luid jet polishing(FJP)is a non-contact polishing technology that can fabricate free-form optical surfaces with sub-micron-level form accuracy and nano-level surface roughness,especially for hard and brittle materials...luid jet polishing(FJP)is a non-contact polishing technology that can fabricate free-form optical surfaces with sub-micron-level form accuracy and nano-level surface roughness,especially for hard and brittle materials.The surface generation model of FJP can be used to guide the determination and optimization of process parameters and is of great significance for understanding the evolution mechanism of surface microtopography.However,predictive models for the microscopic topography of polished surfaces are still lacking.This study established a macroscopic surface profile model for predicting 3D material removal characteristics and surface texture by combining the 3D computer fluid dynamics(CFD)simulation model and single-particle erosion mechanism.A fractal theory-based erosion model has been built to calculate the material removal caused by the erosion of a single abrasive particle on the rough surface;thus,it predicts the micro-topography and surface roughness of the polished samples.A series of polishing experiments were conducted to analyze the feasibility and accuracy of the model quantitatively and study the influence mechanism of process parameters on the material removal characteristics and surface quality.Results indicated that the models could well predict material removal and surface roughness.The prediction accuracy of the surface roughness Ra and maximum removal depth is better than 91.6%and 90%,respectively.It is also found that the material removal rate of FJP could reach 0.517 mm3/min,and the surface roughness convergence rate could reach 62.9%.展开更多
As a crucial part in micro-electromechanical manufacture,local ultra-precision processing of highly ductile copper is expected to be realized by fluid jet polishing(FJP),which widely utilized in optical elements.Since...As a crucial part in micro-electromechanical manufacture,local ultra-precision processing of highly ductile copper is expected to be realized by fluid jet polishing(FJP),which widely utilized in optical elements.Since copper exhibits different wear behavior from stiff and brittle material,there is currently no abrasive wear prediction model applicable for copper to investigate the polishing mechanism.This research reveals that the copper material removal is dominated by deformation wear rather than cutting wear through abrasive jet impact experiments and localized wear scars analysis.A three-dimensional gas-liquid-particle triphasic wear model for copper in FJP is developed by considering impact energy and wear mechanism simultaneously.Ultimately,validation assessments at various working pressures and impingement angles achieve the goodness-of-fit up to 0.92–0.97 in quantitative comparison between simulations and experimental measurements,which demonstrate the wear prediction ability of the proposed model.This investigation facilitates a better understanding of copper wear mechanism and provides theoretical guidance for FJP process optimization.展开更多
The effects of impacting particles from a jet of liquid on the removal of a surface material(on the impacted workpiece)were investigated.Experimental observations show that the cross section of the material removed ch...The effects of impacting particles from a jet of liquid on the removal of a surface material(on the impacted workpiece)were investigated.Experimental observations show that the cross section of the material removed changed fromʹWʹ‐shaped toʹUʹ‐shaped as the size of abrasive particles was increased.Comparisons between removed material profiles and particle collision distributions indicate that the particle-surface collisions are the main reason for the material removal.The deduced number of atoms removed by a single collision implies that a transition occurs in the removal mode.For nanoscale particles,the polished surface is likely to be removed in an atom‐by‐atom manner,possibly due to the chemisorption of the impacting particles on the impacted surface.Contrarily,for the case of microscale particles,bulk material removal produced by particle bombardment is more likely to occur.The present mechanism of material removal for particle-surface collisions is further corroborated experimentally.展开更多
Fluid jet polishing(FJP)is a versatile polishing process that has many advantages compared to other polishing processes.Stand-off distance(SOD)is one of the key parameters in flu id jet polishi ng.However,relatively l...Fluid jet polishing(FJP)is a versatile polishing process that has many advantages compared to other polishing processes.Stand-off distance(SOD)is one of the key parameters in flu id jet polishi ng.However,relatively little research work has been carried out to investigate its effect of SOD on material removal characteristics and surface generation in FJP.In this paper,a systematic investigation of the effect of SOD on the tool influence function and surface topography in FJP was conducted.Experiments were designed for FJP two kinds of materials corresponding to ductile and brittle materials.They are nickel copper(NiCu)alloy and BK7 optical glass,respectively.In this study,the SOD was varied from 2 to 35 mm.Analysis and discussions were made on its effect on the shape of TIF,material removal rate,and surface topography.It is interesting to note that the TIF shape becomes a Gaussian-like shape with large SOD both on NiCu and BK7,which provides a novel way to optimize the TIF in FJP.The variation of the material removal rate and surface roughness versus SOD on NiCu and BK7 were also determined from the experimental results.Moreover,the surface topography of NiCu and BK7 were characterized from the results measured from the white light interferometer and scan electron microscope.The outcome of the study provides a better understanding of the material removal characteristics and surface generation mechanism in FJP.展开更多
基金the National Natural Science Foundation of China(No.51905376).
文摘luid jet polishing(FJP)is a non-contact polishing technology that can fabricate free-form optical surfaces with sub-micron-level form accuracy and nano-level surface roughness,especially for hard and brittle materials.The surface generation model of FJP can be used to guide the determination and optimization of process parameters and is of great significance for understanding the evolution mechanism of surface microtopography.However,predictive models for the microscopic topography of polished surfaces are still lacking.This study established a macroscopic surface profile model for predicting 3D material removal characteristics and surface texture by combining the 3D computer fluid dynamics(CFD)simulation model and single-particle erosion mechanism.A fractal theory-based erosion model has been built to calculate the material removal caused by the erosion of a single abrasive particle on the rough surface;thus,it predicts the micro-topography and surface roughness of the polished samples.A series of polishing experiments were conducted to analyze the feasibility and accuracy of the model quantitatively and study the influence mechanism of process parameters on the material removal characteristics and surface quality.Results indicated that the models could well predict material removal and surface roughness.The prediction accuracy of the surface roughness Ra and maximum removal depth is better than 91.6%and 90%,respectively.It is also found that the material removal rate of FJP could reach 0.517 mm3/min,and the surface roughness convergence rate could reach 62.9%.
基金supported by the National Natural Science Foundation of China(No.52175175)Shenzhen Science and Technology Program(No.JCYJ20220818102809020).
文摘As a crucial part in micro-electromechanical manufacture,local ultra-precision processing of highly ductile copper is expected to be realized by fluid jet polishing(FJP),which widely utilized in optical elements.Since copper exhibits different wear behavior from stiff and brittle material,there is currently no abrasive wear prediction model applicable for copper to investigate the polishing mechanism.This research reveals that the copper material removal is dominated by deformation wear rather than cutting wear through abrasive jet impact experiments and localized wear scars analysis.A three-dimensional gas-liquid-particle triphasic wear model for copper in FJP is developed by considering impact energy and wear mechanism simultaneously.Ultimately,validation assessments at various working pressures and impingement angles achieve the goodness-of-fit up to 0.92–0.97 in quantitative comparison between simulations and experimental measurements,which demonstrate the wear prediction ability of the proposed model.This investigation facilitates a better understanding of copper wear mechanism and provides theoretical guidance for FJP process optimization.
基金The work is financially supported by the National Natural Science Foundation of China(Nos.51575054 and 51527901)the Fundamental Research Funds for the Central Universities(No.YX2013‐02).
文摘The effects of impacting particles from a jet of liquid on the removal of a surface material(on the impacted workpiece)were investigated.Experimental observations show that the cross section of the material removed changed fromʹWʹ‐shaped toʹUʹ‐shaped as the size of abrasive particles was increased.Comparisons between removed material profiles and particle collision distributions indicate that the particle-surface collisions are the main reason for the material removal.The deduced number of atoms removed by a single collision implies that a transition occurs in the removal mode.For nanoscale particles,the polished surface is likely to be removed in an atom‐by‐atom manner,possibly due to the chemisorption of the impacting particles on the impacted surface.Contrarily,for the case of microscale particles,bulk material removal produced by particle bombardment is more likely to occur.The present mechanism of material removal for particle-surface collisions is further corroborated experimentally.
基金The work described in this paper was mainly supported by General Research Fund from the Research Grants Council(Project No.:15200119)Innovation and Technology Commission(ITC)(Project No.:ITS/076/18FP)of Hong Kong Special Administrative Region(HKSAR),Chinathe financial support from the Guangdong Natural Science Foundation Programme 2019-2020(Project No.:2O19A1515O12O15).
文摘Fluid jet polishing(FJP)is a versatile polishing process that has many advantages compared to other polishing processes.Stand-off distance(SOD)is one of the key parameters in flu id jet polishi ng.However,relatively little research work has been carried out to investigate its effect of SOD on material removal characteristics and surface generation in FJP.In this paper,a systematic investigation of the effect of SOD on the tool influence function and surface topography in FJP was conducted.Experiments were designed for FJP two kinds of materials corresponding to ductile and brittle materials.They are nickel copper(NiCu)alloy and BK7 optical glass,respectively.In this study,the SOD was varied from 2 to 35 mm.Analysis and discussions were made on its effect on the shape of TIF,material removal rate,and surface topography.It is interesting to note that the TIF shape becomes a Gaussian-like shape with large SOD both on NiCu and BK7,which provides a novel way to optimize the TIF in FJP.The variation of the material removal rate and surface roughness versus SOD on NiCu and BK7 were also determined from the experimental results.Moreover,the surface topography of NiCu and BK7 were characterized from the results measured from the white light interferometer and scan electron microscope.The outcome of the study provides a better understanding of the material removal characteristics and surface generation mechanism in FJP.