Digital structured light （SL） profilometry is increasingly used in three-dimensional （3D） measurement technology. However, the nonlinearity of the off-the-shelf projectors and cameras seriously reduces the measure...Digital structured light （SL） profilometry is increasingly used in three-dimensional （3D） measurement technology. However, the nonlinearity of the off-the-shelf projectors and cameras seriously reduces the measurement accuracy. In this paper, first, we review the nonlinear effects of the projector-camera system in the phase-shifting structured light depth measurement method. We show that high order harmonic wave components lead to phase error in the phase-shifting method. Then a practical method based on frequency domain filtering is proposed for nonlinear error reduction. By using this method, the nonlinear calibration of the SL system is not required. Moreover, both the nonlinear effects of the projector and the camera can be effectively reduced. The simulations and experiments have verified our nonlinear correction method.展开更多
A phase-shifting digital holography scheme developed to investigate internal defects in artworks is described. Phase-shifting is utilized to obtain a clear reconstructed object wave from a rough surface texture. A rev...A phase-shifting digital holography scheme developed to investigate internal defects in artworks is described. Phase-shifting is utilized to obtain a clear reconstructed object wave from a rough surface texture. A reverse-transform algorithm is employed to reconstruct the object wave on its original position of unknown distance or the imaging position from the object wave information on the holographic plane. To get the clearest reconstruction the exact registration of the unknown distance is determined by applying the intensity sum as the auto-focusing function, The spatial resolution of the reconstruction image is also investigated for a variety of affecting factors. Laboratory results of reconstruction images under deformation are presented.展开更多
Although the phase-shift seismic processing method has characteristics of high accuracy, good stability, high efficiency, and high-dip imaging, it is not able to adapt to strong lateral velocity variation. To overcome...Although the phase-shift seismic processing method has characteristics of high accuracy, good stability, high efficiency, and high-dip imaging, it is not able to adapt to strong lateral velocity variation. To overcome this defect, a finite-difference method in the frequency-space domain is introduced in the migration process, because it can adapt to strong lateral velocity variation and the coefficient is optimized by a hybrid genetic and simulated annealing algorithm. The two measures improve the precision of the approximation dispersion equation. Thus, the imaging effect is improved for areas of high-dip structure and strong lateral velocity variation. The migration imaging of a 2-D SEG/EAGE salt dome model proves that a better imaging effect in these areas is achieved by optimized phase-shift migration operator plus a finite-difference method based on a hybrid genetic and simulated annealing algorithm. The method proposed in this paper is better than conventional methods in imaging of areas of high-dip angle and strong lateral velocity variation.展开更多
Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming t...Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional fiveinterferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.展开更多
We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. ...We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.展开更多
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properti...We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.展开更多
Phase-shifting measurement and its error estimation method were studied according to the holographic principle.A function of synchronous superposition of object complex amplitude reconstructed from N-step phase-shifti...Phase-shifting measurement and its error estimation method were studied according to the holographic principle.A function of synchronous superposition of object complex amplitude reconstructed from N-step phase-shifting through one integral period(N-step phase-shifting function for short)was proposed.In N-step phase-shifting measurement,the interferograms are seen as a series of in-line holo-grams and the reference beam is an ideal parallel-plane wave.So the N-step phase-shifting function can be obtained by multiplying the interferogram by the original reference wave.In ideal conditions,the proposed method is a kind of synchro-nous superposition algorithm in which the complex ampli-tude is separated,measured and superposed.When error exists in measurement,the result of the N-step phase-shifting function is the optimal expected value of the least-squares fitting method.In the above method,the N+1-step phase-shifting function can be obtained from the N-step phase-shifting function.It shows that the N-step phase-shifting function can be separated into two parts:the ideal N-step phase-shifting function and its errors.The phase-shifting errors in N-steps phase-shifting phase measurement can be treated the same as the relative errors of amplitude and intensity under the understanding of the N+1-step phase-shifting function.The difficulties of the error estimation in phase-shifting phase measurement were restricted by this error esti-mation method.Meanwhile,the maximum error estimation method of phase-shifting phase measurement and its formula were proposed.展开更多
Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the m...Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.展开更多
基金Project supported by the Science and Technology Major Projects of Zhejiang Province,China(Grant No.2013C03043-5)
文摘Digital structured light （SL） profilometry is increasingly used in three-dimensional （3D） measurement technology. However, the nonlinearity of the off-the-shelf projectors and cameras seriously reduces the measurement accuracy. In this paper, first, we review the nonlinear effects of the projector-camera system in the phase-shifting structured light depth measurement method. We show that high order harmonic wave components lead to phase error in the phase-shifting method. Then a practical method based on frequency domain filtering is proposed for nonlinear error reduction. By using this method, the nonlinear calibration of the SL system is not required. Moreover, both the nonlinear effects of the projector and the camera can be effectively reduced. The simulations and experiments have verified our nonlinear correction method.
文摘A phase-shifting digital holography scheme developed to investigate internal defects in artworks is described. Phase-shifting is utilized to obtain a clear reconstructed object wave from a rough surface texture. A reverse-transform algorithm is employed to reconstruct the object wave on its original position of unknown distance or the imaging position from the object wave information on the holographic plane. To get the clearest reconstruction the exact registration of the unknown distance is determined by applying the intensity sum as the auto-focusing function, The spatial resolution of the reconstruction image is also investigated for a variety of affecting factors. Laboratory results of reconstruction images under deformation are presented.
基金the Open Fund(PLC201104)of State Key Laboratory of Oil and Gas Reservoir Geology and Exploitation (Chengdu University of Technology)the National Natural Science Foundation of China(No.61072073)the Key Project of Education Commission of Sichuan Province(No.10ZA072)
文摘Although the phase-shift seismic processing method has characteristics of high accuracy, good stability, high efficiency, and high-dip imaging, it is not able to adapt to strong lateral velocity variation. To overcome this defect, a finite-difference method in the frequency-space domain is introduced in the migration process, because it can adapt to strong lateral velocity variation and the coefficient is optimized by a hybrid genetic and simulated annealing algorithm. The two measures improve the precision of the approximation dispersion equation. Thus, the imaging effect is improved for areas of high-dip structure and strong lateral velocity variation. The migration imaging of a 2-D SEG/EAGE salt dome model proves that a better imaging effect in these areas is achieved by optimized phase-shift migration operator plus a finite-difference method based on a hybrid genetic and simulated annealing algorithm. The method proposed in this paper is better than conventional methods in imaging of areas of high-dip angle and strong lateral velocity variation.
基金the Ministry of Science and Technology of China under Grant No.2002DEA20014.
文摘Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional fiveinterferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.
基金supported by the National Science and Technology Major Project,China(No.2009ZX02202005)
文摘We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.
基金supported by the National Research Foundation and the Ministry of Education, Science and Engineering of Korea through the National Creative Re-search Initiative Program (R16-2007-030-01001-0)
文摘We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.
基金supported by the National Natural Science Foundation of China (Grant No.60467003 and 60277032)。
文摘Phase-shifting measurement and its error estimation method were studied according to the holographic principle.A function of synchronous superposition of object complex amplitude reconstructed from N-step phase-shifting through one integral period(N-step phase-shifting function for short)was proposed.In N-step phase-shifting measurement,the interferograms are seen as a series of in-line holo-grams and the reference beam is an ideal parallel-plane wave.So the N-step phase-shifting function can be obtained by multiplying the interferogram by the original reference wave.In ideal conditions,the proposed method is a kind of synchro-nous superposition algorithm in which the complex ampli-tude is separated,measured and superposed.When error exists in measurement,the result of the N-step phase-shifting function is the optimal expected value of the least-squares fitting method.In the above method,the N+1-step phase-shifting function can be obtained from the N-step phase-shifting function.It shows that the N-step phase-shifting function can be separated into two parts:the ideal N-step phase-shifting function and its errors.The phase-shifting errors in N-steps phase-shifting phase measurement can be treated the same as the relative errors of amplitude and intensity under the understanding of the N+1-step phase-shifting function.The difficulties of the error estimation in phase-shifting phase measurement were restricted by this error esti-mation method.Meanwhile,the maximum error estimation method of phase-shifting phase measurement and its formula were proposed.
基金funding from the Enterprise Ireland and from the European Union’s Horizon 2020 Research and Innovation Programme under the Marie Skłodowska-Curie grant agreement(Grant No.713654)the National Natural Science Foundation of China(Grant No.51705070)the Science Foundation Ireland(SFI)(Grant No.15/RP/B3208).
文摘Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.
