期刊文献+
共找到506篇文章
< 1 2 26 >
每页显示 20 50 100
Laser-induced oxidation assisted micro milling of high aspect ratio microgroove on WC-Co cemented carbide 被引量:10
1
作者 Guolong ZHAO Hongjun XIA +3 位作者 Yang ZHANG Liang LI Ning HE Hans Nφrgaard HANSEN 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2021年第4期465-475,共11页
Severe tool wear and poor surface quality are the main problems during micro machining of cemented carbide.In this work,an innovative hybrid process of laser-induced oxidation assisted micro milling(LOMM)was proposed ... Severe tool wear and poor surface quality are the main problems during micro machining of cemented carbide.In this work,an innovative hybrid process of laser-induced oxidation assisted micro milling(LOMM)was proposed to solve the problems.A nanosecond laser was utilized to induce oxidation of the WC-20%Co material,producing loose oxide which was easy to remove.The micro machinability of the material was improved by laser-induced oxidation.The oxidation mechanisms of cemented carbide were studied.A microgroove with a depth of 2.5 mm and aspect ratio of 5 was fabricated successfully.The milling force,surface quality and tool wear mechanisms were investigated.For comparison,a microgroove was also fabricated with conventional micro milling(COMM)using identical milling parameters.Results revealed that in LOMM the milling force and tool wear rate were extremely low during removing the oxide.The machined surface quality and dimensional accuracy achieved by LOMM were superior to those obtained by COMM.The surface roughness Saof the microgroove bottom reached 88 nm in LOMM,while the cross-sectional geometry of the microgroove was a trapezoid.Perpendicularity of the microgroove sidewall machined by LOMM was better than that by COMM.The tool wear forms in LOMM were coating spalling and slight tool nose breakage.Compared with COMM,the tool life in LOMM was prolonged significantly.It indicates that the proposed hybrid process is an effective and efficient way to fabricate high aspect ratio micro-features with high dimensional accuracy. 展开更多
关键词 Cemented carbide high aspect ratio Laser-induced oxidation Micro milling Microgroove Tool wear
原文传递
A review of bird-like flapping wing with high aspect ratio 被引量:1
2
作者 Changchuan XIE Nongyue GAO +2 位作者 Yang MENG Yue WU Chao YANG 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2023年第1期22-44,共23页
Bird-like flapping-wing vehicles with a high aspect ratio have the potential to fulfill missions given to micro air vehicles,such as high-altitude reconnaissance,surveillance,rescue,and bird group guidance,due to thei... Bird-like flapping-wing vehicles with a high aspect ratio have the potential to fulfill missions given to micro air vehicles,such as high-altitude reconnaissance,surveillance,rescue,and bird group guidance,due to their good loading and long endurance capacities.Biologists and aeronautical researchers have explored the mystery of avian flight and made efforts to reproduce flapping flight in bioinspired aircraft for decades.However,the cognitive depth from theory to practice is still very limited.The mechanism of generating sufficient lift and thrust during avian flight is still not fully understood.Moving wings with unique biological structures such as feathers make modeling,simulation,experimentation,and analysis much more difficult.This paper reviews the research progress on bird-like flapping wings from flight mechanisms to modeling.Commonly used numerical computing methods are briefly compared.The aeroelastic problems are also highlighted.The results of the investigation show that a leading-edge vortex can be found during avian flight.Its induction and maintenance may have a close relationship with wing configuration,kinematics and deformation.The present models of flapping wings are mainly two-dimensional airfoils or three-dimensional single root-jointed geometric plates,which still exhibit large differences from real bird wings.Aeroelasticity is encouraged to consider the nonignorable effect on aerodynamic performance due to large-scale nonlinear deformation.Introducing appropriate flexibility can improve the peak values and efficiencies of lift and thrust,but the detailed conclusions always have strong background dependence. 展开更多
关键词 Aeroelasticity Bird-like flapping wing Flapping motion high aspect ratio MODELING NONLINEAR
原文传递
Preparation and Characterization of Sepiolite Microfibers with High Aspect Ratio
3
作者 XU Tong HU Yelei +5 位作者 QIAN Di ZHU Yuanzhao ZHONG Yi ZHANG Linping XU Hong MAO Zhiping 《Journal of Donghua University(English Edition)》 CAS 2022年第6期542-548,共7页
It is difficult to access exfoliated sepiolite(Sep)fibers with high aspect ratio from Sep ore.The traditional method used to purify Sep ore also reduces its aspect ratio.In this study,impurities in the Sep ore were re... It is difficult to access exfoliated sepiolite(Sep)fibers with high aspect ratio from Sep ore.The traditional method used to purify Sep ore also reduces its aspect ratio.In this study,impurities in the Sep ore were removed by acid activation followed by a cetyltrimethylammonium chloride(C16)treatment to organically modify the purified Sep by cation exchange.Then,the organically-modified Sep(O-Sep)was stripped and processed by an ultrasonic cell crusher to obtain Sep microfibers at a specific frequency for a given period.These Sep samples had relatively high aspect ratio,compared with the Sep fibers gotten by traditional method.Scanning electron microscopy(SEM)and transmission electron microscopy(TEM)demonstrate the micro-morphology of exfoliated Sep samples in an intuitive way.Moreover,pure inorganic membrane prepared only with the exfoliated Sep fibers exhibited excellent flexibility,further demonstrating the excellent properties of Sep fibers with high aspect ratio. 展开更多
关键词 sepiolite microfiber high aspect ratio inorganic membrane FLEXIBILITY
在线阅读 下载PDF
Fast and accurate measurement of high aspect ratio MEMS trench array with optical lattice illumination
4
作者 Xiangjie Li Xinqi Sui Dengfeng Kuang 《Microsystems & Nanoengineering》 2025年第4期413-429,共17页
The high aspect ratio(HAR)micro-electro-mechanical system trench array is a key component for the miniaturization of micro sensors,actuators,and other advanced precision equipment,with broad application prospects in d... The high aspect ratio(HAR)micro-electro-mechanical system trench array is a key component for the miniaturization of micro sensors,actuators,and other advanced precision equipment,with broad application prospects in defense,security,aerospace,energy,and other fields.Therefore,accurate and efficient measurement of the aspect ratio of microstructures will become a crucial method for monitoring and ensuring the reliability and stability of the device fabrication process.This paper presents a novel method that combines the lattice light field generated by a microaxicon array with microscopic imaging technology to accurately measure the width and depth of HAR micro-trench structures.We designed and constructed a dedicated experimental system,initially using monochromatic microscopic imaging and edge extraction algorithms to obtain the width information of the trenches.Subsequently,the trench depth was measured using the diffraction lattice light field generated by the micro-axicon array.Experimental results indicate that as the light field propagates from the top to the bottom of the trench,the light spots in the lattice light field shift in position due to the presence of diffraction angles,with the displacement being closely related to the trench depth.A mapping between the displacement and depth is established through geometric relationships,enabling the calculation of the trench depth.We tested nine trench samples with different aspect ratios,with the maximum aspect ratio reaching 58.12.The experimental results,compared with the scanning electron microscope measurement values,show that the measurement errors are all<9%. 展开更多
关键词 precision equipment advanced precision equipmentwith optical lattice illumination efficient measurement aspect ratio microstructures micro electro mechanical system microscopic imaging aspect ratio measurement high aspect ratio
原文传递
Realization of high aspect ratio metalenses by facile nanoimprint lithography using water-soluble stamps 被引量:8
5
作者 Hojung Choi Joohoon Kim +8 位作者 Wonjoong Kim Junhwa Seong Chanwoong Park Minseok Choi Nakhyun Kim Jisung Ha Cheng-Wei Qiu Junsuk Rho Heon Lee 《PhotoniX》 SCIE EI 2023年第1期382-392,共11页
Nanoimprint lithography(NIL)has attracted attention recently as a promising fabrication method for dielectric metalenses owing to its low cost and high throughput,however,high aspect ratio(HAR)nanostructures are requi... Nanoimprint lithography(NIL)has attracted attention recently as a promising fabrication method for dielectric metalenses owing to its low cost and high throughput,however,high aspect ratio(HAR)nanostructures are required to manipulate the full 2πphase of light.Conventional NIL using a hard-polydimethylsiloxane(h-PDMS)mold inevitably incurs shear stress on the nanostructures which is inversely proportional to the surface area parallel to the direction of detachment.Therefore,HAR structures are subjected to larger shear stresses,causing structural failure.Herein,we propose a novel wet etching NIL method with no detachment process to fabricate flawless HAR metalenses.The water-soluble replica mold is fabricated with polyvinyl alcohol(PVA)which is simpler than an h-PDMS mold,and the flexibility of the PVA mold is suitable for direct printing as its high tensile modulus allows high-resolution patterning of HAR metalenses.The diffraction-limited focusing of the printed metalenses demonstrates that it operates as an ideal lens in the visible regime.This method can potentially be used for manufacturing various nanophotonic devices that require HAR nanostructures at low cost and high throughput,facilitating commercialization. 展开更多
关键词 Nanoimprint lithography Wet etching Polyvinyl alcohol high fidelity nanofabrication high aspect ratio nanostructure Metalens
在线阅读 下载PDF
Drilling high aspect ratio holes by femtosecond laser filament with aberrations 被引量:2
6
作者 Manshi WANG Zhiqiang YU +1 位作者 Nan ZHANG Weiwei LIU 《Frontiers of Optoelectronics》 EI CSCD 2021年第4期522-528,共7页
A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament,which is employed to drill holes on copper targets.By shifting or rotating the focusing lens,additional ... A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament,which is employed to drill holes on copper targets.By shifting or rotating the focusing lens,additional aberration is imposed on the focused laser beam,and significant influence is produced on the aspect ratio and cross-sectional shape of the micro-holes.Experimental results show that when proper aberration is introduced,the copper plate with a thickness of 3 mm can be drilled through with an aspect ratio of 30,while no through-holes can be drilled on 3-mm-thickness copper plates by femtosecond laser with minimized aberration.In addition,when femtosecond laser filament with large astigmatism is used,micro-holes that had a length to width ratio up to 3.3 on the cross-section are obtained.Therefore,the method proposed here can be used to fabricate long oval holes with high aspect ratios. 展开更多
关键词 femtosecond laser ABERratioN DRILLING high aspect ratio
原文传递
Elliptical vibration chiseling:a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface
7
作者 Zhiwei Li Jianfu Zhang +3 位作者 Zhongpeng Zheng Pingfa Feng Dingwen Yu Jianjian Wang 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2024年第2期449-467,共19页
High-aspect-ratio metallic surface microstructures are increasingly demanded in breakthrough applications,such as high-performance heat transfer enhancement and surface plasmon devices.However,the fast and cost-effect... High-aspect-ratio metallic surface microstructures are increasingly demanded in breakthrough applications,such as high-performance heat transfer enhancement and surface plasmon devices.However,the fast and cost-effective fabrication of high-aspect-ratio microstructures on metallic surfaces remains challenging for existing techniques.This study proposes a novel cutting-based process,namely elliptical vibration chiseling(EV-chiseling),for the high-efficiency texturing of surface microstructures with an ultrahigh aspect ratio.Unlike conventional cutting,EV-chiseling superimposes a microscale EV on a backward-moving tool.The tool chisels into the material in each vibration cycle to generate an upright chip with a high aspect ratio through material deformation.Thanks to the tool’s backward movement,the chip is left on the material surface to form a microstructure rather than falling off.Since one microstructure is generated in one vibration cycle,the process can be highly efficient using ultrafast(>1 kHz)tool vibration.A finite element analysis model is established to explore the process mechanics of EV-chiseling.Next,a mechanistic model of the microstructured surface generation is developed to describe the microstructures’aspect ratio dependency on the process parameters.Then,surface texturing tests are performed on copper to verify the efficacy of EV-chiseling.Uniformed micro ribs with a spacing of 1–10μm and an aspect ratio of 2–5 have been successfully textured on copper.Compared with the conventional EV-cutting that uses a forward-moving tool,EV-chiseling can improve the aspect ratio of textured microstructure by up to 40 times.The experimental results also verify the accuracy of the developed surface generation model of microstructures.Finally,the effects of elliptical trajectory,depth of cut,tool shape,and tool edge radius on the surface generation of micro ribs have been discussed. 展开更多
关键词 metallic microstructure high aspect ratio backward-moving cutting vibration cutting chiseling material deformation
在线阅读 下载PDF
A Rapid Synthesis of High Aspect Ratio Silver Nanowires for High-Performance Transparent Electrodes
8
作者 Tao Cheng Yizhou Zhang +2 位作者 Wenyong Lai Yao Chen Wei Huang 《Chinese Journal of Chemistry》 SCIE CAS CSCD 2015年第1期147-151,共5页
A rapid,simple and cost-effective polyol method has been developed for the synthesis of silver nanowires with high aspect ratio and high purity.The aspect ratios of the silver nanowires as high as ca.1000(average leng... A rapid,simple and cost-effective polyol method has been developed for the synthesis of silver nanowires with high aspect ratio and high purity.The aspect ratios of the silver nanowires as high as ca.1000(average length 40μm and some even as long as 80μm,diameter 50-100 nm)were obtained via optimizing the reaction conditions.Transparent electrodes with excellent optoelectronic performances(optical transmittance of 90%,sheet resistance of 23.2Ω/□and optical transmittance of 87%,sheet resistance of 19.7Ω/□)comparable to commercial ITO were fab-ricated via simple spin coating the resulting silver nanowires onto the glass substrates.The high optoelectronic per-formances and the facile all-solution process of the as-prepared transparent electrodes render them rather promising candidates for use in cost-effective large-area optoelectronic devices. 展开更多
关键词 silver nanowires transparent electrodes high aspect ratio all-solution process large-area electronics
原文传递
Gust response analysis and wind tunnel test for a high-aspect ratio wing 被引量:14
9
作者 Liu Yi Xie Changchuan +1 位作者 Yang Chao Cheng Jialin 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2016年第1期91-103,共13页
A theoretical nonlinear aeroelastic response analysis for a flexible high-aspect ratio wing excited by harmonic gust load is presented along with a companion wind tunnel test. A multidisci- plinary coupled numerical c... A theoretical nonlinear aeroelastic response analysis for a flexible high-aspect ratio wing excited by harmonic gust load is presented along with a companion wind tunnel test. A multidisci- plinary coupled numerical calculation is developed to simulate the flexible model wing undergoing gust load in the time domain via discrete nonlinear finite element structural dynamic analysis and nonplanar unsteady vortex lattice aerodynamic computation. A dynamic perturbation analysis about a nonlinear static equilibrium is also used to determine the small perturbation flutter bound- ary. A novel noncontact 3-D camera measurement analysis system is firstly used in the wind tunnel test to obtain the spatial large deformation and responses. The responses of the flexible wing under different static equilibrium states and frequency gust loads are discussed. The fair to good quanti- tative agreements between the theoretical and experimental results demonstrate that the presented analysis method is an acceptable way to predict the geometrically nonlinear gust response for flex- ible wings. 展开更多
关键词 Gust loads high-aspect ratio wing Nonlinear analysis Unsteady vortex latticemethod (UVLM) Wind tunnels
原文传递
Aeroelastic Analysis and Optimization of High-aspect-ratio Composite Forward-swept Wings 被引量:9
10
作者 万志强 颜虹 +1 位作者 刘德广 杨超 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2005年第4期317-325,共9页
In order to analyze the effects of forward-swept angle and skin ply-orientation on the static and dynamic aeroelastic characteristics, the aeroelastic modeling and calculation for high-aspect-ratio composite wings wit... In order to analyze the effects of forward-swept angle and skin ply-orientation on the static and dynamic aeroelastic characteristics, the aeroelastic modeling and calculation for high-aspect-ratio composite wings with different forward-swept angles and skin ply-orientation are performed. This paper presents the results of a design study aiming to optimize wings with typical forward-swept angles and skin ply-orientation in an aeroelastic way by using the genetic/sensitivity-based hybrid algorithm. Under the conditions of satiated multiple constraints including strength, displacements, divergence speeds and flutter speeds, the studies are carried out in a bid to minimize the structural weight of a wing with the lay-up thicknesses of wing components as design variabies. In addition, the effects of the power of spanwise variation function of lay-up thicknesses of skins and iugs on the optimized weights are also analyzed. 展开更多
关键词 aeroeiasticity structural optimization high-aspect-ratio wing forward-swept wing COMPOSITE
在线阅读 下载PDF
Structural Modeling and Aeroelastic Analysis of High-Aspect-Ratio Composite Wings 被引量:9
11
作者 赵永辉 胡海岩 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2005年第1期25-30,共6页
A unified structural model for high-aspect-ratio composite wing with arbitrary cross-section is developed. Two types of lay-ups of the composite wing, namely, circumferentially uniform stiffness (CUS) configuration ... A unified structural model for high-aspect-ratio composite wing with arbitrary cross-section is developed. Two types of lay-ups of the composite wing, namely, circumferentially uniform stiffness (CUS) configuration and circumferentially asymmetric stiffness (CAS) configuration, are investigated. The present structural modeling method is validated through ANSYS FEM software for the case of a composite box beam. Then, the case of a single-cell composite wing with NACA0012 airfoil shape is considered. To investigate the aeroelastic problem of high-aspect-ratio composite wings, the linear ONERA aerodynamic model is used to model the unsteady aerodynamic loads under the case of small angle of attack. Finally, flutter speeds of the high-aspect-ratio wing with various composite ply angles are determined by using U-g method. 展开更多
关键词 structural modeling aeroelastic analysis high-aspect-ratio composite wing
在线阅读 下载PDF
Stall Flutter Analysis of High-Aspect-Ratio Composite Wing 被引量:6
12
作者 刘湘宁 向锦武 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2006年第1期36-43,共8页
The stall flutter characters of high-aspect-ratio composite wing are investigated, and the effects of structure geometric nonlinearity and stiffness couple created by composite anisotropy on them also are discussed. F... The stall flutter characters of high-aspect-ratio composite wing are investigated, and the effects of structure geometric nonlinearity and stiffness couple created by composite anisotropy on them also are discussed. Firstly, the high-aspect-ratio wing is modeled as a composite thin-walled closed section Euler beam whose displacement and rotation both could be of finite value, and the nonlinear dynamic equations is build up on it with all the effects of geometric nonlinearity, aerodynamic nonlinearity and anisotropy of material being considered. Then vibration equations are deduced through perturbing the dynamic equations at wing's equilibrium position, and coupled with unsteady stall aerodynamic model and ONERA model, to obtain the nonlinear stall flutter analysis equations of wing. Finally, the flutter stabilities with various wind speeds are determined by the harmonic balance method. With several exampies, the validity of the stall flutter model is proved, and the significant effects of geometric nonlinearity on the stall flutter various characters as wall as the effects of ply angle on the stall flutter speed and frequency also are discussed. 展开更多
关键词 stall flutter high-aspect-ratio wing geometric nonlinearity COMPOSITES thln-walled closed section beam
在线阅读 下载PDF
Development of high-aspect-ratio microchannel heat exchanger based on multi-tool milling process 被引量:2
13
作者 潘敏强 李金恒 汤勇 《Journal of Central South University》 SCIE EI CAS 2008年第S2期228-234,共7页
A high-aspect-ratio microchannel heat exchanger based on multi-tool milling process was developed. Several slotting cutters were stacked together for simultaneously machining several high-aspect-ratio microchannels wi... A high-aspect-ratio microchannel heat exchanger based on multi-tool milling process was developed. Several slotting cutters were stacked together for simultaneously machining several high-aspect-ratio microchannels with manifold structures. On the basis of multi-tool milling process, the structural design of the manifold side height, microchannel length, width, number, and interval were analyzed. The heat transfer performances of high-aspect-ratio microchannel heat exchangers with two different manifolds were investigated by experiments, and the influencing factors were analyzed. The results indicate that the magnitude of heat transfer area per unit volume dominates the heat transfer performances of plate-type micro heat exchanger, while the velocity distribution between microchannels has little effects on the heat transfer performances. 展开更多
关键词 high-aspect-ratio microchannel multi-tool milling PLATE-TYPE HEAT EXCHANGER HEAT transfer velocity distribution
在线阅读 下载PDF
Stiffness Distribution and Aeroelastic Performance Optimization of High-Aspect-Ratio Wings 被引量:1
14
作者 Wan Zhiqiang Du Ziliang +1 位作者 Wu Qiang Yang Chao 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2016年第3期243-251,共9页
The relationship between stiffness distribution and aeroelastic performance for a beam-frame model and a3-D model is investigated based on aeroelastic optimization of global stiffness design for high-aspect-ratio wing... The relationship between stiffness distribution and aeroelastic performance for a beam-frame model and a3-D model is investigated based on aeroelastic optimization of global stiffness design for high-aspect-ratio wings.The sensitivity information of wing spanwise stiffness distribution with respect to the twist angle at wing tip,the vertical displacement at wing tip,and the flutter speed are obtained using a sensitivity method for both models.Then the relationship between stiffness distribution and aeroelastic performance is summarized to guide the design procedure.By using the genetic/sensitivity-based hybrid algorithm,an optimal solution satisfying the strength,aeroelastic and manufacturing constraints is obtained.It is found that the summarized guidance is well consistent with the optimal solution,thus providing a valuable design advice with efficiency.The study also shows that the aeroelastic-optimization-based global stiffness design procedure can obtain the optimal solution under multiple constraints with high efficiency and precision,thereby having a strong application value in engineering. 展开更多
关键词 aeroelastic high-aspect-ratio wing stiffness design structural optimization sensitivity analysis
在线阅读 下载PDF
Electrodeposition of Gold to Conformally Fill High-Aspect-Ratio Nanometric Silicon Grating Trenches: A Comparison of Pulsed and Direct Current Protocols 被引量:2
15
作者 Sami Znati Nicholas Chedid +3 位作者 Houxun Miao Lei Chen Eric E. Bennett Han Wen 《Journal of Surface Engineered Materials and Advanced Technology》 2015年第4期207-213,共7页
Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of X-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in ... Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of X-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplating protocol that reliably filled trenches for such structures. 展开更多
关键词 PULSED ELECTROPLATING Gold ELECTROPLATING high aspect ratio TRENCHES Gold Electrodepostion Di-rect Current Electrodeposition PULSED vs. Direct Current ELECTROPLATING Atomic LAYER Deposition Platinum Seed LAYER Silicon TRENCH Gratings TRENCH FILLING Grating FILLING ALD Adhesive LAYER
在线阅读 下载PDF
Design and Simulation of BTT Missile with High-Aspect-Ratio Wing Robust H_∞ Autopilot
16
作者 崔生旺 刘莉 马春艳 《Journal of Beijing Institute of Technology》 EI CAS 2007年第1期50-55,共6页
For the strong coupling among the channels of bank-to-turn (BTT) missile with high-aspect-ratio wing, an autopilot is designed with a two loop control structure robust autopilot design methods. By the inner loop des... For the strong coupling among the channels of bank-to-turn (BTT) missile with high-aspect-ratio wing, an autopilot is designed with a two loop control structure robust autopilot design methods. By the inner loop design, the question of pole-zero cancellation is solved, and the stabilization of structured uncertainty is achieved. Through the outer loop of H∞ controller design, the flying performance and robustness can be guaranteed. The nonlinear simulation results show that the autopilot designed has perfect time domain response, and can suppress bad influence of the inertial and kinematics couplings. It can make the missile fly stably in the large flying areas. The control is very effective. 展开更多
关键词 BANK-TO-TURN ROBUST AUTOPILOT COUPLING high-aspect-ratio
在线阅读 下载PDF
基于28 nm CMOS技术平台的STI无接缝填充工艺研究
17
作者 刘聪 李华曜 +1 位作者 张欢欢 刘欢 《功能材料与器件学报》 2026年第1期105-112,共8页
本文针对28 nm互补金属-氧化物-半导体(complementary metal-oxide-semiconductor,CMOS)工艺中高深宽比、非标准V形浅沟槽隔离(shallow trench isolation,STI)结构所面临的填充挑战展开研究。该结构易在填充后中心形成接缝,影响器件隔... 本文针对28 nm互补金属-氧化物-半导体(complementary metal-oxide-semiconductor,CMOS)工艺中高深宽比、非标准V形浅沟槽隔离(shallow trench isolation,STI)结构所面临的填充挑战展开研究。该结构易在填充后中心形成接缝,影响器件隔离可靠性。为此,本研究提出采用高深宽比工艺(high aspect ratio process,HARP)沉积与后蒸汽高温退火相结合的方案,旨在实现无接缝填充。本研究通过交叉实验,系统分析新型HARP沉积与创新高温退火工艺对氧化硅薄膜收缩率及沟槽接缝形貌的影响。实验结果表明,仅依靠单一工艺优化无法完全消除V形结构底部的微缝。最终的解决方案强调工艺协同:将新型HARP沉积与脉冲式高温退火相结合,并在退火过程中引入氯化氢(HCl)作为辅助气体。该协同工艺可精确调控薄膜的致密化过程,并利用HCl的气相刻蚀作用有效清除界面薄弱区,从而在高深宽比、非标准V形STI结构内实现高质量的无接缝填充。本研究为先进技术节点复杂三维结构的集成提供了有效的工艺路径。 展开更多
关键词 28 nm CMOS 高深宽比 沟槽填充 无接缝
在线阅读 下载PDF
Ultrafast Laser High-Aspect-Ratio Extreme Nanostructuring of Glass beyond λ/100
18
作者 Guodong Zhang Anton Rudenko +1 位作者 Razvan Stoian Guanghua Cheng 《Ultrafast Science》 2025年第4期29-38,共10页
The ultimate feature size is key in ultrafast laser material processing.A capacity to substantially exceed optical limits and to structure below 100 nm is essential to advance ultrafast processing into the field of me... The ultimate feature size is key in ultrafast laser material processing.A capacity to substantially exceed optical limits and to structure below 100 nm is essential to advance ultrafast processing into the field of metamaterials.Such achievement requires combining the control of optical near-fields and of material reactions while preserving the flexibility of long working distances,compatible with a mature laser process.Using subpicosecond and picosecond nondiffractive Bessel beams,we demonstrate unprecedented feature sizes below a hundredth of the incident 1-um wavelength over an extended focus depth of tens of micrometers.Record features sizes,down to 7 nm,result from self-generated near-field light components initiated by cavities induced by far-field radiation in a back-surface illumination geometry.This sustains the generation of more confined near-field evanescent components along the laser scan with a nanometer pitch,perpendicular to the incident field direction,driving a superresolved laser structuring process via local thermal ablation.The near-field pattern is replicated with high robustness,advancing toward a 10-nm nanoscribing tool with a micrometer-sized laser pen.The process is controllable by the field orientation.The nondiffractive irradiation develops evanescent fields over the focusing length,resulting in high-aspect-ratio trenching with a nanometer section and a micrometer depth.Higher energy doses trigger the self-organization of quasi-periodic patterns seeded by spatially modulated scattering,similarly to optical modelocking.A predictive multipulse simulation method validates the far-field-induced near-field electromagnetic scenario of void nanochannel growth and replication,indicating the processing range and resolution on the surface and in the depth. 展开更多
关键词 METAMATERIALS high aspect ratio nanostructuring ultrafast laser near field control sub nm structuring ultrafast processing glass processing mature laser processusing
原文传递
Bosch放电参数对RIE-lag的影响研究
19
作者 龙思宇 曹世程 +1 位作者 陈志华 黄振贵 《真空科学与技术学报》 北大核心 2026年第2期125-135,共11页
Bosch工艺在高深宽比刻蚀中的应用愈发广泛,而反应离子刻蚀滞后效应(RIE-lag)仍是约束其刻蚀均匀性及最大深宽比的因素之一。文章采用多尺度仿真,通过耦合全局模型,鞘层模型和刻蚀模型对高深宽比下反应气体为SF_(6)和C_(4)F_(8)的Bosch... Bosch工艺在高深宽比刻蚀中的应用愈发广泛,而反应离子刻蚀滞后效应(RIE-lag)仍是约束其刻蚀均匀性及最大深宽比的因素之一。文章采用多尺度仿真,通过耦合全局模型,鞘层模型和刻蚀模型对高深宽比下反应气体为SF_(6)和C_(4)F_(8)的Bosch工艺刻蚀进行了模拟,研究了各种放电参数对RIE-lag的影响。结果表明,偏压功率和频率均以离子能量角度分布来影响RIE-lag,较低离子能量增加到一定值时,会增加刻蚀前沿的离子数密度,从而使RIE-lag有所改善;而超过该能量值后RIElag则会加剧;线圈功率会直接影响气体放电产生的粒子数密度来改变RIE-lag,随着功率的增加,RIE-lag同样呈现出先降低后升高的非单调变化趋势;钝化阶段压力的增加会延长刻蚀钝化层的时间,改善RIE-lag。最后结合Bosch循环中的时间序列与刻蚀深度关系图分析发现,偏压功率、偏压频率以及线圈功率等参数的调整都会造成钝化层刻蚀速率和硅基刻蚀速率的同时变化,使RIE-lag的变化趋势复杂化,而只改变钝化阶段的压力时,由于未影响硅基刻蚀速率,使得硅基刻蚀线在水平方向平移,RIE-lag的变化则更可控。研究结论对实际工程中的Bosch工艺优化具有重要意义。 展开更多
关键词 BOSCH 工艺 放电参数 反应离子刻蚀滞后 高深宽比
原文传递
SiCp/Al复合材料高深宽比凹槽激光加工试验研究
20
作者 张俊飞 何斌 +3 位作者 唐玉琪 韩锦锦 陈国炎 张锁荣 《应用激光》 北大核心 2026年第2期64-72,共9页
为了在SiCp/Al复合材料(SiCp/Al)表面加工出高深宽比的凹槽结构,采用纳秒光纤与紫外激光进行加工试验。首先研究激光功率、激光扫描速度、填充线间距等参数对材料去除过程的影响规律,再通过扫描电子显微镜观测不同参数下的加工形貌,分... 为了在SiCp/Al复合材料(SiCp/Al)表面加工出高深宽比的凹槽结构,采用纳秒光纤与紫外激光进行加工试验。首先研究激光功率、激光扫描速度、填充线间距等参数对材料去除过程的影响规律,再通过扫描电子显微镜观测不同参数下的加工形貌,分别选取最佳激光参数对凹槽进行不同次数、不同宽度的加工。结果表明,在纳秒光纤激光加工下,加工表面存在严重的熔融产物,对凹槽加工产生不利影响。在纳秒紫外激光加工下,材料主要以气化形式去除,加工表面几乎无熔融产物,有利于微凹槽的加工。最终,利用纳秒紫外激光在SiCp/Al复合材料表面成功加工出宽度0.2 mm、深宽比11.16的微凹槽结构。 展开更多
关键词 激光加工 SICP/AL 高深宽比 熔融产物
原文传递
上一页 1 2 26 下一页 到第
使用帮助 返回顶部