We report the growth of InSb layers directly on GaAs （001） substrates without any buffer layers by molecular beam epitaxy （MBE）. Influences of growth temperature and V/Ⅲ flux ratios on the crystal quality, the su...We report the growth of InSb layers directly on GaAs （001） substrates without any buffer layers by molecular beam epitaxy （MBE）. Influences of growth temperature and V/Ⅲ flux ratios on the crystal quality, the surface morphology and the electrical properties of InSb thin films are investigated. The InSb samples with room- temperature mobility of 44600cm2/Vs are grown under optimized growth conditions. The effect of defects in InSb epitaxial on the electrical properties is researched, and we infer that the formation of In vacancy （VIn） and Sb anti-site （SbIn） defects is the main reason for concentrations changing with growth temperature and Sb2/In flux ratios. The mobility of the InSb sample as a function of temperature ranging from 90 K to 360K is demonstrated and the dislocation scattering mechanism and phonon scattering mechanism are discussed.展开更多
基金Supported by the Youth Innovation Promotion Association of Chinese Academy of Sciences under Grant No 2015094the National Natural Science Foundation of China under Grant Nos 61204012,61274049 and 61376058+1 种基金the Beijing Natural Science Foundation under Grant Nos 4142053 and 4132070the Beijing Nova Program under Grant Nos 2010B056 and xxhz201503
文摘We report the growth of InSb layers directly on GaAs （001） substrates without any buffer layers by molecular beam epitaxy （MBE）. Influences of growth temperature and V/Ⅲ flux ratios on the crystal quality, the surface morphology and the electrical properties of InSb thin films are investigated. The InSb samples with room- temperature mobility of 44600cm2/Vs are grown under optimized growth conditions. The effect of defects in InSb epitaxial on the electrical properties is researched, and we infer that the formation of In vacancy （VIn） and Sb anti-site （SbIn） defects is the main reason for concentrations changing with growth temperature and Sb2/In flux ratios. The mobility of the InSb sample as a function of temperature ranging from 90 K to 360K is demonstrated and the dislocation scattering mechanism and phonon scattering mechanism are discussed.
