C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation ,...C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation , the DLC film has been recognized as hydrogenated DLC film and its tribologicul properties have been evaluated. The bull-on-disc testing results show that the hardness and the tribologicul properties of the DLC film produced by C^ ＋ ion beam- assisted deposition are improved significantly. DLC film produced by C ^＋ ion beam- assisted deposition is positive to have a prosperous tribologicul application in the near future.展开更多
Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films an...Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films and their compositions were located in a range of 50 similar to 80 at. pct Hf. The amorphization mechanism was also discussed.展开更多
文摘采用离子束辅助沉积(ion beam-assisted deposition,IBAD)技术在非织构的金属基带上沉积双轴织构的MgO薄膜,研究了不同Ar^(+)离子束流能量对MgO双轴织构和表面形貌的影响.结果表明:在700∼1000 eV离子能量范围内,MgO薄膜的双轴织构随离子能量的增加而改善;在1000 eV离子能量下,IBAD-MgO薄膜的面内半高全宽(full-width at half-maximum,FWHM)∆_(ϕ)和面外FWHM∆ω分别为6°和2°;随着离子能量的增加,MgO薄膜的表面形貌并无明显区别,其表面粗糙度(5µm×5µm)均方根(root mean square,RMS)均在5∼6 nm.该研究证明了较高的Ar^(+)离子束能量可以提高IBAD-MgO薄膜的织构质量,对于双轴织构薄膜的稳定制备具有重要意义.
基金Funded by the National Natural Science Foundation of China(No.50175041 ,50275111)
文摘C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation , the DLC film has been recognized as hydrogenated DLC film and its tribologicul properties have been evaluated. The bull-on-disc testing results show that the hardness and the tribologicul properties of the DLC film produced by C^ ＋ ion beam- assisted deposition are improved significantly. DLC film produced by C ^＋ ion beam- assisted deposition is positive to have a prosperous tribologicul application in the near future.
基金国家自然科学基金，the Administration of Tsinghua University
文摘Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films and their compositions were located in a range of 50 similar to 80 at. pct Hf. The amorphization mechanism was also discussed.
