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Ge/Si heterojunction L-shape tunnel field-effect transistors with hetero-gate-dielectric
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作者 CongLi Zhi-Rui Yan +2 位作者 Yi-Qi Zhuang Xiao-Long Zhao Jia-Min Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第7期572-579,共8页
A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, ... A Ge/Si heterojunction L-shaped tunnel field-effect transistor combined with hetero-gate-dielectric (GHL-TFET) is proposed and investigated by TCAD simulation. Current-voltage characteristics, energy-band diagrams, and the distri- bution of the band-to-band tunneling (BTBT) generation rate of GHL-TFET are analyzed. In addition, the effect of the vertical channel width on the ON-current is studied and the thickness of the gate dielectric is optimized for better suppression of ambipolar current. Moreover, analog/RF figure-of-merits of GHL-TFET are also investigated in terms of the cut-off frequency and gain bandwidth production. Simulation results indicate that the ON-current of GHL-TFET is increased by about three orders of magnitude compared with that of the conventional L-shaped TFET. Besides, the introduction of the hetero-gate-dielectric not only suppresses the ambipolar current effectively but also improves the analog/RF performance drastically. It is demonstrated that the maximum cut-off frequency of GHL-TFET is about 160 GHz, which is 20 times higher than that of the conventional L-shaped TFET. 展开更多
关键词 tunnel field-effect transistors ge/si heterojunction hetero-gate-dielectric ambipolar effect
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Temperature-dependent rectifying and photovoltaic characteristics of an oxygen-deficient Bi_2Sr_2Co_2O_y/Si heterojunction
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作者 闫国英 白子龙 +5 位作者 李慧玲 傅广生 刘富强 于威 王江龙 王淑芳 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第10期500-503,共4页
A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties ar... A Bi2Sr2Co2Oy/Si heterojunction is obtained by growing a layer of p-type oxygen-deficient Bi2Sr2Co2Oy film on a commercial n-type silicon wafer by pulsed laser deposition. Its rectifying and photovoltaic properties are studied in a wide temperature range from 20 K to 300 K. The transport mechanism under the forward bias can be attributed to a trap- filled space-charge-limited current conduction mechanism. Under the irradiation of a 532-nm continuous wave laser, a clear photovoltaic effect is observed and the magnitude ofphotovoltage increases as the temperature decreases, The results demonstrate the potential application of a Bi2SrzCo2Oy-based heterojunction in the photoelectronic devices. 展开更多
关键词 Bi2Sr2Co2Oy/si heterojunction rectifying characteristics photovoltaic effect space-charge-limited current
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SiC based Si/SiC heterojunction and its rectifying characteristics 被引量:2
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作者 朱峰 陈治明 +2 位作者 李连碧 赵顺峰 林涛 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第11期4966-4969,共4页
The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play t... The Si on SiC heterojunction is still poorly understood, although it has a number of potential applications in electronic and optoelectronic devices, for example, light-activated SiC power switches where Si may play the role of an light absorbing layer. This paper reports on Si films heteroepitaxially grown on the Si face of (0001) n-type 6H-SiC substrates and the use of B2H6 as a dopant for p-Si grown at temperatures in a range of 700-950℃. X-ray diffraction (XRD) analysis and transmission electron microscopy (TEM) tests have demonstrated that the samples prepared at the temperatures ranged from 850℃ to 900℃ are characterized as monocrystalline silicon. The rocking XRD curves show a well symmetry with FWHM of 0.4339° Omega. Twin crystals and stacking faults observed in the epitaxial layers might be responsible for widening of the rocking curves. Dependence of the crystal structure and surface topography on growth temperature is discussed based on the experimental results. The energy band structure and rectifying characteristics of the Si/SiC heterojunctions are also preliminarily tested. 展开更多
关键词 si/6H-siC heterojunction heteroepitaxy siC
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Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications 被引量:1
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作者 谷锦华 司嘉乐 +3 位作者 王九秀 冯亚阳 郜小勇 卢景霄 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第11期502-505,共4页
The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivi... The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivity ITO films by direct-current (DC) magnetron sputtering, we studied the impacts of the ITO film deposition conditions, such as the oxygen flow rate, pressure, and sputter power, on the electrical and optical properties of the ITO films. ITO films of resistivity of 4 x 10-4 ~.m and average transmittance of 89% in the wavelength range of 380-780 nm were obtained under the optimized conditions: oxygen flow rate of 0.1 sccm, pressure of 0.8 Pa, and sputtering power of 110 W. These ITO films were used to fabricate the single-side HJ solar cell without an intrinsic a-Si:H layer. However, the best HJ solar cell was fabricated with a lower sputtering power of 95 W, which had an efficiency of 11.47%, an open circuit voltage (Voc) of 0.626 V, a filling factor (FF) of 0.50, and a short circuit current density (Jsc) of 36.4 mA/cm2. The decrease in the performance of the solar cell fabricated with high sputtering power of 110 W is attributed to the ion bombardment to the emitter. The Voc was improved to 0.673 V when a 5 nm thick intrinsic a-Si:H layer was inserted between the (p) a-Si:H and (n) c-Si layer. The higher Voc of 0.673 V for the single-side HJ solar cell implies the excellent c-Si surface passivation by a-Si:H. 展开更多
关键词 ITO films si heterojunction solar cell DC magnetron sputtering
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Forward and reverse electron transport properties across a CdS/Si multi-interface nanoheterojunction 被引量:2
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作者 李勇 王伶俐 +4 位作者 王小波 闫玲玲 苏丽霞 田永涛 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第8期502-507,共6页
The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporou... The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporous pillar array, an untraditional, nonplanar, and multi-interface CdS/Si nanoheterojunction is prepared. The current density versus voltage curve is measured and an obvious rectification effect is observed. Based on the fitting results and model analyses on the forward and reverse conduction characteristics, the electron transport mechanism under low forward bias, high forward bias, and reverse bias are attributed to the Ohmic regime, space-charge-limited current regime, and modified Poole-Frenkel regime respectively. The forward and reverse electrical behaviors are found to be highly related to the distribution of inter- facial trap states and the existence of localized electric field respectively. These results might be helpful for optimizing the preparing procedures to realize high-performance silicon-based CdS optoelectronic devices. 展开更多
关键词 heterojunction multi-interface nanoheterojunction electron transport silicon nanoporous pillararray si-NPA) CdS/si-NPA
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Rectification and electroluminescence of nanostructured GaN/Si heterojunction based on silicon nanoporous pillar array 被引量:1
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作者 王小波 李勇 +1 位作者 闫玲玲 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第10期432-437,共6页
A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. T... A GaN/Si nanoheterojunction is prepared through growing Ga N nanocrystallites(nc-GaN) on a silicon nanoporous pillar array(Si-NPA) by a chemical vapor deposition(CVD) technique at a relatively low temperature. The average size of nc-Ga N is determined to be ~10 nm. The spectral measurements disclose that the photoluminescence(PL) from GaN/SiNPA is composed of an ultraviolet(UV) band and a broad band spanned from UV to red region, with the feature that the latter band is similar to that of electroluminescence(EL). The electron transition from the energy levels of conduction band and, or, shallow donors to that of deep acceptors of Ga N is indicated to be responsible for both the broad-band PL and the EL luminescence. A study of the I-V characteristic shows that at a low forward bias, the current across the heterojunction is contact-limited while at a high forward bias it is bulk-limited, which follows the thermionic emission model and space-charge-limited current(SCLC) model, respectively. The bandgap offset analysis indicates that the carrier transport is dominated by electron injection from n-GaN into the p-Si-NPA, and the EL starts to appear only when holes begin to be injected from Si-NPA into GaN with biases higher than a threshold voltage. 展开更多
关键词 GaN/si-NPA heterojunction RECTIFICATION electroluminescence (EL)
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Phase Formation Mechanism of Al-Si-Ge Filler Metals Based on Thermodynamics Calculation
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作者 Huang Sen Long Weimin +3 位作者 Shan Jiguo Jiang Chao Jing Peiyao Zhang Guanxing 《稀有金属材料与工程》 北大核心 2025年第2期293-300,共8页
A series of Al-xSi-yGe filler metals(x=4–12 and y=10–40,wt%)were prepared,and the effect of Si and Ge on microstructure and melting characteristics of filler metals was studied.The thermodynamic model of Al-Si-Ge te... A series of Al-xSi-yGe filler metals(x=4–12 and y=10–40,wt%)were prepared,and the effect of Si and Ge on microstructure and melting characteristics of filler metals was studied.The thermodynamic model of Al-Si-Ge ternary alloy was established to analyze the phase formation mechanism of filler metals based on Miedema model,Tanaka model,and Toop equation.This research provided a basis for the composition optimization of filler metals and the analysis of metallurgical reaction process between filler metals and base materials.Results show that Al-Si-Ge alloy is composed of Al-Ge eutectic phase,Al-Si eutectic phase,and primary Si.Ge addition promotes the precipitation of primary Si.Ge is the main melting point depressant element of filler metals.With the increase in Ge content from 10wt%to 40wt%,the solid phase line of filler metals remains unchanged,whereas the liquidus temperature decreases from 567.65°C to 499.96°C.With the increase in Ge content of filler metal,Ge content in eutectic Si phase is increased,the endothermic peak of Al-Si eutectic reaction according to thermogravimetry curve becomes smoother,and Al-Si eutectic temperature is decreased.Ge addition can reduce the free energy of Al-Si alloy system.The lowest point of free energy is located on Al-Ge side.The eutectic Ge phase with the composition similar to pure Ge composition is the most likely to appear in the microstructure of filler metals,whereas the eutectic Si phase with the composition similar to pure Si composition is the least likely to appear.The thermodynamic calculation results are consistent with the experiment results. 展开更多
关键词 Al-si-ge filler metals MICROSTRUCTURE THERMODYNAMICS phase formation mechanism
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Novel Si/SiC heterojunction lateral double-diffused metal-oxide semiconductor field-effect transistor with p-type buried layer breaking silicon limit
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作者 Baoxing Duan Xin Huang +2 位作者 Haitao Song Yandong Wang Yintang Yang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第4期605-609,共5页
A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first ti... A novel silicon carbide(SiC) on silicon(Si) heterojunction lateral double-diffused metal-oxide semiconductor fieldeffect transistor with p-type buried layer(PBL Si/SiC LDMOS) is proposed in this paper for the first time.The heterojunction has breakdown point transfer(BPT) characteristics,and the BPT terminal technology is used to increase the breakdown voltage(BV) of Si/SiC LDMOS with the deep drain region.In order to further optimize the surface lateral electric field distribution of Si/SiC LDMOS with the deep drain region,the p-type buried layer is introduced in PBL Si/SiC LDMOS.The vertical electric field is optimized by Si/SiC heterojunction and the surface lateral electric field is optimized by the p-type buried layer,which greatly improves the BV of device and alleviates the relationship between BV and specific on-resistance(R_(on,sp)).Through TCAD simulation,when the drift region length is 20 μm,the BV is significantly improved from 249 V for the conventional Si LDMOS to 440 V for PBL Si/SiC LDMOS,increased by 77%;And the BV is improved from 384 V for Si/SiC LDMOS with the deep drain region to 440 V for the proposed structure,increased by 15%.The figure-of-merit(FOM) of the Si/SiC LDMOS with the deep drain region and PBL Si/SiC LDMOS are 4.26 MW/cm^(2) and 6.37 MW/cm^(2),respectively.For the PBL Si/SiC LDMOS with the drift length of 20 μm,the maximum FOM is 6.86 MW/cm^(2).The PBL Si/SiC LDMOS breaks conventional silicon limit. 展开更多
关键词 si/siC heterojunction LDMOS breakdown voltage specific on-resistance
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Interfacial photoconductivity effect of type-Ⅰ and type-Ⅱ Sb2Se3/Si heterojunctions for THz wave modulation
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作者 曹雪芹 黄媛媛 +7 位作者 席亚妍 雷珍 王静 刘昊楠 史明坚 韩涛涛 张蒙恩 徐新龙 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第11期82-86,共5页
An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivi... An in-depth understanding of the photoconductivity and photocarrier density at the interface is of great significance for improving the performance of optoelectronic devices. However, extraction of the photoconductivity and photocarrier density at the heterojunction interface remains elusive. Herein, we have obtained the photoconductivity and photocarrier density of 173 nm Sb2Se3/Si(type-Ⅰ heterojunction) and 90 nm Sb2Se3/Si(type-Ⅱ heterojunction) utilizing terahertz(THz) time-domain spectroscopy(THz-TDS) and a theoretical Drude model. Since type-Ⅰ heterojunctions accelerate carrier recombination and type-Ⅱ heterojunctions accelerate carrier separation, the photoconductivity and photocarrier density of the type-Ⅱ heterojunction(21.8×10^(4)S·m^(-1),1.5 × 10^(15)cm^(-3)) are higher than those of the type-Ⅰ heterojunction(11.8×10^(4)S·m^(-1),0.8×10^(15)cm^(-3)). These results demonstrate that a type-Ⅱ heterojunction is superior to a type-Ⅰ heterojunction for THz wave modulation. This work highlights THz-TDS as an effective tool for studying photoconductivity and photocarrier density at the heterojunction interface. In turn, the intriguing interfacial photoconductivity effect provides a way to improve the THz wave modulation performance. 展开更多
关键词 PHOTOCONDUCTIVITY Sb2 Se3/si heterojunctions THZ-TDS Drude model
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CdS/Si nanofilm heterojunctions based on amorphous silicon films:Fabrication,structures,and electrical properties
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作者 Yong Li Peng-Fei Ji +3 位作者 Yue-Li Song Feng-Qun Zhou Hong-Chun Huang Shu-Qing Yuan 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第2期385-389,共5页
Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunc... Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunctions are fabricated by using the radio frequency magnetron sputtering method to deposit the amorphous silicon nanofilms and Cd S nanofilms on the ITO glass in turn.The relation of current density to applied voltage(I-V)shows the obvious rectification effect.From the analysis of the double logarithm I-V curve it follows that below~2.73 V the electron behaviors obey the Ohmic mechanism and above~2.73 V the electron behaviors conform to the space charge limited current(SCLC)mechanism.In the SCLC region part of the traps between the Fermi level and conduction band are occupied,and with the increase of voltage most of the traps are occupied.It is believed that Cd S/Si nanofilm heterojunction is a potential candidate in the field of nano electronic and optoelectronic devices by optimizing its fabricating procedure. 展开更多
关键词 magnetron sputtering CdS/si nanofilm heterojunctions electron behaviors SCLC mechanisms
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The Effects of Fabrication Prameters and Electroforming Phenomenon on CdTe/Si (p) Heterojunction Photovoltaic Solar Cell
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作者 Wagah F. Mohammad 《Circuits and Systems》 2012年第1期42-47,共6页
The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical trouble... The In-doped CdTe/Si (p) heterostruture was fabricated and its electrical and photoelectrical properties were studied and interpreted. During the fabrication processes of CdTe/Si heterojunction, some practical troubles were encountered. However, the important one was the formation of the SiO2 thin oxide layer on the soft surface of the Si during the formation of the back contact. The silicon wafer was subjected to different chemical treatments in order to remove the thin oxide layer from the silicon wafer surfaces. It was found that the heterojunction with Si (p+) substrate gave relatively high open circuit voltage comparing with that of Si (p) substrate. Also an electroforming phenomenon had been observed in this structure for the first time which may be considered as a memory effect. It was observed that there are two states of conduction, non-conducting state and conducting state. The normal case is the non-conducting state. As the forward applied voltage increased beyond threshold value, it switches into the conducting state and remains in this state even after the voltage drops to zero. 展开更多
关键词 CDTE SOLAR CELLS CdTe/si heterojunction In-Doped CDTE
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a-Si/c-Si heterojunction solar cells on SiSiC ceramic substrates
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作者 LI Xudong XU Ying CHE Xiaoqi 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期186-189,共4页
Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollutio... Silicon thin-film solar cells are considered to be one of the most promising cells in the future for their potential advantages, such as low cost, high efficiency, great stability, simple processing, and none-pollution. In this paper, latest progress on poly-crystalline silicon solar cells on ceramic substrates achieved by our group was reported. Rapid thermal chemical vapor deposition (RTCVD) was used to deposited poly-crystalline silicon thin films, and the grains of as-grown film were enlarged by Zone-melting Recrystallization (ZMR). As a great change in cell′s structure, traditional diffused pn homojunction was replaced by a-Si/c-Si heterojunction, which lead is to distinct improvement in cell′s efficiency. A conversion efficiency of 3.42% has been achieved on 1 cm2 a-Si/c-Si heterojunction solar cell (Isc=16.93 mA, Voc=310.9 mV, FF=0.6493, AM=1.5 G, 24 ℃), while the cell with diffused homojunction only got an efficiency of 0.6%. It indicates that a-Si emitter formed at low temperature might be more suitable for thin film cell on ceramics. 展开更多
关键词 a-si/c-si heterojunction thin film solar cell ceramic substrate
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Simulation of a-Si:H/c-Si heterojunction solar cells: From planar junction to local junction
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作者 Haibin Huang Lang Zhou +1 位作者 Jiren Yuan Zhijue Quan 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第12期370-377,共8页
In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with lo... In order to obtain higher conversion efficiency and to reduce production cost for hydrogenated amorphous silicon/crystalline silicon(a-Si:H/c-Si) based heterojunction solar cells, an a-Si:H/c-Si heterojunction with localized p–n structure(HACL) is designed. A numerical simulation is performed with the ATLAS program. The effect of the a-Si:H layer on the performance of the HIT(heterojunction with intrinsic thin film) solar cell is investigated. The performance improvement mechanism for the HACL cell is explored. The potential performance of the HACL solar cell is compared with those of the HIT and HACD(heterojunction of amorphous silicon and crystalline silicon with diffused junction) solar cells.The simulated results indicate that the a-Si:H layer can bring about much absorption loss. The conversion efficiency and the short-circuit current density of the HACL cell can reach 28.18% and 43.06 m A/cm^2, respectively, and are higher than those of the HIT and HACD solar cells. The great improvement are attributed to(1) decrease of optical absorption loss of a-Si:H and(2) decrease of photocarrier recombination for the HACL cell. The double-side local junction is very suitable for the bifacial solar cells. For an HACL cell with n-type or p-type c-Si base, all n-type or p-type c-Si passivating layers are feasible for convenience of the double-side diffusion process. Moreover, the HACL structure can reduce the consumption of rare materials since the transparent conductive oxide(TCO) can be free in this structure. It is concluded that the HACL solar cell is a promising structure for high efficiency and low cost. 展开更多
关键词 silicon solar cell a-si:H/c-si heterojunction short-circuit current local junction
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非化学计量比MnFe(P,Si,Ge)合金在低场下的磁热效应 被引量:14
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作者 王高峰 松林 +3 位作者 李福安 哈斯朝鲁 李新文 特古斯 《金属学报》 SCIE EI CAS CSCD 北大核心 2007年第8期889-892,共4页
通过XRD和磁性测量对非化学计量比MnFe(P,Si,Ge)合金的相组成和磁性进行了研究.xRD分析表明。所有样品都具有Fe_2P型六角结构,主相为(Re,Mn)_2(P,Si,Ge),并存在少量的第二相(Fe,Mn)_3(Si,Ge).过量的Mn和Fe都会使合金的Curie温度降低,由3... 通过XRD和磁性测量对非化学计量比MnFe(P,Si,Ge)合金的相组成和磁性进行了研究.xRD分析表明。所有样品都具有Fe_2P型六角结构,主相为(Re,Mn)_2(P,Si,Ge),并存在少量的第二相(Fe,Mn)_3(Si,Ge).过量的Mn和Fe都会使合金的Curie温度降低,由343K(化学计量比)降低到294K(过量Mn)和286K(过量Fe);过量的Mn能减小热滞,而过量的Fe会使热滞增加;磁熵变也有所减小,在1.5T的磁场下,最大磁熵变由5.2J/(kg·K)(化学计量比)减小到4.9J/(kg·K)(过量Mn)和3.8J/(kg·K)(过量Fe). 展开更多
关键词 MnFe(P si ge)合金 非化学计量比 CURIE温度 热滞 磁熵变
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原材料Gd对Gd-Si-Ge合金巨磁热效应影响的研究 被引量:12
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作者 吴卫 赵平 +3 位作者 姜自莲 李远辉 朱向东 周廷栋 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2003年第11期962-964,共3页
采用国产钆制作Gd-Si-Ge合金,测量H-M曲线,计算磁熵变(-ΔSm)判断其磁热效应。发现采用商业级钆配制合金时,由于杂质抑制了材料的一级相变,未发现巨磁热效应。经提纯后的钆尽管没有Ames实验室的纯度高,但配制的合金具有典型的一级相变,-... 采用国产钆制作Gd-Si-Ge合金,测量H-M曲线,计算磁熵变(-ΔSm)判断其磁热效应。发现采用商业级钆配制合金时,由于杂质抑制了材料的一级相变,未发现巨磁热效应。经提纯后的钆尽管没有Ames实验室的纯度高,但配制的合金具有典型的一级相变,-ΔSm值基本上达到Ames实验室报道的数据,而且居里点有所提高。 展开更多
关键词 GD Gd—sige合金 巨磁热效应
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热丝CVD法在单晶硅衬底上低温外延生长Si和Ge薄膜的研究 被引量:6
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作者 黄海宾 沈鸿烈 +2 位作者 唐正霞 吴天如 张磊 《人工晶体学报》 EI CAS CSCD 北大核心 2010年第3期603-607,共5页
采用热丝CVD法在单晶Si衬底上进行了Si和Ge薄膜的低温外延生长,用XRD和Raman谱对其结构性能进行了分析。结果表明:在衬底温度200℃时,Si(111)单晶衬底上外延生长出了Raman峰位置为521.0cm-1;X射线半峰宽(FWHM)为5.04cm-1。结晶质量非常... 采用热丝CVD法在单晶Si衬底上进行了Si和Ge薄膜的低温外延生长,用XRD和Raman谱对其结构性能进行了分析。结果表明:在衬底温度200℃时,Si(111)单晶衬底上外延生长出了Raman峰位置为521.0cm-1;X射线半峰宽(FWHM)为5.04cm-1。结晶质量非常接近于体单晶的(111)取向的本征Si薄膜;在衬底温度为300℃时,在Si(100)单晶衬底上异质外延,得到了Raman峰位置为300.3cm-1的Ge薄膜,Ge薄膜的晶体取向为Ge(220)。研究表明热丝CVD是一种很好的低温外延薄膜的方法。 展开更多
关键词 热丝CVD 低温外延 单晶si衬底 si ge
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离子束溅射制备Si/Ge多层膜的结晶研究 被引量:5
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作者 邓书康 陈刚 +4 位作者 高立刚 陈亮 俞帆 刘焕林 杨宇 《人工晶体学报》 EI CAS CSCD 北大核心 2005年第2期288-291,共4页
采用离子束溅射制备Si/Ge多层膜,通过X射线小角衍射计算其周期厚度及各子层的厚度,用Raman光谱对Si/Ge多层膜的微观结构及Si子层的结构进行表征。结果表明,所制备的Si/Ge多层膜中,当Ge子层的厚度为6. 2nm时, Si子层的结晶质量较好,表明... 采用离子束溅射制备Si/Ge多层膜,通过X射线小角衍射计算其周期厚度及各子层的厚度,用Raman光谱对Si/Ge多层膜的微观结构及Si子层的结构进行表征。结果表明,所制备的Si/Ge多层膜中,当Ge子层的厚度为6. 2nm时, Si子层的结晶质量较好,表明适量的Ge含量有诱导Si结晶的作用。 展开更多
关键词 si/ge多层膜 离子束溅射 拉曼光谱 制备方法 薄膜 结构分析
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Si基Ge异质结构发光器件的研究进展 被引量:3
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作者 刘智 李传波 +1 位作者 薛春来 成步文 《中国光学》 EI CAS 2013年第4期449-456,共8页
近年来,与Si的CMOS工艺相兼容的Ge/Si异质结构发光器件取得很多重要的进展。本文概述了Si基Ge异质结构发光器件的最新成果,如Ge/Si量子点发光二极管、Si衬底上的Ge发光二极管及激光器和Ge/SiGe多量子阱发光二极管,分别描述了这些器件的... 近年来,与Si的CMOS工艺相兼容的Ge/Si异质结构发光器件取得很多重要的进展。本文概述了Si基Ge异质结构发光器件的最新成果,如Ge/Si量子点发光二极管、Si衬底上的Ge发光二极管及激光器和Ge/SiGe多量子阱发光二极管,分别描述了这些器件的特点和增强其发光特性的途径。最后展望了Si基Ge异质结构发光器件的发展趋势,指出尽管Si基Ge异质结构发光器件获得了很大的发展,但是器件的发光效率仍然很低,离实用还有一定距离,还需要在材料和器件的结构方面有更多的创新。 展开更多
关键词 发光器件 发光二极管 ge ge si量子点 ge sige量子阱
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SiO_2/Si(111)表面Ge量子点的生长研究 被引量:3
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作者 王科范 盛斌 +3 位作者 刘金锋 徐彭寿 潘海滨 韦世强 《真空科学与技术学报》 EI CAS CSCD 北大核心 2005年第5期358-361,366,共5页
Si衬底用化学方法清洗后,表面大约残余1.0 nm厚SiO2薄膜。利用原子力显微镜(AFM)和反射高能电子衍射(RHEED)来研究温度和Ge蒸发厚度对在SiO2薄膜表面生长的Ge量子点的影响。实验结果表明,当衬底温度超过500℃时,SiO2开始与Ge原子发生化... Si衬底用化学方法清洗后,表面大约残余1.0 nm厚SiO2薄膜。利用原子力显微镜(AFM)和反射高能电子衍射(RHEED)来研究温度和Ge蒸发厚度对在SiO2薄膜表面生长的Ge量子点的影响。实验结果表明,当衬底温度超过500℃时,SiO2开始与Ge原子发生化学反应,并形成与Si(111)表面直接外延的Ge量子点。在650℃时,只有Ge的厚度达到0.5nm时,Ge量子点才开始形成。 展开更多
关键词 ge量子点 siO2薄膜 si(111) 原子力显微镜(AFM) 反射高能电子衍射(RHEED)
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离子束溅射制备Si/Ge多层膜及红外吸收性能研究 被引量:5
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作者 刘焕林 郝瑞亭 杨宇 《人工晶体学报》 EI CAS CSCD 北大核心 2006年第2期280-284,共5页
采用离子束溅射方法在S i衬底上制备S i/Ge多层膜。通过改变生长温度、溅射速率等因素得到一系列S i/Ge多层膜样品。通过X射线衍射、拉曼散射、原子力显微分析(AFM)等表征方法研究薄膜结构与生长条件的关系。在小束流(10mA)、室温条件... 采用离子束溅射方法在S i衬底上制备S i/Ge多层膜。通过改变生长温度、溅射速率等因素得到一系列S i/Ge多层膜样品。通过X射线衍射、拉曼散射、原子力显微分析(AFM)等表征方法研究薄膜结构与生长条件的关系。在小束流(10mA)、室温条件下制备出界面清晰、周期完整的S i/Ge多层膜。通过红外吸收谱的测量发现薄膜样品具有较好的红外吸收性能。 展开更多
关键词 si/ge多层膜 离子束溅射 红外探测材料
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