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Mid-wavelength infrared planar junction photodetector based on InAs/GaSb Type-Ⅱsuperlattices
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作者 Shihao Zhang Hongyue Hao +13 位作者 Ye Zhang Shuo Wang Xiangyu Zhang Ruoyu Xie Lingze Yao Faran Chang Yifan Shan Haofeng Liu Guowei Wang Donghai Wu Dongwei Jiang Yingqiang Xu Zhichuan Niu Wenjing Dong 《Journal of Semiconductors》 2025年第11期70-74,共5页
In this paper,a planar junction mid-wavelength infrared(MWIR)photodetector based on an InAs/GaSb type-Ⅱsuper-lattices(T2SLs)is reported.The Intrinsic-πMN superlattices was grown by the molecular beam epitaxy(MBE),fo... In this paper,a planar junction mid-wavelength infrared(MWIR)photodetector based on an InAs/GaSb type-Ⅱsuper-lattices(T2SLs)is reported.The Intrinsic-πMN superlattices was grown by the molecular beam epitaxy(MBE),followed with a ZnS layer grown by the chemical vapor deposition(CVD).The p-type contact layer was constructed by thermal diffusion in the undoped superlattices.The Zinc atom was successfully realised into the superlattice and a PπMN T2SL structure was con-structed.Furthermore,the effects of different diffusion temperatures on the dark current performance of the devices were researched.The 50%cut-off wavelength of the photodetector is 5.26μm at 77 K with 0 V bias.The minimum dark current density is 8.67×10^(−5) A/cm^(2) and the maximum quantum efficiency of 42.5%,and the maximum detectivity reaches 3.90×10^(10) cm·Hz^(1/2)/W at 77 K.The 640×512 focal plane arrays(FPA)based on the planner junction were fabricated afterwards.The FPA achieves a noise equivalent temperature difference(NETD)of 539 mK. 展开更多
关键词 inas/gasb type-Ⅱsuperlattices planar photodetector mid-wavelength infrared zinc diffusion
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Molecular Beam Epitaxy of Zero Lattice-Mismatch InAs/GaSb Type-Ⅱ Superlattice 被引量:2
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作者 于海龙 吴皓越 +2 位作者 朱海军 宋国峰 徐云 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第12期142-145,共4页
Type-Ⅱ InAs/GaSb superlattiees made of 13 InAs monolayers (MLs) and 7 GaSb MLs are grown on GaSb substrates by solid source molecular beam epitaxy. To obtain lattice-matched structures, thin InSb layers are inserte... Type-Ⅱ InAs/GaSb superlattiees made of 13 InAs monolayers (MLs) and 7 GaSb MLs are grown on GaSb substrates by solid source molecular beam epitaxy. To obtain lattice-matched structures, thin InSb layers are inserted between InAs and GaSb layers. We complete a series of experiments to investigate the influence of the InSb deposition time, Ⅴ/Ⅲ beam-equivalent pressure ratio and interruption time between each layer, and then characterize the superlattice (SL) structures with high-resolution x-ray diffraction and atomic force microscopy. The optimized growth parameters are applied to grow the 100-period SL structure, resulting in the full-width half-maximum of 29.55 arcsee for the first SL satellite peak and zero lattice-mismatch between the zero-order SL peak and the GaSb substrate peak. 展开更多
关键词 gasb is InSb Molecular Beam Epitaxy of Zero Lattice-Mismatch inas/gasb type SUPERLATTICE inas of
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Strain-induced the dark current characteristics in InAs/GaSb type-Ⅱ superlattice for mid-wave detector 被引量:3
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作者 H.J.Lee S.Y.Ko +1 位作者 Y.H.Kim J.Nah 《Journal of Semiconductors》 EI CAS CSCD 2020年第6期35-38,共4页
Type-Ⅱsuperlattice(T2SL)materials are the key element for infrared(IR)detectors.However,it is well known that the characteristics of the detectors with the T2SL layer are greatly affected by the strain developed duri... Type-Ⅱsuperlattice(T2SL)materials are the key element for infrared(IR)detectors.However,it is well known that the characteristics of the detectors with the T2SL layer are greatly affected by the strain developed during the growth process,which determines the performance of IR detectors.Therefore,great efforts have been made to properly control the strain effect and develop relevant analysis methods to evaluate the strain-induced dark current characteristics.In this work,we report the strain-induced dark current characteristics in InAs/GaSb T2SL MWIR photodetector.The overall strain of InAs/GaSb T2SL layer was analyzed by both high-resolution X-ray diffraction(HRXRD)and the dark current measured from the absorber layer at the elevated temperatures(≥110 K),where the major leakage current component is originated from the reduced minority carrier lifetime in the absorber layer.Our findings indicate that minority carrier lifetime increases as the tensile strain on the InAs/GaSb T2SL is more compensated by the compressive strain through‘InSb-like’interface,which reduces the dark current density of the device.Specifically,tensile strain compensated devices exhibited the dark current density of less than 2×10^-5 A/cm^2 at 120 K,which is more than one order of magnitude lower value compared to that of the device without tensile strain relaxation. 展开更多
关键词 mid-wave detector inas/gasb typeⅡsuper lattice dark current
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Interface effect on superlattice quality and optical properties of InAs/GaSb type-Ⅱ superlattices grown by molecular beam epitaxy 被引量:2
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作者 Zhaojun Liu Lian-Qing Zhu +3 位作者 Xian-Tong Zheng Yuan Liu Li-Dan Lu Dong-Liang Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第12期671-676,共6页
We systematically investigate the influence of InSb interface(IF)engineering on the crystal quality and optical properties of strain-balanced InAs/GaSb type-Ⅱsuperlattices(T2SLs).The type-Ⅱsuperlattice structure is ... We systematically investigate the influence of InSb interface(IF)engineering on the crystal quality and optical properties of strain-balanced InAs/GaSb type-Ⅱsuperlattices(T2SLs).The type-Ⅱsuperlattice structure is 120 periods InAs(8 ML)/GaSb(6 ML)with different thicknesses of InSb interface grown by molecular beam epitaxy(MBE).The highresolution x-ray diffraction(XRD)curves display sharp satellite peaks,and the narrow full width at half maximum(FWHM)of the 0th is only 30-39 arcsec.From high-resolution cross-sectional transmission electron microscopy(HRTEM)characterization,the InSb heterointerfaces and the clear spatial separation between the InAs and GaSb layers can be more intuitively distinguished.As the InSb interface thickness increases,the compressive strain increases,and the surface“bright spots”appear to be more apparent from the atomic force microscopy(AFM)results.Also,photoluminescence(PL)measurements verify that,with the increase in the strain,the bandgap of the superlattice narrows.By optimizing the InSb interface,a high-quality crystal with a well-defined surface and interface is obtained with a PL wavelength of 4.78μm,which can be used for mid-wave infrared(MWIR)detection. 展开更多
关键词 inas/gasb type-Ⅱsuperlattice molecular beam epitaxy interface mid-wave infrared
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Growth Optimization, Strain Compensation and Structure Design of InAs/GaSb Type-II Superlattices for Mid-Infrared Imaging 被引量:2
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作者 Yuxin Song Shumin Wang +5 位作者 Carl Asplund Rickard Marcks von Würtemberg Hedda Malm Amir Karim Xiang Lu Jun Shao 《Crystal Structure Theory and Applications》 2013年第2期46-56,共11页
InAs/GaSb type-II superlattce (T2SL) photodetector structures at the MWIR regime were grown by molecular beam epitaxy. The growth temperature and group-V soaking times were optimized with respect to interface and tran... InAs/GaSb type-II superlattce (T2SL) photodetector structures at the MWIR regime were grown by molecular beam epitaxy. The growth temperature and group-V soaking times were optimized with respect to interface and transport quality. Novel strain compensation schemes with insertion of InSb layers were proposed and tested to be efficient to tune the overall strain between tensile and compressive without degradation of interface and optical quality. The effect of the proposed methods is modeled by analytic functions.? Band structure calculations were also carried out for the proposed T2SL structures to assist optimizing sample designs. Single pixel photodiodes with a low dark current were demonstrated. 展开更多
关键词 inas/gasb type-II Superlattce Molecular Beam EPITAXY Strain COMPENSATION
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Mid-wavelength InAs/GaSb type-Ⅱ superlattice barrier detector with nBn design and M barrier 被引量:1
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作者 LIU Zhaojun ZHU Lianqing +3 位作者 LU Lidan DONG Mingli ZHANG Dongliang ZHENG Xiantong 《Optoelectronics Letters》 EI 2023年第10期577-582,共6页
This study reports the performance of an InAs/GaSb type-Ⅱ superlattices(T2SLs) detector with nBn structure for mid-wavelength infrared(MWIR) detection. An electronic band structure of M barrier is calculated using 8-... This study reports the performance of an InAs/GaSb type-Ⅱ superlattices(T2SLs) detector with nBn structure for mid-wavelength infrared(MWIR) detection. An electronic band structure of M barrier is calculated using 8-band k·p method, and the nBn structure is designed with the M barrier. The detector is prepared by wet etching, which is simple in manufacturing process. X-ray diffraction(XRD) and atomic force microscope(AFM) characteristics indicate that the detector material has good crystal quality and surface morphology. The saturation bias of the spectral response measurements at 77 K is 300 m V, and the device is promising to work at a temperature of 140 K. Energy gap of T2SLs versus temperature is fitted by the Varshni curve, and zero temperature bandgap Eg(0), empirical coefficients α and β are extracted. A dark current density of 3.2×10-5A/cm2and differential resistance area(RA) product of 1.0×104Ω·cm2are measured at 77 K. The dominant mechanism of dark current at different temperature ranges is analyzed. The device with a 50% cutoff wavelength of 4.68 μm exhibits a responsivity of 0.6 A/W, a topside illuminated quantum efficiency of 20% without antireflection coating(ARC), and a detectivity of 9.17×1011cm·Hz1/2/W at 77 K and 0.3 V. 展开更多
关键词 inas/gasb BARRIER structure
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Growth of high material quality InAs/GaSb type-Ⅱ superlattice for long-wavelength infrared range by molecular beam epitaxy
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作者 Fang-Qi Lin Nong Li +10 位作者 Wen-Guang Zhou Jun-Kai Jiang Fa-Ran Chang Yong Li Su-Ning Cui Wei-Qiang Chen Dong-Wei Jiang Hong-Yue Hao Guo-Wei Wang Ying-Qiang Xu Zhi-Chuan Niu 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第9期624-627,共4页
By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray d... By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray diffraction(HRXRD),atomic force microscopy(AFM),and Fourier transform infrared(FTIR)spectrometer are used to characterize the material growth quality.The results show that the full width at half maximum(FWHM)of the superlattice zero-order diffraction peak,the mismatching of the superlattice zero-order diffraction peak between the substrate diffraction peaks,and the surface roughness get the best results when the beam-equivalent pressure(BEP)ratio reaches the optimal value,which are 28 arcsec,13 arcsec,and 1.63?,respectively.The intensity of the zero-order diffraction peak is strongest at the optimal value.The relative spectral response of the LWIR detector shows that it exhibits a 100%cut-off wavelength of 12.6μm at 77 K.High-quality epitaxial materials have laid a good foundation for preparing high-performance LWIR detector. 展开更多
关键词 type-Ⅱsuperlattice inas/gasb LONG-WAVELENGTH strain-balanced
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Long-Period InAs/GaSb Type-II Superlattices for Terahertz Application
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作者 Longlong Li Jun Ni Wen Xu 《Journal of Modern Physics》 2014年第17期1880-1888,共9页
We present a theoretical study on the terahertz (THz) optoelectronic properties of long-period InAs/GaSb type-II super lattices (SLs). The eight-band k·p model is used to calculate the electronic structures of su... We present a theoretical study on the terahertz (THz) optoelectronic properties of long-period InAs/GaSb type-II super lattices (SLs). The eight-band k·p model is used to calculate the electronic structures of such SLs and on the basis of band structures, the Boltzmann equation approach is employed to calculate the optical absorption coefficients for the corresponding SL systems. It is found that long-period InAs/GaSb type-II SLs have a considerable absorption in the THz bandwidth. By examining the dependence of THz absorption coefficient on the InAs/GaSb layer widths, we demonstrate that with a proper choice of InAs/GaSb layer widths, an optimized THz absorption can be achieved. This study is pertinent to the potential application of InAs/GaSb type-II SLs as THz photo detectors. 展开更多
关键词 Long-Period inas/gasb type-II SLS THZ OPTOELECTRONIC Properties THZ Band-Gap and Absorption
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基于GaAs界面的长波InAs/GaSb超晶格红外焦平面探测器研制
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作者 周旭昌 蒋志 +13 位作者 班雪峰 王海澎 孔金丞 邓功荣 岳彪 黄俊博 木迎春 雷晓虹 陈蕊 王海虎 陈杰 周艳 段碧雯 李淑芬 《红外与激光工程》 北大核心 2025年第8期56-63,共8页
开展了基于GaAs界面的InAs/GaSb超晶格红外探测器材料和焦平面探测器研究。采用分子束外延(MBE)技术在InAs衬底上生长了高质量的PB1nB2N双势垒超晶格材料,通过GaAs界面的引入来提高了超晶格材料生长温度来改善材料晶体质量并降低暗电流... 开展了基于GaAs界面的InAs/GaSb超晶格红外探测器材料和焦平面探测器研究。采用分子束外延(MBE)技术在InAs衬底上生长了高质量的PB1nB2N双势垒超晶格材料,通过GaAs界面的引入来提高了超晶格材料生长温度来改善材料晶体质量并降低暗电流;同时通过结构设计将电场加载到宽带隙的电子和空穴势垒阻挡层,实现了窄带隙吸收层与耗尽区分离,减小产生-复合暗电流。采用ICP干法刻蚀技术制备出光滑台面,通过硫化/介质膜复合钝化技术实现了低侧壁漏电,研制出长波640×512焦平面探测器组件,截止波长为10.14μm,NETD达到17.8 mK,有效像元率达到99.89%,量子效率达到37%,成像验证展现出优良的光电性能。 展开更多
关键词 GaAs界面 inas/gasb超晶格 长波 焦平面
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中/长波双色1280×1024 InAs/GaSbⅡ类超晶格红外探测器研究
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作者 刘铭 游聪娅 +11 位作者 任昂 程雨 张轶 王静 王晓乾 闫勇 周蕾 常发冉 徐应强 张烨 梁岩 王国伟 《红外与激光工程》 北大核心 2025年第12期78-84,共7页
双色红外探测器利用不同波段的响应特性差异,可有效提高探测识别能力。文中报道了中/长波双色超晶格红外探测器研究结果。探测器采用两个超晶格PN结二极管以背靠背形式形成PN-N P的叠层外延结构。双波段信号通过偏压调节顺序读出。通过... 双色红外探测器利用不同波段的响应特性差异,可有效提高探测识别能力。文中报道了中/长波双色超晶格红外探测器研究结果。探测器采用两个超晶格PN结二极管以背靠背形式形成PN-N P的叠层外延结构。双波段信号通过偏压调节顺序读出。通过台面制备、表面钝化、电极生长、倒装互连、衬底减薄等制备工艺,研制出了阵列规格1280×1024、像元中心距15μm×15μm中/长波双色超晶格红外探测器组件。经测试,探测器中波和长波的50%截止波长分别为4.99μm和9.53μm,在F/2、77 K条件下中波和长波噪声等效温差(NETD)分别达到18.9 m K和27.6 mK。中波和长波成像质量良好,双波段差异对比清晰,体现了中/长波双波段探测成像的优势。 展开更多
关键词 Ⅱ类超晶格 双色 焦平面阵列 inas/gasb
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非均匀离散化有限差分法应用于InAs/GaSb超晶格微带计算
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作者 蒋志 周旭昌 +1 位作者 杨晋 孔金丞 《红外技术》 北大核心 2025年第11期1382-1389,共8页
基于k·p微扰理论的8带Kane模型和Lüttinger-Kohn模型是计算锑化物二类超晶格微带结构的有效手段,常用于锑化物二类超晶格材料和器件结构设计。在8带k·p模型基础上用非均匀离散化有限差分法构建长波InAs/GaSb超晶格和中波... 基于k·p微扰理论的8带Kane模型和Lüttinger-Kohn模型是计算锑化物二类超晶格微带结构的有效手段,常用于锑化物二类超晶格材料和器件结构设计。在8带k·p模型基础上用非均匀离散化有限差分法构建长波InAs/GaSb超晶格和中波InAs/GaSb超晶格的总矩阵。通过计算超晶格总哈密顿矩阵的本征值对超晶格在波矢空间的E-k关系进行数值求解,得到长波InAs/GaSb超晶格和中波InAs/GaSb超晶格在波矢空间高对称点附近的微带(mini-band)结构。其中中波和长波超晶格的有效带隙分别为0.247 eV和0.109 eV,与均匀网格离散化方案的计算结果一致,并与以相同超晶格结构作吸收层的器件100%截止波长测试结果一致。非均匀网格离散化方案与均匀网格离散化方案相比,在保证精算准确性的前提下,能显著提升InAs/GaSb超晶格微带结构的数值计算效率。 展开更多
关键词 inas/gasb超晶格 k·p模型 有限差分法 非均匀离散化
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Low Crosstalk Three-Color Infrared Detector by Controlling the Minority Carriers Type of InAs/GaSb Superlattices for Middle-Long and Very-Long Wavelength 被引量:6
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作者 蒋洞微 向伟 +7 位作者 国凤云 郝宏玥 韩玺 李晓超 王国伟 徐应强 于清江 牛智川 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第4期151-154,共4页
We report a type-Ⅱ InAs/GaSb superlattice three-color infrared detector for mid-wave (MW), long-wave (LW), and very long-wave (VLW) detections. The detector structure consists of three contacts of NIPIN archite... We report a type-Ⅱ InAs/GaSb superlattice three-color infrared detector for mid-wave (MW), long-wave (LW), and very long-wave (VLW) detections. The detector structure consists of three contacts of NIPIN architecture for MW and LW detections, and hetero-junction NIP architecture for VLW detection. It is found that the spectral crosstalks can be significantly reduced by controlling the minority carriers transport via doping beryllium in the two active regions of NIPIN section. The crosstalk detection at MW, LW, and VLW signals are achieved by selecting the bias voltages on the device. At 77K, the cutoff wavelengths of the three-color detection are 5.3μm (at OmV), 141μm (at 300mV) and 19μm (at -20mV) with the detectivities of 4.6xlO11 cm.Hzl/ZW-1, 2.3×10^10 cm.Hzl/2W-1, and 1.0×10^10cm.Hzl/2W-1 for MW, LW and VLW. The crosstalks of the MW channel, LW channel, and VLW channel are almost 0, 0.25, and 0.6, respectively. 展开更多
关键词 gasb on of Low Crosstalk Three-Color Infrared Detector by Controlling the Minority Carriers type of inas/gasb Superlattices for Middle-Long and Very-Long Wavelength by inas for LONG
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High quantum efficiency long-/long-wave dual-color type-Ⅱ InAs/GaSb infrared detector 被引量:2
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作者 Zhi Jiang Yao-Yao Sun +6 位作者 Chun-Yan Guo Yue-Xi Lv Hong-Yue Hao Dong-Wei Jiang Guo-Wei Wang Ying-Qiang Xu Zhi-Chuan Niu 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第3期386-390,共5页
A long-/long-wave dual-color detector with N-M-π-B-π-M-N structure was developed based on a type-ⅡInAs/GaSb superlattice.The saturated responsivity was achieved under low bias voltage for both channels.The device c... A long-/long-wave dual-color detector with N-M-π-B-π-M-N structure was developed based on a type-ⅡInAs/GaSb superlattice.The saturated responsivity was achieved under low bias voltage for both channels.The device could be operated as a single detector for sequential detection and showed high quantum efficiencies.The peak quantum efficiencies of long-wavelength infrared band-1(blue channel)and long-wavelength infrared band-2(red channel)were 44%at 6.3μm under 20 mV and 57%at 9.1μm under-60 mV,respectively.The optical performance for each channel was achieved using a 2μm thickness absorber.Due to the high QE,the specific detectivities of the blue and red channels reached5.0×10^(11)cm·Hz^(1/2)/W at 6.8μm and 3.1×10^(11)cm·Hz1^(1/2)/W at 9.1μm,respectively,at 77 K. 展开更多
关键词 infrared detector inas/gasb SUPERLATTICE dual-color molecular beam EPITAXY
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Effect of compensation doping on the electrical and optical properties of mid-infrared type-II InAs/GaSb superlattice photodetectors 被引量:1
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作者 王永宾 徐云 +3 位作者 张宇 迂修 宋国峰 陈良惠 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第6期397-402,共6页
This paper presents a theoretical study on the electrical and optical properties of mid-infrared type-II InAs/GaSb superlattices with different beryllium concentrations in the InAs layer of the active region. Dark cur... This paper presents a theoretical study on the electrical and optical properties of mid-infrared type-II InAs/GaSb superlattices with different beryllium concentrations in the InAs layer of the active region. Dark current, resistancearea product, absorption coefficient and quantum efficiency characteristics are thoroughly examined. The superlattice is residually n-type and it becomes slightly p-type by varying beryllium-doping concentrations, which improves its electrical performances. The optical performances remain almost unaffected with relatively low p-doping levels and begin to deteriorate with increasing p-doping density. To make a compromise between the electrical and optical performances, the photodetector with a doping concentration of 3 ×10^15 cm-3 in the active region is believed to have the best overall performances. 展开更多
关键词 inas/gasb superlattices p-doping concentration electrical and optical properties
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Effect of Interface Bond Type on the Structure of InAs/GaSb Superlattices Grown by Metalorganic Chemical Vapor Deposition
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作者 LI Li-Gong LIU Shu-Man +6 位作者 LUO Shuai YANG Tao WANG Li-Jun LIU Feng-Qi YE Xiao-Ling XU Bo WANG Zhan-Guo 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第11期194-197,共4页
InAs/GaSb type-II superlattices were grown on(100)GaSb substrates by metalorganic chemical vapor deposition.Raman scattering spectroscopy reveals that it is possible to grow superlattices with almost pure GaAs-like an... InAs/GaSb type-II superlattices were grown on(100)GaSb substrates by metalorganic chemical vapor deposition.Raman scattering spectroscopy reveals that it is possible to grow superlattices with almost pure GaAs-like and mixed-like(plane of mixed As and Sb atoms that connect the GaSb and InAs layers)interfaces.Introducing the InSb-like interface results in nanopipes and As contamination of the GaSb layers.X-ray diffraction and atomic force microscopy demonstrate that the superlattices with a mixed-like interface have better morphology and crystalline quality. 展开更多
关键词 inas/gasb SCATTERING gasb
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Electronic Structure of Type-Ⅱ InAs/GaSb Misaligned Superlattice
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作者 LONG Fei LIU Shenzhi +2 位作者 MEI Fei MIAO Jingqi LIANG Jingguo 《Chinese Physics Letters》 SCIE CAS CSCD 1994年第2期109-112,共4页
The Energy band edges of type-Ⅱ InAs/GaSb(001)misaligned superlattices as functions of InAs and GaSb layer thicknesses are calculated by a pseudopotential method with quick convergency.The results show the trend of d... The Energy band edges of type-Ⅱ InAs/GaSb(001)misaligned superlattices as functions of InAs and GaSb layer thicknesses are calculated by a pseudopotential method with quick convergency.The results show the trend of deep-shallow transitions of impurities in the superlattices.The regime in which the superlattice changes from semiconductor to semimetal is also showed. 展开更多
关键词 inas/gasb REGIME SHALLOW
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320×256元InAs/GaSb II类超晶格中波红外双色焦平面探测器 被引量:10
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作者 白治中 徐志成 +5 位作者 周易 姚华城 陈洪雷 陈建新 丁瑞军 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2015年第6期716-720,共5页
报道了320×256元InAs/GaSb II类超晶格红外双色焦平面阵列探测器的初步结果.探测器采用PN-NP叠层双色外延结构,信号提取采用顺序读出方式.运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为7 ... 报道了320×256元InAs/GaSb II类超晶格红外双色焦平面阵列探测器的初步结果.探测器采用PN-NP叠层双色外延结构,信号提取采用顺序读出方式.运用分子束外延技术在GaSb衬底上生长超晶格材料,双波段红外吸收区的超晶格周期结构分别为7 ML InAs/7 ML GaSb和10 ML InAs/10 ML GaSb.焦平面阵列像元中心距为30μm.在77 K时测试,器件双色波段的50%响应截止波长分别为4.2μm和5.5μm,其中N-on-P器件平均峰值探测率达到6.0×10^(10) cmHz^(1/2)W^(-1),盲元率为8.6%;P-on-N器件平均峰值探测率达到2.3×10~9 cmHz^(1/2)W^(-1),盲元率为9.8%.红外焦平面偏压调节成像测试得到较为清晰的双波段成像. 展开更多
关键词 inas/gasb 超晶格 双色 焦平面
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长波InAs/GaSbⅡ类超晶格红外探测器 被引量:11
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作者 周易 陈建新 +5 位作者 徐庆庆 徐志成 靳川 许佳佳 金巨鹏 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2013年第3期210-213,224,共5页
报道了50%截止波长为12.5μm的InAs/GaSb Ⅱ类超晶格长波红外探测器材料及单元器件.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.吸收区结构为15ML(InAs)/7ML(GaSb),器件采用PBIN的多层异质结构以抑制长波器件暗电流.在77K温度... 报道了50%截止波长为12.5μm的InAs/GaSb Ⅱ类超晶格长波红外探测器材料及单元器件.实验采用分子束外延技术在GaSb衬底上生长超晶格材料.吸收区结构为15ML(InAs)/7ML(GaSb),器件采用PBIN的多层异质结构以抑制长波器件暗电流.在77K温度下测试了单元器件的电流-电压(Ⅰ-Ⅴ)特性,响应光谱和黑体响应.在该温度下,光敏元大小为100μm×100μm的单元探测器RmaxA为2.5Ωcm2,器件的电流响应率为1.29A/W,黑体响应率为2.1×109cmHz1/2/W,11μm处量子效率为14.3%.采用四种暗电流机制对器件反向偏压下的暗电流密度曲线进行了拟合分析,结果表明起主导作用的暗电流机制为产生复合电流. 展开更多
关键词 inas/gasbⅡ类超晶格 长波12.5μm 暗电流
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GaAs基GaSb体材料及InAs/GaSb超晶格材料的MBE生长 被引量:5
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作者 郝瑞亭 徐应强 +2 位作者 周志强 任正伟 牛智川 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第7期1088-1091,共4页
采用分子束外延方法在GaAs(100)衬底上生长GaSb体材料,以此GaSb为缓冲层生长了不同InAs厚度的InAs/GaSb超晶格,其10K光致发光谱峰值波长在2.0~2.6μm.高分辨透射电子显微镜观察证实超晶格界面清晰,周期完整.
关键词 分子束外延 GAAS gasb inas/gasb超晶格
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InAs/GaSb超晶格中波焦平面材料的分子束外延技术 被引量:7
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作者 徐庆庆 陈建新 +3 位作者 周易 李天兴 吕翔 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2011年第5期406-408,438,共4页
报道了InAs/GaSb超晶格中波材料的分子束外延生长技术研究.通过改变GaSb衬底上分子束外延InAs/GaSb超晶格材料的衬底温度,以及界面的优化等,改善超晶格材料的表面形貌和晶格失配,获得了晶格失配Δa/a=1.5×10-4,原子级平整表面的InA... 报道了InAs/GaSb超晶格中波材料的分子束外延生长技术研究.通过改变GaSb衬底上分子束外延InAs/GaSb超晶格材料的衬底温度,以及界面的优化等,改善超晶格材料的表面形貌和晶格失配,获得了晶格失配Δa/a=1.5×10-4,原子级平整表面的InAs/GaSb超晶格材料,材料77 K截止波长为4.87μm. 展开更多
关键词 inas/gasb 超晶格 分子束外延
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