A photoluminescence(PL)study on InGaAs/InP multiple-quantum wells(MQW)structure with F^(+),Ne^(+)implant induced compositional disordering(I ICD)is presented.The effects of energy shift of PL peak depend on ion dose,a...A photoluminescence(PL)study on InGaAs/InP multiple-quantum wells(MQW)structure with F^(+),Ne^(+)implant induced compositional disordering(I ICD)is presented.The effects of energy shift of PL peak depend on ion dose,annealing conditions,target temperature and implanted ion species.The results indicate that the optimum annealing condition is approximately 750℃ for 30s,the ion dose which caused biggest blue shift is around 1 × 10^(14) cm^(-2) for room temperature implantation and 5 × 10^(14) cm^(-2) for elevated temperature of 200℃ implantation.With the same condition of implantation and annealing,F^(+)and Ne^(+)implantation induced approximately the same blue shift of PL peak.This result suggests that the radiation enhanced diffusion by neutral ion implantation dominates the IICD processing.The secondary ion mass spectroscopy analysis indicates that the ion implantation caused slightly layer interdiffusion which makes the square potential well smear and results in the band gap blue shift.展开更多
Microstructure and misfit dislocation behavior in In_xGa_(1-x)As/InP heteroepitaxial materials grown by low pressure metal organic chemical vapor deposition(LP-MOCVD) were analyzed by high resolution transmission elec...Microstructure and misfit dislocation behavior in In_xGa_(1-x)As/InP heteroepitaxial materials grown by low pressure metal organic chemical vapor deposition(LP-MOCVD) were analyzed by high resolution transmission electron microscopy(HRTEM), scanning electron microscopy(SEM), atomic force microscopy(AFM), Raman spectroscopy and Hall effect measurements. To optimize the structure of In_(0.82)Ga_(0.18)As/InP heterostructure, the In_xGa_(1-x)As buffer layer was grown. The residual strain of the In_(0.82)Ga_(0.18)As epitaxial layer was calculated. Further, the periodic growth pattern of the misfit dislocation at the interface was discovered and verified. Then the effects of misfit dislocation on the surface morphology and microstructure of the material were studied. It is found that the misfit dislocation of high indium(In) content In_(0.82)Ga_(0.18)As epitaxial layer has significant influence on the carrier concentration.展开更多
Optical gains of type-Ⅱ In Ga As/Ga As Bi quantum wells(QWs) with W, N, and M shapes are analyzed theoretically for near-infrared laser applications. The bandgap and wave functions are calculated using the self-con...Optical gains of type-Ⅱ In Ga As/Ga As Bi quantum wells(QWs) with W, N, and M shapes are analyzed theoretically for near-infrared laser applications. The bandgap and wave functions are calculated using the self-consistent k·p Hamiltonian, taking into account valence band mixing and the strain effect. Our calculations show that the M-shaped type-Ⅱ QWs are a promising structure for making 1.3 um lasers at room temperature because they can easily be used to obtain 1.3 um for photoluminescence with a proper thickness and have large wave-function overlap for high optical gain.展开更多
The ground-state energy level (GEL) and electron distribution of GaAs pseudomorphic high-electron-mobility transistors (PHEMTs) are analyzed by a self-consistent solution to the Schrodinger-Poisson equations. The ...The ground-state energy level (GEL) and electron distribution of GaAs pseudomorphic high-electron-mobility transistors (PHEMTs) are analyzed by a self-consistent solution to the Schrodinger-Poisson equations. The indium composition and thickness of the InGaAs channel are optimized according to the GEL position. The GEL position is not in direct proportion to 1/d^2 (d is the channel thickness) by considering the influence of electron distribution in the InGaAs channel. Indium composition 0.22 and channel thickness 9 nm are obtained by considering the mismatch between InGaAs and AlGaAs. Several PHEMT samples are grown according to the theoretical results and mobility 6300 cm^2 /V.s is achieved.展开更多
In P/In0.53Ga0.47As短波红外探测器是一种高性能的近室温工作器件,从200 K到室温下都能获得较好的器件性能,从而大大降低了对制冷的要求。为了充分利用目标在可见光和短波波段的光谱信息,通过特殊的材料结构设计和器件背减工艺,成功实...In P/In0.53Ga0.47As短波红外探测器是一种高性能的近室温工作器件,从200 K到室温下都能获得较好的器件性能,从而大大降低了对制冷的要求。为了充分利用目标在可见光和短波波段的光谱信息,通过特殊的材料结构设计和器件背减工艺,成功实现了320×256In P/In Ga As宽光谱红外探测器,能够同时对可见光和短波红外响应,并从77 K到263 K工作温度下实现了对人脸、计算机及室外2.3 km处的景物成像。测试样管平均峰值探测率为2×1012 cm Hz1/2/W,光谱响应为0.6~1.7μm,光谱响应测试和成像结果同时验证了In P/In Ga As宽光谱探测器对可见光信号的探测。相比标准的In P/In0.53Ga0.47As短波探测器,In P/In Ga As宽光谱探测器显示了可见/短波双波段探测的效果,大大丰富了探测目标的信息量,可显著提升对目标的识别率。展开更多
采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试...采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试结果表明器件有正常的光响应特性,击穿电压32~42 V,在低于击穿电压2 V 左右可以得到大约10 A/W 的光响应度,在0到小于击穿电压1 V 的偏压范围内,暗电流只有1 nA 左右;器件在2.7 GHz 以下有平坦的增益。展开更多
A new method is used to simulate InGaAs/InP composite channel high electron mobility transistors (HEMTs). By coupling the hydrodynamic model and the density gradient model, the electron density distribution in the c...A new method is used to simulate InGaAs/InP composite channel high electron mobility transistors (HEMTs). By coupling the hydrodynamic model and the density gradient model, the electron density distribution in the channel in different electric fields is obtained. This method is faster and more robust than traditional meth- ods and should be applicable to other types of HEMTs simulations. A detailed study of the InGaAs/InP composite channel HEMTs is presented with the help of simulations.展开更多
基金Supported by the National Natural Science Foundation df China。
文摘A photoluminescence(PL)study on InGaAs/InP multiple-quantum wells(MQW)structure with F^(+),Ne^(+)implant induced compositional disordering(I ICD)is presented.The effects of energy shift of PL peak depend on ion dose,annealing conditions,target temperature and implanted ion species.The results indicate that the optimum annealing condition is approximately 750℃ for 30s,the ion dose which caused biggest blue shift is around 1 × 10^(14) cm^(-2) for room temperature implantation and 5 × 10^(14) cm^(-2) for elevated temperature of 200℃ implantation.With the same condition of implantation and annealing,F^(+)and Ne^(+)implantation induced approximately the same blue shift of PL peak.This result suggests that the radiation enhanced diffusion by neutral ion implantation dominates the IICD processing.The secondary ion mass spectroscopy analysis indicates that the ion implantation caused slightly layer interdiffusion which makes the square potential well smear and results in the band gap blue shift.
基金supported by the National Key Basic Research Program of China(No.2012CB619200)the National Natural Science Foundation of China(No.61474053)+1 种基金the State Key Laboratory for Mechanical Behavior of Materials of Xi'an Jiaotong University(No.20161806)the Natural Science Basic Research Open Foundation of the Key Lab of Automobile Materials,Ministry of Education,Jilin University(No.1018320144001)
文摘Microstructure and misfit dislocation behavior in In_xGa_(1-x)As/InP heteroepitaxial materials grown by low pressure metal organic chemical vapor deposition(LP-MOCVD) were analyzed by high resolution transmission electron microscopy(HRTEM), scanning electron microscopy(SEM), atomic force microscopy(AFM), Raman spectroscopy and Hall effect measurements. To optimize the structure of In_(0.82)Ga_(0.18)As/InP heterostructure, the In_xGa_(1-x)As buffer layer was grown. The residual strain of the In_(0.82)Ga_(0.18)As epitaxial layer was calculated. Further, the periodic growth pattern of the misfit dislocation at the interface was discovered and verified. Then the effects of misfit dislocation on the surface morphology and microstructure of the material were studied. It is found that the misfit dislocation of high indium(In) content In_(0.82)Ga_(0.18)As epitaxial layer has significant influence on the carrier concentration.
基金Supported by the National Basic Research Program of China under Grant No 2014CB643902the Key Program of Natural Science Foundation of China under Grant No 61334004+3 种基金the National Natural Science Foundation of China under Grant No 61404152the Strategic Priority Research Program of the Chinese Academy of Sciences under Grant No XDA5-1the Foundation of National Laboratory for Infrared Physics,the Key Research Program of the Chinese Academy of Sciences under Grant No KGZDEW-804the Creative Research Group Project of Natural Science Foundation of China under Grant No 61321492
文摘Optical gains of type-Ⅱ In Ga As/Ga As Bi quantum wells(QWs) with W, N, and M shapes are analyzed theoretically for near-infrared laser applications. The bandgap and wave functions are calculated using the self-consistent k·p Hamiltonian, taking into account valence band mixing and the strain effect. Our calculations show that the M-shaped type-Ⅱ QWs are a promising structure for making 1.3 um lasers at room temperature because they can easily be used to obtain 1.3 um for photoluminescence with a proper thickness and have large wave-function overlap for high optical gain.
文摘The ground-state energy level (GEL) and electron distribution of GaAs pseudomorphic high-electron-mobility transistors (PHEMTs) are analyzed by a self-consistent solution to the Schrodinger-Poisson equations. The indium composition and thickness of the InGaAs channel are optimized according to the GEL position. The GEL position is not in direct proportion to 1/d^2 (d is the channel thickness) by considering the influence of electron distribution in the InGaAs channel. Indium composition 0.22 and channel thickness 9 nm are obtained by considering the mismatch between InGaAs and AlGaAs. Several PHEMT samples are grown according to the theoretical results and mobility 6300 cm^2 /V.s is achieved.
文摘In P/In0.53Ga0.47As短波红外探测器是一种高性能的近室温工作器件,从200 K到室温下都能获得较好的器件性能,从而大大降低了对制冷的要求。为了充分利用目标在可见光和短波波段的光谱信息,通过特殊的材料结构设计和器件背减工艺,成功实现了320×256In P/In Ga As宽光谱红外探测器,能够同时对可见光和短波红外响应,并从77 K到263 K工作温度下实现了对人脸、计算机及室外2.3 km处的景物成像。测试样管平均峰值探测率为2×1012 cm Hz1/2/W,光谱响应为0.6~1.7μm,光谱响应测试和成像结果同时验证了In P/In Ga As宽光谱探测器对可见光信号的探测。相比标准的In P/In0.53Ga0.47As短波探测器,In P/In Ga As宽光谱探测器显示了可见/短波双波段探测的效果,大大丰富了探测目标的信息量,可显著提升对目标的识别率。
文摘采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试结果表明器件有正常的光响应特性,击穿电压32~42 V,在低于击穿电压2 V 左右可以得到大约10 A/W 的光响应度,在0到小于击穿电压1 V 的偏压范围内,暗电流只有1 nA 左右;器件在2.7 GHz 以下有平坦的增益。
文摘A new method is used to simulate InGaAs/InP composite channel high electron mobility transistors (HEMTs). By coupling the hydrodynamic model and the density gradient model, the electron density distribution in the channel in different electric fields is obtained. This method is faster and more robust than traditional meth- ods and should be applicable to other types of HEMTs simulations. A detailed study of the InGaAs/InP composite channel HEMTs is presented with the help of simulations.