目的探讨工作气压对管内等离子体放电光学现象以及Si/O-DLC(Si and O Incorporated DLC,Si/O-DLC)薄膜结构与性能的影响,为获得管内高质量、均匀的Si/O-DLC薄膜制备工艺技术提供指导。方法利用空心阴极等离子体增强化学气相沉积(Hollow ...目的探讨工作气压对管内等离子体放电光学现象以及Si/O-DLC(Si and O Incorporated DLC,Si/O-DLC)薄膜结构与性能的影响,为获得管内高质量、均匀的Si/O-DLC薄膜制备工艺技术提供指导。方法利用空心阴极等离子体增强化学气相沉积(Hollow Cathode Plasma Enhanced Chemical Vapor Deposition,HC-PECVD)技术,通过改变工作气压在管内沉积Si/O-DLC薄膜。利用高速摄像机记录并对比不同工作气压下管内等离子体放电光学现象。通过SPM、XPS和Raman光谱仪表征不同工作气压下薄膜的三维立体表面形貌和微观结构,并利用SEM、纳米压痕仪以及划痕测试系统,对比研究管内Si/O-DLC薄膜的硬度、弹性模量、膜基结合力以及沿管轴向的薄膜厚度分布。结果随着工作气压的上升,管径向中心处亮斑面积和光强先增大增强后趋于缩小暗淡。在不同工作气压下,均能够在管内获得表面光滑的Si/O-DLC薄膜,粗糙度为3~10 nm。随着工作气压的上升,管内Si/O-DLC薄膜的平均厚度从1.42μm增大到2.06μm,且沿管轴向的薄膜厚度分布均匀度从24%显著提高到65%;不同工作气压下管内Si/O-DLC薄膜沿管轴向平均硬度呈先增大后减小的趋势,总体平均硬度可达(14±1)GPa。管内Si/O-DLC薄膜在工作气压上升到25 mTorr时获得较高的平均膜基结合力。结论改变工作气压能够显著影响管内壁Si/O-DLC薄膜的结构与性能,当工作气压为25 m Torr时,在管内获得均匀性最优、结合力较高的Si/O-DLC薄膜。展开更多
The corrosion and wear of N80 pipeline in oil and gas field environment has always been an urgent problem to be solved in the field of oil and gas exploitation.DLC film is considered to be an effective material for pr...The corrosion and wear of N80 pipeline in oil and gas field environment has always been an urgent problem to be solved in the field of oil and gas exploitation.DLC film is considered to be an effective material for prolonging the service life of pipeline due to its excellent properties.However,it is very difficult to deposit a uniform DLC film on the inner surface of long pipeline.In this paper,DLC film was deposited on the inner surface of a 1 m-long N80 pipeline with an inner diameter of 75 mm by hollow cathode plasma enhanced chemical vapor deposition(HCPECVD)using the pipeline itself as the deposition chamber and cathode.The uniformity of microstructure,mechanical properties,corrosion resistance and tribological properties of DLC film were discussed.The results show that the DLC film deposited on the inner surface of N80 long pipeline by HC-PECVD equipment possesses excellent axial uniformity.The deposition of DLC film increases the corrosion potential and reduces the corrosion current density,which greatly improves the corrosion resistance of N80 pipeline.In addition,the deposition of DLC film also reduces the friction coefficient and wear rate,which greatly improves the wear resistance of N80 pipeline.Therefore,the deposition of DLC film is an effective protection method for the inner surface of N80 pipeline,which prolongs the service life of the pipeline.HC-PECVD equipment with pipeline as cavity uniformly deposits DLC film on the inner surface of long pipeline,which is a potential deposition method to prolong the service life of long pipeline in oil and gas exploitation.展开更多
文摘目的探讨工作气压对管内等离子体放电光学现象以及Si/O-DLC(Si and O Incorporated DLC,Si/O-DLC)薄膜结构与性能的影响,为获得管内高质量、均匀的Si/O-DLC薄膜制备工艺技术提供指导。方法利用空心阴极等离子体增强化学气相沉积(Hollow Cathode Plasma Enhanced Chemical Vapor Deposition,HC-PECVD)技术,通过改变工作气压在管内沉积Si/O-DLC薄膜。利用高速摄像机记录并对比不同工作气压下管内等离子体放电光学现象。通过SPM、XPS和Raman光谱仪表征不同工作气压下薄膜的三维立体表面形貌和微观结构,并利用SEM、纳米压痕仪以及划痕测试系统,对比研究管内Si/O-DLC薄膜的硬度、弹性模量、膜基结合力以及沿管轴向的薄膜厚度分布。结果随着工作气压的上升,管径向中心处亮斑面积和光强先增大增强后趋于缩小暗淡。在不同工作气压下,均能够在管内获得表面光滑的Si/O-DLC薄膜,粗糙度为3~10 nm。随着工作气压的上升,管内Si/O-DLC薄膜的平均厚度从1.42μm增大到2.06μm,且沿管轴向的薄膜厚度分布均匀度从24%显著提高到65%;不同工作气压下管内Si/O-DLC薄膜沿管轴向平均硬度呈先增大后减小的趋势,总体平均硬度可达(14±1)GPa。管内Si/O-DLC薄膜在工作气压上升到25 mTorr时获得较高的平均膜基结合力。结论改变工作气压能够显著影响管内壁Si/O-DLC薄膜的结构与性能,当工作气压为25 m Torr时,在管内获得均匀性最优、结合力较高的Si/O-DLC薄膜。
基金supported by the Joint Funds of the National Natural Science Foundation of China(Grant No.U21A20127)the National Natural Science Foundation of China(Grant No.52275221).
文摘The corrosion and wear of N80 pipeline in oil and gas field environment has always been an urgent problem to be solved in the field of oil and gas exploitation.DLC film is considered to be an effective material for prolonging the service life of pipeline due to its excellent properties.However,it is very difficult to deposit a uniform DLC film on the inner surface of long pipeline.In this paper,DLC film was deposited on the inner surface of a 1 m-long N80 pipeline with an inner diameter of 75 mm by hollow cathode plasma enhanced chemical vapor deposition(HCPECVD)using the pipeline itself as the deposition chamber and cathode.The uniformity of microstructure,mechanical properties,corrosion resistance and tribological properties of DLC film were discussed.The results show that the DLC film deposited on the inner surface of N80 long pipeline by HC-PECVD equipment possesses excellent axial uniformity.The deposition of DLC film increases the corrosion potential and reduces the corrosion current density,which greatly improves the corrosion resistance of N80 pipeline.In addition,the deposition of DLC film also reduces the friction coefficient and wear rate,which greatly improves the wear resistance of N80 pipeline.Therefore,the deposition of DLC film is an effective protection method for the inner surface of N80 pipeline,which prolongs the service life of the pipeline.HC-PECVD equipment with pipeline as cavity uniformly deposits DLC film on the inner surface of long pipeline,which is a potential deposition method to prolong the service life of long pipeline in oil and gas exploitation.
