This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge cir...This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.展开更多
The development and character of compound temperature-humidity sensor were discussed in this study.The design of sampling,control and output unit of temperature-humidity sensor as well as their manufacture method and ...The development and character of compound temperature-humidity sensor were discussed in this study.The design of sampling,control and output unit of temperature-humidity sensor as well as their manufacture method and character were studied in detail.The relationship between components of humidity resistance materials and negative temperature coefficient ( NTC) thermistor materials in sampling unit of compound sensor and character of electrical resistance and temperature was obtained.Couples of character curves of compound temperature-humidity sensor and data of materials of sampling unit were shown in this paper too.展开更多
Abstract： This paper presents a charge-sensitive-amplifier （CSA） based readout circuit for capacitive microelectro-mechanical-system （MEMS） sensors. A continuous-time （CT） readout structure using the chopper te...Abstract： This paper presents a charge-sensitive-amplifier （CSA） based readout circuit for capacitive microelectro-mechanical-system （MEMS） sensors. A continuous-time （CT） readout structure using the chopper technique is adopted to cancel the low frequency noise and improve the resolution of the readout circuits. An operational trans-conductance amplifier （OTA） structure with an auxiliary common-mode-feedback-OTA is proposed in the fully differential CSA to suppress the chopper modulation induced disturbance at the OTA input terminal. An analog temperature compensation method is proposed, which adjusts the chopper signal amplitude with temperature variation to compensate the temperature drift of the CSA readout sensitivity. The chip is designed and implemented in a 0.35μm CMOS process and is 2.1 × 2.1 mm2 in area. The measurement shows that the readout circuit achieves 0.9 aF/√H capacitive resolution, 97 dB dynamic range in 100 Hz signal bandwidth, and 0.8 mV/fF sensitivity with a temperature drift of 35 ppm/℃ after optimized compensation.展开更多
We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC.The model encompasses mechanical,thermal,and electrical domains to facilitate...We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC.The model encompasses mechanical,thermal,and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA platform.The compensation strategy is implemented on-chip with a variable temperature difference heating circuit.Results show that the linear programming for the low-temperature drift in the SoC output is characterized by a compensation resistor Rc with a resistance value of 748.21Ωand a temperature coefficient of resistance of 3.037×10−3℃^(−1) at 25℃.Experimental validation demonstrates that within an ambient temperature range of 0–50℃ and a flow range of 0-10 m/s,the temperature drift of the sensor is reduced to±1.6%,as compared to±8.9%observed in a counterpart with the constant temperature difference circuit.Therefore,this on-chip temperature-compensated CMOS-MEMS flow sensing SoC is promising for low-cost sensing applications such as respiratory monitoring and smart energy-efficient buildings.展开更多
风是气象预报中的一个重要的要素,准确地预报风速,对人们的生产生活都有一定的影响。二维超声风传感器是气象与工业中最重要的风速测量方式之一,在传统的超声波测风仪器的基础上,通过测量空气温湿度来进行准确的调节,补偿了雨雾等环境...风是气象预报中的一个重要的要素,准确地预报风速,对人们的生产生活都有一定的影响。二维超声风传感器是气象与工业中最重要的风速测量方式之一,在传统的超声波测风仪器的基础上,通过测量空气温湿度来进行准确的调节,补偿了雨雾等环境因素的影响,设计一种基于STM32处理器的200 k Hz全天候超声测风仪,通过实验证明:该装置可以实现全天候精确测量风速风向,测量误差小。展开更多
文摘This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.
文摘The development and character of compound temperature-humidity sensor were discussed in this study.The design of sampling,control and output unit of temperature-humidity sensor as well as their manufacture method and character were studied in detail.The relationship between components of humidity resistance materials and negative temperature coefficient ( NTC) thermistor materials in sampling unit of compound sensor and character of electrical resistance and temperature was obtained.Couples of character curves of compound temperature-humidity sensor and data of materials of sampling unit were shown in this paper too.
基金supported by the National Natural Science Foundation of China(No.61106025)the CAS/SAFEA International Partnership Program for Creative Research Teams
文摘Abstract： This paper presents a charge-sensitive-amplifier （CSA） based readout circuit for capacitive microelectro-mechanical-system （MEMS） sensors. A continuous-time （CT） readout structure using the chopper technique is adopted to cancel the low frequency noise and improve the resolution of the readout circuits. An operational trans-conductance amplifier （OTA） structure with an auxiliary common-mode-feedback-OTA is proposed in the fully differential CSA to suppress the chopper modulation induced disturbance at the OTA input terminal. An analog temperature compensation method is proposed, which adjusts the chopper signal amplitude with temperature variation to compensate the temperature drift of the CSA readout sensitivity. The chip is designed and implemented in a 0.35μm CMOS process and is 2.1 × 2.1 mm2 in area. The measurement shows that the readout circuit achieves 0.9 aF/√H capacitive resolution, 97 dB dynamic range in 100 Hz signal bandwidth, and 0.8 mV/fF sensitivity with a temperature drift of 35 ppm/℃ after optimized compensation.
基金supported by the National Natural Science Foundation of China(62474115,52105582)Natural Science Foundation of Guangdong Province(2024A1515030026,2022A1515010894)+1 种基金Fundamental Research Foundation of Shenzhen(JCYJ20210324095210030,JCYJ20220818095810023,ZDSYS20220527171402005)the State Key Laboratory of Radio Frequency Heterogeneous Integration(Independent Scientific Research Program No.2024013)for Linze Hong,Ke Xiao,Xiangyu Song,and Wei Xu.
文摘We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC.The model encompasses mechanical,thermal,and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA platform.The compensation strategy is implemented on-chip with a variable temperature difference heating circuit.Results show that the linear programming for the low-temperature drift in the SoC output is characterized by a compensation resistor Rc with a resistance value of 748.21Ωand a temperature coefficient of resistance of 3.037×10−3℃^(−1) at 25℃.Experimental validation demonstrates that within an ambient temperature range of 0–50℃ and a flow range of 0-10 m/s,the temperature drift of the sensor is reduced to±1.6%,as compared to±8.9%observed in a counterpart with the constant temperature difference circuit.Therefore,this on-chip temperature-compensated CMOS-MEMS flow sensing SoC is promising for low-cost sensing applications such as respiratory monitoring and smart energy-efficient buildings.
文摘风是气象预报中的一个重要的要素,准确地预报风速,对人们的生产生活都有一定的影响。二维超声风传感器是气象与工业中最重要的风速测量方式之一,在传统的超声波测风仪器的基础上,通过测量空气温湿度来进行准确的调节,补偿了雨雾等环境因素的影响,设计一种基于STM32处理器的200 k Hz全天候超声测风仪,通过实验证明:该装置可以实现全天候精确测量风速风向,测量误差小。
