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Dependence of R-G Currenton Bulk Traps Characteristics and Silicon Film Structure in SOI Gated-Diode
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作者 何进 黄如 +2 位作者 张兴 孙飞 王阳元 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第1期18-24,共7页
The dependence of the Recombination- Generation( R- G) current on the bulk trap characteristics and sili- con film structure in SOI lateral p+ p- n+ diode has been analyzed num erically by using the simulation tool,D... The dependence of the Recombination- Generation( R- G) current on the bulk trap characteristics and sili- con film structure in SOI lateral p+ p- n+ diode has been analyzed num erically by using the simulation tool,DESSIS- ISE.By varying the bulk trap characteristics such as the trap density and energy level spectrum systematically,the dependence of the R- G current on both of them has been dem onstrated in details.Moreover,the silicon film doping concentration and thickness are changed to make silicon body varies from the fully- depletion m ode into the partial- ly- depletion one.The influence of the transfer of silicon body characteristics on the R- G currenthas also been care- fully examined.A better understanding is obtained of the behavior of bulk trap R- G current in the SOI lateral gat- ed- diode. 展开更多
关键词 R- G current bulk trap energy level silicon film structure SOI gated- diode
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Control of Donor−Acceptor Conjugated Polymer Crystallization for Optimized Film Structures in Organic Transistors
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作者 Xinxiu Cao Yanchun Han 《Polymer Science & Technology》 2025年第5期413-435,共23页
Donor−acceptor(D−A)conjugated polymers are promising materials for organic transistors including organic field-effect transistors(OFETs)and organic electrochemical transistors(OECTs).The aggregated structure of D−A co... Donor−acceptor(D−A)conjugated polymers are promising materials for organic transistors including organic field-effect transistors(OFETs)and organic electrochemical transistors(OECTs).The aggregated structure of D−A conjugated polymer films,which strongly depends on the crystallization process,is crucial for the device performance.However,the crystallization of D−A conjugated polymers is complicated during solution processing,and the optimal film structure is various in different applications.Therefore,it is significantly important to reveal the relationship between the processing conditions and the resulting aggregated structures.This review provides a systematic understanding of how to control the aggregated structure of D−A conjugated polymer films from the fundamental mechanisms of polymer crystallization.We first discuss the possible nucleation and growth mechanisms of D−A conjugated polymers based on traditional theories or models and current findings.Then,recent progress in controlling the structure of D−A conjugated polymer films for OFETs and OECTs is reviewed.D−A conjugated polymers generally adopt chain-extended crystallization due to their strongly rigid backbone,which makes homogeneous nucleation difficult.A common strategy to control the aggregated structure of D−A conjugated polymer films is to manipulate the heterogeneous nucleation process by tuning the preaggregation.Besides,the effect of the crystallization rate and complicated conditions on the aggregated structure of D−A conjugated polymer films is also discussed.Finally,a concise summary is provided,followed by some current challenges in controlling the aggregated structure of D−A conjugated polymer films. 展开更多
关键词 D−A conjugated polymers CRYSTALLIZATION film structure organic field-effect transistors organic electrochemical transistors solution processing
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Post-buckling analysis of square film under in-plane torsion:experiment and simulation comparisons
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作者 Yiming Shan Liang Wang Wenwang Wu 《Acta Mechanica Sinica》 2026年第1期220-232,共13页
Thin-film structures are widely used in industry due to their advantages in lightweight,flexibility and deployability.This paper investigates the wrinkling deformation pattern of square film subjected to in-plane tors... Thin-film structures are widely used in industry due to their advantages in lightweight,flexibility and deployability.This paper investigates the wrinkling deformation pattern of square film subjected to in-plane torsion through the post-buckling theory of shell,with the geometric nonlinear behavior derived by energy principle and analyzed with finite element method.An equal-sized experimental verification platform is designed and fabricated,and the wrinkling surface of polyimide film driven by rotary motor is reconstructed by 3D-digital image correlation measurement and verified with finite element simulation comparisons.Wrinkling region within the film expands continuously as the torsion proceeds,accompanied by multiple wrinkling configuration transitions throughout the complete evolutionary process.Due to the non-axial symmetry between structure and loading,significant discrepancies arise in amplitude,span and wavelength between different stripes,effects of thickness,torsion radius and pre-stretch on wrinkling pattern configuration are further discussed.This study can provide valuable references for understanding the wrinkling mechanism of hard film under complex torsion loading. 展开更多
关键词 film structure Post-buckling theory Wrinkling configuration 3D-DIC measurement Finite element analysis
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OptoGPT: A foundation model for inverse design in optical multilayer thin film structures 被引量:6
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作者 Taigao Ma Haozhu Wang L.Jay Guo 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第7期4-16,共13页
Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design... Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design targets,or are difficult to suit for different types of structures,e.g.,designing for different materials at each layer.These methods also cannot accommodate versatile design situations under different angles and polarizations.In addition,how to benefit practical fabrications and manufacturing has not been extensively considered yet.In this work,we introduce OptoGPT(Opto Generative Pretrained Transformer),a decoder-only transformer,to solve all these drawbacks and issues simultaneously. 展开更多
关键词 multilayer thin film structure inverse design foundation models deep learning structural color
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Effect of the Structure and Valence State on the Properties of VO_2 Thin Films 被引量:1
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作者 LUYong LINLi-bin 《Semiconductor Photonics and Technology》 CAS 2001年第2期98-103,共6页
VO 2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural, optical and electrical properties of the samples were ch... VO 2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural, optical and electrical properties of the samples were characterized by using XRD、XPS、UV-VIS and electrical measurements. The switching parameters of VO 2 thin film were investigated too. The results indicate that before and after phase transition the resistance of VO 2 thin films changes about three orders of magnitude, the variation of film transmittance of 40 % has been carried out with the absorptivity switching velocity of about 0.260 7 /min at 900 nm . The structural property of samples has been improved but the phase-transition properties have been decreased by increasing the annealing time and annealing temperature. The valence of V ions and the structure of samples have great effect on phase transition properties of VO 2 thin films. Discussion on the effects of annealing time and annealing temperature on the phase-transition temperature and hysteresis width shows that the best reasonable annealing time and annealing temperature can be achieved. 展开更多
关键词 VO 2 thin film Phase transition film structure Valence state
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Flexible,robust,sandwich structure polyimide composite film with alternative MXene and Ag NWs layers for electromagnetic interference shielding 被引量:3
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作者 Yu Zhang Qiang Gao +7 位作者 Xianzhe Sheng Shuai Zhang Junjie Chen Yan Ma Jianbin Qin Yongsheng Zhao Xuetao Shi Guangcheng Zhang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2023年第28期194-203,共10页
The design and fabrication of electromagnetic interference shielding films with a novel structure to eliminate undesirable electromagnetic pollution is an important research direction.However,it is still a challenge t... The design and fabrication of electromagnetic interference shielding films with a novel structure to eliminate undesirable electromagnetic pollution is an important research direction.However,it is still a challenge to combine and organize nanofillers in different dimensions into the structured network in polymer-based electromagnetic interference(EMI)shielding composites.In this work,a sandwich struc-ture polyimide(PI)composite film with alternative 2D-MXene network and 1D-Silver nanowires(Ag NWs)network was prepared through the“electrospinning-immersion-hot pressing”method.With the increase of Ag NWs content,the EMI shielding effectiveness(SE)gradually increases while maintaining good flexibility and mechanical robustness.The EMI SE and the tensile strength of 150μm thick sand-wich composite film can reach up to 79.54 dB and 39.82 MPa,respectively.The prepared flexible and robust PI composite film with a sandwich structure has high EMI SE with less metal content,which can provide guidelines for the development of high-performance EMI polymeric films with potentials in wearable devices and equipment. 展开更多
关键词 Electromagnetic interference shielding Sandwich structure composite film ELECTROSPINNING IMMERSION Hot pressing
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Emission enhancement and color modulation of Tm(Ho)/Yb codoped Gd_(2)(MoO_(4))_(3) thin films via the use of multilayered structure 被引量:3
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作者 Liang Li Fei Xing +2 位作者 Xueru Zhang Haoyue Hao Yuxiao Wang 《Journal of Rare Earths》 SCIE EI CAS CSCD 2021年第7期765-771,I0001,共8页
The multilayered structure thin films(Gd_(2)(MoO_(4))_(3):Ho(Tm)/Yb@Gd_(2)(MoO_(4))_(3):Yb) were prepared through sol-gel and spin-coating method,while the average thinness was nearly 140 nm.We investigated the up-con... The multilayered structure thin films(Gd_(2)(MoO_(4))_(3):Ho(Tm)/Yb@Gd_(2)(MoO_(4))_(3):Yb) were prepared through sol-gel and spin-coating method,while the average thinness was nearly 140 nm.We investigated the up-conversion luminescence of Gd_(2)(MoO_(4))_(3):Ho(Tm)/Yb@Gd_(2)(MoO_(4))_(3):Yb thin films,The results show that the double-layer structured thin films are able to increase the emission intensity.The fluorescence enhancement factors of the luminescence from Gd_(2)(MoO_(4))_(3):Ho/Yb@Gd_(2)(MoO_(4))_(3):Yb thin films,located at540 and 662 nm,reach 7.5 and 4.3,respectively.And the enhancement factors of emissions located at450,475 and 650 nm(Gd_(2)(MoO_(4))_(3):Tm/Yb@Gd_(2)(MoO_(4))_(3):Yb) reach 9,2 and 2,respectively.The considerable enhancement is due to the suppression of surface quenching and energy harvesting via the Yb ions in the outer shell.In addition,the emission color of thin films can be modulated from yellow to blue via tuning the number of Gd_(2)(MoO_(4))_(3):Ho/Yb and Gd_(2)(MoO_(4))_(3):Tm/Yb layers,which provides a feasible strategy to tune the up-conversion emission color. 展开更多
关键词 Emission enhancement Multilayered-layer structured thin films Emission color tuning Up-conversion materials Rare earths
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Influence of Deposition Temperature and Pressure on Microstructure and Tribological Properties of Arc Ion Plated Ag Films 被引量:2
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作者 HU Ming GAO Xiaoming +3 位作者 SUN Jiayi WENG Lijun ZHOU Feng LIU Weimin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第4期838-844,共7页
The films deposited at low temperature(LT-films) have increasingly attracted theoretical and technical interests since such films exhibit obvious difference in structure and performances compared to those deposited ... The films deposited at low temperature(LT-films) have increasingly attracted theoretical and technical interests since such films exhibit obvious difference in structure and performances compared to those deposited at room temperature.Studies on the tribological properties of LT-films are rarely reported in available literatures.In this paper,the structure,morphology and tribological properties of Ag films,deposited at LT(166 K) under various Ar pressures on AISI 440C steel substrates by arc ion plating(AIP),are studied by X-ray diffraction(XRD),atomic force microscopy(AFM) and a vacuum ball-on-disk tribometer,and compared with the Ag films deposited at RT(300 K).XRD results show that(200) preferred orientation of the films is promoted at LT and low Ar pressure.The Crystallite sizes are 70 nm-80 nm for LT-Ag films deposited at 0.2 Pa and 0.8 Pa and larger than 100 nm for LT-Ag films deposited at 0.4 Pa and 0.6 Pa,while they are 55 nm-60 nm for RT-Ag films deposited at 0.2 Pa-0.6 Pa and 37 nm for RT-Ag films deposited at 0.8 Pa.The surfaces of LT-Ag films are fibre-like at 0.6 Pa and 0.8 Pa,terrace-like at 0.4 Pa,and sphere-like at 0.2 Pa,while the surfaces of RT-Ag films are composed of sphere-like grains separated by voids.Wear tests reveal that,due to the compact microstructure LT-Ag films have better wear resistances than RT-Ag film.These results indicate that the microstructure and wear resistance of Ag films deposited by AIP can be improved by low temperature deposition. 展开更多
关键词 low temperature Ag films structure tribological properties
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Light output improvement of GaN-based light-emitting diodes grown on Si (111) by a via-thin-film structure
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作者 Zengcheng LI Bo Feng +9 位作者 Biao Deng Legong Liu Yingnan Huang Meixin Feng Yu Zhou Hanmin Zhao Qian Sun Huaibing Wang Xiaoli Yang Hui Yang 《Journal of Semiconductors》 EI CAS CSCD 2018年第4期39-43,共5页
This work reports the fabrication of via-thin-film light-emitting diode (via-TF-LED) to improve the light output power (LOP) of blue/white GaN-based LEDs grown on Si (111) substrates. The as-fabricated via-TF-LE... This work reports the fabrication of via-thin-film light-emitting diode (via-TF-LED) to improve the light output power (LOP) of blue/white GaN-based LEDs grown on Si (111) substrates. The as-fabricated via-TF-LEDs were featured with a roughened n-GaN surface and the p-GaN surface bonded to a wafer carrier with a silver-based reflective electrode, together with an array of embedded n-type via pillar metal contact from the p-GaN surface etched through the multiple-quantum-wells (MQWs) into the n-GaN layer. When operated at 350 mA, the via-TF- LED gave an enhanced blue LOP by 7.8% and over 3.5 times as compared to the vertical thin-film LED (TF-LED) and the conventional lateral structure LED (LS-LED). After covering with yellow phosphor that converts some blue photons into yellow light, the via-TF-LED emitted an enhanced white luminous flux by 13.5% and over 5 times, as compared with the white TF-LED and the white LS-LED, respectively. The significant LOP improve- ment of the via-TF-LED was attributed to the elimination of light absorption by the Si (111) epitaxial substrate and the finger-like n-electrodes on the roughened emitting surface. 展开更多
关键词 via thin film LED structure GaN-on-Si light-emitting diode light extraction
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Prediction and Regulation of Delamination at Flexible Film/Finite-Thickness-Substrate Structure Interfaces
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作者 Yutang Zhou Yunlong Xu +1 位作者 Haoran Gong Chenyu Wang 《Acta Mechanica Solida Sinica》 SCIE EI CSCD 2024年第2期238-251,共14页
Regulating the surface instability of thin film/substrate structures has been successfully applied to prepare new ductile electronic devices.However,such electronic devices need to be subjected to external loads durin... Regulating the surface instability of thin film/substrate structures has been successfully applied to prepare new ductile electronic devices.However,such electronic devices need to be subjected to external loads during operation,which can easily induce delamination of the thin-film electronic device from the substrate.This study aims to investigate the instability characteristics of hard films on flexible substrate surfaces from theoretical analysis and numerical simulation perspectives.Considering finite-thickness substrates,this paper establishes theoretical models for pure bending,bent wrinkle,partial delamination,and total delamination buckling of film/substrate structures based on the nonlinear Euler–Bernoulli beam theory and the principle of minimum energy;then the effects of material and geometric parameters of the structure,interfacial adhesion strength,and pre-strain on the evolutionary path of the four patterns are discussed.The study results show that:the greater Young’s modulus of the substrate is,the larger the parameter region where partial delamination of the film/substrate structure occurs,and the smaller the parameter region where bent wrinkle occurs.By varying Young’s modulus,thickness of the film and substrate,interfacial adhesion coefficient,and pre-strain,the buckling pattern of the structure can be predicted and regulated.The parametric design intervals for each pattern are summarized in the phase diagram.The results of this paper provide theoretical support for the design and reliability evaluation of flexible electronic devices. 展开更多
关键词 Thin film/finite-thickness-substrate structure DELAMINATION Surface instability Pattern evolution
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Electromagnetic analysis of GMI effect in sandwich structured films
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作者 黄灿星 刘龙平 +1 位作者 赵振杰 马学鸣 《Journal of Shanghai University(English Edition)》 CAS 2006年第4期357-361,共5页
A model of giant magneto-impedance (GMI) effect in sandwich-structured film has been proposed based on the superposition principle of electromagnetic field. The expression of impedance is derived in the frames of el... A model of giant magneto-impedance (GMI) effect in sandwich-structured film has been proposed based on the superposition principle of electromagnetic field. The expression of impedance is derived in the frames of electrodynamics and ferromagnetism. Electromagnetic interaction between the inner layer and outer layer is discussed. Numerical simulation is conducted and the results show that the conductivity of the inner layer is much larger than that of the outer ferromagnetic layer. The skin effect and the maximum GMI effect of the sandwich film may appear at a much lower frequency compared to that of monofilm. The computational results agree with experimental data. 展开更多
关键词 GMI effect electromagnetic interaction sandwich structured film.
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Crystal Structure during Film Formation
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作者 Guoping DU Hui SHEN +2 位作者 Lanping YUE Weiguo YAO Zongquan LI and Zhenzhong QI (Institute of Solid State Physics, Academia Sinica, Hefei, 230031, China)(To whom correspondence should be addressed) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1994年第2期117-120,共4页
For evaporation-deposited Ti films, face-centred cubic structure was observed at the initial stage of film growth, then transited to the hexagonal close-packed structure during film growing (less than 50 nm thick). Wh... For evaporation-deposited Ti films, face-centred cubic structure was observed at the initial stage of film growth, then transited to the hexagonal close-packed structure during film growing (less than 50 nm thick). While. for ion-beam sputter-deposited films. the structure of films always kept the fcc structure during all stages of film formation. The structure of film at initial growth stages relates with the substrate. It is discussed that different film processes and different growth stages provide different thermodynamic condition of film formation and result in the different crystal structures of films during the film formation 展开更多
关键词 NACL Crystal structure during film Formation NM
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Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag2O Films by Direct-Current Reactive Magnetron Sputtering
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作者 郜小勇 冯红亮 +2 位作者 张增院 马姣民 卢景霄 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期235-238,共4页
(111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and op... (111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and optical properties are then characterized by x-ray diffractometry, scanning electron microscopy, and spectrophotometry, respectively. The results indicate that no clear Ag diffraction peak is discernable in the Ag2O film annealed below 200°C. In comparison, the Ag2O film annealed at 200°C begins to exhibit characteristic Ag diffraction peaks, and in particular the Ag2O film annealed at 250°C can demonstrate enhanced Ag diffraction peaks. This implies that the threshold of the thermal decomposition reaction to produce Ag particles is approximately 200°C for the Ag2O film. In addition, an evolution of the film surface morphology from compact and pyramid-like to a rough and porous structure clearly occurred with increasing annealing temperature. The porous structure might be attributable to the escape of the oxygen produced during annealing, while the rough surface might originate from the reconstruction of the surface. The dispersion of interference peak intensity in the reflectance and transmission spectra could be attributed to the Ag particles produced. The lowered crystallinity and Ag particles produced induce a lattice defect, which results in an enhanced transmissivity in the violet region and a weakened transmissivity in the infrared region. 展开更多
关键词 Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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Composition and Microstructure of Magnetron Sputtering Deposited Ti-containing Amorphous Carbon Films
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作者 Jun DU Ping ZHANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期571-573,共3页
Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backsca... Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and transmission electron microscopy (TEM). It is found that carbon films contain Ti 18 at pct; after Ti incorporation, the films consist of titanium carbide; C1s peak appears at 283.4 eV and it could be divided into 283.29 and 284.55 eV, representing sp2 and sp3, respectively, and sp2 is superior to sp3. This Ti-containing film with dominating sp2 bonds is nanocomposites with nanocrystalline TiC clusters embedded in an amorphous carbon matrix, which could be proved by XRD and TEM. 展开更多
关键词 Magnetron sputtering deposition Carbon film Carbon bond structure
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THE STRUCTURE OF LANGMUIR-BLODGETT FILMS OF TETRA-NONYL PHTHALOCYANINE COPPER
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作者 Tao LUO Wei Qing ZHANG Fu Xi GAN Shanghai Institute of Optics and Fine Mechanics,Academia Sinica P.O.Box 800216 Shanghai 201800 《Chinese Chemical Letters》 SCIE CAS CSCD 1992年第1期63-66,共4页
Langmuir-Blodgett(LB)films of tetra-nonyl phthalocyanine copper (TNPcCu)were prepared.Molecular arrangement and orientation of these films were studied in detail.LB multilayer films of TNPcCu show a very Strong x-ray ... Langmuir-Blodgett(LB)films of tetra-nonyl phthalocyanine copper (TNPcCu)were prepared.Molecular arrangement and orientation of these films were studied in detail.LB multilayer films of TNPcCu show a very Strong x-ray diffration peak and two weak peaks which indicate that the LB films form a quasi-crystal structure which molecules are arranged orderly.IR reflection absorption spectra and polarized VIS absorption spectra not only confirm the previous result but also indicate that phthalocyanine rings orient nearly perpendicular to the substrate surface and perpendicular to the lifting direction and the side-chain segments are not preferred oriented. 展开更多
关键词 TETRA IR THE structure OF LANGMUIR-BLODGETT filmS OF TETRA-NONYL PHTHALOCYANINE COPPER
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Evolution of Magnetic Domain Structure in a YIG Thin Film
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作者 王然 尚雅轩 +2 位作者 吴锐 杨金波 姬扬 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第4期126-129,共4页
The evolution of a magnetic domain structure induced by temperature and magnetic field is reported in silicon- doped yttrium iron garnet (YIG) films with perpendicular anisotropy. During a cooling-down procedure fro... The evolution of a magnetic domain structure induced by temperature and magnetic field is reported in silicon- doped yttrium iron garnet (YIG) films with perpendicular anisotropy. During a cooling-down procedure from 300K to 7K, a 20% change in the domain width is observed, with the long tails of the stripes being shortened and the twisting stripes being straightened. Under the influence of the stray field of a barium ferrite, the garnet presents an interesting domain structure, which shows an appearance of branching protrusions. The intrinsic mechanisms in these two processes are also discussed. 展开更多
关键词 of on YIG Evolution of Magnetic Domain structure in a YIG Thin film in
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Coacervate Structures of CdI_2 Thin Film Grown during Phase Transformation
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作者 Xiaoyan YE and Lili CAO(Dept. of Chemistry, Tsinghua University, Beijing 100084, China)Jizhong ZHANG and Hengde LI(Dept. of Materials Scieuce & Engineering, Tsinghua University, Beijing 100084, China) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1997年第4期296-298,共3页
The microstructure of CdI2 thin film grown during vapor-phase deposition was investigated by scanning electron microscopy (SEM). The thin film deposited on Si crystal consists of numerous sunflower-like aggregates. Th... The microstructure of CdI2 thin film grown during vapor-phase deposition was investigated by scanning electron microscopy (SEM). The thin film deposited on Si crystal consists of numerous sunflower-like aggregates. These aggregates display well self-assembly characteristics. The size of Sunflower-like aggregates is between 12 and 44 μm. Each sunflower-like aggregate is surrounded with many adjacent wings-'petals'. The structure of central region of the 'sunflower' is obviously difFerent from that of the 'petal'. Electron spectroscopy for chemical analysis (ESCA) was employed in determining the chemical valence of the thin film. Self-organization efFect is used to explain the coring growth process of CdI2 thin film 展开更多
关键词 Thin Coacervate structures of CdI2 Thin film Grown during Phase Transformation
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Morphology and Structure of SiO_2 Film Using Thermal Oxidation Process on(111)Silicon Crystals in Dry Oxygen Atmosphere
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作者 TaokaT. 《Rare Metals》 SCIE EI CAS CSCD 1989年第1期32-38,共7页
By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon ... By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film. 展开更多
关键词 Silicon Crystals in Dry Oxygen Atmosphere Morphology and structure of SiO2 film Using Thermal Oxidation Process on SIO
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Structure and Magnetic Properties of Fe-N Films Prepared by Dual Ion Beam Sputtering
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作者 诸葛兰剑 吴雪梅 +2 位作者 汤乃云 叶春兰 姚伟国 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第6期1049-1054,共6页
Fe-N films were prepared on Si substrate by dual ion beam sputtering (DIBS). It is found that the crystal structure of the films varies from α-Fe, to ε-Fe2-3N, ε-Fe2-3N +γ-Fe4N, and finally γ'-Fe4N with the i... Fe-N films were prepared on Si substrate by dual ion beam sputtering (DIBS). It is found that the crystal structure of the films varies from α-Fe, to ε-Fe2-3N, ε-Fe2-3N +γ-Fe4N, and finally γ'-Fe4N with the increase in substrate temperature (TS). The magnetic properties of the films were investigated by a vibrating sample magnetometer (VSM). The structure of the films is insensitive to the ratios of N2/Ar in main ion source(MIS), and is mainly influenced by the substrate temperature (Ts). 展开更多
关键词 FE structure and Magnetic Properties of Fe-N films Prepared by Dual Ion Beam Sputtering
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Structure and optoelectrical properties of transparent conductive MGZO films deposited by magnetron sputtering
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作者 钟志有 康淮 +2 位作者 陆轴 龙浩 顾锦华 《Optoelectronics Letters》 EI 2018年第1期25-29,共5页
The transparent conductive Mg-Ga co-doped Zn O(MGZO) films were prepared by radio-frequency(RF) magnetron sputtering. The influence of substrate temperature on the structural and optoelectrical properties of the films... The transparent conductive Mg-Ga co-doped Zn O(MGZO) films were prepared by radio-frequency(RF) magnetron sputtering. The influence of substrate temperature on the structural and optoelectrical properties of the films is studied. The results show that all the films possess a preferential orientation along the(002) plane. With the increase of substrate temperature, the structure and optoelectrical properties of the films can be changed. When substrate temperature is 300 ℃, the deposited film exhibits the best crystalline quality and optoelectrical properties, with the minimum micro strain of 1.09×10^(-3), the highest average visible transmittance of 82.42%, the lowest resistivity of 1.62×10^(-3) Ω·cm and the highest figure of merit of 3.18×10~3 Ω^(-1)·cm^(-1). The optical bandgaps of the films are observed to be in the range of 3.342—3.545 eV. The refractive index dispersion curves obey the Sellmeier's dispersion model. 展开更多
关键词 AS structure and optoelectrical properties of transparent conductive MGZO films deposited by magnetron sputtering
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