An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circui...An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circuit model of oscillating and differential detection capacitance model are im- plemented in the circuit simulation tool PSPICE,which is available in oscillating properties analysis such as oscillating's transient response,steady response and frequency response to angular rate to op- timize working mode of the gyroscope.The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system.Behavioral simulation of the system is performed to prove the function of detection circuits.The simulation results and measurement results show that the design of circuits is feasible.展开更多
基金The project supported by the Major State Basic Research Development Program "Integrated Micro-Optical-Electro-Mechanical System"(G1999033101)
文摘An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circuit model of oscillating and differential detection capacitance model are im- plemented in the circuit simulation tool PSPICE,which is available in oscillating properties analysis such as oscillating's transient response,steady response and frequency response to angular rate to op- timize working mode of the gyroscope.The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system.Behavioral simulation of the system is performed to prove the function of detection circuits.The simulation results and measurement results show that the design of circuits is feasible.
