Carbon nanotube field-effect transistors(CNT FETs)are regarded as promising candidates for next-generation energy-efficient computing systems.While research has employed the lift-off process to demonstrate the perform...Carbon nanotube field-effect transistors(CNT FETs)are regarded as promising candidates for next-generation energy-efficient computing systems.While research has employed the lift-off process to demonstrate the performance of CNT FETs,this method now poses challenges for enhancing individual FET performance and is not suitable for scalable fabrication.In this paper,we summarize the limitations of the lift-off process and point out that future advancements in manufacturing techniques should prioritize the development of etching processes.展开更多
基金supported by the National Natural Science Foundation of China(Grant No.62274006 and 62225101)the National Key Research and Development Program of China(Grant No.2022YFB4401601)+2 种基金Guangdong Major Project of Basic Research(Grant No.2021B0301030003)Jihua Laboratory(Project No.X210141TL210)Research Project:CNT-DSP-2022.
文摘Carbon nanotube field-effect transistors(CNT FETs)are regarded as promising candidates for next-generation energy-efficient computing systems.While research has employed the lift-off process to demonstrate the performance of CNT FETs,this method now poses challenges for enhancing individual FET performance and is not suitable for scalable fabrication.In this paper,we summarize the limitations of the lift-off process and point out that future advancements in manufacturing techniques should prioritize the development of etching processes.
