A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency （DF） capacitively coupled plasma （CCP） discharge based on the geometry of real device. Given the experimental p...A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency （DF） capacitively coupled plasma （CCP） discharge based on the geometry of real device. Given the experimental parameters for argon plasma, the output from the fluid module such as ion density, number flux, electron temperature and the Monte-Carlo collision （MCC） results of ion energy distribution function （IEDF） as well as electron energy distribution function （EEDF） are obtained and discussed in detail. A novel complete floating double probe is designed to measure both density and temperature of electron and a quadrupole mass spectrometer is also equipped for IEDF investigations. The measurements on the density of bulk plasma, electron temperature and IEDF agree well, qualitatively, with the simulated results. A comparison with experimental results indicates that, since the structure of real device is taken into account, this model is capable of describing the global dynamic characteristics occurred in DF-CCP and presenting more reliable results than the model with an ideal chamber structure.展开更多
This paper reports that a simulation of glow discharge in pure helium gas at the pressure of 1.333×10^3 Pa under a high-voltage nanosecond pulse is performed by using a one-dimensional particle-in-cell Monte Carl...This paper reports that a simulation of glow discharge in pure helium gas at the pressure of 1.333×10^3 Pa under a high-voltage nanosecond pulse is performed by using a one-dimensional particle-in-cell Monte Carlo collisions （PIC-MCC） model. Numerical modelling results show that the cathode sheath is much thicker than that of anode during the pulse discharge, and that there exists the phenomenon of field reversal at relative high pressures near the end of the pulse, which results from the cumulative positive charges due to their finite mobility during the cathode sheath expansion. Moreover, electron energy distribution function （EEDF） and ion energy distribution function （IEDF） have been also observed. In the early stage of the pulse, a large amount of electrons can be accelerated above the ionization threshold energy. However, in the second half of the pulse, as the field in bulk plasma decreases and thereafter the reverse field forms due to the excessive charges in cathode sheath, although the plasma density grows, the high energy part of EEDF decreases. It concludes that the large volume non-equilibrium plasmas can be obtained with high-voltage nanosecond pulse discharges.展开更多
基金supported by National Natural Science Foundation of China (No. 10635010)Specialized Research Fund for the Doctoral Program of Higher Education of China (No.20090041110026)
文摘A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency （DF） capacitively coupled plasma （CCP） discharge based on the geometry of real device. Given the experimental parameters for argon plasma, the output from the fluid module such as ion density, number flux, electron temperature and the Monte-Carlo collision （MCC） results of ion energy distribution function （IEDF） as well as electron energy distribution function （EEDF） are obtained and discussed in detail. A novel complete floating double probe is designed to measure both density and temperature of electron and a quadrupole mass spectrometer is also equipped for IEDF investigations. The measurements on the density of bulk plasma, electron temperature and IEDF agree well, qualitatively, with the simulated results. A comparison with experimental results indicates that, since the structure of real device is taken into account, this model is capable of describing the global dynamic characteristics occurred in DF-CCP and presenting more reliable results than the model with an ideal chamber structure.
基金supported by the National Natural Science Foundation of China (Grant No 10775027)
文摘This paper reports that a simulation of glow discharge in pure helium gas at the pressure of 1.333×10^3 Pa under a high-voltage nanosecond pulse is performed by using a one-dimensional particle-in-cell Monte Carlo collisions （PIC-MCC） model. Numerical modelling results show that the cathode sheath is much thicker than that of anode during the pulse discharge, and that there exists the phenomenon of field reversal at relative high pressures near the end of the pulse, which results from the cumulative positive charges due to their finite mobility during the cathode sheath expansion. Moreover, electron energy distribution function （EEDF） and ion energy distribution function （IEDF） have been also observed. In the early stage of the pulse, a large amount of electrons can be accelerated above the ionization threshold energy. However, in the second half of the pulse, as the field in bulk plasma decreases and thereafter the reverse field forms due to the excessive charges in cathode sheath, although the plasma density grows, the high energy part of EEDF decreases. It concludes that the large volume non-equilibrium plasmas can be obtained with high-voltage nanosecond pulse discharges.
