MgO thin films with different textures are fabricated by the ion beam assisted （IBAD） method on the Y2O3/Al2O3 buffered C276 tape. Then a CaO2 layer is directly grown on the IBAD-MgO film by the pulsed laser deposit...MgO thin films with different textures are fabricated by the ion beam assisted （IBAD） method on the Y2O3/Al2O3 buffered C276 tape. Then a CaO2 layer is directly grown on the IBAD-MgO film by the pulsed laser deposition （PLD） method. Effects of lBAD-MgO texture, substrata temperature and thickness on the grain alignment of the CeO2 layer are investigated. Film characterization is performed by x-ray diffraction and atomic force microscopy. It is found that the orientation and texture degree of the CaO2 layer are very sensitive to the IBAD-MgO texture. By optimizing the IBAD-MgO texture, CeO2 has pure （002） orientation and excellent biaxial texture deposited in a broad substrata temperature range. In addition, the PLD-CeO2 layer has a thickness effect. Under the optimized experimental condition, the PLD-CeO2 layer has a high in-plane texture of △φ = 2.9° and a smooth surface with an rms surface roughness of less than 2nm. The critical current density Jc of a 0.4μm-thick YBCO film deposited on the CeO2 layer is 6.25 × 106 A/cm2 at 77K and a self-field.展开更多
A high-efficiency system was designed as an improvement in conventional reel-to-reel system for ion beam-assisted deposition(IBAD) and homo-epitaxy of double-sided biaxially textured MgO thin films.This system enables...A high-efficiency system was designed as an improvement in conventional reel-to-reel system for ion beam-assisted deposition(IBAD) and homo-epitaxy of double-sided biaxially textured MgO thin films.This system enables Hastelloy tape to flip automatically and go through the deposition area twice in order to deposit MgO on its both sides.With this system,the output of doublesided IB AD-MgO is elevated to be 30 m·h^(-1).A 30-m tapes with 10-nm-thick double-sided biaxially textured MgO thin films was successfully made.X-ray diffraction(XRD) and atomic force microscope(AFM) show identical quality of MgO thin films on both sides.The yield full width at half maximum values of out-of-plane texture and in-plane texture on both sides are approximately 3.1° and 5.3°,respectively.Moreover,the influence of ion beam flux and deposition rate on the texture of thin film was investigated.A process window in which biaxial texture can be obtained is found for large-scale production.展开更多
基金Supported by the ITER Project of the Ministry of Science and Technology of China under Grant No 2011GB113004the Shanghai Commission of Science and Technology under Grant Nos 09DZ1206000 and 11DZ1100402the Youth Fund of Natural Science Foundation of China under Grant No 11204174
文摘MgO thin films with different textures are fabricated by the ion beam assisted （IBAD） method on the Y2O3/Al2O3 buffered C276 tape. Then a CaO2 layer is directly grown on the IBAD-MgO film by the pulsed laser deposition （PLD） method. Effects of lBAD-MgO texture, substrata temperature and thickness on the grain alignment of the CeO2 layer are investigated. Film characterization is performed by x-ray diffraction and atomic force microscopy. It is found that the orientation and texture degree of the CaO2 layer are very sensitive to the IBAD-MgO texture. By optimizing the IBAD-MgO texture, CeO2 has pure （002） orientation and excellent biaxial texture deposited in a broad substrata temperature range. In addition, the PLD-CeO2 layer has a thickness effect. Under the optimized experimental condition, the PLD-CeO2 layer has a high in-plane texture of △φ = 2.9° and a smooth surface with an rms surface roughness of less than 2nm. The critical current density Jc of a 0.4μm-thick YBCO film deposited on the CeO2 layer is 6.25 × 106 A/cm2 at 77K and a self-field.
基金financially supported by the National High Technology Research and Development Program of China (No.2014AA032702)。
文摘A high-efficiency system was designed as an improvement in conventional reel-to-reel system for ion beam-assisted deposition(IBAD) and homo-epitaxy of double-sided biaxially textured MgO thin films.This system enables Hastelloy tape to flip automatically and go through the deposition area twice in order to deposit MgO on its both sides.With this system,the output of doublesided IB AD-MgO is elevated to be 30 m·h^(-1).A 30-m tapes with 10-nm-thick double-sided biaxially textured MgO thin films was successfully made.X-ray diffraction(XRD) and atomic force microscope(AFM) show identical quality of MgO thin films on both sides.The yield full width at half maximum values of out-of-plane texture and in-plane texture on both sides are approximately 3.1° and 5.3°,respectively.Moreover,the influence of ion beam flux and deposition rate on the texture of thin film was investigated.A process window in which biaxial texture can be obtained is found for large-scale production.
