采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积不同Y含量的Cr Al YN纳米多层薄膜,并在静态空气中进行1000℃的高温氧化实验。透射电子显微镜、扫描电镜、X射线衍射、能量色散谱、纳米压痕和划痕实验等研究结果表明:Cr Al YN...采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积不同Y含量的Cr Al YN纳米多层薄膜,并在静态空气中进行1000℃的高温氧化实验。透射电子显微镜、扫描电镜、X射线衍射、能量色散谱、纳米压痕和划痕实验等研究结果表明:Cr Al YN纳米多层薄膜呈现fcc晶体结构,调制周期为Cr N/YN+Al N/Cr N/Al N。Cr Al YN纳米多层薄膜的抗高温氧化性能随着Y含量提高呈现先提高后下降的趋势,Y含量为1.13%(原子比)时,薄膜表现出最优的力学性能,当Y含量增加到2.67%时,薄膜的力学性能明显下降。展开更多
In this work, a series of CrA1YN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages, The effects of bias voltage on microstrncture and properties o...In this work, a series of CrA1YN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages, The effects of bias voltage on microstrncture and properties of the CrA1YN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher A1 content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000℃, and good friction and wear properties at 600 and 800 ℃, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures （i.e., 200 and 400 ℃） due to the serious abrasive wear.展开更多
CrAlYN coatings with different Y contents(0,5 and 12 at.%)were deposited by cathodic arc evaporation to investigate the influence of Y-addition on the structure,mechanical and thermal properties of CrAlN coatings by u...CrAlYN coatings with different Y contents(0,5 and 12 at.%)were deposited by cathodic arc evaporation to investigate the influence of Y-addition on the structure,mechanical and thermal properties of CrAlN coatings by using X-ray diffraction,scanning electron microscopy,differential scanning calorimetry,thermal gravimetric analysis and nanoindentation.The structural transformation of single phase cubic Cr_(0.42)Al_(0.58)N and Cr_(0.39)Al_(0.56)Y_(0.05)N coatings to cubic−wurtzite mixed Cr_(0.32)Al_(0.56)Y_(0.12)N coating leads to a drop in hardness from(30.2±0.7)GPa of Cr_(0.42)Al_(0.58)N and(32.0±1.0)GPa of Cr_(0.39)Al_(0.56)Y_(0.05)N to(25.2±0.7)GPa of Cr_(0.32)Al_(0.56)Y_(0.12)N.The incorporation of 5 at.%Y retards the thermal decomposition of CrAlN,verified by the postponed precipitation of w-AlN and N-loss upon annealing.Correspondingly,Cr_(0.39)Al_(0.56)Y_(0.05)N coating consistently exhibits the highest hardness value during thermal annealing.Nevertheless,alloying with Y exerts an adverse effect on the oxidation resistance of CrAlN.展开更多
文摘采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积不同Y含量的Cr Al YN纳米多层薄膜,并在静态空气中进行1000℃的高温氧化实验。透射电子显微镜、扫描电镜、X射线衍射、能量色散谱、纳米压痕和划痕实验等研究结果表明:Cr Al YN纳米多层薄膜呈现fcc晶体结构,调制周期为Cr N/YN+Al N/Cr N/Al N。Cr Al YN纳米多层薄膜的抗高温氧化性能随着Y含量提高呈现先提高后下降的趋势,Y含量为1.13%(原子比)时,薄膜表现出最优的力学性能,当Y含量增加到2.67%时,薄膜的力学性能明显下降。
基金supported by the National Basic Research Program of China(Grant No.2013CB632302)the National Natural Science Foundation of China(Grant No.51175491)
文摘In this work, a series of CrA1YN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages, The effects of bias voltage on microstrncture and properties of the CrA1YN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher A1 content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000℃, and good friction and wear properties at 600 and 800 ℃, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures （i.e., 200 and 400 ℃） due to the serious abrasive wear.
基金The authors are grateful for the financial supports from the National Natural Science Foundation of China(No.51775560).
文摘CrAlYN coatings with different Y contents(0,5 and 12 at.%)were deposited by cathodic arc evaporation to investigate the influence of Y-addition on the structure,mechanical and thermal properties of CrAlN coatings by using X-ray diffraction,scanning electron microscopy,differential scanning calorimetry,thermal gravimetric analysis and nanoindentation.The structural transformation of single phase cubic Cr_(0.42)Al_(0.58)N and Cr_(0.39)Al_(0.56)Y_(0.05)N coatings to cubic−wurtzite mixed Cr_(0.32)Al_(0.56)Y_(0.12)N coating leads to a drop in hardness from(30.2±0.7)GPa of Cr_(0.42)Al_(0.58)N and(32.0±1.0)GPa of Cr_(0.39)Al_(0.56)Y_(0.05)N to(25.2±0.7)GPa of Cr_(0.32)Al_(0.56)Y_(0.12)N.The incorporation of 5 at.%Y retards the thermal decomposition of CrAlN,verified by the postponed precipitation of w-AlN and N-loss upon annealing.Correspondingly,Cr_(0.39)Al_(0.56)Y_(0.05)N coating consistently exhibits the highest hardness value during thermal annealing.Nevertheless,alloying with Y exerts an adverse effect on the oxidation resistance of CrAlN.
