
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作者 WANG Wen-xing PAN Chang-liang FENG Tao 《Journal of Central South University》 SCIE EI CAS 2000年第3期129-132,共4页
A new test method—the load relaxation test after the peak value, was used to investigate rockburst proneness. Two new concepts—fountain and inductive rockbursts, were proposed to distinguish two kinds of rockbursts.... A new test method—the load relaxation test after the peak value, was used to investigate rockburst proneness. Two new concepts—fountain and inductive rockbursts, were proposed to distinguish two kinds of rockbursts. The breaking process of rock, mutation condition and occasion of rockburst and source of kinetic energy of rockburst were discussed. 展开更多
关键词 FOUNTAIN inductive ROCKBURST SOURCE of KINETIC ENERGY
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Spheroidization of silica powders by radio frequency inductively coupled plasma with Ar–H2 and Ar–N2 as the sheath gases at atmospheric pressure 被引量:4
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作者 Lin Li Guo-hua Ni +3 位作者 Qi-jia Guo Qi-fu Lin Peng Zhao Jun-li Cheng 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2017年第9期1067-1074,共8页
Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sh... Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sheath gas), as well as the carrier gas flow rate, on the spheroidization rate of silica powders, were investigated. The prepared silica powders before and after plasma treatment were examined by scanning electron microscopy, X-ray diffraction, and laser granulometric analysis. Results indicated that the average size of the silica particles increased, and the transformation of crystals into the amorphous state occurred after plasma treatment. Discharge image processing was employed to analyze the effect of the plasma temperature field on the spheroidization rate. The spheroidization rate of the silica powder increased with the increase of the hydrogen content in the sheath gas. On the other hand, the spheroidization rate of the silica power first increased and then decreased with the increase of the nitrogen content in the sheath gas. Moreover, the amorphous content increased with the increase of the spheroidization rate of the silica powder. 展开更多
关键词 silica powders SPHEROIDIZATION inductively coupled plasma mixed gas
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Experimental Study of the Influence of Process Pressure and Gas Composition on GaAs Etching Characteristics in Cl_2/BCl_3-Based Inductively Coupled Plasma 被引量:5
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作者 D.S.RAWAL B.K.SEHGAL +1 位作者 R.MURALIDHARAN H.K.MALIK 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第2期223-229,共7页
A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etc... A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etching depths of more than 150μm. Plasma etch characteristics with ICP process pressure and the percentage of BCI3 were studied in greater detail at a constant ICP coil/bias power. The measured peak-to-peak voltage as a function of pressure was used to estimate the minimum energy of the ions bombarding the substrate. The process pressure was found to have a substantial influence on the energy of heavy ions. Various ion species in plasma showed minimum energy variation from 1.85 eV to 7.5 eV in the pressure range of 20 mTorr to 50 mTorr. The effect of pressure and the percentage of BCl3 on the etching rate and surface smoothness of the bottom surface of the etched hole were studied for a fixed total flow rate. The etching rate was found to decrease with the percentage of BCl3, whereas the addition of BCl3 resulted in anisotropic holes with a smooth veil free bottom surface at a pressure of 30 mTorr and 42% BC13. In addition, variation of the etching yield with pressure and etching depth were also investigated. 展开更多
关键词 GAAS inductively coupled plasma ETCHING ion energy etch yield
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Quantification of trace amounts of impurities in high purity cobalt by high resolution inductively coupled plasma mass spectrometry 被引量:10
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作者 XIE Hualin HUANG Kelong +1 位作者 NIE Xidu TANG Yougen 《Rare Metals》 SCIE EI CAS CSCD 2007年第3期286-291,共6页
A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, ... A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, Mo, Ag, Cd, Sn Sb, Ba, Pt, Au, and Pb) in high purity cobalt was described. Sample digestions were performed in closed microwave vessels using HNO3 and HCI. The matrix effects because of the presence of excess HCI and Co were evaluated. The usefulness of high mass resolution for overcoming some spectral interference was demonstrated. The optimum conditions for the determination were tested and discussed. The standard addition method was employed for quantitative analysis. The detection limits were 0.016-1.50 ].tg·g^-1, the recovery ratios were 92.2%-111.2%, and the RSD was less than 3.6%. The method was accurate, quick, and convenient. It was applied to the determination of trace impurities in high purity cobalt with satisfactory results. 展开更多
关键词 high resolution inductively coupled plasma mass spectrometry high purity cobalt trace impurities matrix effect standard addition method
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Energy-storage configuration for EV fast charging stations considering characteristics of charging load and wind-power fluctuation 被引量:9
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作者 Xiaoyi Liu Tianyuan Feng 《Global Energy Interconnection》 CAS CSCD 2021年第1期48-57,共10页
Fast charging stations play an important role in the use of electric vehicles(EV)and significantly affect the distribution network owing to the fluctuation of their power.For exploiting the rapid adjustment feature of... Fast charging stations play an important role in the use of electric vehicles(EV)and significantly affect the distribution network owing to the fluctuation of their power.For exploiting the rapid adjustment feature of the energy-storage system(ESS),a configuration method of the ESS for EV fast charging stations is proposed in this paper,which considers the fluctuation of the wind power as well as the characteristics of the charging load.The configuration of the ESS can not only mitigate the effects of fast charging stations on the connected distribution network but also improve its economic efficiency.First,the scenario method is adopted to model the wind power in the distribution network,and according to the characteristics of the EV and the driving probability,the charging demand of each station is calculated.Then,considering factors such as the investment cost,maintenance cost,discharging benefit,and wind curtailment cost,the ESS configuration model of the distribution network is set up,which takes the optimal total costs of the ESS for EV fast charging stations within its lifecycle as an objective.Finally,General Algebraic Modelling System(GAMS)is used to linearize and solve the proposed model.A simulation on an improved IEEE-69 bus system verifies the feasibility and economic efficiency of the proposed model. 展开更多
关键词 Fast charging station energy-storage system Electric vehicle Distribution network
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Surface Modification of Nanometre Silicon Carbide Powder with Polystyrene by Inductively Coupled Plasma 被引量:3
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作者 韦刚 孟月东 +5 位作者 钟少锋 刘峰 蒋仲庆 舒兴胜 任兆杏 王祥科 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第1期78-82,共5页
An investigation was made into polystyrene (PS) grafted onto nanometre silicon carbide (SIC) particles. In our experiment, the grafting polymerization reaction was induced by a radio frequency (RF) inductively c... An investigation was made into polystyrene (PS) grafted onto nanometre silicon carbide (SIC) particles. In our experiment, the grafting polymerization reaction was induced by a radio frequency (RF) inductively coupled plasma (ICP) treatment of the nanometre powder. FTIR (Fourier transform infrared spectrum) and XPS (X-ray photoelectron spectroscopy) results reveal that PS is grafted onto the surface of silicon carbide powder. An analysis is presented on the effectiveness of this approach as a function of plasma operating variables including the plasma treating power, treating time, and grafting reaction temperature and time. 展开更多
关键词 inductively coupled plasma graft polymerization SIC
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Ion Density Distribution in an Inductively Coupled Plasma Chamber 被引量:4
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作者 陈俊芳 赵文锋 +2 位作者 吴先球 樊双莉 符斯列 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第2期2233-2236,共4页
The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamb... The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamber, different radio-frequency powers and different positions. The result indicates that the ion density decreases as the pressure increases, and increases as the power decreases. The ion density of axial position z =0 achieves 5.8×1010 on the center of coil under the power of 200 w and pressure of 9 Pa in the reaction chamber. 展开更多
关键词 inductively coupled plasma ion density distribution angmuir probe
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Simulation of plasma behavior for medium propellant mass and pulsed energy of small scale pulsed inductive thruster 被引量:4
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作者 Yuguo CHENG Guangqing XIA 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2020年第1期176-190,共15页
The pulsed inductive thruster is characterized of no electrode corruption and wide propellant choice.To give insight into the propulsion mechanism of small scale thruster at different propellant mass(m)and energy(E)le... The pulsed inductive thruster is characterized of no electrode corruption and wide propellant choice.To give insight into the propulsion mechanism of small scale thruster at different propellant mass(m)and energy(E)levels,the transient Magneto Hydro Dynamics(MHD)method,completed by high temperature thermodynamic and transport,and plasma electrical models,is developed to study argon plasma response under the excitation of current of high rise rate.By calculating the two-dimensional expansion properties of the thruster with conical pylon,the simulations find that the main energy deposition occurs during the initial pulse rise stage,and the energy density of Joule heat is two magnitudes higher than the deposition in the down side.At propellant mass of 2 mg,average axial velocity of the current sheet increases from about 15 km/s at 750 J to about 21 km/s at 1470 J within the decoupling distance.The velocity variation synchronizes with the pulsed rise in the initial.The monotonically decrease of the temperature along axis results in the growth of low ionization level ions and reducing of high levels.The current sheet maintains the structure formed during the initial pulse rise when moving beyond the decoupling distance.Besides the change in forward velocity,the main difference is the dimension compared with that in the first half period,caused by thermal conduction and particle diffusion.The variations of total impulse It in the range of m from 2 mg to8 mg and E from 750 J to 1470 J show that It is proportional to m1/2 when E is determined. 展开更多
关键词 Expansion properties Flow field Magneto Hydro Dynamics(MHD)method PULSED inductive PLASMA Total IMPULSE
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Modeling Approach and Analysis of the Structural Parameters of an Inductively Coupled Plasma Etcher Based on a Regression Orthogonal Design 被引量:3
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作者 程嘉 朱煜 季林红 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第12期1059-1068,共10页
The geometry of an inductively coupled plasma (ICP) etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these pa... The geometry of an inductively coupled plasma (ICP) etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these parameters were determined by the "trial and error" method, resulting in wastes of time and funds. In this paper, a new approach of regression orthogonal design with plasma simulation experiments is proposed to investigate the sensitivity of the structural parameters on the uniformity of plasma characteristics. The tool for simulating plasma is CFD-ACE+, which is commercial multi-physical modeling software that has been proven to be accurate for plasma simulation. The simulated experimental results are analyzed to get a regression equation on three structural parameters. Through this equation, engineers can compute the uniformity of the electron number density rapidly without modeling by CFD-ACE+. An optimization performed at the end produces good results. 展开更多
关键词 fluid model inductively coupled plasma regression orthogonal structural parameters design of experiment
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