The result of the evaporation of Sio/SiO2 two layer antireflection coatings monitored by the MODEL IL 400 DEPOSITION CONTROLLER is reported.A superluminescent diode with high output power is fabricated by evaporating ...The result of the evaporation of Sio/SiO2 two layer antireflection coatings monitored by the MODEL IL 400 DEPOSITION CONTROLLER is reported.A superluminescent diode with high output power is fabricated by evaporating antireflection coating on the front facet of 1.3μm buried heterostructure laser.展开更多
文摘The result of the evaporation of Sio/SiO2 two layer antireflection coatings monitored by the MODEL IL 400 DEPOSITION CONTROLLER is reported.A superluminescent diode with high output power is fabricated by evaporating antireflection coating on the front facet of 1.3μm buried heterostructure laser.
