An M-shaped interface was observed in the top part of Φ76. 2 mm , (111) , dislocation-free, heavily Sb-doped Si single crystals, which is beneficial for crystals to keep dislocation-free condition at the beginning of...An M-shaped interface was observed in the top part of Φ76. 2 mm , (111) , dislocation-free, heavily Sb-doped Si single crystals, which is beneficial for crystals to keep dislocation-free condition at the beginning ofbody growth. Effects of seed rotation, crucible rotation , crown shape and growth rate on M-shaed interfacewere studied. Under proper conditions, impurity core length can be shortened from 6 cm to 1 cm , the yield israised by more than 5 %.展开更多
文摘An M-shaped interface was observed in the top part of Φ76. 2 mm , (111) , dislocation-free, heavily Sb-doped Si single crystals, which is beneficial for crystals to keep dislocation-free condition at the beginning ofbody growth. Effects of seed rotation, crucible rotation , crown shape and growth rate on M-shaed interfacewere studied. Under proper conditions, impurity core length can be shortened from 6 cm to 1 cm , the yield israised by more than 5 %.
