Here in this paper,we report a room-temperature operating infrared photodetector based on the interband transition of an In As Sb/Ga Sb quantum well.The interband transition energy of 5-nm thick In As(0.91)Sb(0.09...Here in this paper,we report a room-temperature operating infrared photodetector based on the interband transition of an In As Sb/Ga Sb quantum well.The interband transition energy of 5-nm thick In As(0.91)Sb(0.09) embedded in the Ga Sb barrier is calculated to be 0.53 e V(2.35μm),which makes the absorption range of In As Sb cover an entire range from short-wavelength infrared to long-wavelength infrared spectrum.The fabricated photodetector exhibits a narrow response range from 2.0μm to 2.3μm with a peak around 2.1μm at 300 K.The peak responsivity is 0.4 A/W under-500-m Vapplied bias voltage,corresponding to a peak quantum efficiency of 23.8%in the case without any anti-reflection coating.At 300 K,the photodetector exhibits a dark current density of 6.05×10^-3A/cm^2 under-400-m V applied bias voltage and 3.25×10^-5A/cm^2 under zero,separately.The peak detectivity is 6.91×10^10cm·Hz^1/2/W under zero bias voltage at 300 K.展开更多
为提高势垒型中波InAs/InAsSb二类超晶格红外探测器器件性能,研究并设计了nBn势垒型InAs/InAsSb器件结构。针对InAs/InAsSb红外探测器器件结构特征,分析了暗电流的主导机制和能带特性,采用基于泊松方程、连续性方程和热方程的数值计算方...为提高势垒型中波InAs/InAsSb二类超晶格红外探测器器件性能,研究并设计了nBn势垒型InAs/InAsSb器件结构。针对InAs/InAsSb红外探测器器件结构特征,分析了暗电流的主导机制和能带特性,采用基于泊松方程、连续性方程和热方程的数值计算方法,通过精确调控吸收层掺杂、势垒层掺杂、势垒层厚度、温度和组分等,构建出高能量势垒以有效阻挡多数载流子,允许少数载流子迁移,实现价带偏移(Valence Band Offset,VBO)接近于零的要求,从而有效降低暗电流。研究结果表明,在1×10^(15)~1×10^(17)cm^(-3)范围内降低势垒层掺杂浓度,VBO和暗电流开启电压绝对值均会减小,当AlAs1-xSbx势垒中Sb组分为0.91时,VBO接近于零。对于吸收层,随着掺杂浓度的提高,暗电流呈现减小趋势,但趋势较不明显。在-0.5V偏压,140 K工作条件下,吸收层和势垒层掺杂浓度分别为1×10^(13)cm^(-3),1×10^(15)cm^(-3),吸收层与势垒层厚度分别为3μm,80 nm,得到器件结构参数优化后的暗电流低至4.5×10^(-7)A/cm^(2),证明InAs/InAsSb中波红外探测器具有高温工作的应用前景,可广泛应用于导弹预警、红外制导、航空航天等领域。展开更多
In this paper,a planar junction mid-wavelength infrared(MWIR)photodetector based on an InAs/GaSb type-Ⅱsuper-lattices(T2SLs)is reported.The Intrinsic-πMN superlattices was grown by the molecular beam epitaxy(MBE),fo...In this paper,a planar junction mid-wavelength infrared(MWIR)photodetector based on an InAs/GaSb type-Ⅱsuper-lattices(T2SLs)is reported.The Intrinsic-πMN superlattices was grown by the molecular beam epitaxy(MBE),followed with a ZnS layer grown by the chemical vapor deposition(CVD).The p-type contact layer was constructed by thermal diffusion in the undoped superlattices.The Zinc atom was successfully realised into the superlattice and a PπMN T2SL structure was con-structed.Furthermore,the effects of different diffusion temperatures on the dark current performance of the devices were researched.The 50%cut-off wavelength of the photodetector is 5.26μm at 77 K with 0 V bias.The minimum dark current density is 8.67×10^(−5) A/cm^(2) and the maximum quantum efficiency of 42.5%,and the maximum detectivity reaches 3.90×10^(10) cm·Hz^(1/2)/W at 77 K.The 640×512 focal plane arrays(FPA)based on the planner junction were fabricated afterwards.The FPA achieves a noise equivalent temperature difference(NETD)of 539 mK.展开更多
With high surface-to-volume ratio,the abundant surface states and high carrier concentration are challenging the nearinfrared photodetection behaviors of narrow band gap semiconductors nanowires.In this study,the narr...With high surface-to-volume ratio,the abundant surface states and high carrier concentration are challenging the nearinfrared photodetection behaviors of narrow band gap semiconductors nanowires.In this study,the narrow band gap semiconductor of Bi_(2)O_(2)Se nanosheets(NSs)is adopted to construct mixed-dimensional heterojunctions with GaSb nanowires(NWs)for demonstrating the impressive self-powered NIR photodetection.Benefiting from the built-in electric field of~140 meV,the as-constructed NW/NS mixeddimensional heterojunction self-powered photodetector shows the low dark current of 0.07 pA,high I_(light)/I_(dark)ratio of 82 and fast response times of<2/2 ms at room temperature.The self-powered photodetector performance can be further enhanced by fabricating the NW array/NS mixed-dimensional heterojunction by using a contact printing technique.The excellent photodetection performance promises the asconstructed NW/NS mixed-dimensional heterojunction self-powered photodetector in imaging and photocommunication.展开更多
本文报道了1280×1024元InAs/GaSb II类超晶格中/中波双色红外焦平面阵列探测器的研究结果。探测器采用PN-NP叠层双色外延结构,信号提取采用叠层双色结构和顺序读出方式。运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外...本文报道了1280×1024元InAs/GaSb II类超晶格中/中波双色红外焦平面阵列探测器的研究结果。探测器采用PN-NP叠层双色外延结构,信号提取采用叠层双色结构和顺序读出方式。运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为中波1:6 ML InAs/7 ML GaSb和中波2:9 ML InAs/7 ML GaSb。焦平面阵列像元中心距为12μm。在80 K时测试,器件双波段的工作谱段为中波1:3~4μm,中波2:3.8~5.2μm。中波1器件平均峰值探测率达到6.32×10^(11) cm·Hz^(1/2)W^(-1),中波2器件平均峰值探测率达到2.84×10^(11) cm·Hz^(1/2)W^(-1)。红外焦平面偏压调节成像测试得到清晰的双波段成像。本文是国内首次报道1280×1024规模InAs/GaSb II类超晶格中/中波双色红外焦平面探测器。展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.11574362)
文摘Here in this paper,we report a room-temperature operating infrared photodetector based on the interband transition of an In As Sb/Ga Sb quantum well.The interband transition energy of 5-nm thick In As(0.91)Sb(0.09) embedded in the Ga Sb barrier is calculated to be 0.53 e V(2.35μm),which makes the absorption range of In As Sb cover an entire range from short-wavelength infrared to long-wavelength infrared spectrum.The fabricated photodetector exhibits a narrow response range from 2.0μm to 2.3μm with a peak around 2.1μm at 300 K.The peak responsivity is 0.4 A/W under-500-m Vapplied bias voltage,corresponding to a peak quantum efficiency of 23.8%in the case without any anti-reflection coating.At 300 K,the photodetector exhibits a dark current density of 6.05×10^-3A/cm^2 under-400-m V applied bias voltage and 3.25×10^-5A/cm^2 under zero,separately.The peak detectivity is 6.91×10^10cm·Hz^1/2/W under zero bias voltage at 300 K.
文摘为提高势垒型中波InAs/InAsSb二类超晶格红外探测器器件性能,研究并设计了nBn势垒型InAs/InAsSb器件结构。针对InAs/InAsSb红外探测器器件结构特征,分析了暗电流的主导机制和能带特性,采用基于泊松方程、连续性方程和热方程的数值计算方法,通过精确调控吸收层掺杂、势垒层掺杂、势垒层厚度、温度和组分等,构建出高能量势垒以有效阻挡多数载流子,允许少数载流子迁移,实现价带偏移(Valence Band Offset,VBO)接近于零的要求,从而有效降低暗电流。研究结果表明,在1×10^(15)~1×10^(17)cm^(-3)范围内降低势垒层掺杂浓度,VBO和暗电流开启电压绝对值均会减小,当AlAs1-xSbx势垒中Sb组分为0.91时,VBO接近于零。对于吸收层,随着掺杂浓度的提高,暗电流呈现减小趋势,但趋势较不明显。在-0.5V偏压,140 K工作条件下,吸收层和势垒层掺杂浓度分别为1×10^(13)cm^(-3),1×10^(15)cm^(-3),吸收层与势垒层厚度分别为3μm,80 nm,得到器件结构参数优化后的暗电流低至4.5×10^(-7)A/cm^(2),证明InAs/InAsSb中波红外探测器具有高温工作的应用前景,可广泛应用于导弹预警、红外制导、航空航天等领域。
基金supported by the National Key Technologies R&D Program of China(Grant Nos.2024YFA1208904,2019YFA0705203)Major Program of the National Natural Science Foundation of China(Grant Nos.62004189,61274013)+1 种基金the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0460000)the Research Foundation for Advanced Talents of the Chinese Academy of Sciences(Grant No.E27RBB03).
文摘In this paper,a planar junction mid-wavelength infrared(MWIR)photodetector based on an InAs/GaSb type-Ⅱsuper-lattices(T2SLs)is reported.The Intrinsic-πMN superlattices was grown by the molecular beam epitaxy(MBE),followed with a ZnS layer grown by the chemical vapor deposition(CVD).The p-type contact layer was constructed by thermal diffusion in the undoped superlattices.The Zinc atom was successfully realised into the superlattice and a PπMN T2SL structure was con-structed.Furthermore,the effects of different diffusion temperatures on the dark current performance of the devices were researched.The 50%cut-off wavelength of the photodetector is 5.26μm at 77 K with 0 V bias.The minimum dark current density is 8.67×10^(−5) A/cm^(2) and the maximum quantum efficiency of 42.5%,and the maximum detectivity reaches 3.90×10^(10) cm·Hz^(1/2)/W at 77 K.The 640×512 focal plane arrays(FPA)based on the planner junction were fabricated afterwards.The FPA achieves a noise equivalent temperature difference(NETD)of 539 mK.
基金the Natural Science Foundation of Shandong Province(Nos.ZR2022JQ05 and ZR2024MF010).
文摘With high surface-to-volume ratio,the abundant surface states and high carrier concentration are challenging the nearinfrared photodetection behaviors of narrow band gap semiconductors nanowires.In this study,the narrow band gap semiconductor of Bi_(2)O_(2)Se nanosheets(NSs)is adopted to construct mixed-dimensional heterojunctions with GaSb nanowires(NWs)for demonstrating the impressive self-powered NIR photodetection.Benefiting from the built-in electric field of~140 meV,the as-constructed NW/NS mixeddimensional heterojunction self-powered photodetector shows the low dark current of 0.07 pA,high I_(light)/I_(dark)ratio of 82 and fast response times of<2/2 ms at room temperature.The self-powered photodetector performance can be further enhanced by fabricating the NW array/NS mixed-dimensional heterojunction by using a contact printing technique.The excellent photodetection performance promises the asconstructed NW/NS mixed-dimensional heterojunction self-powered photodetector in imaging and photocommunication.
文摘本文报道了1280×1024元InAs/GaSb II类超晶格中/中波双色红外焦平面阵列探测器的研究结果。探测器采用PN-NP叠层双色外延结构,信号提取采用叠层双色结构和顺序读出方式。运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为中波1:6 ML InAs/7 ML GaSb和中波2:9 ML InAs/7 ML GaSb。焦平面阵列像元中心距为12μm。在80 K时测试,器件双波段的工作谱段为中波1:3~4μm,中波2:3.8~5.2μm。中波1器件平均峰值探测率达到6.32×10^(11) cm·Hz^(1/2)W^(-1),中波2器件平均峰值探测率达到2.84×10^(11) cm·Hz^(1/2)W^(-1)。红外焦平面偏压调节成像测试得到清晰的双波段成像。本文是国内首次报道1280×1024规模InAs/GaSb II类超晶格中/中波双色红外焦平面探测器。